KR200152642Y1 - Discarding apparatus of filter assembly - Google Patents
Discarding apparatus of filter assembly Download PDFInfo
- Publication number
- KR200152642Y1 KR200152642Y1 KR2019960049023U KR19960049023U KR200152642Y1 KR 200152642 Y1 KR200152642 Y1 KR 200152642Y1 KR 2019960049023 U KR2019960049023 U KR 2019960049023U KR 19960049023 U KR19960049023 U KR 19960049023U KR 200152642 Y1 KR200152642 Y1 KR 200152642Y1
- Authority
- KR
- South Korea
- Prior art keywords
- filter
- solvent
- storage tank
- tank
- waste
- Prior art date
Links
- 239000002904 solvent Substances 0.000 claims abstract description 59
- 239000002699 waste material Substances 0.000 claims abstract description 24
- 239000000126 substance Substances 0.000 claims abstract description 19
- 238000011282 treatment Methods 0.000 claims description 40
- 239000007788 liquid Substances 0.000 claims description 27
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 10
- 230000002265 prevention Effects 0.000 abstract 1
- 239000007921 spray Substances 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
- B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
- B09B5/00—Operations not covered by a single other subclass or by a single other group in this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
케미컬이 여과된 필터를 수거하여 폐기시키는 본 고안의 필터폐기장치는 케미컬이 잔재된 필터를 여러차례 신나 등의 용제로 처리하여 필터에서 케미컬 성분을 제거시킨 후, 공정중에 배기되는 케미컬과 용제를 배기관을 통하여 폐기물탱크에 저장시키어 한꺼번에 폐기물 수거가 가능하고, 또한 케미컬이 제거된 필터는 한꺼번에 폐기처분시킴으로써 분리수거에 용이하다.The filter waste device of the present invention, which collects and discards the filtered chemical filter, removes the chemical component from the filter by treating the filter with residual chemicals several times with a solvent such as a thinner, and then exhausts the chemicals and solvents exhausted during the process through an exhaust pipe. Waste can be collected at once by storing in the waste tank, and the chemical-removed filter is easily disposed of at once by disposing at once.
따라서, 본 고안의 필터폐기장치에서는 폐기물 방출에 의해 환경이 오염방지에 적합하다.Therefore, in the filter waste device of the present invention, the environment is suitable for pollution prevention by waste discharge.
Description
제1도는 본 고안의 필터폐기장치의 개략도이다.1 is a schematic view of the filter waste device of the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
10 : 필터투여구 11 : 필터보관조10: filter administration port 11: filter storage
12, 12-1 : 가이드 13, 13-1 : 에어실린더12, 12-1: guide 13, 13-1: air cylinder
14 : 용제처리조 15 : 부배기관14: solvent treatment tank 15: auxiliary pipe
16 : 수위감지센서봉 17 : 필터저장조16: level sensor rod 17: filter reservoir
17-1 : 홀 18 : 노즐17-1: hole 18: nozzle
18-1 : 분사홀 19 : 용제투여구18-1: injection hole 19: solvent injection port
20 : 레귤레이터 21 : 주배기관20: regulator 21: main exhaust pipe
22 : 폐기물탱크22: waste tank
본 고안은 폐기된 필터폐기장치에 관한 것으로, 특히 트랙장비에서 필터를 교환한 후, 폐기된 필터를 수거하기에 적당한 필터폐기장치에 관한 것이다.The present invention relates to a discarded filter waste device, and more particularly, to a filter waste device suitable for collecting the discarded filter after replacing the filter in the track equipment.
세정장치 또는 식각장치에는 처리조 내에 흘러넘치는 처리액을 재순환시키어 다시 처리조 내로 보내어 재사용하는데, 이때 순환되는 처리액은 필터에 의해 이물등을 필터링시킨 후 다시 사용하였다.The washing apparatus or the etching apparatus recycles the processing liquid overflowing in the treatment tank and sends it back to the treatment tank for reuse. At this time, the circulating treatment liquid is used again after filtering foreign matters by the filter.
이러한 반복된 필터링과정을 거치는 동안 필터를 교환해 주어야 하며, 교환된 필터는 수거하여 폐기하여야 한다.The filter must be replaced during this repeated filtering process, and the replaced filter must be collected and discarded.
그리고 이러한 케미컬 성분이 잔재되어 있는 필터는 다른 일반폐기물과 분리하여 수거하게끔 되어 있다.In addition, the filter in which these chemical components remain is to be collected separately from other general wastes.
그러나 종래에는 폐기된 필터를 수거하는 별도의 장치가 없이 일반적으로 비닐등에 싸서 버리거나 또는 일반폐기물과 함께 버렸다.However, conventionally, without a separate device for collecting the discarded filter, it is generally wrapped in vinyl or discarded together with general waste.
따라서 필터를 비닐에 싸서 버리는 경우에는 필터에 남아있는 케미컬 성분에 의해 비닐이 용해되며, 이러한 케미컬이 작업자의 손등에 묻게 되면 인체에 손상을 입게되며, 또한 일반폐기물과 함께 버리는 경우 폐기장에서 다시 분리수거해야 하는 번거로움이 발생된다.Therefore, when the filter is wrapped in vinyl, the vinyl is dissolved by the chemicals remaining in the filter, and if the chemical gets on the back of the worker's hand, it causes damage to the human body. Hassle to do.
본 고안은 이러한 문제점을 해결하고자 안출된 것으로, 폐기된 필터의 수거에 용이한 필터폐기장치를 목적으로 한다.The present invention has been made to solve this problem, it is an object of the filter disposal device for easy collection of discarded filters.
케미컬을 여과시킨 필터를 수거하여 폐기시키는 본 고안의 필터폐기장치는 상기와 같은 목적을 달성하고자, 케미컬이 잔재된 필터를 여러차례 용제처리하여 필터로부터 케미컬을 제거시킨 후, 공정중에 배기되는 케미컬과 용제를 배기관을 통하여 폐기물탱크에 저장시키어 한꺼번에 수거가능하고 또한 케미컬이 제거된 필터는 한꺼번에 폐기처분시킴으로써 분리수거에 용이하다.In order to achieve the above object, the filter waste device of the present invention for collecting and discarding the filtered filter filter removes the chemical from the filter by several solvent treatments of the residual filter filter, and then removes the chemicals and solvents exhausted during the process. The filter can be collected at once by storing it in a waste tank through an exhaust pipe, and the chemical-removed filter is easily disposed of at once by disposing at once.
제1도는 본 고안의 필터폐기장치의 단면도로, 이하 첨부된 도면을 참조하여 설명하겠다.1 is a cross-sectional view of the filter waste device of the present invention, will be described with reference to the accompanying drawings.
케미컬이 필터링된 필터를 수거하여 폐기시키는 본 고안의 필터폐기장치는 제1도와 같이, 일측에 형성되어, 필터가 투여되는 필터투여구(10)와, 필터투여구를 통하여 운반된 필터가 보관되는 필터보관조(11)와, 필터보관조를 상하방향으로 이송시키는 이송수단(12)(13)과, 이송수단에 의해 필터보관조가 인입되어 내부에 담겨진 용제에 의해 필터 내의 케미컬 성분을 용해시키는 용제처리조(14)와, 용제처리조 하부에 설치되어, 개폐밸브(15-1)가 형성된 부배기관(15)과, 용제처리조 내에 설치되어, 내부로 공급되는 용제의 수위가 감지되는 수위감지센서봉(16)과, 케미컬 성분이 제거된 필터가 운반되어 저장되는 필터저장조(17)와, 필터저장조에 저장된 필터에 용제를 공급하여 필터저장조 내의 오염을 방지하는 용제분사수단(18)(18-1)과, 일측에 형성되어, 용제처리조와 용제저장조에 용제를 공급시키는 용제투여구(19)와, 용제투여구에 설치되어, 공급되는 용제의 압력을 조절시키는 레귤레이터(20)와, 부배기관과 연결되며. 용제처리조와 필터저장조 내의 케미컬과 용제등의 배기액이 배기되는 주배기관(21)과, 주배기관과 연결되어, 주배기관으로부터 배기되는 처리액 및 용제를 임시저장시키는 배기물탱크(22)로 구성된다.The filter waste device of the present invention for collecting and discarding the chemical filtered filter is formed on one side, as shown in FIG. 1, and the filter administration port 10 through which the filter is administered and the filter carried through the filter administration port are stored. Solvent treatment for dissolving the chemical component in the filter by the storage tank 11, the conveying means 12 and 13 for conveying the filter storage tank in the vertical direction, and the solvent contained in the filter storage tank by the conveying means. Water level sensor installed in the tank 14, the lower part of the solvent treatment tank, the sub-pipe 15 with the on-off valve 15-1 is formed, and installed in the solvent treatment tank, the level of the solvent supplied to the inside is sensed The rod 16, the filter reservoir 17 in which the filter from which the chemical component has been removed is transported and stored, and the solvent injection means 18 (18-18) which supplies a solvent to the filter stored in the filter reservoir to prevent contamination in the filter reservoir. 1) and is formed on one side, solvent And a solvent separation tank is installed in the storage tank for supplying the solvent to the solvent administration opening 19 and a solvent administration sphere, and regulator 20 for adjusting the pressure of the solvent to be supplied, is connected with the exhaust pipe unit. It consists of a main exhaust pipe 21 through which exhaust liquids such as chemicals and solvents in the solvent treatment tank and the filter storage tank are exhausted, and an exhaust tank 22 which is connected to the main exhaust pipe and temporarily stores the processing liquid and the solvent exhausted from the main exhaust pipe. do.
이때, 이송수단으로는 필터보관조(11)의 양측에 각각 연결설치된 가이드(12)와, 가이드를 상하방향으로 구동시키는 각각의 에어실린더(13)를 갖는다.At this time, the transfer means has a guide 12 connected to each side of the filter storage tank 11, and each air cylinder 13 for driving the guide in the vertical direction.
그리고 용제분사수단으로는 노즐이 사용되는데, 이때 노즐(18)의 표면에는 다수의 분사홀(18-1)이 형성되어 분사홀을 통하여 용제가 분사되도록 한다.In addition, a nozzle is used as the solvent spraying means, and a plurality of spray holes 18-1 are formed on the surface of the nozzle 18 so that the solvent is sprayed through the spray holes.
일반적으로 세정 또는 식각공정이 진행되는 처리조 내의 처리액(또는 케미컬)은 처리조 벽을 타고 홀러 넘치어 배기되면서 필터에 의해 이물이 필터링된 후, 처리조 내로 재순환된다.In general, the treatment liquid (or chemical) in the treatment tank in which the cleaning or etching process is performed is overflowed through the treatment tank wall, and the foreign matter is filtered by the filter, and then recycled into the treatment tank.
이러한 과정을 여러번 거친 후, 필터는 다른 새것의 필터와 교환되어 수거된다.After this process several times, the filter is collected for exchange with another new filter.
그리고 수거된 필터는 처리액이 다량 함유되어 있으며, 이러한 처리액은 보통 독성을 갖으며, 따라서 필터에서 처리액 성분을 제거한 후 필터를 폐기시켜야 한다.In addition, the collected filter contains a large amount of the treatment liquid, and the treatment liquid is usually toxic, so the filter must be discarded after removing the treatment liquid component from the filter.
본 고안의 필터폐기장치를 통하여 수거된 필터가 폐기되는 과정을 알아보면 다음과 같다.The process of discarding the filter collected through the filter waste device of the present invention is as follows.
우선, 처리액 성분이 다량 잔재된 필터는 필터투여구에 인입되어 필터보관조(11)에 적재시키며, 필터가 여러 장 수거되면 에어실린더(13)에 에어를 공급하여 가이드(14)를 하방향으로 다운시킴에 따라 필터보관조도 함께 다운되면서 용제처리조(14)에 하부로 인입되며, 인입위치는 수위감지센서봉(16)에 표기된 적정수위선까지 필터보관조를 다운시킨다.First, the filter containing a large amount of the treatment liquid component is introduced into the filter administration port and loaded into the filter storage tank 11, and when several filters are collected, air is supplied to the air cylinder 13 to guide the guide 14 downward. As it is down, the filter storage tank is also pulled down into the solvent treatment tank 14 while being pulled down, and the insertion position lowers the filter storage tank to the appropriate level line indicated on the water level sensor rod 16.
이때, 용제투여구(19)를 통하여 용제처리조 내로 용제(보통 신나등을 사용한다.)를 공급시키는데, 용제투여구에는 레귤레이터(20)가 설치되어 공급되는 용제의 압력을 조절시키며, 용제처리조(14)는 그 내부에 설치된 수위감지 센서봉(16)에 의해 공급되는 용제의 수위를 감지하여 신호로써 알린다.At this time, a solvent (usually thinner is used) is supplied to the solvent treatment tank through the solvent injection port 19. The solvent injection port is provided with a regulator 20 to adjust the pressure of the solvent supplied, and the solvent treatment. The tank 14 detects the water level of the solvent supplied by the water level sensor rod 16 installed therein and informs it by a signal.
따라서 용제처리조(14)에 설치된 수위감지센서봉(16)에 의해 적정한 수위까지 용제가 공급됨에 따라, 필터보관조(11) 내에 적재되어, 처리액이 다량 잔재된 필터가 용제에 의해 용해되면서 필터로부터 처리액이 제거된다.Therefore, as the solvent is supplied to the proper water level by the water level sensor rod 16 installed in the solvent treatment tank 14, the filter loaded in the filter storage tank 11, and a large amount of the remaining treatment liquid is dissolved by the solvent. The treatment liquid is removed from the filter.
그런 후, 일정시간이 경과되면 용제처리조 하부에 설치된 부배기관(15)에 설치된 개폐밸브(15-1)가 온되면서 용제및 처리액 등의 배기액이 배기된다.Then, when a predetermined time has elapsed, the on-off valve 15-1 provided in the sub-exhaust pipe 15 provided under the solvent treatment tank is turned on, and exhaust liquid such as solvent and treatment liquid is exhausted.
이어서 용제처리조 내의 배기액의 배기가 완료된 후, 개폐밸브를 오프시키고 다시 용제투여구를 통하여 용제처리조(14) 내에 용제를 공급한다.Subsequently, after the exhaust of the exhaust liquid in the solvent treatment tank is completed, the on / off valve is turned off and the solvent is supplied into the solvent treatment tank 14 again through the solvent injection port.
그리고 용제가 용제처리조 내로 일정수위에 다다르게 되면 공급을 차단시키고 다시 한 번 필터 내의 처리액을 제거과정을 거친 후, 개폐밸브를 오픈하여 배기시킨다.When the solvent reaches a predetermined level in the solvent treatment tank, the supply is shut off, and once again, the process liquid in the filter is removed, and then the open / close valve is exhausted.
이러한 과정을 3 내지 4번 반복하여 실시한 후, 에어실린더의 구동으로 가이드(12)가 상방향으로 업되며, 가이드와 연결된 필터보관조(11)는 업동작된다.After repeating this process 3 to 4 times, the guide 12 is moved upward by the driving of the air cylinder, and the filter storage tank 11 connected with the guide is operated up.
그런 후, 필터저장조(17)에서 먼쪽의 에어실린더(13-1)를 구동시키어 한 방향의 가이드(12-1)만를 업동작시키며, 한 방향의 가이드에 연결된 필터보관조(11)가 함께 업동작된다.Then, the air cylinder 13-1 far from the filter reservoir 17 is driven to operate only the guide 12-1 in one direction, and the filter storage tank 11 connected to the guide in one direction is lifted up together. It works.
따라서 필터보관조(11)는 일측에 경사가 형성되어 내부에 보관된 필터가 필터저장조(17) 내로 낙하된다.Therefore, the filter storage tank 11 has a slope formed on one side so that the filter stored therein is dropped into the filter storage tank 17.
이어서 필터저장조(17) 내로 낙하된 필터는 필터저장조 상부에 형성된 용제분사수단으로부터 용제를 분사시키어서, 필터에 잔재된 처리액에 의해 필터저장조가 오염됨을 방지하고 또한 표면과 표면끼리 서로 부착된 필터를 떼어낸다.Subsequently, the filter dropped into the filter reservoir 17 sprays the solvent from the solvent spray means formed on the upper portion of the filter reservoir, thereby preventing the filter reservoir from being contaminated by the treatment liquid remaining in the filter, and also allowing the surface and the surfaces to adhere to each other. Take off.
이때 용제분사수단은 노즐(18)로 형성되어. 표면에 형성된 다수의 분사홀(18-1)을 통하여 용제를 분사시킨다.At this time, the solvent spraying means is formed by the nozzle 18. The solvent is injected through the plurality of injection holes 18-1 formed on the surface.
또한, 필터저장조(17)의 하부 표면에는 다수의 홀(17-1)이 형성되어져서 처리액 및 용제가 자연배기되도록 하며, 이러한 자연배기액은 폐기물탱크에 임시보관되어 일정수위에 이르면 한꺼번에 수거된다.In addition, a plurality of holes 17-1 are formed in the lower surface of the filter storage tank 17 to allow the treatment liquid and the solvent to be naturally discharged. Such natural exhaust liquid is temporarily stored in the waste tank and collected at once when the water level is reached. do.
이와 같은 과정을 거치면서 본 고안의 필터폐기장치는 필터 내에 다량 잔재된 처리액을 제거시킨 후, 필터를 폐기시키고, 공정 중에 사용되어진 처리액과 신나등의 배기액은 폐기물탱크에 수거된다.Through such a process, the filter waste device of the present invention removes a large amount of the treatment liquid remaining in the filter, and then discards the filter, and the exhaust liquid such as the treatment liquid and the thinner used in the process is collected in the waste tank.
상기에서 살펴본 바와 같이, 본 고안의 장치는 필터 내에 잔재된 케미컬 등의 처리액의 제거가 용이하며, 또한 처리액을 제거시킨 후, 필터를 폐기시킴에 따라 환경오염을 방지한다.As described above, the apparatus of the present invention facilitates the removal of the treatment liquid such as chemical residues remaining in the filter, and also prevents environmental pollution by disposing the filter after removing the treatment liquid.
또한, 필터내의 처리액은 처리액과 함께 주배기관을 통하여 폐기물탱크로 배기시키므로 폐기물 분리하기에 편리하다.In addition, the treatment liquid in the filter is exhausted to the waste tank through the main exhaust pipe together with the treatment liquid, which is convenient for waste separation.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019960049023U KR200152642Y1 (en) | 1996-12-13 | 1996-12-13 | Discarding apparatus of filter assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019960049023U KR200152642Y1 (en) | 1996-12-13 | 1996-12-13 | Discarding apparatus of filter assembly |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19980036034U KR19980036034U (en) | 1998-09-15 |
| KR200152642Y1 true KR200152642Y1 (en) | 1999-07-15 |
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ID=19479220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019960049023U KR200152642Y1 (en) | 1996-12-13 | 1996-12-13 | Discarding apparatus of filter assembly |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200152642Y1 (en) |
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1996
- 1996-12-13 KR KR2019960049023U patent/KR200152642Y1/en not_active IP Right Cessation
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| Publication number | Publication date |
|---|---|
| KR19980036034U (en) | 1998-09-15 |
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