KR101839462B1 - Micro electrowetting varifocal liquid lens array and method for injecting fluid in the same - Google Patents

Micro electrowetting varifocal liquid lens array and method for injecting fluid in the same Download PDF

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KR101839462B1
KR101839462B1 KR1020150157552A KR20150157552A KR101839462B1 KR 101839462 B1 KR101839462 B1 KR 101839462B1 KR 1020150157552 A KR1020150157552 A KR 1020150157552A KR 20150157552 A KR20150157552 A KR 20150157552A KR 101839462 B1 KR101839462 B1 KR 101839462B1
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South Korea
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fluid
chamber
chambers
transparent electrode
electrode pattern
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KR1020150157552A
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Korean (ko)
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KR20170054870A (en
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원용협
이진수
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한국과학기술원
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/115—Electrowetting

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

A microelectronic wetted liquid lens array and a fluid injection method in the array are disclosed.
The array comprising: a lower glass having a plurality of chambers arranged in a matrix and filled with a first fluid and a second fluid that do not mix with each other, and a first transparent electrode pattern for supplying power to the chambers; And a second transparent electrode pattern for supplying power to the plurality of chambers, and an upper glass which is covered on the lower glass to seal the plurality of chambers. At this time, the first fluid and the second fluid are injected into the plurality of chambers by using evaporation acid.

Description

≪ Desc / Clms Page number 1 > MICROELECTRIC LIQUID LENS ARRAY AND METHOD FOR INJECTING FLUID IN THE SAME < RTI ID = 0.0 >

The present invention relates to a micro electro-wetted liquid lens array and a fluid injection method in the array.

In recent years, variable focus lenses have become essential components in various industrial fields. For example, it has become a core part in many fields such as semiconductor processing, three-dimensional display, nano microscope, optical logic device, optical signal processing device.

Particularly, a liquid type variable focus lens array using electrowetting is disclosed in Korean Patent Laid-Open No. 10-2005-7021247.

Electro wetting phenomenon can change the contact angle of water and hydrophobic film when voltage is applied to water and electrode when water is present on electrode coated with hydrophobic film and insulating film, and it can serve as display, lens and actuator. At this time, the lens can be adjusted to diopter by changing the contact angle between the two fluids and the hydrophobic film depending on the voltage, in which water and oil are injected into the cylindrical hole. Here, other combinations are possible which can lead to electrowetting rather than a combination of water and oil.

On the other hand, it is difficult to generate and separate electrodes on the inner surface of a vertical cylindrical hole of several hundreds or tens of microseconds through the conventional process, and the profile of the electrode, insulating film and hydrophobic film formed through vapor deposition is uniformly formed inside the wall surface There is a difficulty of things. In addition, uniform injection of liquid into a hole of a cylindrical shape having a size of several tens of microns has been limited by the various injection methods proposed so far and has become a hindrance to commercialization.

Methods of injecting liquid into a space having a conventional micro size have been such as injection using a microsyringe or injection using a capillary phenomenon. However, in order to inject two liquids having different properties rather than a single liquid, problems such as bubbles and leaks have been caused due to differences in properties of the surface of the structure to be injected. In particular, when two liquids having different properties are injected into a microcylindrical hole having a large vertical and horizontal ratio without bubbling, it is necessary to use a nano-liter liquid injection precision so that the injection is slow and expensive.

On the other hand, there are an active matrix type and a passive matrix type display driving method, and many commercial displays are driven by adoption of a passive matrix. However, as mentioned above, in the process of making vertical cylindrical holes of several tens to several hundreds of microns that can contain liquid in a variable-type liquid lens array and the difficulty of producing and separating electrodes on the inner surface, It is difficult to apply to a lens array.

SUMMARY OF THE INVENTION The present invention provides a micro electro-wetted liquid lens array and a method of injecting fluid in the array, wherein the fluid can be easily injected into a hole of several tens of micro-

A micro electro-wetted liquid lens array according to one aspect of the present invention,

A lower substrate of a transparent material having a plurality of chambers arranged in a matrix and filled with a first fluid and a second fluid that do not mix with each other and a first transparent electrode pattern for supplying power to the plurality of chambers; And a substrate on an upper portion of the transparent material, wherein the second transparent electrode pattern is formed to supply power to the plurality of chambers and is covered on the lower substrate to seal the plurality of chambers, Characterized in that the fluid is injected into the plurality of chambers using an evaporation acid.

Here, the first fluid and the second fluid are injected in such a manner that the volume of each fluid is controlled through the evapotranspiration which is generated by heating the fluid to the boiling point of the fluid in a state of being filled in the plurality of chambers.

Further, the first fluid is injected into the plurality of chambers by using the evaporation acid, and then the second fluid is injected into the plurality of chambers by using the evaporation acid over the first fluid.

Also, the boiling point of the second fluid is lower than the boiling point of the first fluid.

The upper substrate and the lower substrate are sealed so that the first transparent electrode pattern and the second transparent electrode pattern are arranged in a vertical line form with a horizontal line with respect to the plurality of chambers, And an alternate voltage is applied to the plurality of chambers through the second transparent electrode pattern to perform individual driving by passive matrix driving.

The chamber may further include an insulating layer for preventing a leakage current caused by a low resistance of the silicon wafer; A transparent electrode laminated on the insulating layer and connected to the first transparent electrode pattern; An insulating layer which is laminated on the transparent electrode and prevents an electric short-circuit due to a penetration phenomenon caused by electro-wetting of the fluid; And a hydrophobic film laminated on the insulating film and controlling the contact angle of the first fluid and the second fluid.

Further, the transparent electrode is characterized in that it is patterned in each chamber so that the holes of each of the chambers are separated from each other.

According to another aspect of the present invention,

CLAIMS What is claimed is: 1. A method of injecting a fluid into a chamber of a microelectronic wetted liquid lens array, comprising: filling a first fluid within the chamber; Heating the chamber to regulate the volume of the first fluid through the evaporation acid; Filling a first fluid in the chamber with a second fluid that is not mixed with the first fluid; And adjusting the volume of the second fluid through the evaporation acid by heating the chamber.

Here, in the step of filling the first fluid, the chamber is left inside the vacuum chamber for a predetermined time to remove minute bubbles present in the chamber.

Further, in the step of controlling the volume of the first fluid, the chamber is heated to reach the boiling point of the first fluid, and the heating temperature is higher than the melting point of the transparent electrode, the insulating film and the hydrophobic film formed in the chamber And is adjusted within a range that does not allow the operation of the motor.

In addition, in filling the second fluid in the chamber with the first fluid, the chamber in which the first fluid is contained is slowly inserted into the water tank filled with the second fluid so that the surface tension of the first fluid And bubbles and the second fluid are injected evenly into the chamber without leaving the chamber out of the chamber.

Heating the chamber to reach the boiling point of the second fluid at the step of adjusting the volume of the second fluid, wherein the boiling point of the second fluid is lower than the boiling point of the first fluid .

Further, volume control of the second fluid is performed until the second fluid fills the chamber.

According to the present invention, by using the method of injecting an evapotranspiration liquid, which is a method of heating the first fluid and the second fluid injected into the silicon through-hole chamber and controlling the respective volumes through the evapotranspiration, Fluids can be easily injected into holes of tens of micro-or less.

Therefore, a new low-cost optical system can be produced by injecting a liquid into a hole of several tens of micro- For example, it is possible to implement an integrated image display and a volumetric 3D display in combination with a three-dimensional display, and it is applicable to a high-performance optical signal processing, a microscope, and the like.

In addition, by enabling the transparent electrode patterns to be driven in a passive matrix manner, it is possible to manufacture a novel concept variable focus liquid lens array optical element that operates individually.

1 is a schematic diagram of a microelectronic wetted liquid lens array according to an embodiment of the present invention.
2 is a view showing a concrete example of the lower glass shown in Fig.
FIG. 3 is a view showing the upper glass shown in FIG. 1 in detail.
FIG. 4 is a cross-sectional view of the silicon-through-hole chamber shown in FIG. 1. FIG.
5 is a view illustrating a process of filling a silicon through-hole chamber with a first fluid in a fluid injection method according to an embodiment of the present invention.
FIG. 6 is a view illustrating a process of adjusting the volume of a first fluid by heating a first fluid in the fluid injection method according to an embodiment of the present invention to conduct an evapotranspiration.
7 is a view illustrating a process of filling a silicon through-hole chamber with a second fluid in the fluid injection method according to the embodiment of the present invention.
8 is a view illustrating a volume control process of a second fluid by heating a second fluid in the fluid injection method according to an embodiment of the present invention
FIG. 9 is a diagram showing the result after filling the silicon-containing chamber with the first fluid and the second fluid according to the fluid injection method according to the embodiment of the present invention.
10 is a view showing a state in which the upper glass is sealed after the first fluid and the second fluid are filled in the silicon through-hole chamber according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise. Also, the terms " part, "" module," and " module ", etc. in the specification mean a unit for processing at least one function or operation and may be implemented by hardware or software or a combination of hardware and software have.

Hereinafter, a micro electro-wetted liquid lens array according to an embodiment of the present invention will be described with reference to the drawings.

1 is a schematic diagram of a microelectronic wetted liquid lens array according to an embodiment of the present invention.

1, a micro electro-wetted liquid lens array 10 according to an embodiment of the present invention includes upper and lower substrates of a transparent material, Regions are formed so as to be overlapped to overlap each other.

The lower glass 105 includes a plurality of silicon-through-hole chambers 100 and a first transparent electrode pattern 101, as shown in FIG. Here, each of the plurality of silicon-through-hole chambers 100 constitutes a variable-type liquid lens, and is filled with two fluids, for example, oil and water.

The plurality of silicon-through-hole chambers 100 are arranged in a matrix, i.e., in the horizontal and vertical directions, as one embodiment. The silicon-through-hole chamber 100 will be described in detail later.

The first transparent electrode pattern 101 is patterned to be connected to each of the plurality of silicon through-hole chambers 100 such that an external power source is supplied to each of the plurality of silicon-through-hole chambers 100. The first transparent electrode pattern 101 differs depending on the size of the silicon through-hole chamber 100 and the space between the electrodes.

On the other hand, the upper glass 106 includes a second transparent electrode pattern 107, as shown in Fig. The second transparent electrode pattern 107 is formed on each of the plurality of silicon through-hole chambers 100 formed in the lower glass 105 when the upper glass 106 is covered on the lower glass plate 105 And is patterned on the upper glass 106 so as to supply power. This second transparent electrode pattern 107 also differs depending on the size of the silicon through-hole chamber 100 and the space between the electrodes, and the electrode pad portion is thickened, which can be advantageous for connection of the wires later.

Indium-thin oxide (ITO), indium zinc oxide (IZO), or the like can be used as the transparent electrode material forming the first transparent electrode pattern 101 and the second transparent electrode pattern 107.

4 is a cross-sectional view of the silicon-plated-through hole chamber 100 shown in FIG.

4, an insulating layer 102, a transparent electrode 108, an insulating film 103, and a hydrophobic film 104 are laminated on the silicon-plated-through hole chamber 100.

First, an insulating layer 102 is deposited closest to the silicon-through-hole chamber 100, which is intended to prevent leakage current due to low resistance of the silicon wafer. As the insulating layer 102, a general insulating material such as SiO 2 or SiN may be used.

Next, a transparent electrode 108 is patterned and formed on the insulating layer 102. For example, the transparent electrode 108 is patterned along the vertical lines of a plurality of silicon-through-hole chambers 100 formed in the lower glass 105, and the silicon-through-holes and the holes are separately formed.

The transparent electrode 108 may be formed of the same material as that of the first transparent electrode pattern 101. Alternatively, the transparent electrode 108 may be patterned with a metal such as aluminum, gold, or silver when the silicon-

The structure of the transparent electrode 108 may be patterned differently depending on the driving method and purpose of the micro electro-wetted liquid lens array according to the embodiment of the present invention.

The transparent electrode 108 may be connected to the first transparent electrode pattern 101 formed on the lower glass 105 to receive external power.

An insulating film 103 is deposited on the transparent electrode 108 and used to prevent an electrical short circuit due to penetration phenomenon caused by electro-wetting of water. As the insulating film 103, a material such as Al 2 O 3 , SiO 2 , and Parylene may be used.

This insulating film 103 may be deposited in a single layer or an intersection along the transparent electrode 108 to improve the lifetime of the micro electro-wetted liquid lens array according to the embodiment of the present invention.

The hydrophobic film 104 is deposited on the insulating film 103 and controls the contact angle of the fluids filled in the silicon through holes to make the initial shape of the micro electro-wetted liquid lens array according to the embodiment of the present invention a concave lens . Depending on the nature of the hydrophobic film 104, the diopter of the concave lens is determined and, as a result, the performance of the microelectronic wetted liquid lens array according to an embodiment of the present invention is determined.

In order to inject two fluids into each hole, the silicon-through-hole chamber 100 needs to be controlled at a level of nanoliter.

Hereinafter, two fluid injection methods according to embodiments of the present invention will be described.

First, referring to FIG. 5, the first fluid 109 is filled in the holes of the silicon-through-hole chamber as shown in FIG. At this time, the first fluid may be an oil, and a known method may be used for filling the hole of the silicon through-hole chamber with the first fluid.

When the first fluid is filled in the holes of the silicon through-hole chamber, a process of leaving a certain time in the vacuum chamber to remove minute bubbles present in the holes of the silicon through-hole chamber may be added.

Referring now to FIG. 6, the silicon through-hole chamber 100 filled with the first fluid 109 is heated through FIG. 5 to adjust the volume of the first fluid 109 through the evaporation acid.

This heating is continued until reaching the boiling point of the first fluid 109. At this time, the temperature does not exceed the melting point (phase temperature) of the transparent electrode 108, the insulating film 102, and the hydrophobic film 104 Lt; / RTI >

The first fluid 109 is evaporated to an appropriate level so that the ratio of the second fluid 110 to be filled on the first fluid 109 is approximately 1: 1.

Referring to FIG. 6, a second fluid 110, a second fluid 110, and a second fluid 110 are formed on the first fluid 109 in the holes of the silicon through-hole chamber 100 containing the first fluid 109, For example, water is filled.

In this case, when the glass 105 having the silicon through-hole chamber 100 in which the first fluid 109 is contained is slowly inserted into the water tank filled with the second fluid 110, the hydrophobic film 104, The surface tension between the first fluid 109 and the second fluid 109 can be uniformly injected into the entire surface of the silicon through hole chamber 100 without leaving the minute bubbles and the first fluid 109.

Referring to FIG. 8, the second fluid 110 is heated in the same manner as in FIG. 6 for adjusting the volume of the second fluid 110 injected through FIG. 7, The volume adjustment of the second fluid 110 is performed.

At this time, the second fluid 110 is selected as a material having a lower boiling point than the first fluid 109 to prevent the first fluid 109 from evaporating. For example, water, which is the second fluid 110, is a substance having a boiling point lower than that of the oil that is the first fluid 109, so that water, which is the second fluid 110, The oil as the first fluid 109 has a high boiling point, so that the volume change does not occur.

The heating as in FIG. 8 continues until the first fluid 109 and the second fluid 110 are filled in the silicon through-hole chamber 100 as shown in FIG.

10, the first transparent electrode pattern 107 and the second transparent electrode pattern 107 are formed in a state where the first fluid 109 and the second fluid 110 are filled in the silicon through-hole chamber 100, The upper glass 106 previously patterned along the horizontal line is sealed so as to cover the silicon-through-hole chamber 100 formed in the lower glass 105 to form a micro electro-wetted liquid lens array 10 can be manufactured.

The microelectronic wetted liquid lens array 10 thus manufactured has two lines in which the first transparent electrode pattern 101 and the second transparent electrode pattern 107 are divided into a vertical line and a horizontal line, And a silicon-through-hole chamber 100 filled with two fluids (109, 110) through a through-hole.

As described above, according to the embodiment of the present invention, the first fluid 109 and the second fluid 110 injected into the silicon-through-hole chamber 100 are heated to control the respective volumes through the evaporation, By using the injection method, the fluid can be easily injected into the holes of several tens of micro- or less without problems such as micro-bubbles and leakage.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It belongs to the scope of right.

Claims (13)

A lower substrate of a transparent material having a plurality of chambers arranged in a matrix and filled with a first fluid and a second fluid that do not mix with each other and a first transparent electrode pattern for supplying power to the plurality of chambers; And
And a substrate on an upper portion of the transparent material, wherein the second transparent electrode pattern is provided to supply power to the plurality of chambers and is covered on the lower substrate to seal the plurality of chambers,
Wherein the first fluid and the second fluid are injected into the plurality of chambers using an evaporation acid,
Wherein the first fluid is injected into the plurality of chambers by using evaporation acid, and then the second fluid is injected onto the first fluid, and the chamber in which the first fluid is contained in the water tank filled with the second fluid The surface tension of the first fluid causes the second fluid to be injected evenly over the first fluid in the chamber without leaving the minute bubbles and the first fluid out of the chamber
≪ / RTI > The method according to claim 1,
Characterized in that the first fluid and the second fluid are injected in such a manner that the volume of each fluid is controlled through the evapotranspiration generated by heating up to the boiling point of each fluid in the state of being filled in the plurality of chambers. Lens array. 3. The method of claim 2,
Wherein the second fluid is injected into the plurality of chambers using an evapotranspirator on the first fluid after the first fluid is injected into the plurality of chambers using an evapotranspiration. . The method of claim 3,
Wherein the boiling point of the second fluid is lower than the boiling point of the first fluid. The method according to claim 1,
The upper substrate and the lower substrate are sealed so that the first transparent electrode pattern and the second transparent electrode pattern are arranged in a vertical line form with a horizontal line with respect to the plurality of chambers,
An intersection voltage is applied to the plurality of chambers through the first transparent electrode pattern and the second transparent electrode pattern to perform individual driving by passive matrix driving
≪ / RTI > 6. The method according to any one of claims 1 to 5,
In the chamber,
An insulating layer for preventing a leakage current caused by a low resistance of the silicon wafer;
A transparent electrode laminated on the insulating layer and connected to the first transparent electrode pattern;
An insulating layer which is laminated on the transparent electrode and prevents an electric short-circuit due to a penetration phenomenon caused by electro-wetting of the fluid; And
A hydrophobic film stacked on the insulating film and controlling a contact angle of the first fluid and the second fluid,
Is formed on the surface of the micro-electro-wetted liquid lens array. The method according to claim 6,
Wherein the transparent electrode is patterned in each chamber so that the holes of each of the plurality of chambers are separated from each other. A method of injecting a fluid into a chamber of a microelectronic wetted liquid lens array,
Filling the chamber with a first fluid;
Heating the chamber to regulate the volume of the first fluid through the evaporation acid;
Filling a first fluid in the chamber with a second fluid that is not mixed with the first fluid; And
Heating the chamber to regulate the volume of the second fluid through the evapotranspiration
/ RTI >
In filling the second fluid over the first fluid in the chamber,
The chamber in which the first fluid is contained is slowly inserted into the water tank filled with the second fluid so that the surface tension of the first fluid causes the fine bubbles and the second fluid Into the chamber
≪ / RTI > 9. The method of claim 8,
Wherein in the step of filling the first fluid, the chamber is left inside the vacuum chamber for a predetermined time to remove minute bubbles present inside the chamber. 9. The method of claim 8,
Wherein the chamber is heated to reach a boiling point of the first fluid in the step of adjusting the volume of the first fluid, the heating temperature not exceeding the melting point of the transparent electrode, the insulating film, and the hydrophobic film formed in the chamber Of the fluid. delete 9. The method of claim 8,
Wherein the second fluid has a boiling point lower than the boiling point of the first fluid,
In controlling the volume of the second fluid, the chamber is heated to reach the boiling point of the second fluid
≪ / RTI > 13. The method of claim 12,
Wherein the volume adjustment of the second fluid is performed until the second fluid fills the chamber.
KR1020150157552A 2015-11-10 2015-11-10 Micro electrowetting varifocal liquid lens array and method for injecting fluid in the same KR101839462B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007534985A (en) * 2004-04-24 2007-11-29 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Liquid optical device, control method thereof, and electronic device
JP2012103252A (en) * 2010-11-10 2012-05-31 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method for controlling evaporation of drop of liquid in micro fluid device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007534985A (en) * 2004-04-24 2007-11-29 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Liquid optical device, control method thereof, and electronic device
JP2012103252A (en) * 2010-11-10 2012-05-31 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method for controlling evaporation of drop of liquid in micro fluid device

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