KR20040022530A - 반도체 웨이퍼 공정용 리프트 어셈블리 - Google Patents
반도체 웨이퍼 공정용 리프트 어셈블리 Download PDFInfo
- Publication number
- KR20040022530A KR20040022530A KR1020020054125A KR20020054125A KR20040022530A KR 20040022530 A KR20040022530 A KR 20040022530A KR 1020020054125 A KR1020020054125 A KR 1020020054125A KR 20020054125 A KR20020054125 A KR 20020054125A KR 20040022530 A KR20040022530 A KR 20040022530A
- Authority
- KR
- South Korea
- Prior art keywords
- lift
- pin
- support
- wafer
- assembly
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (1)
- 반도체 공정용 챔버의 리프트어셈블리로서,리프트핀과;상기 리프트핀의 하부에 위치하고, 상부에 핀머리를 가지는 서포트핀과;상면에 상기 리프트핀이 삽입되는 리프트핀지지홀이 형성되고, 하부가 개구된 원통형의 리프트몸체상단부와;상부가 개구되어 상기 리프트몸체상단부의 하부가 내치되고, 하면에 수직원통형의 서포트핀지지홀이 형성된 보울형상의 리프트몸체하단부를 포함하는 반도체 웨이퍼 공정용 리프트어셈블리
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0054125A KR100457266B1 (ko) | 2002-09-09 | 2002-09-09 | 반도체 웨이퍼 공정용 리프트 어셈블리 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0054125A KR100457266B1 (ko) | 2002-09-09 | 2002-09-09 | 반도체 웨이퍼 공정용 리프트 어셈블리 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040022530A true KR20040022530A (ko) | 2004-03-16 |
KR100457266B1 KR100457266B1 (ko) | 2004-11-16 |
Family
ID=37326271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0054125A KR100457266B1 (ko) | 2002-09-09 | 2002-09-09 | 반도체 웨이퍼 공정용 리프트 어셈블리 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100457266B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022169125A1 (ko) * | 2021-02-03 | 2022-08-11 | 피에스케이 주식회사 | 리프트 핀 어셈블리 및 그것을 구비한 기판 처리 장치 |
-
2002
- 2002-09-09 KR KR10-2002-0054125A patent/KR100457266B1/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022169125A1 (ko) * | 2021-02-03 | 2022-08-11 | 피에스케이 주식회사 | 리프트 핀 어셈블리 및 그것을 구비한 기판 처리 장치 |
Also Published As
Publication number | Publication date |
---|---|
KR100457266B1 (ko) | 2004-11-16 |
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