KR101818639B1 - A non-rotational oblique typed CT system and a reconstruction method of 3D tomographic image of the specimen thereby. - Google Patents

A non-rotational oblique typed CT system and a reconstruction method of 3D tomographic image of the specimen thereby. Download PDF

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KR101818639B1
KR101818639B1 KR1020160081903A KR20160081903A KR101818639B1 KR 101818639 B1 KR101818639 B1 KR 101818639B1 KR 1020160081903 A KR1020160081903 A KR 1020160081903A KR 20160081903 A KR20160081903 A KR 20160081903A KR 101818639 B1 KR101818639 B1 KR 101818639B1
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South Korea
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radiation
projection data
sub
incidence
area
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KR1020160081903A
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Korean (ko)
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KR20180002956A (en
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진경찬
김종석
이성호
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한국생산기술연구원
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Priority to PCT/KR2016/014338 priority patent/WO2018004085A1/en
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A61B6/02—Devices for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
    • A61B6/03—Computerised tomographs
    • A61B6/032—Transmission computed tomography [CT]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A61B6/02—Devices for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
    • A61B6/03—Computerised tomographs
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A61B6/06—Diaphragms
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A61B6/40—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment with arrangements for generating radiation specially adapted for radiation diagnosis
    • A61B6/4007—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment with arrangements for generating radiation specially adapted for radiation diagnosis characterised by using a plurality of source units
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
    • A61B6/52—Devices using data or image processing specially adapted for radiation diagnosis
    • A61B6/5205—Devices using data or image processing specially adapted for radiation diagnosis involving processing of raw data to produce diagnostic data
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10072—Tomographic images
    • G06T2207/10081—Computed x-ray tomography [CT]

Abstract

According to the present invention, there is provided an exposure apparatus comprising a stage, an incident radiation forming section for forming incident radiation to be irradiated on the object to be inspected, a light source provided on the opposite side of the incident radiation generating section with respect to the position of the object to be inspected, A projection data detection unit for obtaining a projection data set to be generated; And a three-dimensional image processing unit for processing the projection data set and restoring a three-dimensional internal shape image of the area to be inspected, wherein the incident radiation is close to the subject and at a center position of the subject area Wherein the projection data set is formed as a pattern radiated from a radiation source located at an outwardly spaced point, the projection data set being obtained at a time, wherein both the radiation source and the subject are rotated The detector acquires the projection data for each angle at a time and processes it in parallel, thereby having the advantage that the overall inspection speed can be shortened.

Description

TECHNICAL FIELD [0001] The present invention relates to a non-rotational oblique type CT apparatus and a method for reconstructing a three-dimensional internal shape image using the same, and a reconstruction method of a 3D tomographic image of the specimen.

More particularly, the present invention relates to a non-rotating oblique type CT apparatus and a method for restoring a three-dimensional internal shape image of an object using the same, and more particularly, The present invention relates to a non-rotating oblique type CT apparatus capable of shortening the overall inspection speed by acquiring data at a time and parallel processing the data, and a method for restoring a three-dimensional internal shape image of an object using the same.

A CT (Computed Tomography) apparatus rotates a receiving portion of a radiation transmitted through an output source of a radiation such as an X-ray and an object to be examined to the periphery of the subject and processes the collected data to generate a two- or three- .

The amount of the radiation transmitted to the subject differs depending on the material and the traveling distance of the subject placed on the path of the radiation, and when the amount of such radiation is plotted according to the rotation angle, a sinogram can be obtained , And a three-dimensional image of the subject can be obtained by performing specific arithmetic processing on the sinogram.

Such a CT apparatus is widely used in the medical field, but can also be utilized in fields such as quality inspection of precision electronic parts. Particularly, in recent years, a three-dimensional packaging technique in which a plurality of chips are vertically raised in a single package is widely used, and it is possible to check whether or not a plurality of chips are electrically connected using a CT device.

In Korean Patent No. 10-1146883 (hereinafter referred to as Reference 1), a non-rotating CT system is implemented using a plurality of X-ray generators and detectors, and in particular, an X- Rotation CT system capable of constructing a CT image for each time point of an object using the acquired minimum number of 2-dimensional X-ray images and an image interpolation technique after every acquisition.

KR 10-1146833 B1

Although the technology of the cited document 1 uses a plurality of X-ray generators to implement a non-rotating CT system, since the X-ray generating unit and the detecting unit are located around the object, The second problem is that the configuration of the equipment becomes complicated in that a plurality of X-ray generating units and a detecting unit must be provided in order to construct an accurate tomographic image.

An oblique type CT apparatus for reconstructing a three-dimensional internal shape image of an inspection target region of an inspection object includes a stage (20) on which a subject is placed, a stage A projection data detecting unit that is provided on the opposite side of the radiation generating unit with respect to the position of the object to be inspected and that obtains a projection data set generated by transmission of incident radiation to the object, And a three-dimensional image processing unit for processing a set of three-dimensional internal shape images of the inspection target area and restoring the three-dimensional internal shape image of the inspection target area, wherein the incident radiation is positioned near the subject and at a position spaced apart from the center position of the inspection target area A projection data set is formed as a pattern radiated from a radiation source, and a configuration that can be obtained at a time is proposed.

The projection data set may be a set of a plurality of projection data obtained by dividing a single total projection data detected at a time on the projection data detection unit, The incident angle of each of the plurality of sub-incidence radiation beams divided and set to the inspected area can be reflected

In addition, the radiation source can be two or more radiation sources.

In addition, it is preferable that the radiation source is two radiators (first radiator and second radiator), and the incident radiation has a first incident radiation and a second radiator corresponding to the first and second radiators, respectively, 2 incident radiation and the plurality of sub-incidence radiation may be a first sub-incidence radiation set and a second sub-incidence radiation set corresponding to the first incident radiation and the second incident radiation, respectively.

The incident radiation forming unit may include a radiation source unit and a radiation flux adjusting unit that adjusts the radiation from the radiation source unit to form the incident radiation incident on the subject.

Further, the radiation flux control section may be a radiation shielding material, provided with an opening, and the radiation passing through the opening may serve as the incident radiation.

Further, the radiation source portion may comprise a single radiation source.

The projection data detecting unit may be configured to cover an upper portion of the object to be inspected.

The present invention provides a method of irradiating an object to be inspected, comprising the steps of: (1) dividing the incident radiation to set the plurality of sub-incidence radiation, and each of the plurality of sub- (3) determining an area (overlapping area) in which each of the object-to-be-irradiated areas of the plurality of sub-incidence radiation are all superimposed on each other, And (4) confirming the overlapping area as the inspection subject area. The present invention also provides a method of setting an inspection area of a non-rotating oblique type CT apparatus.

(A) dividing the single overall projection data 70 to derive sub-projection data corresponding to each of the plurality of sub-incidence radiation; (b) (C) extracting portions extracted in the step (b) from the plurality of projection data for the region to be inspected by extracting portions of the sub- The method comprising the steps of: obtaining a plurality of projection data for an area to be inspected,

(1) dividing the first incident radiation and the second incident radiation to set the first set of sub-incident radiation and the second set of sub-incident radiation, and setting the first set of sub- Wherein each of the plurality of sub-incidence radiation and the plurality of sub-incidence radiation forming the second set of sub-incidence radiation are subjected to information on the angle of incidence with respect to the subject, (2) Measuring the subject transmissive region for each of a plurality of sub-incidence radiation and a plurality of sub-incidence radiation for the second sub-incidence radiation set; (3) measuring a plurality of sub-incidence radiation sets (First overlapping region) in which all of the irradiated object radiation regions overlap each other, and a plurality of sets of the second sub-incident radiation sets (Second overlap region) in which all of the subpixel radiation of each of the subpixels is overlapped, (4) determining an overlap region of the first overlap region and the second overlap region, Area of the non-rotating oblique type CT apparatus.

In addition, the first overlapping area and the second overlapping area may be set to be the same.

The present invention also relates to a method of irradiating an object to be inspected, comprising the steps of: (i) placing the object on the stage (20); (ii) the incident radiation forming section forms the incident radiation; (iii) the projection data detection unit 90 detects the single full projection data 70 at a time, and (iv) the three-dimensional image processing unit processes the single overall projection data 70, And reconstructing a three-dimensional internal shape image of a region to be inspected by using the non-rotating oblique type CT apparatus.

(Iv-1) the 3-dimensional image processing unit processes the single total projection data 70 to generate the plurality of projection data; (iv-2) Dimensional image processing unit performs filtering on each of the plurality of projection data, (iv-3) the three-dimensional image processing unit performs a geometric transformation on each of the filtered plurality of projection data, and iv-4) The three-dimensional image processing unit includes performing rotational angle conversion for each of the plurality of projection data on which the geometric transformation has been performed, wherein the step after the step (iv-3) Can be processed in parallel for each of the projection data.

The method may further include storing the plurality of projection data in a memory between the step (iv-1) and the step (iv-2).

According to the present invention, it is possible not to rotate both the source and the object to be inspected, to obtain the projection data for the inspection target area at a time, and to perform the parallel processing on the acquired plurality of projection data, The second effect is that a tomographic image can be acquired with high resolution through the use of an oblique-type CT apparatus, which is a first effect that the total time required to reconstruct a three-dimensional tomographic image for a region to be inspected can be drastically shortened .

1 is a schematic diagram of a non-rotating oblique type CT apparatus according to an embodiment of the present invention.
2 is a schematic diagram for explaining parameters applied to sub-incidence radiation and sub-incidence radiation according to an embodiment of the present invention.
3 is a schematic diagram for explaining a method of forming a first overlap region that can be formed by a first incident radiation from a first radiator according to an embodiment of the present invention;
4 is a schematic diagram for explaining a method of forming a second overlap region that can be formed by a second incident radiation from a second emitter according to an embodiment of the present invention.
5 is a schematic view showing an embodiment of the incident radiation forming section of the present invention.
FIG. 6 is a block diagram for explaining a process for parallel-processing a plurality of projection data for an area to be inspected temporarily acquired by the CT apparatus of the present invention to restore a tomographic image. FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when a part is referred to as being "connected" (connected, connected, coupled) with another part, it is not only the case where it is "directly connected" "Is included. Also, when a part is referred to as "comprising ", it means that it can include other components as well, without excluding other components unless specifically stated otherwise.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, the terms "comprises" or "having", etc. are intended to specify the presence of stated features, integers, steps, operations, elements, parts or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, parts, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The oblique type CT apparatus of the present invention performs a function of restoring a three-dimensional internal shape image of an inspection target region of a test object 10 and includes a stage 20, an incident radiation forming section 30 for forming incident radiation, A projection data detecting unit 90 for obtaining a projection data set that is generated by transmission of incident radiation to the subject 10, and a three-dimensional image processing unit 90 for processing the projection data set to restore the three- Processing unit as main components. Since a plurality of projection images for the inspection target area of the inspection object 10 can be acquired at a time, it is possible to process the three-dimensional image of the inspection target 10 A known configuration can be applied to the detailed configuration of the three-dimensional image processing unit that functions to restore the internal shape image. However, since a plurality of projection images can be acquired at a time, they can be processed in parallel to form a tomographic image at a higher speed, which will be described separately.

The incident radiation is formed as a pattern radiated from a radiation source located at a position spaced apart from the center of the region to be inspected, and the projection data set has a main feature that it is acquired at a time. Particularly, since the incident radiation is formed in a pattern radiated from a radiation source located at a position spaced apart from the center of the inspection subject region, the incident radiation is incident on the inspection subject region in an oblique direction, As an oblique type CT apparatus.

The object 10 to be inspected may be a thin object such as a semiconductor device package, and may be a human body, an animal, or the like when the present invention is used in a medical field.

The inspected area means a target area from which the reconstructed three-dimensional shape image (image) can be obtained using the CT apparatus of the present invention among the subject 10. The inspection area may be the entire inspection subject 10, but may be limited to only a partial area of the inspection subject 10.

An image is represented by a set of data consisting of pixels or voxels. The tomography image may be an image obtained by performing a specific algorithm operation processing on the projection data set.

Hereinafter, each component will be described in detail.

The projection data set is obtained by irradiating the incident radiation to the subject 10 and detecting the transmitted radiation by the projection data detection section 90. The projection data set consists of a plurality of projection data, Thereby obtaining a tomographic image. The projection data set is a set of a plurality of projection data obtained by dividing a single total projection data 70 detected at a time on the projection data detection unit 90. This division processing method will be described later.

The single whole projection data 70 is processed and utilized as a plurality of projection data. In the present invention, unlike the conventional CT apparatus, since the object and the incident radiation forming section 30 do not perform any rotational behavior, a single whole projection data 70 is obtained at a time. Then, since the single full projection data 70 is processed to obtain the projection data set, the projection data set may also be expressed as being acquired at a time. In other words, temporal acquisition of the projection data set begins by acquiring a single full projection data 70, which is detected at once on the projection data detection section 90. Thereafter, a single total projection data 70 is divided to form a plurality of projection data.

Further, each of the plurality of projection data reflects an incident angle to the inspected area of each of a plurality of sub-incidence radiation in which incident radiation is virtually divided and set. Although the non-rotating oblique type CT apparatus of the present invention does not rotate both the radiation source and the subject 10, in order to obtain a three-dimensional tomographic image of the region to be inspected, a projection data set containing a kind of angle information You must. (In general CT apparatus, projection data is obtained for each rotation angle of revolution.) In other words, in the present invention, it is also necessary to acquire a projection image for each 'angle' The angle of incidence to the inspection area of each of a plurality of sub-incidence radiation which can be thought of by virtually dividing the incident radiation becomes the angle of incidence.

The incident radiation is formed in a pattern that radiates in four directions around the radiation source, and the plurality of sub-incident radiation is formed by virtually dividing the incident radiation. When imaginarily assuming a plurality of sub-incidence radiation by dividing incident radiation, the following two pieces of information should be considered. One is the angle of incidence to each of the plurality of sub-incidence radiation regions to be inspected, and the other is the radiation angle width of each of the plurality of sub-incidence radiation beams. The former is angle information given to a plurality of projection data (to be inspected area) obtained later, and is used as a parameter, and is information necessary for three-dimensional tomographic image synthesis on the inspection target area. The latter is a concept similar to the radiation center angle of radiation emitted from a radiation source in a cone shape. The increment in the incident angle of each of the plurality of sub-incidence radiation to the inspected area and the radiation angle width of each of the plurality of sub-incident radiation may be set to be equal to each other, to be. In particular, when the radial angular width is set to be larger than the increment, the sub-projection data for each of the plurality of sub-incidence radiation may be mutually superimposed.

A method for acquiring a plurality of projection data for an area to be inspected from a single total projection data 70 for a non-rotating oblique type CT apparatus of the present invention is as follows. And a plurality of projection data is determined.)

First, a single total projection data 70 is divided to derive sub-projection data corresponding to each of a plurality of sub-incidence radiation. As described above, a plurality of sub-projection data can be mutually superimposed. In general, one sub-projection data (sub-incidence radiation related) will be greater than or equal to one projection data (associated with an area to be inspected) because the area through which the sub- (Or the same) as the projection data generated by transmitting through the inspection area.

Second, among the sub-projection data for each of a plurality of sub-incidence radiation, portions actually sensed through the inspection area and extracted are extracted. This is because it is the object of the present invention to obtain a tomographic image of a region to be inspected, and therefore data on the portion of the subject 10 that is not the region to be inspected is not necessary.

Third, the parts extracted in the second step are designated as a plurality of projection data for the inspection area. Each of the plurality of projection data has an incident angle to each of the plurality of sub-incidence radiation regions to be inspected as a parameter.

3 and 4, a description will be given of a method of presetting a region to be inspected for the subject 10, that is, a method for setting a plurality of acquired projection data to be one inspection region .

This presetting can be performed by adjusting the spatial arrangement of the components of the present invention such as the incident radiation forming section 30, the inspection target 10, and the like.

The general CT apparatus ensures that the radiation source 31a rotates the periphery of the subject 10 or rotates the subject 10 around a predetermined rotation axis to secure projection data for each rotation angle, The object 10 and the radiation source do not rotate, and nonetheless, it is necessary to acquire projection data (which is a plurality of projection data) for each angle (incident angle to the inspected area). Furthermore, even if a plurality of projection data are acquired for each incident angle, such a plurality of projection data must be obtained for one inspected area. Thus, the preset step should be preceded by obtaining a single full projection data 70 such that the plurality of projection data obtained is for one inspection subject area.

More specifically, first, the incident radiation is divided to set a plurality of sub-incidence radiation, and each of the plurality of sub-incidence radiation is given information of the incident angle to the subject 10. [ The plurality of sub-incidence radiation at this time is the same as that mentioned in the method of extracting the plurality of projection data from the single overall projection data 70 described above, and therefore each of the plurality of sub- 10) of the incident angle.

Second, for each of a plurality of sub-incidence radiation, the test subject transmissive region is measured. Each of the sub-incidence radiation passes through the entire inspection target 10, and what is actually required is limited to the projection data of the inspection target area.

Third, a region (overlapping region) in which all of the object-to-be-irradiated regions of each of a plurality of sub-incidence radiation overlaps is determined, and such overlapped region is determined as a region to be inspected. Thereby, it is ready to acquire a plurality of projection data for the inspection area.

5, the radiation source is two emitters (first emitter 41 and second emitter 42), and incident radiation is emitted from the first emitter 41 and the second emitter Corresponding to each of the first incident radiation 50a and the second incident radiation, the first incident radiation 50a and the second incident radiation corresponding to each of the first incident radiation 50a and the second incident radiation, In the embodiment where the sub incident radiation set and the second sub incident radiation set are set, the method for setting the inspection area is as follows. Reference is now made to Figs. 3 and 4. Fig.

First, the first incident radiation 50a and the second incident radiation are divided to set a first sub-incident radiation set and a second sub-incident radiation set, and a plurality of sub-incident radiation and a sub- Each of the plurality of sub-incidence radiation constituting the sub-incidence radiation set is given information of the incidence angle with respect to the subject.

Second, the subject transmissive region is measured for each of a plurality of sub-incidence radiation constituting the first sub-incidence radiation set and a plurality of sub-incidence radiation constituting the second sub-incidence radiation set.

Third, a region (first overlapping region) in which all of the plurality of sub-incidence radiation forming the first sub-incidence radiation sets are overlapped with each other is determined, and a plurality of sub- (Second overlapping area) in which all of the object-to-be-examined object transmission areas for each of the radiation overlap. For example, if the first overlapping region is related to the projection data (n projection data, for example) obtained by the first sub-incidence radiation set having an incident angle of 0 to 90 degrees with respect to the object 10, The two overlapping regions are related to the projection data (for example, n projection data) obtained by the second set of sub-incidence radiation having an incident angle of 90 to 180 degrees with respect to the subject 10. [

Fourth, an overlapping area of the first overlapping area and the second overlapping area is determined as a to-be-inspected area. In this case, the number of projection data with respect to the inspection area is n + n, and the 2n pieces of projection data are the 'plurality of projection data' that constitute the projection data set in the present invention. Obviously, when the first overlapping region and the second overlapping region are set to be completely identical from the beginning, the region to be inspected will be the first overlapping region (second overlapping region) itself.

The stage 20 is a structure in which the subject 10 is placed, and is preferably made of a material in which radiation is transmitted. In the general CT apparatus, the stage 20 of the present invention keeps the fixed position with respect to the external absolute coordinate system without rotating, contrary to the embodiment in which the stage 20 rotates around a predetermined rotation axis .

The incident radiation forming unit 30 functions to form an incident radiation to be irradiated on the subject 10, wherein the 'formation' includes generating and adjusting the generated radiation to a purpose. Unlike in the case of a general CT apparatus in which an X-ray generator or the like rotates around a subject 10 in a revolving pattern or the like, the incident radiation forming unit 30 of the present invention is fixed to an absolute coordinate system And maintains its position.

A radiation source, which may be the logical radiation center of incident radiation, can be made up of two or more radiation sources.

The reason why it is not preferable for the purpose of the present invention to construct a radiation source with only one radiation source is as follows.

For example, when the one radiating element is positioned at the center of the test object 10, overlapping regions are formed on the left and right sides of the radiating element position. However, for two overlapping regions thus formed, Only the projection data in the 90 degree view (the view seen from the incident side) is obtained (lack of projection data in the 90 degree to 180 degree view), and only the projection data in the 180 degree view from the 90 degree view (Lack of projection data in the 0-degree to 90-degree views). As a result, effective tomographic images can not be obtained for both of the overlapping regions.

For this reason, it is necessary to construct a radiation source with two or more radiation sources. Further, by appropriately setting the positions of the irradiator and the subject 10, an effective tomographic image for the region to be inspected of the subject 10 If available, two radiation sources may be sufficient. That is, it is preferable to configure the radiation source with two radiators (the first radiator 41 and the second radiator 42).

In the case of the embodiment in which two radiators (the first radiator 41 and the second radiator 42) are applied, the two radiators are positioned opposite to each other with respect to the region to be inspected of the subject 10 . Preferably, the first radiator 41 and the second radiator can be positioned at mutually symmetrical positions about the region to be inspected. In this case, the first radiator 41 may be involved in the view from 0 degrees to 90 degrees, and the second radiator 42 may be in the view of 90 degrees to 180 degrees. At this time, if the overlap regions (the first overlap region and the second overlap region) determined for the first radiator 41 and the second radiator 42 are set to coincide with each other (the first overlap region and the second overlap region) It is possible to obtain the projection data having a view from 0 degrees to 180 degrees as a result with respect to the area to be inspected, It will be possible to acquire a tomographic image of the region. However, if the first overlapping area and the second overlapping area are formed so that the first overlapping area and the second overlapping area are not the same, and the first overlapping area and the second overlapping area are formed differently, It is not excluded that the region is again obtained and used as the inspection region.

However, with respect to the projection data that can be obtained, as mentioned above, projection data having a view from 0 degrees to 180 degrees is not always obtained. In the embodiment in which the first radiator 41 and the second radiator are applied, the inspecting region is set as a narrow region inside the installation position of the first radiator 41 and the second radiator 42, The tomographic image obtained for the inspected area can be obtained through the synthesis of projection data having a view from 30 degrees to 150 degrees, for example. In this case, since there is no projection data having a view from 0 degrees to 30 degrees and from 150 degrees to 180 degrees, the accuracy of the tomographic image tends to decrease slightly. However, when the subject 10 such as a circuit board is a thin and narrow structure , It is considered that the degree of such degradation is not large.

Further, regarding the position of the radiation source (the first radiation source 41 and the second radiation source 42) at the position of the subject 10, it is possible to consider that the radiation source is located at the edge of the subject 10 When the radiation source is located inside the edge of the subject 10, it is difficult for the overlap areas generated by each of the first and second radiators 41 and 42 to coincide with each other, This is because the region must be formed narrowly. Therefore, it may be considered that the first radioterms 41 and the second radiotermers 42 are positioned near both edges of the subject 10, respectively. However, it is also considered that the inspection area is generally limited to a part of the inside area of the inspection target 10.

The incident radiation forming section performs the function of forming incident radiation (forming a radiation source).

The incident radiation forming section 30 is positioned such that the incident radiation can be incident on the subject 10 in the vicinity thereof. The CT device of the present invention can be regarded as an oblique type because the object 10 can be seen in a situation where it is necessary to position the radiation source (radiator) close to the subject 10 (stage 20) The incident radiation from the radiation source (radiator) located close to the inspection target 10 is incident obliquely with respect to the inspection target area of the inspection target 10 as a result.

In connection with incident radiation and the aforementioned radiation source (radiator), it is assumed that incident radiation is emitted from a radiation source (radiator).

As an embodiment of the incident radiation forming section 30, two or more radiation sources 31a may be provided directly at the positions of two or more radiators. The radiation source 31a may be a point source, and it may be considered that a portion of the radiation from the point source that does not transmit the subject 10 is shielded. The radiation that does not pass through the subject 10 among the radiation from the point source does not form the projection data and the projection data is not detected. (90). However, this phenomenon is considered to minimize the effect of post-processing such as noise elimination on the acquired projection data set.

Considering that the invention is related to the oblique type CT, it is possible to consider entering the incident radiation at an inclined angle with respect to the mounting surface (stage 20 surface) of the test object 10, but this is not essential. This is because, in the embodiment in which the radiation source (radiator) is provided so as to be close to the non-detection object (stage 20) and further disposed at the edge of the inspection area, the incident radiation is inclined Because it is incident at a true angle.

5, as another embodiment of the structure of the incident radiation forming section 30, the incident radiation forming section 30 is arranged so as to adjust the radiation from the radiation source section 31 and the radiation source section 31 And a radiation flux adjusting unit for forming incident radiation incident on the subject 10.

The radiation flux control section 32 becomes a radiation shielding material 33 and has an opening 34 through which the radiation passing through the aperture 34 can function as the incident radiation. For this embodiment, the aperture 34 will be the emitter, and the incident radiation at the aperture 34 as the emitter will be seen to emit. Particularly, in consideration of the fact that the radiation source (radiator) is located at two or more places in the present invention, it is appropriate that the openings 34 are formed at two or more places. The radiation (incident radiation) passing through the aperture 34 will function as a point source, but does not preclude a line source or some area from performing a function such as a shielded point source or line source.

The radiation source portion 31 may be a single radiation source 31a, but does not preclude the application of two or more radiation sources 31a.

The projection data detecting unit 90 is provided on the opposite side of the radiation generating unit with respect to the position of the subject 10 and acquires a projection data set generated by transmitting the incident radiation to the subject 10 Function.

The projection data detecting section 90 may be shaped to cover the upper portion of the subject 10. [ In the conventional CT apparatus, since the radiation source 31a and the detector are relatively rotated (or revolve together), it is sufficient that the detector has such a width as to be able to detect the radiation from the radiation source 31a However, since the projection data detecting section 90 of the present invention is required to acquire a projection data set which is temporarily located over a wide range while being positioned above the subject 10, it is possible to detect the radiation over a relatively large area The shape and the mounting position must be determined.

It is needless to say that the three-dimensional image processing unit performs the function of processing the projection data set and restoring the three-dimensional internal shape image of the detection object, and may adopt a known configuration.

The function of the three-dimensional image processing unit is related to a method of restoring the three-dimensional internal shape image of the subject 10 using the non-rotating oblique type CT apparatus of the present invention. Therefore, The description will be made by a method for restoring the three-dimensional internal shape image of the subject 10 using the non-rotating oblique type CT apparatus.

Referring to Fig. 6, a method for restoring the three-dimensional internal shape image of the subject 10 using the non-rotating oblique type CT apparatus of the present invention will be described.

First, the subject 10 is placed on the stage 20.

Second, the incident radiation forming section 30 forms incident radiation. The incident radiation is emitted from a radiation source (radiator).

Third, the incident radiation is transmitted through the subject 10, and the projection data detection unit 90 acquires the single overall projection data 70. This single whole projection data 70 is obtained at a time.

Fourth, the three-dimensional image processing unit processes a single overall projection data 70 to reconstruct a three-dimensional internal shape image of the inspection area. A method of restoring a three-dimensional internal shape image using a plurality of projection data can be performed by applying a known technique such as a back projection algorithm. Hereinafter, the fourth step will be described in detail.

The three-dimensional image processing section divides a single total projection data 70 detected at a time to generate a plurality of projection data. In this regard, as described above.

Alternatively, after the step of storing a plurality of projection images which have undergone the extraction process in this way, the process of the subsequent stage can be carried out. Furthermore, in the step of storing in the memory, a plurality of projection data can be stored simultaneously, which is possible because a plurality of projection images can be generated simultaneously.

Thereafter, the three-dimensional image processing unit performs filtering on each of the plurality of projection data. The filtering has the purpose of increasing the resolution in the tomographic image synthesis, and a well-known technique can be applied.

Thereafter, geometric transformation and rotation angle transformation are performed for each of the plurality of filtered projection data. This is a necessary step because the present invention relates to an oblique type CT apparatus, since each of a plurality of projection data is not based on the same rotation axis. A known technique can be applied. At this time, the respective steps of the geometric transformation and the rotation angle conversion are parallel-processed for each of the plurality of projection data, and the processing speed can be increased. Further, this parallel processing can simultaneously process each of the plurality of projection data, thereby making the processing speed faster.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it should be understood that various changes and modifications will be apparent to those skilled in the art. Obviously, the invention is not limited to the embodiments described above. Accordingly, the scope of protection of the present invention should be construed according to the following claims, and all technical ideas which fall within the scope of equivalence by alteration, substitution, substitution, and the like within the scope of the present invention, Range. In addition, it should be clarified that some configurations of the drawings are intended to explain the configuration more clearly and are provided in an exaggerated or reduced size than the actual configuration.

10: Subject

20: stage
30: incident radiation forming part
31: radiation source part
31a: radiation source
32:
33: radiation shielding material
34: opening
Radiation source
41: first radiator
42: second radiator
50: incident radiation
50a: First incident radiation
50b: second incident radiation
SUBk: Sub-incident radiation
? k (k is a natural number): Incident angle of sub-incident radiation SUBk to the object
? k (k is a natural number): the radiation width angle of the sub-incidence radiation SUBk
60: object-to-be-inspected area for sub-incidence radiation
Pk (k is a natural number): an object-to-be-inspected area for sub-incident radiation SUBk
61: first overlap region
62: second overlap region
70: Single full projection data
Sk ~ Ek (k is a natural number): sub-projection data (for k sub-incident radiation (SUBk)
90: projection data detector
M: Memory section
F: Filtering section
G: Geometric transform unit
R: rotation angle conversion section

Claims (15)

An oblique type CT apparatus for restoring a three-dimensional internal shape image of an inspection target region of an object to be inspected,
A stage on which the object is placed;
An incident radiation forming unit for forming incident radiation to be irradiated onto the object to be inspected;
A projection data detecting unit that is provided on the opposite side of the incident radiation forming unit with respect to the position of the object to be inspected and that obtains a projection data set generated by transmitting the incident radiation to the object to be inspected; And
A three-dimensional image processing unit for processing the projection data set to restore a three-dimensional internal shape image of the inspection subject area;
Lt; / RTI >
Wherein the incident radiation is formed as a pattern radiated from a radiation source located at a position close to the subject and spaced apart from the center position of the region to be inspected,
Characterized in that the projection data set is obtained at a time,
The projection data set is a set of a plurality of projection data obtained by dividing a single total projection data detected at a time on the projection data detection unit,
Wherein each of the plurality of projection data reflects an angle of incidence with respect to the area to be inspected of each of a plurality of sub-incidence radiation in which the incident radiation is virtually divided and set.
delete The method according to claim 1,
Wherein the radiation source is at least two radiation sources.
The method of claim 3,
The radiation source is made up of two radiators (first radiator and second radiator)
Wherein the incident radiation is a first incident radiation and a second incident radiation corresponding to the first and second radiation sources respectively,
Wherein the plurality of sub-incidence radiation is a set of a first sub-incidence radiation set and a second sub-incidence radiation set corresponding to the first incident radiation and the second incident radiation, respectively. .
The method according to claim 1,
Wherein the incident radiation forming unit comprises:
The radiation source portion, and
A radiation flux regulator for regulating the radiation flux from the radiation source portion to form the incident radiation incident on the subject,
Rotation type oblique type CT apparatus.
The method of claim 5,
Wherein the radiation flux regulator is a radiation shielding material and has an opening through which radiation passing through the aperture functions as the incident radiation.
The method of claim 6,
Characterized in that the radiation source portion comprises a single radiation source.
The method according to claim 1,
Wherein the projection data detecting unit is configured to cover an upper portion of the object to be examined.
A method for setting a region to be inspected of a non-rotating oblique type CT apparatus according to claim 1,
(1) dividing the incident radiation to set the plurality of sub-incidence radiation, and each of the plurality of sub-incidence radiation receiving information of the incidence angle with respect to the subject;
(2) measuring an object-to-be-irradiated region for each of the plurality of sub-incidence radiation;
(3) determining an area (overlapping area) where all of the object-to-be-inspected areas for each of the plurality of sub-incidence radiation overlaps;
(4) confirming the overlapping area as the inspection subject area;
Wherein the non-rotating oblique type CT apparatus comprises:
A method for acquiring a plurality of projection data for an area to be inspected from a single total projection data for a non-rotating oblique type CT apparatus of claim 1,
(a) dividing the incident radiation to set the plurality of sub-incidence radiation, and each of the plurality of sub-incidence radiation receiving information of an incident angle to the subject;
(b) measuring an object-to-be-irradiated area for each of the plurality of sub-incidence radiation;
(c) determining a region (overlapping region) where all of the subject transmission regions for each of the plurality of sub-incidence radiation overlaps;
(d) confirming and setting the overlap area as the inspection subject area;
(e) dividing the single total projection data to derive sub-projection data corresponding to each of the plurality of sub-incidence radiation;
(f) extracting, among the sub-projection data for each of the plurality of sub-incidence radiation, portions actually transmitted through the inspection area and detected;
(g) designating portions extracted in the step (f) as the plurality of projection data for the area to be inspected;
The method comprising the steps of: obtaining a plurality of projection data for an area to be inspected,
A method for setting an inspection target area of a non-rotating oblique type CT apparatus according to claim 4,
(1) dividing the first incident radiation and the second incident radiation to set the first sub-incidence radiation set and the second sub-incidence radiation set, and setting a plurality of sub- Wherein each of the plurality of sub-incidence radiation forming the set of radiation and the second set of sub-incidence radiation is given information of an incident angle to the subject;
(2) measuring an object-to-be-inspected area for each of a plurality of sub-incidence radiation forming the first sub-incidence radiation set and a plurality of sub-incidence radiation forming the second sub-incident radiation set;
(3) determining a region (first overlapping region) in which all of the plurality of sub-incidence radiation forming the first set of sub-incidence radiation overlaps with each of the respective object transmission regions, and Determining a region (second overlapping region) in which all of the object-to-be-irradiated regions overlap with each of a plurality of sub-incidence radiation;
(4) confirming the overlapped area of the first overlapping area and the second overlapping area as the area to be inspected;
Wherein the non-rotating oblique type CT apparatus comprises:
The method of claim 11,
Wherein the first overlapping area and the second overlapping area are set to be equal to each other.
A method for restoring a three-dimensional internal shape image of a subject using a non-rotating oblique type CT apparatus of claim 1,
(i) placing the object on the stage;
(ii) the incident radiation forming section forms the incident radiation, and the incident radiation is transmitted through the object to be examined;
(iii) the projection data detection unit detecting the single full projection data at a time; And
(iv) the three-dimensional image processing unit processes the single overall projection data to reconstruct a three-dimensional internal shape image of the area to be inspected;
Wherein the non-rotating oblique type CT apparatus comprises: a non-rotating oblique type CT apparatus;

14. The method of claim 13,
The step (iv)
(iv-1) the three-dimensional image processing unit processing the single overall projection data to generate the plurality of projection data,
(iv-2) the three-dimensional image processing unit performing filtering on each of the plurality of projection data,
(iv-3) the three-dimensional image processing unit performing a geometric transformation on each of the filtered plurality of projection data, and
(iv-4) the three-dimensional image processing unit performing rotation angle conversion for each of the plurality of projection data on which the geometric transformation has been performed,
Lt; / RTI >
Wherein the step (iv-3) and subsequent steps are performed in parallel on each of the plurality of projection data.

14. The method of claim 13,
Between the step (iv-1) and the step (iv-2)
And storing the plurality of projection data in a memory, respectively. The method of claim 1, wherein the three-dimensional internal shape image is reconstructed using a non-rotating oblique type CT apparatus.





KR1020160081903A 2016-06-29 2016-06-29 A non-rotational oblique typed CT system and a reconstruction method of 3D tomographic image of the specimen thereby. KR101818639B1 (en)

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