KR101780385B1 - Oled encapsulation structure and manufacturing method thereof - Google Patents
Oled encapsulation structure and manufacturing method thereof Download PDFInfo
- Publication number
- KR101780385B1 KR101780385B1 KR1020150123020A KR20150123020A KR101780385B1 KR 101780385 B1 KR101780385 B1 KR 101780385B1 KR 1020150123020 A KR1020150123020 A KR 1020150123020A KR 20150123020 A KR20150123020 A KR 20150123020A KR 101780385 B1 KR101780385 B1 KR 101780385B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- point alloy
- emitting diode
- organic light
- melting point
- Prior art date
Links
Images
Classifications
-
- H01L51/5237—
-
- H01L51/0002—
-
- H01L51/0026—
-
- H01L51/56—
-
- H01L2251/56—
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
In order to realize an organic light emitting diode encapsulating structure having a low process temperature that does not damage the organic film inside the organic light emitting diode device and excellent blocking ability against penetration of moisture and air, Forming a heating layer; Forming a preliminary encapsulant composed of a mixture of a low melting point alloy and a polymer organic substance on the heat generating layer; Separating the preliminary sealing material into a low-melting-point alloy layer and a polymer organic material layer by using a Joule heat generated by applying a current to the heating layer; And curing the polymer organic material layer.
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealing structure and a manufacturing method thereof, and more particularly, to an organic light emitting diode sealing structure and a manufacturing method thereof.
Organic light emitting diodes (OLEDs) have attracted much attention as next generation display devices because they have many advantages such as self-luminescence and high reaction speed. One of the major obstacles to device performance in organic light emitting diodes is the presence of black spots, which are known to be responsible for the penetration of moisture and / or air into the device. To prevent this, an effective sealing technique is needed to prevent penetration of moisture and air.
As a representative encapsulation technique of an organic light emitting diode, there is a method of using a UV curable epoxy together with a moisture absorber. In this curing method using only epoxy, moisture and air penetration can not be completely blocked. Glass frit is used as an encapsulating material and a technique of sealing with a laser is widely used. This method has an advantage that it has excellent ability to block moisture and air infiltration. However, since the generated temperature is high, it can be used only for a glass substrate.
Recently, the best sealing method is a thin film encapsulation (TFE) technology that continuously deposits organic and inorganic thin film layers. For example, there is a thin-film encapsulation technique in which four layers of a polymeric polymer, AlO x , are repeatedly deposited, and TFE techniques in which SiO 2 and SiN x are repeatedly deposited are studied. In addition, studies on the lifetime increase of CF x and Si 3 N 4 layers are under way. In addition, studies on the characteristics and life span of PVAC, PMMA, and CYTOP polymer barriers have been conducted, and studies on TFE technology through repeated deposition of Al 2 O 3 and polymer polymers have been conducted. However, such a method may cause serious problems in reliability if pinholes or cracks are not completely removed during the deposition process, and the moisture shielding force in the direction perpendicular to the thin film sealing layer is good, but the shielding effect in the parallel direction It is showing the limit.
In conclusion, there is still a need for a new encapsulation technology that has a low process temperature that does not damage the organic film inside the device, and has excellent blocking ability against moisture and air infiltration.
An object of the present invention is to provide an organic light emitting diode encapsulating structure having a low process temperature that does not damage the organic film inside the organic light emitting diode device and has excellent blocking ability against penetration of moisture and air, and a manufacturing method thereof. However, these problems are exemplary and do not limit the scope of the present invention.
An organic light emitting diode encapsulating structure according to one aspect of the present invention is provided. Wherein the organic light emitting diode encapsulating structure is a pattern locally disposed on a substrate, the heat emitting layer being capable of generating joule heat by an applied electric current; A low melting point alloy (LMPA) layer formed on the heating layer; And a polymer organic material layer surrounding at least a part of the heat generating layer and the low melting point alloy layer.
In the organic light emitting diode encapsulating structure, the substrate may include a lower substrate and an upper substrate spaced apart from each other, wherein the organic light emitting diode device is disposed on at least one substrate of the lower substrate and the upper substrate, Wherein the heat generating layer is disposed apart from the organic light emitting diode device and the low melting point alloy layer is interposed between the lower substrate and the upper substrate so as to block penetration of moisture and / or air, The both sides of the alloy layer may be sealed and adhered to the substrate by being cured while continuing from the lower substrate to the upper substrate.
In the organic light emitting diode encapsulating structure, the heat generating layer may contain at least one selected from the group consisting of Mo, Ti, Ni and Al, and the low melting point alloy layer may contain at least one selected from Sn, Cd, In and Bi have.
A method for manufacturing an organic light emitting diode encapsulating structure according to another aspect of the present invention is provided. A method of fabricating an organic light emitting diode encapsulation structure includes: a first step of forming a heating layer that is a pattern locally disposed on a substrate; A second step of forming a preliminary sealing material composed of a mixture of a low melting point alloy and a polymer organic substance on the heating layer; And a third step of phase-separating the preliminary sealing material into a low-melting-point alloy layer and a polymer organic material layer using a Joule heat generated by applying a current to the heating layer. And a fourth step of curing the polymer organic material layer after the third step.
In the method for manufacturing an organic light emitting diode encapsulating structure, the phase separation may be performed prior to the curing step.
The method of manufacturing an organic light emitting diode encapsulation structure according to claim 1, wherein the first step further comprises forming a sacrificial layer on the heating layer, wherein the sacrificial layer is formed by the joule heat generated in the third step At least some of the materials react with at least some of the materials constituting the low melting point alloy layer to form a compound, so that the low melting point alloy layer may have selective wetting with the sacrificial layer. In this case, in the third step, the low melting point alloy layer is formed in contact with the sacrificial layer, and the polymer organic material layer may be formed on both sides of the low melting point alloy layer.
The first step of the manufacturing method may further include forming an insulating layer interposed between the heating layer and the sacrificial layer.
According to the embodiments of the present invention described above, an organic light emitting diode encapsulating structure having a low process temperature that does not damage the organic film inside the organic light emitting diode device and excellent blocking ability against penetration of moisture and air, and a manufacturing method thereof Can be provided. Of course, the scope of the present invention is not limited by these effects.
1 is a flowchart illustrating a method of manufacturing an organic light emitting diode encapsulation structure according to an embodiment of the present invention.
2A and 2B are cross-sectional views schematically illustrating a manufacturing method according to an embodiment of the present invention and an organic light emitting diode encapsulating structure implemented thereby.
3 is a state diagram of Sn-Cu for illustrating a sacrifice layer applied to a method of manufacturing an organic light-emitting diode encapsulation structure according to an embodiment of the present invention.
4A and 4B are DSC curves of an epoxy and a low melting point alloy layer constituting a preliminary encapsulant applied in the method of manufacturing an organic light emitting diode encapsulating structure according to an embodiment of the present invention.
FIG. 5 is a graph illustrating a temperature measured in the process of manufacturing the organic light emitting diode encapsulating structure according to an embodiment of the present invention. Referring to FIG.
FIGS. 6A and 6B are photographs showing changes in the structure of the organic light emitting diode encapsulant before and after heating the joule heat in the process of manufacturing the organic light emitting diode encapsulating structure according to an embodiment, by an optical microscope.
7 is a scanning electron microscope (SEM) image of the organic light emitting diode encapsulating structure after the curing step in the process of manufacturing the organic light emitting diode encapsulating structure according to an embodiment of the present invention.
8A to 8C are SEM mapping images after Joule heating according to various thicknesses of a sacrificial layer applied to a method of manufacturing an organic light emitting diode encapsulating structure according to an embodiment of the present invention.
9A is a view for explaining factors for defining a phase separation characteristic in a method of manufacturing an organic light emitting diode encapsulating structure according to an embodiment of the present invention.
9B is a graph illustrating the phase separation characteristics according to the epoxy content in the method of manufacturing the organic light emitting diode encapsulating structure according to an embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, Is provided to fully inform the user. Also, at least some of the components may be exaggerated or reduced in size for convenience of explanation. Like numbers refer to like elements throughout the drawings.
It is to be understood that throughout the specification, when an element such as a layer or a region is referred to as being "on" another element, the element may be directly "on" It will be understood that there may be other intervening components. On the other hand, when an element is referred to as being "directly on" another element, it is understood that there are no other elements intervening therebetween.
The present inventors have found that a low melting point alloy line which prevents moisture and air from penetrating by inducing phase separation by heating a sealing material obtained by mixing a low melting point alloy (LMPA) and epoxy in a heat treatment furnace, A double-line structure of the line is proposed. However, since the temperature of about 180 ° C. is applied to the entire organic light emitting diode device, it may be necessary to further lower the heat treatment temperature to 100 ° C. or less so as not to damage the organic film inside the device.
In order to accomplish this, a method of locally heating only an encapsulation region using Joule heating is proposed as a manufacturing method of an organic light emitting diode encapsulation structure according to an embodiment of the present invention. Joule heating can be understood as a method of applying electric current to a conductor to generate heat corresponding to the Joule's law and heating it by using it.
Hereinafter, in order to solve the problem of excessive heat being applied to the organic material inside the device in a new sealing technique of heating a mixed material of a low-melting-point alloy and a polymer organic material, a technique of locally heating the sealing area using Joule heating Will be described in detail.
FIG. 1 is a flowchart illustrating a method of manufacturing an organic light emitting diode encapsulating structure according to an embodiment of the present invention. FIGS. 2a and 2b are sectional views sequentially illustrating a manufacturing method according to an embodiment of the present invention.
Referring to FIGS. 1, 2A, and 2B, a method of fabricating an organic light emitting diode encapsulating structure according to an exemplary embodiment of the present invention includes steps of preparing a substrate (S10) (S20); (S30) forming a
First, a substrate will be described in a method of manufacturing an organic light emitting diode encapsulating structure according to an embodiment of the present invention. The substrate may comprise a glass substrate or a substrate of flexible material. For example, the substrate may include a
The substrate on which the
According to the modified embodiment, the substrate on which the
According to such a configuration, since the
In step S30 of forming the
Particularly, when the polymer
In the present invention, the low
If the Joule heat is applied to the
Hereinafter, the
Step S20 of forming the
The
Further, the
Hereinafter, exemplary embodiments of the present invention for implementing the organic light-emitting diode encapsulating structure and the manufacturing method thereof will be described. It should be understood, however, that the invention is not limited to the disclosed exemplary embodiments, but is capable of other various forms of implementation. The following examples are intended to be illustrative of the present invention, Is provided to fully inform the user.
First, a seal pattern structure designed to generate joule heat will be described with reference to FIG. 2A. A
Fabrication of multilayer thin film pattern
Specifically, the multilayer thin film pattern includes a
Heating layer
The melting temperature of the Sn-58Bi material, which is the low melting point alloy (32) selected in this Experiment Example, was 139 占 폚, and the UV curable epoxy was used as the polymer organic material (34). UV hardening type epoxy was used without thermosetting epoxy due to insufficient amount of heat to cure Si series thermosetting epoxy by using Joule heat.
In this experimental example, a pattern of Mo, Ti, Ni, Al or the like was formed on the
Insulating layer
Since the surface of the
As the material of the insulating
Sacrificial layer
In this experiment, a Sn-58Bi composition with a melting temperature of 139 ° C was selected as a low-melting alloy (32). A sacrificial layer (24) capable of reacting with Sn-58Bi so that phase separation of Sn- ) Was introduced. FIG. 3 shows the state of Sn-Cu. It can be seen that Cu and Sn compounds are formed even at 100 ° C or lower. Therefore, in this experimental example, Cu was used as the
As the deposition conditions of Cu, Ar gas was injected by DC sputtering, and the coating was performed under a pressure of 500 mTorr. The coating thickness was varied to 1,500, 3,000 and 6,000 Å. The multilayer thin film pattern thus formed was patterned in the form of a line having a width of 0.5 mm and a thickness of several angstroms along the periphery of the substrate using photolithography and an aluminum etchant.
Manufacturing and printing of encapsulant
The sealing
First, comparative experiments were conducted for thermosetting and UV curing epoxy for the selection of suitable epoxy. FIGS. 4A and 4B are DSC curves for Sn-58Bi and thermosetting Si epoxy. As shown in FIG. 4B, the exothermic peak at 180.degree. C. and the endothermic peak at 139.degree. As a result of the basic experiment using Joule heating, it was judged that it is not effective to supply the amount of heat required for hardening by the Joule heating method in case of the thermosetting epoxy. On the other hand, in the case of the UV curable epoxy, the UV curable epoxy is selected in this experiment because it has a property of curing by reacting with UV more sensitively than heat. In order to stir the Sn-58Bi and the epoxy mixture, the mixture was stirred at 400 RPM for 20 minutes using a ball mill. The UV curing epoxy used in this experiment was one-pack type, and no curing agent was used.
The
When the epoxy is exposed to ultraviolet rays, the epoxy cures before the phase separation of Sn-58Bi and epoxy. In order to prevent this, all processes from preparation to printing of the mixture proceed under yellow fluorescent lamps blocked with ultraviolet rays.
Hereinafter, the results shown by the above-described experimental method will be discussed and explained.
Formation of double line by Joule heating
The current was applied to the encapsulated pattern using the power supply, and Joule heat was generated. Since the Mo thin film electrode used as the
FIG. 5 shows the temperature change with time when 5.8 W is applied. The temperature measurement is based on the temperature (a) at the sealing line and the temperature (b) at the position 5 mm from the sealing line on the glass substrate Respectively. The temperature of the sealing line was increased to 139 ° C above the melting temperature of Sn-58Bi after 60 seconds. The temperature of the glass substrate, which was 5 mm away from the sealing line, was measured at about 82 ° C (b). Under these conditions, it was judged that the organic light emitting layer inside the device would not be thermally damaged when fabricating the organic light emitting diode device. Therefore, in this experiment, the Joule heating condition was fixed by maintaining the condition at 5.8 W for 60 seconds.
Figs. 6A and 6B show changes in the encapsulation pattern structure before and after Joule heating with an optical microscope. As shown in FIG. 6A, the
UV hardening of epoxy
In the structure of FIG. 6B, double lines were formed. However, it was found that the adhesive strength between the two
The present inventor has conducted an experiment to obtain an adhesive force using a heating furnace. In this experiment, a two-step process was performed through UV curing, which is a method favorable for protecting devices. UV curing was carried out for 10 seconds with an ultraviolet lamp having wavelengths of 4.8 W and 365 nm.
FIG. 7 shows a cured seal pattern observed with a scanning electron microscope, showing a state in which Sn-58Bi was gathered along the encapsulation pattern and the epoxy was pushed out to the side and phase separation was obtained. Also, It can be seen that the glass substrate is well bonded.
Optimization of Cu thickness in underlayer
In this experiment, Cu was disposed as the
Therefore, in order to determine the minimum thickness required for the
Optimize mixture content
When the content of epoxy in the mixture (30) was 1.0 wt% or more, the viscosity of the mixture (30) became very thin and was not suitable for printing using a screen mask. Therefore, the epoxy content was varied to 0.2, 0.5 and 1.0 wt% The effect was investigated.
FIG. 9A shows the phase separation of the mixture, where a is the line width of the
Phase separation (?) = B / a
Spread (β) = c / a
FIG. 9B shows changes in phase separation () and degree of spread () depending on the epoxy content. In case of 0.2 wt%, the degree of spread was low as 2.0, but the phase separation was large as 1.5. In this case, phase separation did not occur effectively. It can be explained that the phase separation of Sn-58Bi and epoxy is not complete because of the insufficient flowability of epoxy due to the small amount of epoxy contained in the mixture. In the case of 0.5 wt%, the phase separation was about 1.2, so that most of Sn-58Bi and Cu, which is a sacrificial layer, migrated, and the epoxy moved out of the pattern. The spread also increased to 2.5. In the case of 1.0 wt%, the phase separation was not different from 0.5 wt%, but the spreading degree was greatly increased to 3.5. This means that the viscosity of the epoxy is too low, which means that the epoxy is pushed up to 3.5 times the design width of the multilayer thin film pattern at the time of printing or phase separation, which may affect the luminescent material inside the encapsulation line. As a result, it was judged that the phase separation property was the most excellent when the epoxy content was 0.5 wt%.
conclusion
Sn-58Bi and epoxy were mixed with each other using Joule heating, thereby developing a sealing method that does not deteriorate the organic light emitting diode device. As the sealing material, a mixture of Sn-58Bi, which is a low melting point alloy, and UV curable epoxy was printed. As the base layer, a multilayer thin film pattern of Mo (heat generating layer), SiO 2 (insulating layer) And induced phase separation by Sn-Cu reaction. 5.8 W was applied to the heating layer of Mo for 60 seconds. As a result, the sealing pattern region was locally heated to melt the Sn-58Bi and obtain a double line structure by phase separation with epoxy. After that, the epoxy was cured by irradiating UV to secure the adhesive force of the sealing portion. Through the experiment, the thickness of the Cu thin film as the sacrificial layer was optimized to 3,000 Å, and the epoxy content was optimized to 0.5 wt%.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art. will be. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.
10a, 10b: substrate
20: heat generating layer 22: insulating layer
24: sacrificial layer 25: ground layer
32, 32a: Low melting point alloy (layer)
34, 34a: Polymer organic material (layer)
Claims (8)
A second step of forming a preliminary sealing material composed of a mixture of a low melting point alloy and a polymer organic substance on the heat generating layer; And
A low-melting-point alloy layer for protecting the organic light-emitting diode device mounted on the substrate from moisture and oxygen using the joule heat generated by applying a current to the heating layer, A polymeric organic material layer covering a void or a crack existing at an interface between the polymeric organic material layer and the polymeric organic material layer to form a double-sealed structure;
/ RTI >
The first step further comprises forming a sacrificial layer on the heating layer,
By the joule heat generated in the third step, at least some of the materials constituting the sacrificial layer react with at least a part of materials constituting the low melting point alloy layer to form a compound, whereby the low melting point alloy layer is selectively removed from the sacrificial layer With wetting,
A method for manufacturing an organic light emitting diode encapsulating structure.
In the third step, the low melting point alloy layer is formed in contact with the sacrificial layer, and the polymer organic material layer is formed on both sides of the low melting point alloy layer.
Wherein the first step further comprises forming an insulating layer interposed between the heating layer and the sacrificial layer.
A second step of forming a preliminary sealing material composed of a mixture of a low melting point alloy and a polymer organic substance on the heat generating layer;
A low-melting-point alloy layer for protecting the organic light-emitting diode device mounted on the substrate from moisture and oxygen using the joule heat generated by applying a current to the heating layer, A polymeric organic material layer covering a void or a crack existing at an interface between the polymeric organic material layer and the polymeric organic material layer to form a double-sealed structure; And
A fourth step of curing the polymer organic material layer after the third step;
Wherein the organic light-emitting diode encapsulation structure is formed on the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150123020A KR101780385B1 (en) | 2015-08-31 | 2015-08-31 | Oled encapsulation structure and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150123020A KR101780385B1 (en) | 2015-08-31 | 2015-08-31 | Oled encapsulation structure and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20170025907A KR20170025907A (en) | 2017-03-08 |
KR101780385B1 true KR101780385B1 (en) | 2017-09-21 |
Family
ID=58404609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150123020A KR101780385B1 (en) | 2015-08-31 | 2015-08-31 | Oled encapsulation structure and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR101780385B1 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3451516B2 (en) | 1996-04-09 | 2003-09-29 | オムロン株式会社 | Electronic component, its manufacturing method and brazing method |
JP2008249839A (en) * | 2007-03-29 | 2008-10-16 | Fujifilm Corp | Organic el panel and manufacturing method therefor |
JP4330717B2 (en) | 1999-08-09 | 2009-09-16 | 東京エレクトロン株式会社 | Hot plate unit and method of using hot plate unit |
JP2011137918A (en) * | 2009-12-28 | 2011-07-14 | Fujifilm Corp | Method for manufacturing metal sealed electronic element |
-
2015
- 2015-08-31 KR KR1020150123020A patent/KR101780385B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3451516B2 (en) | 1996-04-09 | 2003-09-29 | オムロン株式会社 | Electronic component, its manufacturing method and brazing method |
JP4330717B2 (en) | 1999-08-09 | 2009-09-16 | 東京エレクトロン株式会社 | Hot plate unit and method of using hot plate unit |
JP2008249839A (en) * | 2007-03-29 | 2008-10-16 | Fujifilm Corp | Organic el panel and manufacturing method therefor |
JP2011137918A (en) * | 2009-12-28 | 2011-07-14 | Fujifilm Corp | Method for manufacturing metal sealed electronic element |
Also Published As
Publication number | Publication date |
---|---|
KR20170025907A (en) | 2017-03-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3290375B2 (en) | Organic electroluminescent device | |
JP5981018B2 (en) | Method for manufacturing organic electronic device | |
TWI452744B (en) | Electroluminescent structure | |
JPWO2014057647A1 (en) | ORGANIC ELECTROLUMINESCENT ELEMENT AND LIGHTING DEVICE | |
JP2005510851A (en) | Organic light emitting diode (OLED) | |
CN110660932A (en) | Manufacturing method of electroluminescent device, electroluminescent device and display device | |
US20100258797A1 (en) | Organic electroluminescent device and method for manufacturing the same | |
KR101780385B1 (en) | Oled encapsulation structure and manufacturing method thereof | |
WO2012140736A1 (en) | Organic electroluminescence device | |
JP6186652B2 (en) | Substrates for organic electronic devices | |
CN110291642B (en) | Display panel, manufacturing method thereof and display device | |
JP2013097917A (en) | Organic el device and manufacturing method thereof | |
JP2001052863A (en) | Organic el element and manufacture thereof | |
JP4945408B2 (en) | Method and apparatus for manufacturing organic electroluminescence | |
JP5570092B2 (en) | LIGHT EMITTING ELEMENT AND MANUFACTURING METHOD THEREOF | |
KR101888097B1 (en) | Oled encapsulation structure and manufacturing method thereof | |
WO2013030919A1 (en) | Organic electroluminescence device | |
JP2000243557A (en) | Organic electroluminescence element and its manufacture | |
JP2002117972A (en) | Organic el display device and its manufacturing method | |
KR20130135142A (en) | Organic electronic device | |
TW201108456A (en) | Short circuit prevention in electroluminescent devices | |
JP2009037799A (en) | Light-emitting element and its manufacturing method | |
JP2010080421A (en) | Organic el element and method for manufacturing the same | |
KR101573602B1 (en) | Oled encaptulation structure and manufacturing method thereof | |
JP2019204917A (en) | Semiconductor package and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right |