KR200160564Y1 - Tray-stocker for handler system - Google Patents

Tray-stocker for handler system Download PDF

Info

Publication number
KR200160564Y1
KR200160564Y1 KR2019970005622U KR19970005622U KR200160564Y1 KR 200160564 Y1 KR200160564 Y1 KR 200160564Y1 KR 2019970005622 U KR2019970005622 U KR 2019970005622U KR 19970005622 U KR19970005622 U KR 19970005622U KR 200160564 Y1 KR200160564 Y1 KR 200160564Y1
Authority
KR
South Korea
Prior art keywords
stocker
tray
handler system
handler
Prior art date
Application number
KR2019970005622U
Other languages
Korean (ko)
Other versions
KR19980061392U (en
Inventor
Tae-Heung Gu
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority to KR2019970005622U priority Critical patent/KR200160564Y1/en
Publication of KR19980061392U publication Critical patent/KR19980061392U/en
Application granted granted Critical
Publication of KR200160564Y1 publication Critical patent/KR200160564Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
KR2019970005622U 1997-03-25 1997-03-25 Tray-stocker for handler system KR200160564Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019970005622U KR200160564Y1 (en) 1997-03-25 1997-03-25 Tray-stocker for handler system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019970005622U KR200160564Y1 (en) 1997-03-25 1997-03-25 Tray-stocker for handler system

Publications (2)

Publication Number Publication Date
KR19980061392U KR19980061392U (en) 1998-11-05
KR200160564Y1 true KR200160564Y1 (en) 1999-11-15

Family

ID=19497810

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019970005622U KR200160564Y1 (en) 1997-03-25 1997-03-25 Tray-stocker for handler system

Country Status (1)

Country Link
KR (1) KR200160564Y1 (en)

Also Published As

Publication number Publication date
KR19980061392U (en) 1998-11-05

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