KR101783376B1 - Assemble type gas-liquid contact devic unit for Scrubber - Google Patents
Assemble type gas-liquid contact devic unit for Scrubber Download PDFInfo
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- KR101783376B1 KR101783376B1 KR1020150188269A KR20150188269A KR101783376B1 KR 101783376 B1 KR101783376 B1 KR 101783376B1 KR 1020150188269 A KR1020150188269 A KR 1020150188269A KR 20150188269 A KR20150188269 A KR 20150188269A KR 101783376 B1 KR101783376 B1 KR 101783376B1
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- gas
- liquid contact
- unit
- contact means
- liquid
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- 239000007788 liquid Substances 0.000 title claims abstract description 151
- 239000002912 waste gas Substances 0.000 claims description 21
- 238000005192 partition Methods 0.000 claims description 10
- 238000009751 slip forming Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 31
- 238000000926 separation method Methods 0.000 abstract description 6
- 239000010891 toxic waste Substances 0.000 abstract description 3
- 230000008929 regeneration Effects 0.000 abstract description 2
- 238000011069 regeneration method Methods 0.000 abstract description 2
- 238000012423 maintenance Methods 0.000 abstract 1
- 230000008878 coupling Effects 0.000 description 13
- 238000010168 coupling process Methods 0.000 description 13
- 238000005859 coupling reaction Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000013618 particulate matter Substances 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 239000002341 toxic gas Substances 0.000 description 3
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02046—Dry cleaning only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
- H01L2021/60007—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process
- H01L2021/60022—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process using bump connectors, e.g. for flip chip mounting
- H01L2021/60097—Applying energy, e.g. for the soldering or alloying process
- H01L2021/60172—Applying energy, e.g. for the soldering or alloying process using static pressure
- H01L2021/60187—Isostatic pressure, e.g. degassing using vacuum or pressurised liquid
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Gas Separation By Absorption (AREA)
- Treating Waste Gases (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The present invention relates to a combination and separation of gas-liquid contact means units, which facilitates the combination and separation of a gas-liquid contact means complex having a plurality of functions adopted in a wet scrubber for removing toxic waste gas, To a gas-liquid contact means for a scrubber.
The gas-liquid contact unit unit according to the present invention is made up of parts that can be separated and assembled, so that the gas-liquid contact unit unit and the plurality of gas-liquid contact unit units can be assembled by assembling to provide a combination gas / liquid contact means combination. Liquid contact means unit is easily disassembled and easy to be cleaned for regeneration of gas-liquid contact means, it is advantageous in maintenance and management.
Description
The present invention relates to a gas-liquid contact means for a scrubber for treating waste gas, and more particularly to a gas-liquid contact means for a waste gas treatment scrubber having a prefabricated structure so that individual gas- Liquid contact means.
In general, exhaust gas (waste gas) discharged from a process such as forming or etching a thin film on a wafer in a semiconductor manufacturing process includes acid gases such as hydrogen fluoride, sulfur oxide, nitrogen oxide, hydrogen sulfide, and sulfur dioxide, Liquid contact means for spraying a cleaning solution to the exhaust gas (waste gas), which is a wet process, to remove the toxic gas components, in addition to not only containing toxic gases harmful to the human body but also causing environmental pollution The scrubber method to be used is widely known.
The wet scrubber mainly employs a gas-liquid contact means (filter body) in order to increase the efficiency of gas-liquid contact in the process of absorbing and removing the waste gas into the cleaning liquid by spraying a cleaning solution on the exhaust gas (waste gas) Background Art [0002] In the prior art relating to a device (filter body), for example, a method is disclosed in Korean Patent Publication No. 1995-0014023 in which a filling material is filled and a liquid is dispersed from the side of the filling material, A gas-liquid contact device for supplying a gas from a lower portion to a gas and contacting the liquid with a gas, comprising: a liquid dispersion head connected to a flow-through line of the liquid and having a plurality of small holes in a curved surface of a tip portion; The tubular upper portion has a straight line shape, and a plurality of gas-liquid contact surfaces are arranged so as to be parallel to the gas flow Liquid contact device is disclosed in which an upper opening portion of the filling material is disposed within an angle range in which water can be seen and which can be seen through a normal line of a curved surface of a small hole of the liquid dispersion head, 10-0816822 has a gas flow path device, a gas-liquid reaction device, and a dehumidifying device in a housing, wherein the gas flow path device is composed of a bending flow path plate 21 and a diagonal flow path plate 22, Which is formed by a reactor (31) having a filler layer and an injection device, wherein an injection device is installed at an upper portion and an inlet side of a gas-liquid reaction device. The multiscrubber The gas-liquid contact means of the prior art simply mounts the gas-liquid contact means inside the scrubber (absorption tower) Also it does not disclose any technique for the combination of the contact means per unit.
Prior arts, which are invented by the inventors of the present invention and registered in Korean Registered Patent Publication Nos. 10-1478973, 10-1564579, 10-1564580, and 10-1564581, include a combination of a waste gas treatment scrubber with a gas- Liquid contact means composite having a function of a gas-liquid contact means and a patent application No. 10-2015-0172161, which is pending application, horizontally mounts a multifunctional gas-liquid contact means combination in which a gas-liquid contact means unit is combined with a horizontal type scrubber.
The present invention further improves the structure of the gas-liquid contact unit unit adopted by the inventors of the present invention in the prior arts which are registered or pending by the inventor of the present invention, so that the combination and separation of the gas-liquid contact unit unit and the gas- Liquid contact means unit having a prefabricated structure so as to facilitate the regeneration work of the gas-liquid contact means with ease.
The present invention relates to a gas-liquid contacting means for a scrubber for removing toxic waste gas, and more particularly, to a gas-liquid contact means having a combined function, which is employed to induce contact between a waste gas and a cleaning liquid in a wet scrubber for removing toxic waste gas Liquid contact means unit for a gas-liquid contact member which facilitates the combination and separation of a combination of the gas-liquid contact means, and facilitates the combination and separation of the gas-liquid contact means unit constituting the gas-liquid contact means combination.
A wet scrubber for removing exhaust gas (waste gas) containing toxic gases harmful to the human body, which is discharged from processes such as forming or etching a thin film on a wafer in a semiconductor manufacturing process, is used to spray a cleaning liquid onto an exhaust gas Liquid contact means (filter body) is employed to improve the absorption and absorption effect of harmful components, and the gas-liquid contact means (filter body) is composed of a single body or a combination of multiple functions.
Liquid contacting means (filter body) employed in the wet scrubber is constituted by a prefabricated structure of the gas-liquid contact means unit constituting the combined function gas-liquid contact means combination.
The assembled gas-liquid contact unit unit (MU) for a waste gas-treated scrubber of the present invention comprises a hexahedron shaped upper surface (6) having a predetermined thickness (t1) and a space formed therein, The lower side A2 of the lower side A1, the lower side A2, the left side A3, the right side A4, the front B1 and the rear B2 is detachably and integrally joined to the left side A3, The engaging portion a and the engaging portion b of the concavo-convex shape are mutually oppositely formed so as to be able to separate and engage with each other along the side n on the outer surface of the right side surface A4, The front surface B1 and the rear surface B2 have a network structure in which the square grooves h are continuously formed by the partition walls W in a four-sided manner. At the same time, the fastening protrusions c are formed near the four corners of the front surface B1. A fastening hole d in which the fastening protrusion c is detachably coupled is formed near four corners of the rear surface B2, Like
The main body A according to the present invention is a cube or a rectangular parallelepiped having a hexagonal shape having a predetermined thickness t1 and having a square shape or a rectangular shape with the front side B1 and the rear side B2, It is preferable that any one of the lower side surface A1, the lower side surface A2, the left side surface A3 and the right side surface A4 is detachably coupled and integrally joined and the lower side surface A2 is detachably coupled.
The front face B1 and the rear face B2 of the main body A are formed such that the quadrangular recesses h are formed continuously in four successive directions by the partition walls W so as to allow the exhaust gas (waste gas) The partition walls W are spaced apart from each other at a central portion of the adjacent four square grooves h while the square grooves h are continuously formed by the partition walls W, Structure.
The main body A according to the present invention has the engaging portions a and the engaging portions of the concave and convex shapes in the longitudinal direction along the side n on the outer surface of the left side surface A3 and the right side surface A4, (b) are formed in opposite directions, and the concave and convex coupling portions (a) and (b) formed in opposite directions are formed so as to be fastened and detachable so that the plurality of main bodies (A) .
A fastening protrusion c is formed near the four corners of the front face B1 of the main body A and a fastening hole d is formed near the four corners of the back face B2 to fasten the fastening protrusion c And the plurality of main bodies A are coupled to each other so as to be detachable in forward and backward directions by engagement of the holes d.
The liquid contact member unit MU1 and the liquid contact member unit MU2 according to the present invention are arranged such that each of the gas-liquid contact medium F1 and the gas-liquid contact medium F2 can be separated into the internal space of the main body A .
The gas-liquid contact unit unit MU1 is provided with a plurality of rows of column-shaped
The gas-liquid contact unit unit MU2 has upper and lower sides communicating with each other and two
The gas-liquid contact unit unit MU1 and the gas-liquid contact unit unit MU2 according to the present invention are provided with the concave and convex shape engaging portions a and b and the fastening protrusion portion c and the fastening holes d Liquid contact means combination (HBF) which is optimized to be suitable for treatment according to the concentration and properties of the exhaust gas (waste gas), and is provided with a gas-liquid contact means unit (MU1 And the gas-liquid contact unit unit MU2 itself can be provided as gas-liquid contact means (filter body) for the removal of exhaust gas (waste gas) to the waste gas treatment scrubber.
Since the plurality of assembled gas-liquid contact means unit bodies according to the present invention are assembled in various forms, it is possible to provide the features and effects of simply providing a gas-liquid contact means combination optimized for treatment according to the concentration and properties of the exhaust gas .
The exhaust gas (waste gas) removal scrubber to which the prefabricated gas-liquid contact means unit according to the present invention is applied is easy to disassemble the gas-liquid contact means combination and the gas-liquid contact means unit, And advantages in terms of management.
BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 and Fig. 2 are diagrams showing the bonding relationship of the assembled gas-liquid contact unit unit (MU1) and (MU2) of the present invention.
Fig. 3 is a view showing a relationship in which the lower surface A2 of the main body A of the present invention is detachably engaged. Fig.
Figs. 4 to 6 are views showing the unit gas-liquid contact medium (f), the gas-liquid contact medium (F2) and the
Figs. 7 to 9 are views showing the front and rear surfaces of the assembled gas-liquid contact unit unit MU1 of the present invention and front views of the gas-liquid contact unit unit MU2. Fig.
10 is a cross-sectional view of the AA portion of the assembled liquid contact means unit MU1 (FIG. 7).
11 is a cross-sectional view of the BB portion of Fig. 7 relative to the granulator liquid contacting unit MU1. Fig.
12 is a sectional view of the CC portion of Fig. 9 relative to the assembled gas-liquid contact member unit MU2. Fig.
13 is a view showing a relationship in which the assembled gas-liquid contact unit units MU1 and MU2 of the present invention are assembled by the concave-convex coupling portions (a) and (b).
Fig. 14 is an enlarged view of a portion " D "in Fig. 8 with respect to a fastening hole d formed at a corner of the rear surface B2 of the main body;
Figs. 15 to 17 are views showing a process in which the fastening protrusion c and the fastening hole d are engaged. Fig.
18 is a view showing an embodiment of a gas-liquid contact means combination (HBF) in which a plurality of assembled gas-liquid contact means unit bodies MU1 and MU2 according to the present invention are coupled to each other.
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings, but the present invention is not limited by the following description.
1 and 2 are views showing the coupling relationship between the assembled gas-liquid contact unit unit MU1 and the gas-liquid contact unit unit MU2 of the present invention. Fig. 3 is a cross- The present invention will be described in detail with reference to Figs. 1 to 3. Fig.
1 and 2, the assembled gas-liquid contact unit units MU1 and MU2 according to the present invention are configured such that respective gas-liquid contact media F1 and F2 can be separated into an internal space of the main body A, Liquid contact means unit MU2 according to the present invention has a function of repeating the re-scattering and coarsening according to the flow rate of the gas to accelerate the absorption of the gas, and the gas-liquid contact unit unit MU2, (Bubbles), and functions to filter and absorb particulate matter contained in exhaust gas (waste gas) and particulate matter, mist, and the like generated upon gas-liquid contact by bubbles.
The main body A comprises an upper surface A1, a lower surface A2, a left surface A3, a right surface A4, a front surface B1 and a rear surface B2, And has a structure in which a lower side A2 is detachably coupled as a hexahedron with a space formed therein and a fastening protrusion c is formed near four corners of the front side B1.
The outer surface of the right side surface A4 is formed with an engaging portion a having a concavo-convex shape in the longitudinal direction along the side n, and the outer surface of the left side surface A3 the concavo-convex shape engaging portion a and the engaging portion b can be separated from each other, and the concave-convex shape engaging portion a and the engaging portion b can be separated from each other, And in one embodiment (see FIG. 13) a substantially triangular shape
The front face B1 and the rear face B2 of the main body A are formed such that the quadrangular recesses h are formed continuously in four successive directions by the partition walls W so as to allow the exhaust gas (waste gas) 1 and 2 illustrate a preferred embodiment of the present invention in which the front surface B1 and the rear surface B2 are formed by the partition walls W so as to form a square groove h in a four- And a mesh structure in which the partition W is spaced apart from the central portion of the groove h.
3, the lower side A2 of the main body A of the present invention is detachably coupled to the main body A, and the lower side A2 is divided into a plurality of A plurality of coupling grooves e are formed so as to correspond to the positions of the coupling projections g to the inside of the lower end of the main body A, and in one embodiment, as shown in Fig. 3 Like engagement protrusion 'g' is inserted into the engagement groove 'e' so as to be detachable.
4 to 6 are views showing the unit gas-liquid contact medium (f), the gas-liquid contact medium (F2) and the
4, the unit gas-liquid contact medium f constituting the assembled gas-liquid contact unit unit MU1 according to the present invention includes a rod-shaped circular rod 1 (1) between the upper plate P1 and the lower plate P2, 1, the unit gas-liquid contact medium f is arranged in a plurality of rows while being arranged in parallel with a predetermined interval, and the
As shown in Figs. 5 and 6, the gas-liquid contact medium F2 constituting the assembled gas-liquid contact unit unit MU2 according to the present invention has two
7 to 9 are views showing front and rear surfaces of the assembled gas-liquid contact unit unit MU1 of the present invention and front views of the gas-liquid contact unit unit MU2, Fig. 11 is a cross-sectional view of the BB portion of Fig. 7 relative to the assembling device liquid contact unit unit MU1, Fig. 12 is a sectional view of the AA portion of the assembled liquid- 9] with reference to Figs. 7 to 12 as a cross-sectional view of the CC part.
7 to 10, fastening protrusions c are formed near the four corners of the front face B1 of the main body A of the present invention. In the vicinity of the four corners of the rear face B2, A hole d is formed and a preferred embodiment of each of the left side surface A3 and the right side surface A4 of the main body A of the present invention as shown in Figs. (A) and (b) having concave and convex shapes are formed and the concave and convex shapes of the concave and convex shapes of the concave and convex shapes are opposite to each other, In a detachable manner.
13 is a view showing the relationship in which the assembled gas-liquid contact unit unit MU1 and MU2 of the present invention are assembled by the concave and convex coupling portions (a) and (b) (A) and (b) of the concave-convex shape on the left side surface A3 and the right side surface A4 of the main body A of the present invention, respectively, a plurality of gas-liquid contact unit units MU1 and MU2 according to the present invention have a concave-convex shape combining unit (a) and a plurality of gas-liquid contact unit unit (MU2) It is possible to form various types of gas-liquid contact means combination while being continuously connected to each other in the left and right directions.
Fig. 14 is an enlarged view of a fastening hole d formed at the edge of the rear surface B2 of the main body. Fig. 15 to Fig. 17 show the fastening protrusion c formed on the edge of the front surface B1, The engagement between the fastening protrusion c and the fastening hole d of the present invention will be described with reference to Figs. 14 to 17. Fig.
A fastening protrusion c formed on a front portion of a front surface B1 of one of the plurality of main bodies A according to the present invention and a fastening protrusion formed on a rear portion B2 of the other main body A, 15 to 17, and the plurality of gas-liquid contact means unit units MU1 and MU2 according to the present invention are assembled in accordance with the fastening method, It is possible to form various types of gas-liquid contact member assemblies while continuously connecting the gas-liquid contact members MU2 in the forward and backward directions.
The plurality of gas-liquid contact unit units MU1 and (MU2) are formed by the action of the concave-convex coupling portions a and b and the coupling projection c and the coupling holes d formed in the main body A according to the present invention. Liquid contact means unit MU1 and MU2 which are coupled in accordance with the processing capacity of the exhaust gas (waste gas) of the scrubber by being continuously connected in the forward and backward directions and also continuously in the left and right direction, It is possible to provide gas-liquid contact means assemblies of various specifications and various types.
Liquid contact member unit MU1 and MU2 are continuously joined in the forward and backward directions and the gas-liquid contact member assembly continuously joined in the left and right direction is laminated (superposed) in the upward direction as described above It is possible to provide a gas-liquid contact means combination of various specifications and various types.
18 is a view showing a gas-liquid contact member assembly (HBF) in which a plurality of gas-liquid contact member unit bodies MU1 and MU2 are coupled to each other according to the present invention, Liquid contact member assembly (HBF) in which the gas-liquid contact member assembly in which the gas-liquid contact member MU2 and the gas-liquid contact member MU2 are joined in the left and right directions by the engaging portions (a) and (b) The plurality of gas-liquid contact unit units MU1 and MU2 are continuously coupled in the forward and backward directions by the action of the concave and convex coupling portions a and b and the coupling projection c and the coupling hole d, It is possible to provide a gas-liquid contact means combination which is combined in the left and right directions at the same time.
The main body A, the bottom surface A2 and the gas-liquid contact medium F1 (F2), which are components of the gas-liquid contact unit unit MU1 and MU2 of the present invention, are detachably coupled In order to facilitate the fastening and separation of the parts, the material is preferably made of a synthetic resin having elasticity and flexibility.
The specification of the gas-liquid contact unit unit (MU1) and the unit (MU2) itself according to the present invention, that is, the specifications of the main body (A) and the specifications of the gas- , And various sizes according to the size of the scrubber.
18, since the gas-liquid contact unit unit MU1 and the unit MU2 are combined with each other to provide various types of gas-liquid contact means combination, the present invention can be applied to a gas- It is possible to simply provide a gas-liquid contact means combination optimized for treatment according to concentration and constancy.
MUI, MU2: gas-liquid contact means unit F1, F2: gas-liquid contact medium
f: unit gas liquid contact medium A:
A1, A2, A3, A4, B1, B2: Top, Bottom, Left, Right Side, Front, Back
a, b: concave-convex shape coupling portion c, d: fastening protrusion portion and fastening hole
g, e: engaging projection and engaging groove
Claims (6)
The front face B1 and the rear face B2 are a network structure in which the square grooves h are continuously formed by the partition walls W in a four-sided continuous manner and at the same time, A main body A in which a fastening protrusion c is formed near four corners and a fastening hole d in which the fastening protrusion c is detachably coupled is formed near four corners of the other side,
A rod-shaped circular rod 1 is arranged between the upper plate P1 and the lower plate P2 as an internal space of the main body A and is installed in a plurality of rows while being arranged parallel to each other at regular intervals, The circular rod 1 is composed of a gas-liquid contact member unit MU1 for detachably mounting a gas-liquid contact medium F1 in which two gas-liquid contact media f which are alternately arranged in an overlapping manner,
A plurality of rectangular pillar-shaped support members 2 are arranged at regular intervals and the mesh sheet 3 is passed through the plurality of support members 2 in a zigzag manner Liquid contacting means unit (MU2) to which the gas-liquid contact medium (F2) arranged while being detachably mounted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150188269A KR101783376B1 (en) | 2015-12-29 | 2015-12-29 | Assemble type gas-liquid contact devic unit for Scrubber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150188269A KR101783376B1 (en) | 2015-12-29 | 2015-12-29 | Assemble type gas-liquid contact devic unit for Scrubber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20170078104A KR20170078104A (en) | 2017-07-07 |
| KR101783376B1 true KR101783376B1 (en) | 2017-09-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020150188269A KR101783376B1 (en) | 2015-12-29 | 2015-12-29 | Assemble type gas-liquid contact devic unit for Scrubber |
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| Country | Link |
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| KR (1) | KR101783376B1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200121582A (en) * | 2019-04-16 | 2020-10-26 | 주식회사 효진엔지니어링 | Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same |
| KR20220049211A (en) * | 2020-10-14 | 2022-04-21 | 주식회사 효진엔지니어링 | Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102124002B1 (en) * | 2018-11-02 | 2020-06-17 | 한국에너지기술연구원 | Apparatus on the Toxic Gas Removal by Wetted Wall Column |
| KR101955270B1 (en) * | 2018-11-06 | 2019-03-08 | 윤창진 | Complex type odor eliminator |
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| KR200276269Y1 (en) * | 2002-01-25 | 2002-05-21 | 주식회사 중외엔비텍 | Air filter for an air purifying apparatus |
| KR101564580B1 (en) * | 2015-06-26 | 2015-10-30 | 서익환 | Scrubber for waste gases removing by combination of gas-liquid contact device with multi function |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR200276269Y1 (en) * | 2002-01-25 | 2002-05-21 | 주식회사 중외엔비텍 | Air filter for an air purifying apparatus |
| KR101564580B1 (en) * | 2015-06-26 | 2015-10-30 | 서익환 | Scrubber for waste gases removing by combination of gas-liquid contact device with multi function |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20200121582A (en) * | 2019-04-16 | 2020-10-26 | 주식회사 효진엔지니어링 | Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same |
| KR102192344B1 (en) | 2019-04-16 | 2020-12-17 | 주식회사 효진엔지니어링 | Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same |
| KR20220049211A (en) * | 2020-10-14 | 2022-04-21 | 주식회사 효진엔지니어링 | Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same |
| KR102402387B1 (en) | 2020-10-14 | 2022-05-26 | 주식회사 효진엔지니어링 | Gas-liquid contact device for Waste gas removal scrub and Waste gas removal scrub using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20170078104A (en) | 2017-07-07 |
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