KR20020072445A - Lead-frame for semiconductor package - Google Patents
Lead-frame for semiconductor package Download PDFInfo
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- KR20020072445A KR20020072445A KR1020010012434A KR20010012434A KR20020072445A KR 20020072445 A KR20020072445 A KR 20020072445A KR 1020010012434 A KR1020010012434 A KR 1020010012434A KR 20010012434 A KR20010012434 A KR 20010012434A KR 20020072445 A KR20020072445 A KR 20020072445A
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- pad
- lead frame
- tie bar
- frame
- semiconductor package
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48257—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
본 발명은 반도체 패키지용 리드프레임에 관한 것으로, 특히 몰딩작업시 플래쉬 등의 현상을 최소화할 수 있도록 한 반도체 패키지용 리드프레임에 관한 것이다.The present invention relates to a lead package for a semiconductor package, and more particularly to a lead package for a semiconductor package to minimize the phenomenon such as flash during the molding operation.
주지된 바와 같이, 반도체 패키지는 구리 재질의 리드프레임을 사용하여 패키지 크기를 칩(chip)의 크기에 가깝게 만든 CSP(Chip Size Package)의 일종으로, 도 1 내지 도 3을 참조하여 반도체 패키지의 일례로 MLF(Micro Lead Frame) 반도체 패키지의 구조를 간략하게 설명하면 다음과 같다.As is well known, a semiconductor package is a type of CSP (Chip Size Package) in which a package size is made close to a chip size by using a lead frame made of copper, and an example of a semiconductor package with reference to FIGS. 1 to 3. The structure of the MLF semiconductor package is briefly described as follows.
도 1에 도시된 바와 같이, 반도체 패키지의 바닥면 외측부에는 리드프레임(10)의 리드(12)가 외부로 노출되도록 형성되어 있고, 반도체 패키지 바닥면 중앙부에는 칩(2)이 부착되는 패드(13)가 동일면상으로 위치되어 있다.As shown in FIG. 1, the lead 12 of the lead frame 10 is formed to be exposed to the outside of the bottom surface of the semiconductor package, and the pad 13 to which the chip 2 is attached to the center portion of the bottom surface of the semiconductor package. ) Are coplanar.
상기 칩(2)과 리드프레임(10)은 금선(3; gold wire)에 의해 연결되며, 전술한 각 구성부들은 패키지 몸체를 형성하는 몰드컴파운드(4; mold compound)에 의해 특정형태를 가지며 지지된다.The chip 2 and the lead frame 10 are connected by gold wires, and each of the above components has a specific shape and is supported by a mold compound 4 forming a package body. do.
여기서, 상기 리드프레임(10)은 도 2에 도시된 바와 같이 프레임 몸체부(11)와, 이 몸체부(11) 중앙에 형성된 패드(13)와, 이 패드(13) 외측을 둘러싸도록 위치된 리드(12) 및, 상기 패드(13)를 몸체부(11)에 대해 지지하여 주는 역할을 하는 타이바아(14; tie bar)로 구성된다.Here, the lead frame 10 is positioned to surround the frame body portion 11, the pad 13 formed at the center of the body portion 11, and the outside of the pad 13, as shown in FIG. 2. A lead 12 and a tie bar 14, which serves to support the pad 13 with respect to the body portion 11, are configured.
상기와 같은 구조의 MLF 반도체 패키지를 제조하는 과정은 일반적인 반도체 패키지 제조공정을 따르는데, 먼저 웨이퍼에서 절단작업(wafer sawing)을 통해 얻어진 개별 칩(2)을 접착용제로 리드프레임(10)의 패드(13)에 부착시킨 다음, 와이어본딩 작업을 통해 금선(3)으로 칩(2)과 리드프레임(10)을 서로 연결시키고, 이어서 상기 칩(2)이 부착된 리드프레임(10)을 하부 몰드다이(50; 도 3참조)에 놓은 상태에서 몰딩작업을 수행하게 된다.The manufacturing process of the MLF semiconductor package having the above structure follows a general semiconductor package manufacturing process. First, the pads of the lead frame 10 are bonded to the individual chips 2 obtained through wafer sawing on the wafer. After attaching to the (13), through the wire bonding operation to connect the chip 2 and the lead frame 10 with each other by the gold wire (3), and then the lead frame 10 to which the chip (2) is attached to the lower mold The molding operation is performed while being placed on the die 50 (see FIG. 3).
그런데, 상기와 같은 구조의 MLF 반도체 패키지는 상기 리드프레임(10)의 구조적인 문제로 인하여 몰딩 작업시 플래쉬(flash) 현상이 발생하는 문제점이 있었다.However, the MLF semiconductor package having the above structure has a problem in that a flash phenomenon occurs during molding due to a structural problem of the lead frame 10.
즉, 도 3에 도시된 바와 같이 상기 리드프레임(10)의 패드(13)와 타이바아(14) 및 리드(12)가 일직선 상으로 되어 있음에 따라 몰딩 작업시 리드프레임(10)에 약간의 기울기가 발생하거나 상부의 몰드다이(미도시)에서 가해지는 클램핑력(F)이 불균일하게 되는 경우에 리드프레임(10)의 패드(13) 하부면에서 플래쉬가 발생하는 현상이 있었다.That is, as shown in FIG. 3, the pad 13, the tie bar 14, and the lead 12 of the lead frame 10 are in a straight line. When the slope occurs or the clamping force F applied from the upper mold die (not shown) becomes uneven, there is a phenomenon in which the flash is generated on the lower surface of the pad 13 of the lead frame 10.
이에 본 발명은 상기와 같은 문제점을 해결하기 위하여 안출된 것으로, 반도체 패키지에 있어서, 리드프레임의 패드가 몰드다이에 더욱 잘 밀착할 수 있도록 리드프레임의 구조를 개선하여 몰딩 작업시 플래시 현상이 발생하는 것을 최소화할 수 있도록 한 반도체 패키지용 리드프레임을 제공함에 그 목적이 있다.Accordingly, the present invention has been made in order to solve the above problems, in the semiconductor package, a flash phenomenon occurs during the molding operation by improving the structure of the lead frame so that the pad of the lead frame is more closely adhered to the mold die It is an object of the present invention to provide a lead frame for a semiconductor package, which can minimize the number of them.
도 1은 일반적인 반도체 패키지의 일례로 MLF 반도체 패키지 구조를 나타낸 종단면도1 is a vertical cross-sectional view illustrating an MLF semiconductor package structure as an example of a general semiconductor package;
도 2는 도 1의 반도체 패키지에 사용되는 리드프레임을 나타낸 평면도FIG. 2 is a plan view illustrating a lead frame used in the semiconductor package of FIG. 1. FIG.
도 3은 도 2의 리드프레임이 몰딩작업을 위해 몰드 다이에 놓여진 상태를 나타낸 도 2의 I-I선 단면도3 is a cross-sectional view taken along the line I-I of FIG. 2 showing a state in which the lead frame of FIG.
도 4는 도 2의 대응도로서, 본 발명에 따른 반도체 패키지용 리드프레임을 나타낸 평면도4 is a plan view of the lead frame for a semiconductor package according to the present invention, which corresponds to FIG. 2.
도 5는 도 3의 대응도로서, 도 4의 리드프레임이 몰드 다이에 놓여진 상태를 나타낸 도 4의 Ⅱ-Ⅱ선 단면도FIG. 5 is a sectional view taken along line II-II of FIG. 4 showing a state in which the lead frame of FIG. 4 is placed on a mold die. FIG.
도면의 주요부분의 참조부호에 대한 설명Explanation of Reference Symbols in Major Parts of Drawings
20 - 리드프레임 21 - 몸체부20-Leadframe 21-Body
22 - 리드 23 - 패드22-Lead 23-Pad
24 - 타이바아 25 - 다운셋24-Tyvaa 25-Downset
50 - 하부 몰드다이50-lower mold die
상기와 같은 목적을 달성하기 위하여 본 발명은, 프레임 몸체부와, 이 몸체부의 각 모서리부분에서 프레임 내측으로 연장되게 형성되는 타이바아와, 상기 몸체부 중심에서 상기 타이바에 연결되도록 설치되고 그 상부면에 반도체칩이 탑재되는 사각판형의 패드와, 상기 패드 외측 둘레에 위치하도록 프레임 몸체부로부터 내측으로 연장되게 형성되는 복수개의 리드가 구비된 리드프레임에 있어서; 상기 패드는 상기 타이바아의 하측에 위치하도록 상기 타이바아와 패드의 연결부위에 경사지게 절곡된 다운셋(down-set)이 형성된 것을 특징으로 하는 반도체 패키지용 리드프레임을 제공한다.In order to achieve the above object, the present invention provides a frame body portion, a tie bar formed to extend into the frame at each corner portion of the body portion, and installed to be connected to the tie bar at the center of the body portion and an upper surface thereof. A lead frame having a rectangular plate-shaped pad on which a semiconductor chip is mounted, and a plurality of leads extending inwardly from the frame body portion so as to be positioned around the outside of the pad; The pad provides a lead frame for a semiconductor package, wherein a down-set bent at an angle is formed at a connection portion between the tie bar and the pad so as to be positioned below the tie bar.
본 발명의 한 형태에 따르면, 상기 반도체 패키지는 MLF(Micro Lead Frame) 반도체인 것을 특징으로 한다.According to one aspect of the invention, the semiconductor package is characterized by being a MLF (Micro Lead Frame) semiconductor.
이하, 본 발명에 따른 반도체 패키지의 리드프레임의 일 실시예를 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, an embodiment of a lead frame of a semiconductor package according to the present invention will be described in detail with reference to the accompanying drawings.
도 4는 본 발명에 따른 MLF 반도체 패키지의 리드프레임을 나타낸 평면도이고, 도 5는 도 4의 리드프레임이 몰드 다이에 놓여진 상태를 나타낸 도면으로, 본 발명의 반도체 패키지용 리드프레임(20)은 사각틀 형태의 프레임 몸체부(21)와, 상기 프레임 몸체부(21)의 중앙에 위치하여 그 위에 칩(2)이 부착되는 패드(23)와, 상기 프레임 몸체부(21)의 각 모서리부분에서 상기 패드(23)의 각 모서리부분과 연결되도록 몸체부 내측으로 일체로 연장 형성되어 몸체부(21)에 대해 패드(23)를 지탱하는 타이바아(24)로 구성된다.4 is a plan view showing a lead frame of the MLF semiconductor package according to the present invention, Figure 5 is a view showing a state in which the lead frame of Figure 4 placed on the mold die, the semiconductor package lead frame 20 of the present invention is a rectangular frame The frame body portion 21 of the form, the pad 23 is located in the center of the frame body portion 21 is attached to the chip 2, and at each corner of the frame body portion 21 It is composed of a tie bar (24) for supporting the pad 23 against the body portion 21 is formed integrally extending into the body portion to be connected to each corner portion of the pad (23).
여기서, 상기 타이바아(24)에는 상기 패드(23)와 연결되는 부위에 아래쪽으로 경사지게 절곡된 다운셋(25; down-set)이 형성되어, 상기 패드(23)가 타이바아(14)보다 아래쪽에 위치하게 된다.Here, the tie bar 24 is formed with a down-set bent downwardly inclined downward in a portion connected to the pad 23, the pad 23 is lower than the tie bar 14 It is located at.
따라서, 상기 리드프레임(20)이 하부 몰드다이(50)의 편평한 면상에 놓여졌을 때 도 5에 도시된 것과 같이 패드(23)는 하부 몰드다이(50)의 편평면에 접촉하고 타이바아(24) 및 리드(22)는 편평면과 유격을 갖게 된다.Accordingly, when the leadframe 20 is placed on the flat surface of the lower mold die 50, the pad 23 contacts the flat surface of the lower mold die 50 and the tie bar 24 as shown in FIG. 5. And the lead 22 have a clearance with a flat surface.
이에 따라, 몰딩 작업시 상부 몰드다이(미도시)가 리드프레임(20)의 상측에서 타이바아(24)를 가압할 때 패드(23)가 하부 몰드다이(50) 상에 더욱 밀착하게 되어 플래쉬 발생이 억제될 수 있게 되는 것이다.Accordingly, when the upper mold die (not shown) presses the tie bar 24 on the upper side of the lead frame 20 during the molding operation, the pad 23 is brought into close contact with the lower mold die 50 to generate a flash. This can be suppressed.
이상에서와 같이 본 발명에 따르면, 리드프레임의 타이바아와 패드 간에 다운셋(down-set)이 형성되어 몰딩작업시 패드가 하부 몰드다이에 밀착하는 힘이 증가되므로 플래쉬의 발생이 억제되고, 이에 따라 반도체 패키지의 제조과정에서 불량 발생률이 저하되어 생산성이 향상되는 효과를 얻게 된다.As described above, according to the present invention, since a down-set is formed between the tie bar of the lead frame and the pad, the force of the pad in close contact with the lower mold die is increased during molding, thereby preventing the occurrence of flash. As a result, the defect occurrence rate is lowered in the manufacturing process of the semiconductor package, thereby improving productivity.
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030006532A (en) * | 2001-07-13 | 2003-01-23 | 삼성테크윈 주식회사 | Lead Frame, Semi-conductor Package therewith and Method for manufacturing Semi-Conductor Package |
KR100868662B1 (en) * | 2007-03-02 | 2008-11-13 | 에스티에스반도체통신 주식회사 | Micro Lead Frame type semiconductor package and manufacture method thereof |
-
2001
- 2001-03-10 KR KR1020010012434A patent/KR20020072445A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030006532A (en) * | 2001-07-13 | 2003-01-23 | 삼성테크윈 주식회사 | Lead Frame, Semi-conductor Package therewith and Method for manufacturing Semi-Conductor Package |
KR100868662B1 (en) * | 2007-03-02 | 2008-11-13 | 에스티에스반도체통신 주식회사 | Micro Lead Frame type semiconductor package and manufacture method thereof |
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