KR20020088935A - Nitriding furnace - Google Patents
Nitriding furnace Download PDFInfo
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- KR20020088935A KR20020088935A KR1020010028015A KR20010028015A KR20020088935A KR 20020088935 A KR20020088935 A KR 20020088935A KR 1020010028015 A KR1020010028015 A KR 1020010028015A KR 20010028015 A KR20010028015 A KR 20010028015A KR 20020088935 A KR20020088935 A KR 20020088935A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/24—Nitriding
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- General Engineering & Computer Science (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
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Abstract
Description
본 발명은 질화로(窒化爐)에 관한 것으로, 보다 상세하게는 질화로의 POT내에 내통을 설치하여 내통과 POT사이에 대류작용이 일어나도록 하여 질화로 내에 투입되는 가스의 흐름이 대류작용에 의해 구석구석 균일하게 일어나 제품이 가스에 접촉하는 시간도 길어져 질화처리가 균일하게 이루어져 제품의 표면경도가 향상됨과 더불어, 외부에서 바람을 불어넣을 수 있는 송풍기(BLOWER)를 설치하여 로벽과 POT를 냉각시켜줌으로서 냉각시간이 단축됨은 물론, POT내 제품에 질소가스를 불어넣어 제품을 냉각시키고 불어넣어 더워진 질소가스를 빼내서 열교환기를 통해 냉각시켜 다시 사용할 수 있게 질소가스 순환냉각장치를 설치하여 보다 빠르게 냉각시켜 질화처리 작업 후 2∼3시간이면 냉각이 되어 작업시간을 단축시킬 수 있어 작업효율의 향상을 이룰 수 있는 질화로에 관한 것이다.The present invention relates to a nitriding furnace, and more particularly, by installing an inner cylinder in the POT of the nitriding furnace so that convection occurs between the inner cylinder and the POT so that the flow of gas introduced into the nitriding furnace is uniform by all convection. The longer the time the product comes into contact with the gas, the more uniform the nitriding treatment, which improves the surface hardness of the product, and by installing a blower that blows air from the outside, it cools the furnace wall and the POT. Not only is this shortened, it also cools the product by blowing nitrogen gas into the product inside the POT, removes the hot nitrogen gas by blowing it, and then cools it faster by installing a nitrogen gas circulation cooling device so that it can be cooled and reused through a heat exchanger. After 2 ~ 3 hours, it can be cooled to shorten working time and improve work efficiency. It is about a nitriding furnace.
일반적으로 사용되고 있는 질화처리작업을 하는 과정을 살펴보면, 바스켓(Basket)에 질화처리할 제품을 넣어 POT내에 장입한 후, 소정의 온도로 승온(예열: 1∼1.5시간 동안)한 뒤, NH₃: N₂:CO₂= 50 : 45 : 5의 비율로 이루어진 가스를 투입하여 질화처리를 하게 된다.In general, the process of nitriding is used. Put the product to be nitrided in a basket, put it in the POT, and then raise the temperature to a predetermined temperature (preheat: 1 to 1.5 hours), and then NH₃: N₂. Nitrogen treatment is performed by adding a gas in the ratio of: CO₂ = 50: 45: 5.
이후, 질화작업을 끝낸 제품을 회백색이 나타날 때까지 냉각을 하게되는데, 제품의 온도가 200℃이상일 때 제품을 추출하면 제품의 색깔이 청색 또는 심하면 흑청색을 띄게 되면, 100℃이하의 온도까지 냉각이 되면 회백색을 띄워 질화작업을 완료하게 되는 것이다.After that, the product after nitriding is cooled until grayish white appears. When the product is extracted when the temperature of the product is 200 ℃ or higher, the color of the product becomes blue or deep blue-black. When this happens, the grayish white to complete the nitriding work.
즉, 종래의 질화처리 작업을 시행하기 위해 사용되는 질화로(10)(窒化爐)는 도 5에 도시한 바와 같이, PIT Type으로서 질화처리할 제품을 바스켓(Basket)(미도시)에 넣어 POT(11)내에 장입하여 NH₃, N₂,CO₂가스를 투입하여 질화처리를 하고 있으나, 이는 로(10)내에 POT(11)만이 내장되어 있어서 질화로 내의 온도와 분위기가 균일하게 이루어지지 않아서 질화얼룩이 생길 뿐아니라, 제품의 표면경도가 떨어지는 문제점이 있었다.In other words, the nitriding furnace 10 used to perform the conventional nitriding treatment operation, as shown in Fig. 5, puts a product to be nitrided as a PIT type in a basket (not shown) into a basket (not shown). 11) Nitride treatment is carried out by inserting NH₃, N₂, CO₂ gas into the reactor. However, since only POT (11) is built in the furnace 10, the temperature and atmosphere in the nitriding furnace are not uniform, resulting in nitride staining. There was a problem that the surface hardness of the product falls.
더불어, 상기 가스의 투입은 뚜껑(12)에 있는 투입구를 통하여 투입되었으나, R.C(CIRCULATION)FAN(13)에 의해 간섭이 일어나 POT(11)밑바닥까지 퍼져나기지 못하여 균일한 분위기를 이루지 못하는 문제점이 있었다.In addition, the input of the gas was introduced through the inlet in the lid 12, but the interference caused by the RC (CIRCULATION) FAN (13) does not spread to the bottom of the POT (11) to achieve a uniform atmosphere there was.
또한, 상기 질화작업을 끝낸 제품을 회백색이 나타날 때까지 냉각을 하게 되는데, 종래의 질화로에서는 외부에서 냉각을 도울 수 있는 장치가 설치된 것이 아니라 오직 자연냉각을 하게 되는데, 이는 제품이 회백색을 나타낼 때까지 냉각이 되려면(최소 100℃이하까지) 질화작업 시간보다 5∼10시간 오랜 시간을 요하여 작업효율이 떨어지는 문제점이 있었다.In addition, the nitriding product is cooled until grayish white appears. In the conventional nitriding furnace, a device that can help cooling from the outside is not installed but only natural cooling is performed until the product shows grayish white. In order to be cooled (at least 100 ° C. or less), the working efficiency is lowered since it takes 5 to 10 hours longer than the nitriding operation time.
따라서, 본 발명은 상기와 같은 종래의 문제점을 해결하기 위해 질화로의 POT내부에 내통뚜껑이 있는 내통을 설치함으로서, 질화로 뚜껑에 설치된 R.C FAN의 회전으로 내통과 POT사이에 대류작용이 일어나 온도와 분위기가 균일하여 질화로 내에 투입되는 가스의 흐름이 대류작용에 의해 구석구석 균일하게 일어나 제품이 가스에 접촉하는 시간도 길어져 질화처리가 균일하게 이루어져 제품의 표면경도를 향상할 수 있으며, 또한 상기 질화작업이 끝나고 냉각작업시 외부에서 바람을 불어넣을 수 있도록 2대의 송풍기를 설치함과 아울러 POT내 제품에 질소가스를 불어넣어 제품을 냉각시키고 불어넣어 더워진 질소가스를 빼내서 열교환기를 통해 냉각시켜 다시 사용할 수 있는 질소가스 순환냉각장치를 설치함으로서, POT내에 있는 제품을 보다 빠르게 냉각시켜 주어 질화처리 작업 후 2∼3시간이면 냉각이 되어 작업시간을 단축시킬 수 있어 작업효율의 향상을 이룰 수 있는 질화로를 제공하려는데 그 목적이 있다.Therefore, the present invention by installing the inner cylinder with the inner cylinder lid inside the POT of the nitriding furnace in order to solve the conventional problems as described above, the convection action occurs between the inner cylinder and the POT by the rotation of the RC FAN installed on the nitriding furnace lid temperature and atmosphere Is uniform, the flow of gas introduced into the nitriding furnace is uniformly every corner due to the convection action, so that the time for the product to contact the gas is also long, so that the nitriding treatment is uniform, thereby improving the surface hardness of the product. When the cooling work is finished, two blowers are installed to blow air from the outside, and nitrogen gas is blown into the product inside the POT to cool the product, and the hot nitrogen gas is removed to cool down through a heat exchanger. By installing nitrogen gas circulating cooling device, products in POT can be cooled more quickly. Given on provide jilhwaro that can achieve an improvement in the operating efficiency it is possible to shorten the work time is 2-3 hours when the cooling after nitriding operation haryeoneunde it is an object.
도 1은 본 발명의 일실시예로서 질화로를 나타낸 정면예시도.1 is a front view showing a nitride furnace as an embodiment of the present invention.
도 2는 본 발명의 일실시예로서 도 1의 평면도.Figure 2 is a plan view of Figure 1 as an embodiment of the present invention.
도 3은 본 발명의 일실시예로서 열교환기를 나타낸 정면도.Figure 3 is a front view showing a heat exchanger as an embodiment of the present invention.
도 4는 본 발명의 일실시예로서 도 3의 열교환기의 배관 배열도.4 is a piping arrangement of the heat exchanger of Figure 3 as an embodiment of the present invention.
도 5는 종래의 질화로를 나타낸 단면예시도.5 is a cross-sectional view illustrating a conventional nitride furnace.
이하, 첨부된 도면에 의거하여 본 발명의 일실시예를 설명하면 다음과 같다.Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.
도 1은 본 발명의 일실시예로서 질화로를 나타낸 정면예시도이고, 도 2는 본발명의 일실시예로서 도 1의 평면도이며, 도 3은 본 발명의 일실시예로서 열교환기를 나타낸 정면도이다.1 is a front view showing a nitride furnace as an embodiment of the present invention, Figure 2 is a plan view of Figure 1 as an embodiment of the present invention, Figure 3 is a front view showing a heat exchanger as an embodiment of the present invention.
도 4는 본 발명의 일실시예로서 도 3의 열교환기의 배관 배열도이다.4 is a pipe arrangement diagram of the heat exchanger of FIG. 3 as an embodiment of the present invention.
도 1 내지 도 4에 도시된 바와같이, 로(10)의 상부에 R.C FAN(13)이 설치된 뚜껑(12)이 뚜껑개폐장치(14)에 의하여 개폐가능하고, 로벽(10')의 내부에 설치한 POT(11)에 제품을 내장하여 질화처리할 수 있도록 구성된 통상의 질화로(窒化爐)에 있어서,As shown in FIGS. 1 to 4, the lid 12 having the RC FAN 13 installed on the top of the furnace 10 may be opened and closed by the lid opening and closing device 14, and the inside of the furnace wall 10 ′ may be opened. In a normal nitriding furnace configured to nitride a product by embedding the product in the installed POT 11,
상기 POT(11)의 내부에는 내통뚜껑(21)이 설치된 내통(20)을 설치하되, 상기 내통뚜껑(21)은 뚜껑개폐장치(14)에 의해 R.C FAN(13)이 설치된 뚜껑(12)을 개폐할 때 동시에 내통뚜껑(21)이 개폐되도록 형성하고,Inside the POT 11, an inner cylinder 20 in which an inner cylinder lid 21 is installed is installed, and the inner cylinder lid 21 is a lid 12 in which an RC FAN 13 is installed by a lid opening and closing device 14. At the same time opening and closing the inner cylinder lid 21 is formed to open and close,
상기 질화로(10)의 하부에는 POT(11)외부로 바람을 불어넣을 수 있도록 양측에 송풍기(30)를 설치하여 POT(11)와 로벽(10')사이를 냉각시켜 줄 수 있도록 형성하며,In order to cool the space between the POT 11 and the furnace wall 10 'by installing a blower 30 at both sides of the nitriding furnace 10 so as to blow air outside the POT 11,
상기 POT(11)내부에는 제품에 질소가스를 불어넣어 제품을 냉각시킨 후 불어넣었던 더워진 질소가스를 열교환기(47)를 통해 냉각시킨 질소가스를 다시 로(10)내에 설치된 내통(20)으로 불어넣어 제품을 냉각할 수 있도록 질소가스 순환냉각장치(40)를 설치한 구조이다.The inside of the POT 11 is blown with nitrogen gas to the product to cool the product, and the heated nitrogen gas that has been blown through the heat exchanger 47 is returned to the inner cylinder 20 installed in the furnace 10. Nitrogen gas circulation cooling device 40 is installed to blow the product to cool by blowing.
상기 질소가스 순환냉각장치(40)에는 본체내부에 다수의 배관(42)이 설치하되, 일측부에 물을 공급하는 공급구(43)와 배출하는 배출구(44)를 형성하고, 양단에는 질소가스를 로(10)내의 내통(20)으로 불어넣는 배출관(45)과, 상기 로(10)내로 불어넣었던 더워진 질소가스를 다시 흡입하는 흡입관(46)이 설치된 열교환기(47)로 이루어진 구조이다.In the nitrogen gas circulation cooling device 40, a plurality of pipes 42 are installed inside the main body, and a supply port 43 for supplying water and a discharge port 44 for discharging are formed at one side thereof, and nitrogen gas is disposed at both ends. And a heat exchanger (47) provided with a discharge pipe (45) for blowing into the inner cylinder (20) in the furnace (10), and a suction pipe (46) for sucking back the heated nitrogen gas which has been blown into the furnace (10). .
이하 미설명된 도면부호는 15는 로벽에 설치된 열전대를 나타낸 것이고, 16은 로내에 투입되는 암모니아(NH₃), 질소(N₂), 이산화탄소(CO₂)가스를 유입하는 유입관을 나타낸 것이며, 48은 질소가스 순환냉각장치에 설치된 송풍기를 나타낸 것이고, 49는 모터를 나타낸 것이다.In the following description, reference numeral 15 denotes a thermocouple installed on the wall of the furnace, 16 denotes an inlet pipe through which ammonia (NH₃), nitrogen (N₂), and carbon dioxide (CO₂) gas are introduced into the furnace, and 48 is nitrogen. The blower installed in the gas circulation cooling apparatus is shown, and the 49 is a motor.
이와 같이 구성된 본 발명의 일실시예에 대한 작용을 첨부된 도 1 내지 도 4를 참조하여 설명하면 다음과 같다.Referring to Figures 1 to 4 attached to the operation of an embodiment of the present invention configured as described above are as follows.
먼저, 질화처리할 제품을 세척하여 바스켓(Basket)에 적치한 뒤 뚜껑개폐장치(14)에 의해 개폐되는 뚜껑(12)을 열면 동시에 내통(20)에 설치된 내통뚜껑(21)이 열려지게 되어 제품을 POT(11)의 내부의 내통(20)안으로 장입한 후, 뚜껑개폐장치(14)를 작동하여 뚜껑을 닫도록 한다.First, after washing the product to be nitrided and placed in the basket (Basket) and then open the lid 12 that is opened and closed by the lid opening and closing device 14, the inner cylinder lid 21 installed in the inner cylinder 20 is opened at the same time To the inner cylinder 20 inside the POT 11, and then operate the lid opening and closing device 14 to close the lid.
이후, 컨트롤판넬(미도시)에 작업온도를 온도조절계에 입력하여 전원스위치를 ON하면, 질화로(10)내에는 소정의 온도로 승온(예열: 1∼1.5시간 동안)할 동안에는 계속 질소(N₂)를 투입한다.Subsequently, when the power switch is turned on by inputting a working temperature to a temperature controller on a control panel (not shown), nitrogen (N₂) continues while the temperature is raised to a predetermined temperature (preheating for 1 to 1.5 hours) in the nitriding furnace 10. Input
그리고, 예열이 끝나게 되면 NH₃: N₂:CO₂= 50 : 45 : 5의 비율로 이루어진 가스를 투입한 뒤, 뚜껑(12)에 설치된 R.C FAN(13)을 회전시키게 된다.Then, when the preheating is completed, the gas composed of NH₃: N₂: CO₂ = 50: 45: 5 is added, and then the R.C FAN 13 installed on the lid 12 is rotated.
여기서, 질화로(10)의 뚜껑(12)에 설치된 R.C FAN(13)의 회전으로 내통(20)과 POT(11)사이에 대류작용이 일어나 온도와 분위기가 균일하여 상ㆍ중ㆍ하 온도분포 및 유효가열대(A) 온도차이가 ±3℃ 이내를 유지하므로 투입되는 가스의 흐름이대류작용에 의해 구석구석 균일하게 유지됨과 아울러 제품이 가스에 접촉하는 시간도 길어져 질화처리가 균일하게 이루어져 제품의 표면경도를 향상을 이룰 수 있게 된다.Here, the convection action occurs between the inner cylinder 20 and the POT 11 by the rotation of the RC FAN 13 installed in the lid 12 of the nitriding furnace 10, so that the temperature and atmosphere are uniform. Since the temperature difference of the effective heating zone (A) is within ± 3 ° C, the flow of the injected gas is maintained uniformly in every corner by the convection action, and the time for the product to contact the gas is also long, so that the nitriding treatment is uniform. The surface hardness can be improved.
이후, 질화로(10)내에 설치된 배출구(미도시)를 통하여 LPG가스를 투입하여 배출가스를 연소시키게 된다.Thereafter, LPG gas is inputted through an outlet (not shown) installed in the nitriding furnace 10 to combust the exhaust gas.
이때 질화작업이 완료되면 소정의 시간을 유지하여 목적하는 시간이 되면 가스를 전부 차단하고, 질소(N₂)가스만을 투입하여 질화로(10)의 하부에 설치된 양측의 송풍기(30)를 작동시키면 POT(11)와 로벽(10')사이에 바람이 불어 들어와 온도가 하강함에 따라 POT(11)와 로벽(10')을 냉각시켜 줄 수 있게 된다.At this time, when the nitriding operation is completed, it maintains a predetermined time and shuts off all of the gas when the desired time is reached, and operates only the nitrogen (N₂) gas to operate the blowers 30 installed at the lower part of the nitriding furnace 10 so that the POT ( It is possible to cool the POT 11 and the furnace wall 10 'as the wind blows between 11) and the furnace wall 10' and the temperature decreases.
그리고, 질소(N₂)가스를 일정량 추가 투입하면서 질소가스 순환냉각장치(40)를 작동시키면 질소가스 순환냉각장치(40)에 설치된 모터(49)와 송풍기(48)가 작동하여 배출관(45)으로부터 로(10)내의 내통(20)으로 질소가스를 불어넣게 되어 내통(20)내의 제품을 냉각시키게 된다.Then, when the nitrogen gas circulating cooling device 40 is operated while adding a predetermined amount of nitrogen (N₂) gas, the motor 49 and the blower 48 installed in the nitrogen gas circulating cooling device 40 operate to discharge from the discharge pipe 45. Nitrogen gas is blown into the inner cylinder 20 in the furnace 10 to cool the product in the inner cylinder 20.
이후, 내통(20)내에 불어넣었던 더워진 질소가스를 다시 흡입관(46)을 통하여 질소가스를 흡입하면 열교환기(47)의 본체내부에 설치된 다수의 배관(42)을 타면서 일측부에 물을 공급과 배출하는 공급구(43)와 배출구(44)에 의해 더워진 질소가스가 냉각되어 다시 배출관(45)을 통하여 냉각된 질소가스를 로(10)내의 내통(20)으로 불어넣어 제품을 냉각시키게 된다.Subsequently, when the nitrogen gas is sucked through the suction pipe 46 again, the heated nitrogen gas that has been blown into the inner cylinder 20 is filled with water on one side while riding a plurality of pipes 42 installed inside the main body of the heat exchanger 47. Nitrogen gas heated by the supply port 43 and the outlet port 44 for supplying and discharging is cooled, and the nitrogen gas cooled through the discharge pipe 45 is blown into the inner cylinder 20 in the furnace 10 to cool the product. Let's go.
그리고 로(10)내 온도가 50℃이하로 냉각되면 뚜껑을 열고 제품을 꺼내게 된다.And when the temperature in the furnace 10 is cooled below 50 ℃ to open the lid to take out the product.
따라서, 질화작업이 끝나고 냉각작업은 질소(N₂)가스를 불어넣어 냉각을 더욱 빠르게 할 뿐아니라, 질소가스 냉각을 순환냉각방법을 통하여 로에 불어넣었던 더워진 질소가스를 열교환기로 냉각시켜 다시 로 내로 불어넣어 제품을 냉각시켜 냉각작업시간을 1∼3시간이내에 냉각시킬 수 있어 작업시간을 단축할 수 있게 된다.Therefore, after the nitriding operation is completed, the cooling operation not only speeds up the cooling by blowing nitrogen (N₂) gas, but also cools the heated nitrogen gas, which has been blown into the furnace through the circulation cooling method, by the heat exchanger and blows it back into the furnace. The product can be cooled to cool down the working time within 1 to 3 hours, thereby reducing the working time.
이상에서 설명한 바와같이 본 발명은 질화로의 POT내부에 내통뚜껑이 있는 내통을 설치함으로서, 질화로 뚜껑에 설치된 R.C FAN의 회전으로 내통과 POT사이에 대류작용이 일어나 온도와 분위기가 균일하여 질화로 내에 투입되는 가스의 흐름이 대류작용에 의해 구석구석 균일하게 일어나 제품이 가스에 접촉하는 시간도 길어져 질화처리가 균일하게 이루어져 제품의 표면경도를 향상을 이룰 수 있음은 물론, 상기 질화작업이 끝나고 냉각작업시 외부에서 바람을 불어넣을 수 있도록 2대의 송풍기를 설치함과 아울러 POT내 제품에 질소가스를 불어넣어 제품을 냉각시키고 불어넣어 더워진 질소가스를 빼내서 열교환기를 통해 냉각시켜 다시 사용할 수 있는 질소가스 순환냉각장치를 설치함으로서, POT내에 있는 제품을 보다 빠르게 냉각시켜 주어 질화처리 작업 후 2∼3시간이면 냉각이 되어 작업시간을 단축시킬 수 있어 작업효율의 향상을 이룰 수 있는 효과가 있다.As described above, in the present invention, by installing an inner cylinder with an inner cylinder lid inside the POT of the nitriding furnace, convection occurs between the inner cylinder and the POT due to the rotation of the RC FAN installed on the lid of the nitriding furnace, so that the temperature and the atmosphere are uniformly introduced into the nitride furnace. Due to the convection of the gas, every corner of the gas flows uniformly, resulting in a longer time for the product to contact the gas, resulting in a uniform nitriding treatment, thus improving the surface hardness of the product. Nitrogen Gas Circulation Cooling System which installs two blowers to blow air in the air, cools the product by blowing nitrogen gas into the POT and removes the hot nitrogen gas by blowing it, and then cools it through a heat exchanger. Nitriding treatment by cooling the product in the POT faster 2 to 3 hours after the up can be cooled to shorten the working time has the effect of improving the work efficiency.
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| KR101399331B1 (en) * | 2013-12-09 | 2014-05-28 | (주)이진히팅시스템 | Nitriding furnace |
| KR20160022587A (en) | 2014-08-20 | 2016-03-02 | 주식회사 세텍 | Nitriding Furnace and Nitriding Method Using the Same |
| KR102240460B1 (en) | 2019-08-16 | 2021-04-14 | (주)상도티디에스 | A system of nitriding furnace) |
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