KR101740821B1 - medical plasma generation device - Google Patents

medical plasma generation device Download PDF

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Publication number
KR101740821B1
KR101740821B1 KR1020150157215A KR20150157215A KR101740821B1 KR 101740821 B1 KR101740821 B1 KR 101740821B1 KR 1020150157215 A KR1020150157215 A KR 1020150157215A KR 20150157215 A KR20150157215 A KR 20150157215A KR 101740821 B1 KR101740821 B1 KR 101740821B1
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South Korea
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plasma
protective capsule
medical
electrode
pattern
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KR1020150157215A
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Korean (ko)
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KR20170054716A (en
Inventor
정규선
김상유
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한양대학교 산학협력단
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/44Applying ionised fluids
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61CDENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
    • A61C19/00Dental auxiliary appliances
    • A61C19/06Implements for therapeutic treatment
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/0005Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor for pharmaceuticals, biologicals or living parts
    • A61L2/0011Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor for pharmaceuticals, biologicals or living parts using physical methods

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Biomedical Technology (AREA)
  • Engineering & Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Dentistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Molecular Biology (AREA)
  • Plasma Technology (AREA)

Abstract

A medical plasma generator is provided. The medical plasma generating apparatus includes a protective capsule, a gas supply line, a plasma generating unit, a power transmitting unit, and a power supply line. The plasma generating electrode generates a plasma for generating a molecule . In addition, it is possible to provide a high-efficiency and high-performance medical-use plasma generating device by being able to perform in parallel with other drugs and endoscopic examination.

Description

[0001] The present invention relates to a medical plasma generation device,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0002] The present invention relates to a medical plasma generating apparatus, and more particularly, to a medical plasma generating apparatus that generates plasma to sterilize a human body and supply radicals and gases necessary for a human body.

Plasma has been widely used for the surface treatment of semiconductors, display devices, and various parts, and has become a fusion technology field for biotechnology research, medical care, air cleaning, and incinerator by widening its applicability. Particularly, the field is expanding to medical fields such as tooth whitening, cancer cell death, and blood coagulation speed promotion. In the case of conventional lasers, however, There was a disadvantage that the treatment was impossible. However, in the case of plasma, there is no heat damage, and according to the plasma generating apparatus, a treatment area of a large area can be uniformly and efficiently treated.

Oxygen radicals such as ultraviolet rays (UV) and ozone generated in the plasma, nitrogen oxides such as nitrogen monoxide, currents and charged particles each have an effect of increasing cell immunity, sterilization, cancer cell necrosis and blood circulation Is reported to cause.

In order to maximize the above-mentioned therapeutic effect, it is required that the plasma generator is inserted into the human body and operated in a target internal organ such as oral cavity, esophagus, stomach, small intestine, large intestine, nose, ear and the like. However, most conventional plasma generating apparatuses are characterized in that they operate outside the human body.

The following problems may occur when conventional plasma generating devices are inserted into the human body for a high-efficiency therapeutic effect.

In a conventional plasma generating apparatus including a thick dielectric, a high voltage is required in generating a plasma, so insulation may be difficult.

Also, when the dielectric is a polymer containing fluorine or chlorine, serious side effects may be caused by fluorine and chlorine generated during plasma generation.

Further, when a plasma jet having a length of several cm is inserted into the human body, it may cause inconvenience to the user.

In addition, the plasma generating apparatus, which is inserted and operated inside the human body, is susceptible to infection and metastasis, so that it is always allowed to use only one time.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a high-performance medical plasma generator capable of being inserted into a human body and treating the plasma using the plasma.

It is another object of the present invention to provide a plasma generator for medical use having a high heat dissipation function.

It is another object of the present invention to provide a medical plasma generator capable of being used in combination with other drugs and devices.

It is another object of the present invention to provide a high-safety medical plasma generator for preventing the release of body secretion material into the inside of a protective capsule.

It is another object of the present invention to provide a low cost plasma generator for medical use by low voltage discharge.

Another technical problem to be solved by the present invention is to provide a medical plasma generator for generating carbon dioxide, ozone, and nitrogen oxides that increase the metabolism and immunity of the human body.

It is another object of the present invention to provide a low cost disposable medical plasma generator.

The technical problem to be solved by the present invention is not limited to the above.

In order to solve the above technical problems, the present invention provides a medical plasma generator.

According to an embodiment of the present invention, the medical plasma generator includes a protective capsule having a space formed therein and having a plurality of holes communicating with the space and the outside on the surface; And a plasma generating unit positioned in the protective capsule and generating plasma, wherein the plasma generating unit comprises: a film type dielectric; And electrodes formed on both sides of the dielectric.

According to one embodiment, the protective capsule of the medical-purpose plasma generating apparatus includes a cylindrical tube having both side openings; And a hemispherical cover for sealing both open sides of the tube.

According to an embodiment of the present invention, the medical plasma generator may further include a power transmission unit contacting one of the electrodes and transmitting the power supplied from the external power source to the plasma generation unit.

According to one embodiment, the power transfer portion of the medical plasma generator is an electrically conductive material and includes a cylindrical rod shape, and the plasma generating portion may be wound along the circumference of the power transmitting portion.

According to one embodiment, the protective capsule of the medical plasma generator may be a nonconductive material.

According to an embodiment of the present invention, the medical plasma generator may further include a gas supply line connected to one end of the protective capsule and transmitting a reaction gas from the outside to the inside of the protective capsule.

According to one embodiment, the endoscope insertion tube may further include an endoscope insertion tube inserted into a human body of the medical plasma generation device, and the protective capsule may be positioned at a front end of the endoscope insertion tube.

According to one embodiment, the electrode pattern of the medical plasma generator may be provided in a smooth curve shape in a region where the direction is switched.

According to an embodiment, the pattern width of the electrode electrode of the medical plasma generator may be 0.2 to 2 mm.

According to an embodiment, the distance between the patterns of the electrodes of the medical plasma generator may be larger than twice the electric field area generated in the pattern.

According to an embodiment, the power supply of the medical plasma generator may be an AC power source of several kHz to 20 kHz.

According to one embodiment, the concentration of carbon dioxide produced in the plasma generating portion of the medical plasma generator may be greater than the concentration of carbon dioxide in the atmosphere.

The apparatus for generating a medical plasma according to an embodiment of the present invention is capable of performing high-performance treatment by directly injecting into the human body to provide harmful bacteria, bios sterilization, increase of human immunity, and radicals necessary for activation of metabolism.

Further, the medical plasma generator according to the embodiment of the present invention has a long service life due to the provision of the heat radiation function.

Further, the medical plasma generator according to the embodiment of the present invention can reduce the risk of electric shock by driving at low voltage.

Further, in the medical-use plasma generating apparatus according to the embodiment of the present invention, the inflow of foreign matter is blocked by the internal pressure, so that stable treatment is possible.

In addition, the medical-use plasma generating apparatus according to the embodiment of the present invention can perform parallel treatment with other drugs and devices.

1 to 3 are views for explaining the medical plasma generator according to an embodiment of the present invention.
4 is a cross-sectional view of a plasma generating portion in a medical plasma generating apparatus according to an embodiment of the present invention.
5 is a plan view showing a pattern of a second electrode in a medical plasma generator according to an embodiment of the present invention.
6 is a flowchart illustrating an operation of the medical plasma generator according to an embodiment of the present invention.
7 is a perspective view of a medical plasma generator according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In this specification, when an element is referred to as being on another element, it may be directly formed on another element, or a third element may be interposed therebetween. Further, in the drawings, the thicknesses of the films and regions are exaggerated for an effective explanation of the technical content.

Also, while the terms first, second, third, etc. in the various embodiments of the present disclosure are used to describe various components, these components should not be limited by these terms. These terms have only been used to distinguish one component from another. Thus, what is referred to as a first component in any one embodiment may be referred to as a second component in another embodiment. Each embodiment described and exemplified herein also includes its complementary embodiment. Also, in this specification, 'and / or' are used to include at least one of the front and rear components.

The singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It is also to be understood that the terms such as " comprises "or" having "are intended to specify the presence of stated features, integers, Should not be understood to exclude the presence or addition of one or more other elements, elements, or combinations thereof. Also, in this specification, the term "connection " is used to include both indirectly connecting and directly connecting a plurality of components.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

1 to 3 are views for explaining the medical plasma generator according to an embodiment of the present invention. 1 is a perspective view of the medical plasma generator according to an embodiment of the present invention, FIG. 2 is a partial perspective view of the medical plasma generator, and FIG. 3 is a cross-sectional view of the medical plasma generator.

1 to 3, the medical plasma generator 100 includes a protective capsule 200, a gas supply line 250, a plasma generation unit 300, a power transmission unit 400, and a power supply line 450 .

The protective capsule 200 includes a space therein, and a plurality of holes 230 are formed on a surface thereof. The inner space of the protective capsule 200 communicates with the outside through the holes 230. The holes 230 provide a passage through which the radicals described below are radiated from the inside of the protective capsule 200 to the outside.

The protective capsule 200 has a capsule shape. More specifically, the protective capsule 200 includes a tube 200c having both sides open and hemispherical covers 200a and 200b. The covers (200a, 200b) can seal both open sides of the tube (200c).

The protective capsule 200 may be made of a nonconductive material. Therefore, it is possible to reduce the risk of electric shock during the plasma discharge in the human body, thereby enhancing the stability.

A gas supply line 250 is connected to one surface of the protective capsule 200. The gas supply line 250 is in the form of a tube and is connected to an external gas supply source to transfer the reaction gas to the protection capsule 200. For example, the reaction gas may be nitrogen, helium, argon, or a small amount of air containing them.

The plasma generating part 300 is located in the protective capsule 200. The plasma generating unit 300 generates a plasma under atmospheric pressure.

4 is a cross-sectional view of a plasma generating portion in a medical plasma generating apparatus according to an embodiment of the present invention.

Referring to FIGS. 1 to 4, the plasma generating part 300 includes a dielectric 310 and electrodes 320 and 330.

The dielectric 310 may be at least one of polyimide (PI), polyethylene terephthalate (PET), polyethersulfone (PES), and polycarbonate. According to one embodiment, the dielectric 310 may be polyimide. Polyimide has higher adhesive force and glass transition temperature than other polymer materials and polyimide does not contain halogen element, so it is suitable for medical use because no harmful substances are generated.

The thickness of the dielectric 310 may be several tens of micrometers. For example, the thickness of the dielectric 310 may be greater than or equal to 25.4 μm and less than or equal to 50 μm. Accordingly, the dielectric 310 may be provided in a flexible form.

The electrodes 320 and 330 may be deposited on both sides of the dielectric 310.

The electrodes 320 and 330 are metal. For example, the electrodes 320 and 330 may be copper metal.

The electrodes 320 and 330 may be thinner than the dielectric 310. According to one embodiment, the thickness of the electrodes 320 and 330 may be 2 μm or more and 10 μm or less. Accordingly, the electrodes 320 and 330 may be provided in a flexible form.

Accordingly, the plasma generating part 300 may have a flexible characteristic and may be provided in the form of wrapping along the side surface of the power transmitting part 400.

The electrodes 320 and 330 may be deposited on the dielectric 310 through an alloy layer. The alloy layer is formed between one surface of the dielectric material 310 and the first electrode 320 and between the other surface of the dielectric material 310 and the second electrode 330, Thereby improving the adhesion between the electrodes 320 and 330. For example, the alloy layer may contain nickel.

The electrodes 320 and 330 include a first electrode 320 attached to one surface of the dielectric 310 and a second electrode 330 formed on the other surface of the dielectric 310.

The first electrode 320 is in contact with one surface of the power transmission unit 400. The first electrode 320 receives power from the power transfer unit 400. The second electrode 330 may be grounded.

5 is a plan view showing a pattern of a second electrode in a medical plasma generator according to an embodiment of the present invention.

Referring to FIG. 5, the second electrode 330 may be provided in a predetermined pattern. More specifically, the pattern may be composed of a combination of a straight line and a curved line. In the case of the region (A) in which the direction of the pattern is switched, the pattern may be gently provided in the form of a curve. For example, the shape of the pattern may be a C shape or may be provided in an S shape or an O shape.

If the pattern in the direction switching region A is a sharply curved shape, an electric field can be intensively formed in the direction switching region A in which the direction switching occurs rapidly. Therefore, a plasma with a relatively high density can be formed in a pattern shape in which the direction change is gentle. The high density plasma may induce etching of the dielectric 310 and the second electrode 330. Therefore, in order to prevent this, the pattern of the second electrode 330 according to the embodiment of the present invention is provided in the form of a smooth curve.

Also, the end portions 330c and 330d of the second electrode 330 pattern are provided as curved surfaces. According to one embodiment, the end portions 330c and 330d of the pattern of the second electrode 330 may be provided in a semicircular shape.

For example, when a voltage is applied to the first electrode 320, an electric field is applied to the end of the pattern 330, (330c, 300d). Therefore, it is possible to form a plasma with a higher density than in the case of the semicircular state. The high density plasma may induce etching of the dielectric 310 and the second electrode 330. In order to prevent this, the pattern end portions 330c and 330d of the second electrode 330 according to the embodiment of the present invention are provided as curved surfaces.

The width of the second electrode 330 may be several meters. For example, the width of the second electrode 330 may be 0.2 mm or more and 2.0 mm or less.

If plasma etching is generated at the boundary between the dielectric 310 and the second electrode 330 when the width w of the second electrode 330 is 0.2 mm or less, It may be easily detached. Therefore, in order to prevent this, the width w of the second electrode 330 according to the embodiment of the present invention is provided in a range of 0.2 mm or more to 2.0 mm or less.

The distance d between the first pattern 330a and the second pattern 330b of the second electrode 330 is determined according to the type and thickness of the dielectric 310 and the magnitude of the applied voltage. The distance d between the first pattern 330a and the second pattern 330b of the second electrode 330 may be less than the distance d between the first and second patterns 330a and 330b At least twice as much is required. An electric field region generated in the patterns 330a and 330b may be obtained through plasma generation experiments. For example, when the distance d between the patterns 330a and 330b is narrower than twice the electric field area, the electric field generated in the first pattern 112a and the electric field generated in the second pattern 112b May be overlapped, and the electric field may be canceled. As a result, a low density plasma is generated due to a low townsend coefficient due to a low electric field. Therefore, the distance d between the patterns 330a and 330b of the second electrode 330 according to the embodiment of the present invention should be at least twice as large as the electric field generated in the patterns 330a and 330b In this case, the plasma can be generated with a uniform intensity.

1 to 3, the power transfer part 400 has a cylindrical rod shape and is located within the protective capsule 200. [

The plasma generating part 300 may be wound around the power transmitting part 400.

The power transmission unit 400 may be a conductive material. Accordingly, the side surface of the power transmission unit 400 is in electrical contact with the first electrode 320. As a result, the power transmission unit 400 may transmit power to the plasma generation unit 450.

The power transmission unit 400 may be a material having a high specific heat. Accordingly, when the plasma generating part 300 is overheated, it is possible to perform a heat radiating function to cool the plasma.

A power supply line 450 is connected to one surface of the power transmission unit 400. The power supply line 450 is connected to a power supply unit located outside the human body and transmits power to the power transfer unit 400.

6 is a flowchart illustrating an operation of the medical-use plasma generator according to an embodiment of the present invention.

Referring to FIG. 6, the protective capsule 200 is inserted at a position to be sterilized and / or treated inside the body. Thereafter, a reaction gas is supplied into the protective capsule 200, and power is supplied to the power transfer unit 400.

An electric field is formed between the electrodes of the plasma generating part 300 provided with the electric power. Electrons accelerated by the electric field react with the reaction gas to cause a plasma discharge. Carbon dioxide, nitrogen oxides, and oxygen radicals may be produced as a by-product of the discharge of the plasma. Also, when the dielectric material is polyethersulfone (PES), sulfur is produced in the by-product 500 of the plasma discharge.

The byproducts 500 of the plasma discharge are discharged into the human body through the plurality of holes 230 formed in the side surface 200c of the protective capsule 200. [ At this time, the diffusion rate can be controlled by the amount of the reaction gas introduced from the gas supply line 250.

Among the byproducts 500 of the plasma discharge, the carbon dioxide reacts with moisture and is transformed into carbon dioxide. The carbon dioxide gas may induce expansion of the capillary blood vessels to help the blood circulation of the user, and stabilize the blood pressure, thereby reducing the burden on the heart. The carbon dioxide gas can remove the fat formed in the skin tissue inside the human body. In general, bicarbonate has been proven to be effective in the treatment of chronic skin diseases, allergic diseases, keratitis, and arthritis, and has the effects of anti-inflammatory and anti-convulsive effects.

The sulfur (S) prevents arteriosclerosis by dilating capillaries, coronary arteries and cerebral arteries. In addition, by increasing the concentration of glutathione and vitamin C in the blood, it can exert a therapeutic effect on chronic dermatitis and bronchial asthma.

The nitrogen oxides increase the immunity of the human body and activate the metabolism. It is also applicable to radiation and anti-cancer drug treatment.

The radical reacts with harmful bacteria located inside the human body and sterilizes the inside of the human body such as oral cavity, esophagus, stomach, small intestine, large intestine, nose, ear, and the like.

Since the inside of the protective capsule 200 is filled with the reaction gas and the plasma by-product 500, the inside of the protective capsule 200 has a higher pressure than the outside. In addition, foreign matter such as mucus generated in the human body is prevented from flowing into the protective capsule 200 by the flow of the plasma by-product 500. Therefore, the protective capsule 200 can be stably used for a long period of time without contamination and / or corrosion.

7 is a perspective view of a medical plasma generator according to another embodiment of the present invention.

Referring to FIG. 7, the medical plasma generator may further include an endoscope insertion tube 600.

The protective capsule 200 may be connected to one end of the endoscope insertion tube 600. The gas supply line 250 and the power supply line 450 are inserted into the endoscope insertion tube 600.

Since the medical plasma generator can be combined with the endoscopic treatment and the sterilization treatment, a high therapeutic effect and shortening of the treatment time can be expected.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the invention.

100; Medical Plasma Generator
200; Protective capsules
200a; tube
200b, 200c; Covers
230; hall
250; Gas supply line
300; The plasma generator
310; dielectric
320; The first electrode
330; The second electrode
330a; The first pattern
330b; The second pattern
330c, 330d; Pattern end portions
400; The power-
450; Power supply line
500; Plasma discharge byproduct
600; Endoscope insertion tube

Claims (12)

A protective capsule having a space formed therein and having a plurality of holes communicating with the space and the outside; And
And a plasma generating unit positioned in the space of the protective capsule and generating plasma,
The plasma generator
Flexible film type dielectric; And
And electrodes formed on both surfaces of the dielectric.
The method according to claim 1,
The protective capsule
A cylindrical tube whose both sides are opened; And
And a hemispherical cover for sealing both open sides of the tube.
The method according to claim 1,
And a power transmitting unit contacting one of the electrodes and transmitting the power received from the external power source to the plasma generating unit.
The method of claim 3,
Wherein the power transmission portion is a conductive material and has a cylindrical rod shape,
Wherein the plasma generator is wound along a circumference of the power transmission unit.
The method according to claim 1,
Wherein the protective capsule is a nonconductive material.
The method according to claim 1,
And a gas supply line connected to one end of the protective capsule and adapted to transfer a reaction gas from the outside to the inside of the protective capsule.
The method according to claim 1,
And an endoscope insertion tube inserted into the human body,
Wherein the protective capsule is positioned at a front end of the endoscope insertion tube.
The method according to claim 1,
The electrode is provided in a pattern of a predetermined shape,
Wherein the pattern of the electrode is provided in a smooth curve shape in a region where the direction is switched.
9. The method of claim 8,
And the pattern width of the electrode is 0.2 to 2 mm.
9. The method of claim 8,
Wherein the distance between the patterns of the electrodes is larger than twice the electric field area generated in the pattern.
The method according to claim 1,
Wherein an AC power source is applied for generating the plasma, and the frequency is from several KHz to 20 kHz.
The method according to claim 1,
Wherein the concentration of carbon dioxide produced in the plasma generating portion is greater than the concentration of carbon dioxide in the atmosphere.

KR1020150157215A 2015-11-10 2015-11-10 medical plasma generation device KR101740821B1 (en)

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
US10779389B1 (en) 2020-01-20 2020-09-15 Psm Inc. Hand-type low temperature microwave plasma generator
KR102231371B1 (en) 2020-01-29 2021-03-25 주식회사 피에스엠 Cold plasma generating apparatus and multi-cold plasma generator comprising the same

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KR101841555B1 (en) * 2017-01-23 2018-05-21 바이오메틱 주식회사 Apparatus for hairdressing and beautycare using plasma
KR101940241B1 (en) * 2017-09-15 2019-01-18 주식회사 오존힐 Plasma apparatus with medical oxygen injection function
KR101922507B1 (en) * 2017-11-29 2018-11-28 주식회사 서린메디케어 Skin treatment apparatus using fractional plasma
KR102234028B1 (en) * 2019-09-20 2021-03-31 플람 주식회사 A portable apparatus for treating the mask pack with plasma
KR102454588B1 (en) * 2020-06-11 2022-10-13 최용남 Vagina cleaner using plasma
KR102651635B1 (en) * 2021-06-16 2024-03-27 주식회사 아이비엠솔 A plasma generating module for cervix

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KR101171091B1 (en) * 2011-09-16 2012-08-06 주식회사 메디플 Atmospheric pressure rf plasma generating medical instrument for dental

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10779389B1 (en) 2020-01-20 2020-09-15 Psm Inc. Hand-type low temperature microwave plasma generator
KR20210093491A (en) 2020-01-20 2021-07-28 주식회사 피에스엠 Low temperature microwave plasma generator of hand type
KR102231371B1 (en) 2020-01-29 2021-03-25 주식회사 피에스엠 Cold plasma generating apparatus and multi-cold plasma generator comprising the same
US11264211B2 (en) 2020-01-29 2022-03-01 Psm Inc. Cold plasma generating apparatus and multi-cold plasma array apparatus comprising the same

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