KR20030095162A - Functional porous plate using metal fiber - Google Patents
Functional porous plate using metal fiber Download PDFInfo
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- KR20030095162A KR20030095162A KR1020020037084A KR20020037084A KR20030095162A KR 20030095162 A KR20030095162 A KR 20030095162A KR 1020020037084 A KR1020020037084 A KR 1020020037084A KR 20020037084 A KR20020037084 A KR 20020037084A KR 20030095162 A KR20030095162 A KR 20030095162A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/14—Layered products comprising a layer of metal next to a fibrous or filamentary layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/18—Layered products comprising a layer of metal comprising iron or steel
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
- B32B5/22—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed
- B32B5/24—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer
- B32B5/26—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer another layer next to it also being fibrous or filamentary
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2262/00—Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
- B32B2262/10—Inorganic fibres
- B32B2262/103—Metal fibres
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2305/00—Condition, form or state of the layers or laminate
- B32B2305/30—Fillers, e.g. particles, powders, beads, flakes, spheres, chips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/30—Properties of the layers or laminate having particular thermal properties
- B32B2307/308—Heat stability
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/714—Inert, i.e. inert to chemical degradation, corrosion
- B32B2307/7145—Rot proof, resistant to bacteria, mildew, mould, fungi
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- Powder Metallurgy (AREA)
- Filtering Materials (AREA)
Abstract
Description
본 발명은 금속섬유를 이용한 기능성의 다공성 판에 관한 것으로, 좀 더 상세하게는 금속판 상에 각층의 기공률이 경사적으로 점차 변화되면서 3∼4층 적층된 웹 형태의 금속섬유의 기공 내에 기능성의 휘발성 용매가 충진되어 이루어짐으로써 상기 기능성 용매가 장시간 지속적으로 발산되고, 상기 금속판에 의해 일면이 차단되어 상기 기능성 용매의 열에 의한 변형이 방지되는 금속섬유를 이용한 기능성의 다공성 판에 관한 것이다.The present invention relates to a functional porous plate using a metal fiber, and more particularly, the functional volatility in the pores of the web-shaped metal fiber laminated in 3 to 4 layers as the porosity of each layer gradually changes gradually on the metal plate. By filling the solvent, the functional solvent is continuously dissipated for a long time, and one surface is blocked by the metal plate, and relates to a functional porous plate using a metal fiber to prevent deformation by the heat of the functional solvent.
종래의 다공금속의 기공을 이용한 기술로는 분말 야금법을 기초로 한 오일리스 베어링이 있으며, 또한 이러한 다공금속의 제조방법으로는 금속분말을 이용하여 10∼20% 정도의 낮은 기공률을 갖는 다공금속을 제조하는 방법 등이 있다.Conventional techniques using pores of porous metals include oilless bearings based on powder metallurgy, and also methods of manufacturing such porous metals are porous metals having a low porosity of about 10 to 20% using metal powder. There is a method for producing a.
예를 들어, 한국 특허 제255,185호는 금속분말을 바인더와 혼합하여 예비 성형한 후, 고온에서 소결하여 10∼20% 정도의 기공률을 갖는, 향기를 내는 다공금속의 제조방법을 개시하고 있다. 상기 특허에 따르면, 다공금속의 제조시 예비 성형을 위해서 상기 금속분말을 바인더와 혼합하여 사용하므로 기공률이 10∼20% 정도로 낮고, 성형 후에 소결함으로써 외형의 변형우려가 있으며, 상기 예비 성형 과정에서 이물질이 혼합될 수도 있다. 또한, 분말로 제조되기 때문에 금속섬유에 비하여 강도가 약하고 탄성이 없어 얇은 박판의 제품제조는 불가능한 단점이 있다.For example, Korean Patent No. 255,185 discloses a method for producing a fragrant porous metal having a porosity of about 10 to 20% by preforming a metal powder with a binder, followed by sintering at high temperature. According to the patent, since the metal powder is mixed with a binder for preforming during the preparation of the porous metal, the porosity is about 10 to 20%, and there is a fear of deformation of the outer shape by sintering after molding, and foreign matter in the preforming process. This may be mixed. In addition, since it is made of powder, the strength is weak compared to the metal fiber and there is no elasticity, it is impossible to manufacture a thin thin plate product.
또한, 미국 특허 제4,729,871호는 짧은 금속 단섬유를 이용하여 흡음성 또는 필터링 효과를 지닌 다공성 금속판을 제조하는 방법을 소개하고 있다. 상기 특허에 따르면, 칩 형태의 짧은 금속 단섬유를 소결하기 위하여 종이나 스테인레스 스틸의 지지층에 접착제를 사용하여 금속단섬유와 지지층을 고정하며, 이를 회전 가압롤러에 통과시켜 가열로에서 소결한다. 그러나, 이러한 소결공정이 진공에서 이루어지지 않으므로 불순물로 인해 순도가 저하되며, 짧은 금속섬유를 사용하므로 유연성이 저하되는 단점이 있다.In addition, US Pat. No. 4,729,871 introduces a method for producing a porous metal plate having a sound absorbing or filtering effect using short metal short fibers. According to the patent, in order to sinter the short metal short fibers in the form of chips, the short metal fibers and the support layer are fixed to the support layer of paper or stainless steel using an adhesive, which is passed through a rotary pressure roller and sintered in a heating furnace. However, since the sintering process is not performed in a vacuum, the purity is lowered due to impurities, and there is a disadvantage in that flexibility is reduced because short metal fibers are used.
한편, 한국 실용신안 제238,395호는 극세선 금속섬유를 금속판에 피복 소결하여 이를 원통형으로 가공한 후 작동유체를 주입하고 밀봉하여 극세선 금속섬유의 윅을 이용한 히트파이프를 개시하고 있다. 그러나, 상기 히트파이프는 밀봉상태에서 작동유체를 함유한 것으로 액상의 유체를 포집하여 기상으로 발산시키는 역할을 하는 본 발명의 다공성 판과는 다른 기능을 한다.On the other hand, Korean Utility Model No. 238,395 discloses a heat pipe using a wick of ultrafine metal fibers by coating and sintering the ultrafine metal fibers on a metal plate, processing them into a cylinder, injecting and sealing a working fluid. However, the heat pipe has a function different from that of the porous plate of the present invention, which contains a working fluid in a sealed state and collects liquid fluid and diverges it into the gas phase.
이에 본 발명에서는 전술한 바와 같은 문제점을 해결하기 위하여 다양한 연구를 거듭한 결과, 종래의 소결공정을 이용한 다공성 판과는 달리, 금속판 상에 각층의 기공률을 경사적으로 점차 변화시켜 3∼4층 적층된 웹 형태의 금속섬유층의 기공 내에 기능성의 휘발성 용매가 충진되어 이루어짐으로써 상기 기능성 용매가 장시간 지속적으로 발산될 수 있으며, 상기 금속섬유가 상기 금속판에 적층되어 일면이 차단됨으로써 기능성 용매의 지속성을 향상시키는 동시에 열에 의한 변형이 방지되는 기능성의 다공성 판을 얻을 수 있었으며, 본 발명은 이에 따라 완성되었다.Therefore, in the present invention, as a result of repeating various studies to solve the problems as described above, unlike the porous plate using a conventional sintering process, by gradually changing the porosity of each layer on the metal plate gradually stacked 3 to 4 layers The functional solvent can be continuously dissipated for a long time by filling the functional volatile solvent in the pores of the metal fiber layer in the form of a web, the metal fiber is laminated on the metal plate to block the one surface to improve the persistence of the functional solvent At the same time, a functional porous plate capable of preventing deformation by heat was obtained, and the present invention was thus completed.
따라서, 본 발명의 목적은 금속섬유를 이용하여 기공률이 높고, 우수한 유연성을 갖는 기능성의 다공성 판을 제공하는데 있다.Accordingly, an object of the present invention is to provide a porous plate having a high porosity and excellent flexibility using metal fibers.
본 발명의 다른 목적은 금속섬유를 이용하여 기능성 용매가 지속적으로 장시간 발산될 수 있으며, 열에 의한 변형이 방지될 수 있는 기능성의 다공성 판을 제공하는데 있다.Another object of the present invention is to provide a functional porous plate that can be continuously dissipated for a long time using a metal fiber, the deformation by heat can be prevented.
상기 목적 및 다른 목적을 달성하기 위한 본 발명의 금속섬유를 이용한 기능성의 다공성 판은 금속판; 상기 금속판 상에 적층되며, 서로 다른 기공률 구배를 갖는 웹 형태의 3∼4개의 금속섬유층; 및 상기 금속섬유층 내의 기공내에 충진되어 액상의 유체로 포집되어 기상으로 발산되는 방향제, 살균제 또는 탈취제 기능성의 휘발성 용매를 포함한다.Functional porous plate using a metal fiber of the present invention for achieving the above object and other objects is a metal plate; Three to four metal fiber layers stacked on the metal plate and having a web shape having different porosity gradients; And a volatile solvent of a fragrance, fungicide, or deodorant functional volatile solvent filled in the pores in the metal fiber layer and collected into a liquid fluid and dissipated in the gas phase.
도 1은 본 발명에 따른 금속섬유를 이용한 기능성의 다공성 판을 나타낸 사시도이고,1 is a perspective view showing a functional porous plate using a metal fiber according to the present invention,
도 2는 본 발명에 따른 금속섬유를 이용한 기능성의 다공성 판의 구성을 개략적으로 도시하는 도면이며,2 is a view schematically showing the configuration of a functional porous plate using a metal fiber according to the present invention,
도 3은 본 발명에 따른 다공성 판상의 금속섬유에 형성된 그물구조 형상의 기공을 개략적으로 나타낸 도면이고,3 is a view schematically showing the pores of the network structure formed in the porous metal plate-shaped fiber according to the present invention,
도 4a는 본 발명에 따라 금속섬유를 이용하여 제조된 다공성 판을 소결한 후 그 표면을 100배 확대하여 나타낸 주사전자현미경(SEM) 사진이며,Figure 4a is a scanning electron microscope (SEM) photograph showing a surface magnified 100 times after sintering a porous plate prepared using a metal fiber according to the present invention,
도 4b는 종래기술에 따라 금속분말을 이용하여 제조된 다공성 판을 소결한 후 그 표면을 150배 확대하여 나타낸 SEM 사진이다.Figure 4b is a SEM photograph showing a 150 times magnification of the surface after sintering a porous plate prepared using a metal powder according to the prior art.
※ 도면의 주요 부분에 대한 부호의 설명 ※※ Explanation of code about main part of drawing ※
10: 금속판20: 금속섬유층10: metal plate 20: metal fiber layer
이하, 본 발명을 첨부된 도면을 참조하여 좀 더 구체적으로 살펴보면 다음과 같다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.
전술한 바와 같이, 본 발명에서는 금속판 상에 각층의 기공률이 경사적으로 점차 변화되면서 3∼4층 적층된 웹 형태의 금속섬유층의 기공 내에 기능성의 휘발성 용매가 충진되어 이루어짐으로써 기능성 용매의 지속성이 향상되며 열에 의한 변형이 방지되는 기능성의 다공성 판이 제공된다.As described above, in the present invention, as the porosity of each layer gradually changes gradually on the metal plate, the functional volatile solvent is filled in the pores of the web-like metal fiber layer stacked in three to four layers, thereby improving the durability of the functional solvent. And a functional porous plate is prevented from being deformed by heat.
도 1은 본 발명에 따른 금속섬유를 이용한 기능성의 다공성 판을 나타낸 사시도이고, 도 2는 본 발명에 따른 금속섬유를 이용한 기능성의 다공성 판의 구성을 개략적으로 도시하는 도면이며, 도 3은 본 발명에 따른 다공성 판상의 금속섬유층에 형성된 그물구조 형상의 기공을 개략적으로 나타낸 도면이고, 도 4a는 본 발명에 따라 금속섬유를 이용하여 제조된 다공성 판을 소결한 후 그 표면을 100배 확대하여 나타낸 SEM 사진이며, 도 4b는 종래기술에 따라 금속분말을 이용하여 제조된다공성 판을 소결한 후 그 표면을 150배 확대하여 나타낸 SEM 사진이다.1 is a perspective view showing a functional porous plate using a metal fiber according to the present invention, Figure 2 is a view schematically showing the configuration of a functional porous plate using a metal fiber according to the present invention, Figure 3 is a present invention Figure 4 is a schematic view showing the pores of the network structure formed in the metal fiber layer of the porous plate according to the present invention, Figure 4a is a SEM showing a surface magnified 100 times after sintering the porous plate produced using a metal fiber according to the present invention 4B is a SEM photograph showing an enlarged surface 150 times after sintering a porous plate.
본 발명에서 사용되는 금속판(10)은 기계적 성형이 가능한 연질 스테인레스, 구리합금, 또는 니켈합금판이며, 최종 성형에 따라 0.1∼5 mm 두께를 갖도록 할 수 있다.The metal plate 10 used in the present invention is a soft stainless steel, copper alloy, or nickel alloy plate capable of mechanical molding, and may have a thickness of 0.1 to 5 mm depending on the final molding.
또한, 본 발명에서 사용되는 금속섬유는 용융 가능한 금속으로서 스테인레스, 동, 니켈 및 퍼크랄로이(fecralloy)로 이루어진 군으로부터 선택된 적어도 하나의 금속으로부터 형성된다. 이로부터 선택된 금속은 당해분야에 공지된 고진공 용융 및 초급냉 디스크(Disk) 공법에 따라 20∼90㎛의 굵기를 갖는 금속섬유로 제조된다. 또한, 상기 금속섬유는 균일한 기공이 형성되도록 분산되어 웹 형태로 제조되는 것이 바람직하다.In addition, the metal fiber used in the present invention is formed from at least one metal selected from the group consisting of stainless steel, copper, nickel and fecralloy as a meltable metal. The metal selected therefrom is made of metal fibers having a thickness of 20-90 μm, according to the high vacuum melting and supercooled disk processes known in the art. In addition, the metal fibers are preferably dispersed in a uniform pore is formed in the form of a web.
한편, 상기 웹 형태로 제조된 금속섬유는 기공률 구배를 갖도록 상기 금속판(10) 상에 3∼4개의 층(21, 22 및 23)이 적층된 후, 상기 금속판(10)과 함께 진공 소결로에 장입되어 금속섬유를 구성하고 있는 금속의 용융점 보다 조금 낮은 온도에서 1∼2시간 정도 가열되어 소결됨으로써 고순도의 다공성 판이 얻어진다. 이때, 상기 금속섬유층(20)은 각각 20∼30%, 50∼60%, 및 80∼90%의 기공률을 갖는 상층(21), 중간층(22) 및 하층(23)으로 구성되는 것이 바람직하며, 상기 중간층(22)은 1∼2개의 층을 포함한다. 한편, 이러한 소결공정에서 상기 금속섬유(20)는 부분적으로 소결되어 서로 얽힘으로써, 도 3에 나타낸 바와 같이 상기 금속섬유층(20)의 기공이 3차원의 그물구조 형상을 갖게 된다. 또한, 도 4b에 나타낸 바와 같이, 종래기술에 따라 금속분말을 이용하여 제조된 다공성 판은예비 성형을 위해서 바인더와 혼합되어 사용되기 때문에 기공률이 10∼20% 정도로 낮은 반면, 본 발명에 따라 상기 금속판(10) 상에 적층되어 소결된 부직 형태의 금속섬유층(20)은 도 3 및 도 4a에 나타낸 바와 같이, 금속섬유 자체의 단면이 원형 또는 준원형인 형상을 갖기 때문에 기공률이 70∼80%로 우수할 뿐만 아니라, 뛰어난 유연성을 갖는다.On the other hand, the metal fiber produced in the web form is laminated on the metal plate 10 to the three to four layers (21, 22 and 23) to have a porosity gradient, and together with the metal plate 10 in a vacuum sintering furnace The porous plate of high purity is obtained by heating and sintering for about 1 to 2 hours at the temperature slightly lower than the melting point of the metal which is charged and comprises the metal fiber. In this case, the metal fiber layer 20 is preferably composed of an upper layer 21, an intermediate layer 22 and a lower layer 23 having a porosity of 20 to 30%, 50 to 60%, and 80 to 90%, respectively. The intermediate layer 22 comprises one to two layers. Meanwhile, in the sintering process, the metal fibers 20 are partially sintered and entangled with each other, so that the pores of the metal fiber layer 20 have a three-dimensional network structure shape as shown in FIG. 3. In addition, as shown in Figure 4b, the porous plate prepared by using the metal powder according to the prior art is used because it is mixed with a binder for preforming, the porosity is as low as 10 to 20%, while the metal plate according to the present invention The nonwoven metal fiber layer 20 laminated and sintered on (10) has a porosity of 70 to 80% because the cross section of the metal fiber itself has a circular or semicircular shape as shown in FIGS. 3 and 4A. Not only is it excellent, it also has excellent flexibility.
상기 소결된 금속섬유층(20)의 기공에는 방향제, 살균제, 또는 탈취제 기능을 하는 휘발성 용매가 분사되어 충진되며, 상기 기능성 용매는 액상의 유체로 포집된 후 기상으로 발산된다. 한편, 상기 기공의 3차원의 그물구조 형상으로 인해 상기 기능성 용매가 소량만 분사되어도 기공을 따라 빠른 속도로 흡수되며 장시간 지속된다. 또한, 상기 금속판(10) 표면에 적층되는 웹 형태의 금속섬유층(20)의 각층의 기공률을 전술한 바와 같이 경사적으로 점차 변화시킴으로써 상기 기능성의 휘발성 용매가 충분히 함유되어 장시간 발산될 수 있다. 아울러, 상술한 바와 같이 기계적성형이 가능한 금속판(10)에 의해 그 일면이 차단됨으로써 상기 금속판(10)에 적층된 금속섬유층(20)의 다공에 함유된 기능성 용매가 장시간 지속적으로 발산될 수 있으며, 열에 의한 변형이 방지될 뿐만 아니라, 2차 성형 가공이 용이한 장점을 갖는다.The pores of the sintered metal fiber layer 20 are filled with a volatile solvent that functions as a fragrance, a disinfectant, or a deodorant, and the functional solvent is collected in a liquid fluid and then released into the gas phase. On the other hand, due to the three-dimensional mesh structure of the pores, even if only a small amount of the functional solvent is sprayed at high speed along the pores and lasts for a long time. In addition, by gradually changing the porosity of each layer of the web-shaped metal fiber layer 20 laminated on the surface of the metal plate 10 as described above, the functional volatile solvent is sufficiently contained and can be emitted for a long time. In addition, the one surface is blocked by the metal plate 10 capable of mechanical molding as described above, the functional solvent contained in the pores of the metal fiber layer 20 laminated on the metal plate 10 can be continuously emitted for a long time, Not only the deformation by heat is prevented, but also the secondary molding process has the advantage of being easy.
한편, 전술한 모든 공정은 진공하에서 이루어지므로 이로부터 제공되는 다공성 판의 순도는 매우 높다.On the other hand, since all the above-mentioned processes are performed under vacuum, the purity of the porous plate provided therefrom is very high.
전술한 바와 같이, 본 발명에 따른 기능성의 다공성 판은 금속판 상에 각층의 기공률이 경사적으로 점차 변화되면서 3∼4층 적층된 웹 형태의 금속섬유층의 기공 내에 기능성의 휘발성 용매가 충진되어 이루어짐으로써 기능성 용매가 장시간 지속적으로 발산될 수 있다. 또한, 상기 다공성 판은 금속섬유가 기계적 성형이 가능한 금속판에 적층되어 일면이 차단되도록 형성됨으로써 기능성 용매의 지속성을 향상시키는 동시에 열에 의한 변형이 방지될 뿐만 아니라 2차 성형이 용이한 장점을 갖는다.As described above, the functional porous plate according to the present invention is formed by filling a functional volatile solvent in the pores of the web-like metal fiber layer of three to four layers laminated with a gradually changing porosity of each layer on the metal plate. The functional solvent can be continuously dissipated for a long time. In addition, the porous plate is formed so that the metal fiber is laminated on a metal plate that can be mechanically molded to block one surface, thereby improving the durability of the functional solvent and preventing deformation by heat as well as having an easy secondary molding.
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| JP2007253151A (en) * | 2006-03-23 | 2007-10-04 | Fiber Tech Co Ltd | Metal fiber medium, filter for exhaust gas purifier using this metal fiber medium as filter member, and method for manufacturing this filter |
| KR100810748B1 (en) * | 2007-03-20 | 2008-03-10 | 화이버텍 (주) | Filter having a low density parts for an apparatus for purifying exhaust gas |
| WO2016142238A1 (en) * | 2015-03-11 | 2016-09-15 | Nv Bekaert Sa | Carrier for temporary bonded wafers |
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| JP4569783B2 (en) * | 2006-03-23 | 2010-10-27 | ファイバー テック カンパニー リミテッド | Metal fiber media, filter for exhaust gas purification apparatus using the same as filter member, and method for manufacturing the filter |
| KR100810748B1 (en) * | 2007-03-20 | 2008-03-10 | 화이버텍 (주) | Filter having a low density parts for an apparatus for purifying exhaust gas |
| WO2016142238A1 (en) * | 2015-03-11 | 2016-09-15 | Nv Bekaert Sa | Carrier for temporary bonded wafers |
| TWI685915B (en) * | 2015-03-11 | 2020-02-21 | 比利時商Ｎｖ貝卡特股份有限公司 | Carrier for temporary bonded wafers |
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