KR20020056723A - Spacer dispenser for manufacturing Liquid Crystal Display - Google Patents
Spacer dispenser for manufacturing Liquid Crystal Display Download PDFInfo
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- KR20020056723A KR20020056723A KR1020000086128A KR20000086128A KR20020056723A KR 20020056723 A KR20020056723 A KR 20020056723A KR 1020000086128 A KR1020000086128 A KR 1020000086128A KR 20000086128 A KR20000086128 A KR 20000086128A KR 20020056723 A KR20020056723 A KR 20020056723A
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- spacer
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- crystal display
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13392—Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
Abstract
Description
본 발명은 액정표시소자 제조용 스페이서 산포기에 관한 것으로, 특히 액정표시소자 제조시 특정한 셀 값의 셀 갭을 유지하기 위해 특정한 크기의 스페이서를 기판상에 산포하기 위한 액정표시소자 제조용 스페이서 산포기에 관한 것이다.The present invention relates to a spacer spreader for manufacturing a liquid crystal display device, and more particularly, to a spacer spreader for manufacturing a liquid crystal display device for dispersing a spacer having a specific size on a substrate in order to maintain a cell gap of a specific cell value in manufacturing a liquid crystal display device. will be.
도 1은 종래의 일반적인 액정표시소자 제조용 스페이서 산포기의 내부 단면도이다. 도 1을 참조하면, 산포용 챔버(1)는 산포 작업을 진행하기 위해 외부와 독립적인 환경을 만들어 주며, 상기 챔버(1) 내부의 천장 부위에는 스페이서(Spacer)를 산포하기 위한 분사용 노즐(5)이 위치되어 있으며, 상기 스페이서를 산포하게 될 액정표시소자용 기판(3)을 고정하기 위한 스테이지(2)는 상기 챔버(1) 내부의 하부에 위치한다.1 is a cross-sectional view of a conventional spacer spreader for manufacturing a conventional liquid crystal display device. Referring to FIG. 1, the spreading chamber 1 creates an environment independent from the outside in order to perform a spreading operation, and a spray nozzle for distributing a spacer in a ceiling portion inside the chamber 1. 5) is positioned, and the stage 2 for fixing the substrate 3 for liquid crystal display device which will disperse the spacer is located in the lower part of the chamber 1.
상기 분사용 노즐(5)은 기판상의 전면에 스페이서가 균일하게 산포되도록 하기 위해 산포 진행중 일정량 왕복운동을 하도록 되어있다. 이때 부호 (6)은 상기 분사용 노즐(5)로부터 분사된 스페이서가 낙하되는 경로를 표시한다.The spray nozzle 5 is configured to reciprocate a certain amount during the spreading process in order to uniformly distribute the spacers on the entire surface of the substrate. At this time, reference numeral 6 denotes a path in which the spacer injected from the injection nozzle 5 falls.
일반적으로, 액정표시소자는 투명한 두 장의 기판 사이에 액정을 삽입시키고 바같면에는 편광판(Ploariizer film)을 부착시켜 액정층과 두 장의 기판 사이에 위치한 투명전극에 입력시킨 전기 신호에 따라 액정을 움직이게 하여 편광판을 지닌 빛의 편광 방향을 조절, 빛의 통과 및 차단을 조절할 수 있도록 되어 있다.In general, a liquid crystal display device inserts a liquid crystal between two transparent substrates and attaches a polarizer film to the liquid crystal to move the liquid crystal according to an electrical signal input to the transparent electrode positioned between the liquid crystal layer and the two substrates. It is possible to adjust the direction of polarization of light with polarizer to control the passage and blocking of light.
액정표시장치의 액정의 물성과 액정층의 두께에 따라서 광학적 특성이 크게 달라 지는데 이 때 액정층의 두께 조절은 액정표시소자 제조공정에 있어서 매우 중요한 사항이며 이를 위해 여러 가지 방법이 적용되어 왔다.Optical properties vary greatly depending on the properties of the liquid crystal and the thickness of the liquid crystal layer of the liquid crystal display device. At this time, the thickness control of the liquid crystal layer is very important in the manufacturing process of the liquid crystal display, and various methods have been applied for this purpose.
그러나, 종래의 산포 방식은 휘발성 액체를 사용하거나 대전에 의한 정전기를 산포기에 추가시킴으로써 공해 문제나 기판의 전기적 충격, 경제적인 추가 부담을 가져오는 단점이 있다. 또한, 단순히 기체의 분사 압력으로 스페이서를 뿌릴 경우 스페이서 입자의 뭉침 현상에 대한 대응이 어렵다는 문제점이 있다.However, the conventional spreading method has a disadvantage of using a volatile liquid or adding static electricity due to charging to the spreader to bring about pollution problems, electrical shock of the substrate, and additional economic burden. In addition, there is a problem that it is difficult to cope with the agglomeration of the spacer particles when spraying the spacer simply by the injection pressure of the gas.
이에 본 발명은 상기 종래 기술의 문제점을 해결하기 위해 제안된 것으로, 본 발명의 목적은 스페이서 뭉침에 의한 불량을 줄이고, 기판 내부의 스페이서의 크기 편차를 줄일 수 있는 액정표시소자 제조용 스페이서 산포기를 제공함에 있다.Accordingly, the present invention has been proposed to solve the problems of the prior art, and an object of the present invention is to provide a spacer spreader for manufacturing a liquid crystal display device which can reduce defects caused by agglomeration of spacers and reduce size variations of spacers in a substrate. Is in.
도 1은 종래의 일반적인 액정표시소자 제조용 스페이서 산포기의 내부 단면도.1 is a cross-sectional view of a conventional spacer spreader for manufacturing a conventional liquid crystal display device.
도 2는 본 발명의 일실시예에 의한 액정표시소자 제조용 스페이서 산포기의 내부 단면도.2 is an internal cross-sectional view of a spacer spreader for manufacturing a liquid crystal display device according to an embodiment of the present invention.
도 3은 본 발명의 다른 실시예에 의한 액정표시소자 제조용 스페이서 산포기의 내부 단면도.3 is an internal cross-sectional view of a spacer spreader for manufacturing a liquid crystal display device according to another embodiment of the present invention.
도 4는 본 발명의 다른 실시예에 의한 액정표시소자 제조용 스페이서 산포기의 내부 평면도.4 is a plan view of the inside of the spacer spreader for manufacturing a liquid crystal display device according to another embodiment of the present invention.
< 도면부호의 설명 ><Description of Drawing>
1: 산포용 챔버2: 스테이지1: Dispersion Chamber 2: Stage
3: 액정표시소자용 기판 5: 분사용 노즐3: Substrate for Liquid Crystal Display 5: Spray Nozzle
6: 산포용 노즐로부터 분사된 스페이서가 낙하되는 경로6: Path in which the spacer injected from the spray nozzle falls
7: 정상적인 질량의 스페이서와 뭉침으로 인해 무거워진 스페이서의 수평7: Horizontalness of spacers heavy due to aggregation with spacers of normal mass
이동거리차Distance
상기 본 발명의 목적을 달성하기 위한 본 발명은, 액정표시소자 제조시 상부 기판과 하부 기판 사이의 간격을 일정하게 유지하기 위한 스페이서를 도포하는 산포기에 있어서: 산포를 수행하기 위해 충분한 공간을 갖는 산포용 챔버; 상기 산포용 챔버 내부의 하부에 위치되어 스페이서(Spacer)를 산포하게 될 액정표시소자용 기판; 상기 산포용 챔버 내부의 아래 부분에 위치되어 산포 작업시 상기 액정표시소자용 기판을 고정하기 위한 스테이지; 및 상기 산포용 챔버 내부의 측벽에 위치되는 스페이서 분사용 노즐을 포함하는 것을 특징으로 하는 액정표시소자 제조용 스페이서 산포기를 제공한다.The present invention for achieving the object of the present invention, in the spreader for applying a spacer for maintaining a constant distance between the upper substrate and the lower substrate in the manufacturing of the liquid crystal display device: having a sufficient space to perform the dispersion Spreading chamber; A liquid crystal display device substrate positioned below the interior of the spreading chamber to distribute a spacer; A stage positioned in a lower portion of the inside of the chamber for fixing the liquid crystal display device substrate during a spreading operation; And a spacer spray nozzle disposed on a side wall of the spreading chamber, the spacer spreader for manufacturing a liquid crystal display device.
이하, 본 발명의 바람직한 실시예를 첨부 도면들을 참조하여 상세하게 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 2는 본 발명의 일실시예에 의한 액정표시소자 제조용 스페이서 산포기의 내부 단면도이다.2 is a cross-sectional view illustrating a spacer spreader for manufacturing a liquid crystal display device according to an exemplary embodiment of the present invention.
본 발명에 의한 액정표시소자 제조용 스페이서 산포기는, 기존의 산포기와 유사한 구조를 갖되 산포기 챔버(1) 내부의 측벽에 분사용 노즐(5)이 형성되어 있어 상기 분사용 노즐(5)을 통해 스페이서(Spacer)를 일정한 압력으로 분사하도록 구성되어 있다.The spacer spreader for manufacturing a liquid crystal display device according to the present invention has a structure similar to that of a conventional spreader, but a spraying nozzle 5 is formed on a sidewall of the spreading chamber 1 so that the spraying nozzle 5 is formed. It is configured to inject a spacer at a constant pressure through.
상기 분사용 노즐(5)은 상기 산포기 챔버(1)의 한 쪽 측벽에 위치되어 있으며, 액정표시소자용 기판(3)이 놓이게 될 스테이지(2)는 상기 분사용 노즐(5)의 반대쪽으로 치우쳐 위치되어 있다. 상기 스페이서는 상기 분사용 노즐(5)에서 분사된 후 수평이동하면서 중력에 의해 아래로 낙하된다.The spray nozzle 5 is located on one side wall of the spreader chamber 1, and the stage 2 on which the liquid crystal display substrate 3 is to be placed is opposite to the spray nozzle 5. It is located away from it. The spacer is injected from the spray nozzle (5) and then moved down by gravity while moving horizontally.
도 2에 도시된 바와 같이, 6a와 6b는 산포기 챔버(1) 내부 측벽의 상기 분사용 노즐(5)로부터 분사된 스페이서의 낙하경로이다. 상기 스페이서는 일정한 힘 F로 상기 분사용 노즐(5)에서 분사되므로 그 질량에 따라 서로 다른 가속도(am, aM)를 갖게 되어 수평 방향으로의 이동거리가 다르게 나타난다. 6a는 정상적인 질량을 갖는 스페이서의 낙하경로이고, 6b는 뭉침으로 인하여 비정상적으로 질량이 커진 스페이서의 낙하 경로이다.As shown in Fig. 2, 6a and 6b are drop paths of spacers ejected from the spray nozzles 5 on the inner sidewalls of the spreader chamber 1. Since the spacer is injected from the injection nozzle 5 with a constant force F, the spacers have different accelerations a m and a M according to their masses, and thus the moving distance in the horizontal direction is different. 6a is a drop path of a spacer having a normal mass, and 6b is a drop path of an abnormally large spacer due to aggregation.
이때, 7은 정상적인 질량을 갖는 스페이서와 비정상적으로 무거워진 스페이서의 수평이동거리의 차이를 나타내며, 스페이서와 공기중의 마찰에 의한 경로 변화가 거의 없다고 가정할 경우 아래와 같이 계산될 수 있다.In this case, 7 represents the difference between the horizontal moving distance between the spacer having a normal mass and the spacer which is abnormally heavy, and can be calculated as follows when it is assumed that there is little path change due to friction between the spacer and air.
도 2에서 H는 상기 분사용 노즐(5)로부터 액정표시용 기판(3) 상면까지의 높이이며, D는 측면 분사된 스페이서의 기판(3)까지의 수평이동거리를 의미한다. m과 M은 각각 정상적인 스페이서의 질량과 비정상적으로 무거워진 스페이서의 질량을 나타내며, 이 때 각각 다르게 나타나는 속도(Vm,VM)와 수평이동거리는 Dm, DM로 나타내었다.In FIG. 2, H denotes a height from the jetting nozzle 5 to the upper surface of the liquid crystal display substrate 3, and D denotes a horizontal moving distance from the side jetted spacer to the substrate 3. m and M respectively represent the mass of the normal spacer and the abnormally heavy spacer mass, and the velocity (V m , V M ) and the horizontal movement distance, which are different from each other, are represented by D m and D M.
= (aMt1)- (aMt1) = (a M t 1 ) -(a M t 1 )
= Ft1 (-)= Ft 1 ( - )
H = 1m, g = 10m/s, M = 3m 이라고 하면,If H = 1m, g = 10m / s, M = 3m,
본 발명에 따른 액정표시소자 제조용 스페이서 산포기는 상기 스페이서의 질량 차이를 이용하므로 허용 범위내에서 스페이서 크기에 대해서도 수평이동거리 차가 발생할 수 있다.Since the spacer spreader for manufacturing the liquid crystal display device according to the present invention uses the mass difference of the spacers, a horizontal shift distance difference may occur even with respect to the spacer size within an allowable range.
즉, 기판(3) 상에서 상기 분사용 노즐(5)과 가까운 부분은 비교적 큰 크기의 스페이서가 도착되고, 상기 스페이서 분사용 노즐(5)과 먼 부분은 비교적 크기가작은 스페이서가 도착될 수 있다. 이를 보완하기 위해 기판(3)이 고정용 스테이지를 산포 작업 진행 중 회전시킨다.That is, a spacer of a relatively large size may arrive at a portion close to the jetting nozzle 5 on the substrate 3, and a spacer of a relatively small size may arrive at a portion far from the spacer jetting nozzle 5. To compensate for this, the substrate 3 rotates the fixing stage during the spreading operation.
도 3은 본 발명의 다른 실시예에 의한 액정표시소자 제조용 스페이서 산포기의 내부 단면도이다. 도 4는 본 발명의 다른 실시예에 의한 액정표시소자 제조용 스페이서 산포기의 내부 평면도이다.3 is an internal cross-sectional view of a spacer spreader for manufacturing a liquid crystal display device according to another embodiment of the present invention. 4 is a plan view illustrating an interior of a spacer spreader for manufacturing a liquid crystal display device according to another exemplary embodiment of the present invention.
또한, 스페이서 분포의 균일도를 높이기 위한 방법으로서, 도 3과 도 4에 도시된 바와 같이, 기판 고정용 스테이지(2)를 회전시키면서 스페이서 분사용 노즐(5)을 좌,우 양측 혹은 전,후 좌우 네 방향의 측벽에 위치시킨다.In addition, as a method for increasing the uniformity of the spacer distribution, as shown in Figs. 3 and 4, while rotating the substrate fixing stage (2), the left and right sides of the spacer injection nozzle (5) or before and after left and right It is located on the side wall in four directions.
따라서, 산포기챔버 내부 측면에 설치된 스페이서 분사용 노즐(5)을 통해 기체를 분사시켜 액정 표시소자에서 상부기판과 하부 기판의 두 기판 사이의 갭을 일정하게 유지하는 스페이서가 뭉쳐진 덩어리가 산포 작업 중 기판에 떨어지지 않도록 하여 스페리서 뭉침에 의한 액정표시소자의 불량을 억제할 수 있다.Therefore, the gas is sprayed through the spacer spray nozzles 5 disposed on the inner side of the spreader chamber, so that the spacers that hold the gap between the two substrates of the upper substrate and the lower substrate in the liquid crystal display device are agglomerated. By not falling on the substrate, it is possible to suppress the defect of the liquid crystal display device due to the aggregation of the spacers.
상술한 바와 같이, 본 발명에 따른 액정표시소자 제조용 스페이서 산포기는 산포기 챔버 내부 측면에 설치된 산포용 노즐을 통해 기체를 분사시킴으로써 액정 표시소자에서 두 장의 기판 사이의 갭을 일정하게 유지하기 위해 사용되는 스페이서가 뭉쳐진 덩어리가 산포 작업 중 기판에 떨어지지 않게 함으로써 스페리서 뭉침에 의한 액정표시소자의 불량을 억제하는 효과가 있다.As described above, the spacer spreader for manufacturing a liquid crystal display device according to the present invention is used to maintain a gap between two substrates in a liquid crystal display by spraying gas through a spray nozzle installed on an inner side of the spreader chamber. By preventing the agglomerated mass of the spacers from falling on the substrate during the scattering operation, there is an effect of suppressing the defect of the liquid crystal display device due to the agglomeration of the sparger.
또한, 스페이서의 질량 차이를 이용한 방법으로 스페이서의 품질 등급이 낮은 즉, 스페이서의 크기가 비교적 불균일한 경우에도 동일한 효과를 발휘할 수 있어 스페이서의 크기를 미세하게 정제하지 않아도 되므로 스페이서 제조시의 원가도 절감할 수 있다.In addition, by using the difference in the mass of the spacer, the same effect can be achieved even if the spacer is of low quality, that is, the size of the spacer is relatively non-uniform. can do.
Claims (4)
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KR1020000086128A KR20020056723A (en) | 2000-12-29 | 2000-12-29 | Spacer dispenser for manufacturing Liquid Crystal Display |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133433A (en) * | 1981-02-12 | 1982-08-18 | Toshiba Corp | Production for liquid crystal display device |
JPH01187533A (en) * | 1988-01-21 | 1989-07-26 | Sharp Corp | Spacer scattering device for liquid crystal display panel |
KR970071082A (en) * | 1996-04-24 | 1997-11-07 | 엄길용 | How to Spacer Spatter on LCD Cell Surface |
KR19980020162A (en) * | 1996-09-05 | 1998-06-25 | 엄길용 | Reflective scattering device of liquid crystal display device |
-
2000
- 2000-12-29 KR KR1020000086128A patent/KR20020056723A/en not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133433A (en) * | 1981-02-12 | 1982-08-18 | Toshiba Corp | Production for liquid crystal display device |
JPH01187533A (en) * | 1988-01-21 | 1989-07-26 | Sharp Corp | Spacer scattering device for liquid crystal display panel |
KR970071082A (en) * | 1996-04-24 | 1997-11-07 | 엄길용 | How to Spacer Spatter on LCD Cell Surface |
KR19980020162A (en) * | 1996-09-05 | 1998-06-25 | 엄길용 | Reflective scattering device of liquid crystal display device |
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