KR101688561B1 - Beam reflector - Google Patents

Beam reflector Download PDF

Info

Publication number
KR101688561B1
KR101688561B1 KR1020150086726A KR20150086726A KR101688561B1 KR 101688561 B1 KR101688561 B1 KR 101688561B1 KR 1020150086726 A KR1020150086726 A KR 1020150086726A KR 20150086726 A KR20150086726 A KR 20150086726A KR 101688561 B1 KR101688561 B1 KR 101688561B1
Authority
KR
South Korea
Prior art keywords
cooling
beam reflector
cooling plate
plate
cooling fluid
Prior art date
Application number
KR1020150086726A
Other languages
Korean (ko)
Other versions
KR20160130692A (en
Inventor
윤시영
Original Assignee
한화시스템 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한화시스템 주식회사 filed Critical 한화시스템 주식회사
Publication of KR20160130692A publication Critical patent/KR20160130692A/en
Application granted granted Critical
Publication of KR101688561B1 publication Critical patent/KR101688561B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0407—Liquid cooling, e.g. by water

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The present invention relates to a beam reflector, and more particularly to a beam reflector having a cooling structure for cooling heat absorbed by a beam reflector disposed in a beam path of a laser output device and reflecting the laser beam.
A beam reflector according to an embodiment of the present invention is a beam reflector disposed in a beam path of a laser output device and having a cooling structure for cooling the heat absorbed by a beam reflector that reflects the laser beam, ; A cooling plate having an upper surface attached to the opposite side of the reflective surface of the reflective layer; And a unit cooling section that divides the cooling plate into a plurality of regions and divides the cooling plate into regions.

Description

BEAM REFLECTOR [0002]

The present invention relates to a beam reflector, and more particularly to a beam reflector having a cooling structure disposed in a beam path of a laser output device for cooling heat absorbed from a laser beam.

Efforts to increase the output of lasers have been an important issue, both academia and industry, since the report of laser oscillation in 1960. As the laser output increases, the laser output is limited by thermal problems in the laser gain material, nonlinear phenomena, and the like.

In such a laser output apparatus, particularly in a high output laser output apparatus, the beam reflector for reflecting the laser beam is heated by the laser beam, so that it is necessary to cool the beam reflector efficiently. That is, in a high-output laser device, a temperature rise due to absorption of a high laser energy causes a change in the thermal deformation or refractive index of the beam reflector, and a phenomenon occurs in which the focal position fluctuates.

The generation of the error due to the above causes has a great influence on the precision in controlling the laser beam of high output. Therefore, an efficient cooling structure of the beam reflector is required to minimize the temperature variation of the beam reflector.

For this purpose, conventionally, in order to cool the beam reflector, a cooling channel is formed along the reflection surface inside the cooling plate, a cooling fluid is injected into the side surface, and the beam reflector is cooled by the horizontal flow of the cooling fluid flowing along the cooling channel Method. However, when the beam reflector is cooled by the horizontal flow along the reflective surface of the cooling fluid, the temperature of the cooling fluid gradually increases during cooling, and the entire temperature distribution of the beam reflector can not be uniformly maintained. And the beam reflector is deformed or broken due to heat.

KR 10-2003-0058530 A

The present invention provides a beam reflector having a cooling structure capable of uniformly cooling heat absorbed from a laser beam.

A beam reflector having a cooling structure according to an embodiment of the present invention is a beam reflector disposed in a beam path of a laser output device and having a cooling structure for cooling heat absorbed from the laser beam, A reflective layer; A cooling plate having an upper surface attached to the opposite side of the reflective surface of the reflective layer; And a unit cooling section that divides the cooling plate into a plurality of regions and divides the cooling plate into regions.

Wherein the unit cooling portion includes: a partition wall extending from a lower surface of an interface of each of the partitioned regions of the cooling plate to form an internal space having an opened lower portion; A cooling pipe inserted in the opened lower portion to supply a cooling fluid to the internal space; And a discharge port formed in the opened lower portion to discharge a cooling fluid supplied to the inner space.

The partition may be integrally formed with the cooling plate.

The cooling pipe may be inserted and disposed at a predetermined distance from the lower surface of the cooling plate and the partition wall.

The spacing space may form a flow path of the cooling fluid supplied from the cooling pipe.

The spacing space of the cooling tubes located at the center of the cooling plate and the spacing of the cooling tubes located at the periphery of the cooling plate may be adjusted differently.

Each of the regions defined by the unit cooling portion may be formed to have any one of a triangular shape, a square shape, and a hexagonal shape.

The cooling fluid may comprise cooling air containing nitrogen.

According to the beam reflector according to the embodiment of the present invention, the cooling plate for cooling the reflection layer is divided into a plurality of regions and divided into regions and cooled, thereby minimizing the flow of the cooling fluid along the reflection surface to reduce the temperature gradient of the reflection surface And the beam reflector can be uniformly cooled.

In addition, according to the beam reflector according to the embodiment of the present invention, the beam reflector can be cooled so as to have a uniform temperature gradient in the thickness direction of the beam reflector through the vertical flow of the cooling fluid in the inner space defined by the partition walls have.

That is, according to the beam reflector according to the embodiment of the present invention, the laser beam is cooled so as to have a uniform temperature gradient not only in the reflective surface direction but also in the thickness direction of the beam reflector, It is possible to prevent the variation of the focus position in accordance with the change of the focus position.

1 is a plan view schematically showing a beam reflector according to an embodiment of the present invention;
FIG. 2 is a perspective view showing a partition wall formed on a cooling plate according to an embodiment of the present invention; FIG.
3 is a side sectional view showing a configuration of a beam reflector according to an embodiment of the present invention.
4 is a side cross-sectional view showing the flow of cooling fluid in the unit cooling section according to the embodiment of the present invention.
5 is a graph showing a temperature distribution in a thickness direction of a beam reflector according to an embodiment of the present invention.
6 is a plan view schematically illustrating a beam reflector according to another embodiment of the present invention.
7 is a plan view schematically showing a beam reflector according to another embodiment of the present invention.

The beam reflector according to the present invention minimizes the flow of cooling fluid along the reflective surface to provide a technical feature that can uniformly cool the heat absorbed from the laser beam.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, Is provided to fully inform the user. Wherein like reference numerals refer to like elements throughout.

1 is a plan view schematically showing a beam reflector according to an embodiment of the present invention.

1, a beam reflector according to an embodiment of the present invention is a beam reflector disposed in the beam path of a laser output device and having a cooling structure for cooling heat absorbed from the laser beam, A reflective layer (10) having a surface; A cooling plate (20) having an upper surface attached to the opposite side of the reflective surface of the reflective layer (10); And a unit cooling unit 30 that divides the cooling plate 20 into a plurality of regions and divides the cooling plate 20 by each region to cool the cooling plate.

The reflective layer 10 may be a reflective plate for reflecting a laser beam or a reflective film having a reflective capability and may be a diffraction grating having a groove for diffracting an incident laser beam according to a diffraction angle determined according to each wavelength. It goes without saying that the reflective layer 10 may be a reflective surface integrally formed with the cooling plate 20 having a reflective performance.

The cooling plate 20 has an upper surface attached to the opposite side of the reflective surface from which the reflective layer 10 reflects the laser beam. The cooling plate 20 may be formed in a plate shape having an area larger than the surface area of the reflective layer 10. Although the rectangular plate-type cooling plate 20 is shown in FIG. 1, But is not limited to.

The unit cooling portion 30 divides the cooling plate 20 into a plurality of regions, and divides the cooling plate 20 by each region. That is, the unit cooling section 30 divides the cooling plate 20 into a plurality of regions having a predetermined area, and divides the cooling plate 20 by each region to cool the cooling plate 20, thereby minimizing the flow of the cooling fluid along the reflective surface of the reflection layer 10, The temperature gradient of the surface can be reduced, and the beam reflector can be uniformly cooled.

The detailed configuration of the unit cooling section 30 and the flow of the cooling fluid in the unit cooling section 30 will be described in detail below.

FIG. 2 is a perspective view showing a partition plate formed on a cooling plate according to an embodiment of the present invention, and FIG. 3 is a side sectional view showing a structure of a beam reflector according to an embodiment of the present invention.

2 and 3, the unit cooling portion 30 includes partition walls 310 (see FIG. 3) that form an inner space 315 having an opened lower portion extending from a lower surface of an interface of each of the divided regions of the cooling plate 20, ); A cooling pipe (330) inserted in the opened lower portion to supply a cooling fluid to the internal space (315); And a cooling fluid discharge port 350 formed in the opened lower portion and discharging a cooling fluid supplied to the inner space 315.

The partition 310 is formed to extend from the lower surface of the boundary surface of each of the divided regions of the cooling plate 20 in order to restrict horizontal flow along the reflective surface of the cooling fluid, Forms an internal space 315 having an open bottom. The partition 310 may be formed integrally with the cooling plate 20. In this case, the cooling plate 20 and the partition 310 may be formed of copper having a high thermal conductivity, It may be formed of silicon carbide (SiC) or Zerodur or the like having a high thermal conductivity and a low coefficient of thermal expansion in order to prevent it more effectively.

As described above, the cooling pipe 330 is inserted into the inner space 315 having an open lower portion formed by the partition 310. The lower end of the cooling pipe 330 is connected to the cooling fluid supply unit 40 so that the cooling fluid supplied from the cooling fluid supply unit 40 is discharged to the upper end and the cooling fluid is supplied to the inner space 315 formed by the partition wall 310. [ . Here, the cooling fluid supply unit 40 may be configured to communicate with a plurality of cooling tubes 330 constituting each unit cooling unit 30 in one, and may be configured so as to correspond to the characteristics of the laser beam having a Gaussian distribution intensity. When more heat energy is concentrated in the center portion, a cooling fluid having different cooling characteristics is supplied to the cooling pipe 330 disposed at the center portion and the cooling pipe 330 disposed at the peripheral portion other than the central portion, And may be separated and configured to have a temperature gradient.

Here, the cooling fluid supplied from the cooling fluid supply unit 40 may be cooling air containing nitrogen, or cooled hydrogen or cooled argon may be used.

The cooling pipe 330 is inserted and disposed in the inner space 315 defined by the partition 310 with a space at a predetermined distance from the lower surface of the cooling plate 20 and the partition 310, The space between the lower surface of the cooling plate 20 and the cooling pipe 330 and the space between the partition 310 and the cooling pipe 330 form a flow path for the cooling fluid.

In addition, as shown in FIG. 4, the spacing space of the cooling tube 330 located at the center of the cooling plate 20 and the spacing space of the cooling tube 330 located at the periphery of the cooling plate may be adjusted differently. That is, a space A 'between the cooling pipe 330 located at the center of the cooling plate 20 and the lower surface of the cooling plate 30 and a cooling pipe 330 located at the periphery of the cooling plate 20, (See FIG. 4 (a)), or the length of the cooling pipe 330 located at the center of the cooling plate 20 The cooling tube 330 is disposed at a spacing space B 'between the partition 310 and the cooling tube 330 and the space B' between the cooling tube 330 and the partition 310 located at the periphery of the cooling plate 20, (See Fig. 4 (b)), the beam reflector can be uniformly cooled even when more heat energy is concentrated in the center of the beam reflector depending on the characteristics of the laser beam having the intensity of the Gaussian distribution .

The process in which the cooling fluid discharged from the cooling pipe 330 flows in the inner space 315 to cool the beam reflector will be described later with reference to FIGS. 5 and 6. FIG.

A cooling fluid discharge port 350 for discharging a cooling fluid supplied from the cooling pipe 330 to the inner space 315 is formed in an open lower portion of the inner space 315 formed by the partition 310. The cooling fluid outlet 350 may be an open lower portion of the spacing space between the cooling tube 330 and the partition 310 and the cooling fluid through the open bottom portion between the cooling tube 330 and the partition 310 And is discharged to the outside. Here, in the case of using cooling air containing nitrogen as the cooling fluid, the cooling fluid may be simply discharged to the outside. In the case of using cooling hydrogen or the like, which is dangerous for explosion, as a cooling fluid, May be connected to the cooling fluid ejection port 350, as a matter of course.

FIG. 5 is a side sectional view showing a cooling fluid flow of a unit cooling part according to an embodiment of the present invention, and FIG. 6 is a graph showing a temperature distribution along a thickness direction of a beam reflector according to an embodiment of the present invention.

As described above, generally, in order to cool the beam reflector, a cooling flow path is formed along the reflection surface inside the cooling plate 20, and a cooling fluid is injected into the side surface to flow the cooling fluid flowing in the horizontal flow A method of cooling the beam reflector was used. However, in the case where the beam reflector is cooled by the horizontal flow along the reflecting surface of the cooling fluid, the temperature of the cooling fluid gradually increases during cooling, and the entire temperature distribution of the beam reflector can not be uniformly maintained. That is, since the degree of deformation of the beam reflector is determined by the thermal expansion coefficient of the beam reflector, the temperature difference, and the thickness of the beam reflector, the nonuniform temperature distribution of the beam reflector causes the beam reflector to bend and deform, Thereby causing problems such as fluctuation in position.

5, the flow of the cooling fluid of the beam reflector according to the embodiment of the present invention will be described in more detail. First, it is inserted into the open lower part of the inner space 315 defined by the partition 310 The cooling fluid supplied from each of the cooling pipes 330 is discharged to an upper space, that is, a space between the cooling plate 20 and the cooling pipe 330. The ejected cooling fluid will individually cool each region of the cooling plate 20 defined by the partition 310 so that the flow of cooling fluid along the reflective surface is minimized, It is possible to minimize the uneven temperature gradient in the direction of the reflective surface according to the temperature change, and to divide the divided regions into regions and uniformly cool the regions.

The cooling fluid discharged to the space between the cooling plate 20 and the cooling pipe 330 flows to the lower portion of the inner space 315 through the space between the partition 310 and the outer circumferential surface of the cooling pipe 330.

6, since the beam reflector absorbs the laser energy from the reflective layer 10, the barrier rib 310 extends from the lower surface of the cooling plate 20 in the thickness direction of the beam reflector, that is, The heat absorption rate of the beam reflector decreases. Therefore, the uncooled beam reflector has a temperature gradient in which the temperature gradually decreases toward the thickness direction.

On the contrary, when the cooling fluid is discharged from the cooling pipe 330, it absorbs heat in the atmosphere and has a temperature gradient such that the temperature gradually increases while moving along the movement path. Accordingly, the temperature gradient in the thickness direction of the beam reflector according to the embodiment of the present invention is such that the temperature gradient of the uncooled beam reflector and the temperature gradient according to the movement path of the cooling fluid are simultaneously applied to the cooling plate 20 and the cooling tube The cooling fluid discharged to the spacing space between the partition 310 and the cooling pipe 330 moves downward through the spacing space between the partition 310 and the cooling pipe 330 to cool the cooling water to a uniform temperature gradient in the thickness direction of the beam reflector .

FIG. 7 is a plan view schematically showing a beam reflector according to another embodiment of the present invention, and FIG. 8 is a plan view schematically showing a beam reflector according to another embodiment of the present invention.

7 is a plan view showing an embodiment in which the cross-section of each region defined by the unit cooling section 30 is formed to have a triangular shape, and Fig. 8 is a cross- Sectional view of each region to be partitioned is formed to have a hexagonal shape.

In the beam reflector according to the embodiment of the present invention, when the cooling plate 20 is divided into a plurality of regions, the shape of the cross section of each region defined by the unit cooling portion 30 is particularly limited no.

However, when the partition 310 is formed to have a triangular or hexagonal shape as shown in FIG. 7 or FIG. 8, the sectional shape of each region partitioned by the unit cooling portion 30 may be different The partition 310 can serve as a reinforcing rib for preventing the deformation of the beam reflector and thus can more effectively prevent the deformation of the beam reflector due to heat .

While the preferred embodiments of the present invention have been described and illustrated above using specific terms, such terms are used only for the purpose of clarifying the invention, and the embodiments of the present invention and the described terminology are intended to be illustrative, It will be obvious that various changes and modifications can be made without departing from the spirit and scope of the invention. Such modified embodiments should not be individually understood from the spirit and scope of the present invention, but should be regarded as being within the scope of the claims of the present invention.

10: reflective layer 20: cooling plate
30: unit cooling section 40: cooling fluid supply section
310: partition wall 315: inner space
330: cooling pipe 350: cooling fluid outlet

Claims (8)

1. A beam reflector having a cooling structure disposed in a beam path of a laser output device for cooling heat absorbed from a laser beam,
A reflective layer having a reflective surface for reflecting the laser beam;
A cooling plate having an upper surface attached to the opposite side of the reflective surface of the reflective layer; And
A cooling tube for dividing and dividing the cooling plate into a plurality of regions, a cooling tube for supplying a cooling fluid to each divided region of the cooling plate, and a discharge port for discharging the cooling fluid, And a unit cooling section
Wherein the unit cooling portion further includes a partition wall extending from a lower surface of an interface of each of the divided regions of the cooling plate to form an inner space having an opened lower portion,
Wherein the cooling tube is inserted in the open lower portion to supply the cooling fluid to the inner space, and the discharge port is formed in the open lower portion to discharge the cooling fluid supplied to the inner space.
delete The method according to claim 1,
Wherein the partition is integrally formed with the cooling plate.
The method according to claim 1,
Wherein the cooling tube is inserted and disposed on the lower surface of the cooling plate and spaced apart from the partition by a predetermined distance.
The method of claim 4,
Wherein the spacing space forms a flow path of the cooling fluid supplied from the cooling pipe.
The method of claim 4,
Wherein the spacing space of the cooling tube located at the center of the cooling plate and the spacing space of the cooling tube located at the periphery of the cooling plate are adjusted differently.
The method according to claim 1,
Wherein each of the regions defined by the unit cooling portion is formed to have a shape of a triangle, a quadrangle, or a hexagon.
The method according to claim 1,
Wherein the cooling fluid comprises cooling air containing nitrogen.
KR1020150086726A 2015-05-04 2015-06-18 Beam reflector KR101688561B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020150062690 2015-05-04
KR20150062690 2015-05-04

Publications (2)

Publication Number Publication Date
KR20160130692A KR20160130692A (en) 2016-11-14
KR101688561B1 true KR101688561B1 (en) 2016-12-21

Family

ID=57528564

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150086726A KR101688561B1 (en) 2015-05-04 2015-06-18 Beam reflector

Country Status (1)

Country Link
KR (1) KR101688561B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114924378B (en) * 2022-05-30 2023-10-27 深圳综合粒子设施研究院 Mirror surface shape control structure and beam line device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942880A (en) 1968-09-27 1976-03-09 Avco Corporation Laser mirror
JP2003008264A (en) * 2001-06-26 2003-01-10 Nissan Motor Co Ltd Cooling device of electronic component

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3313257B2 (en) * 1995-02-24 2002-08-12 日本軽金属株式会社 Parabolic mirror processing head and laser processing machine
KR100805436B1 (en) 2001-12-31 2008-02-20 두산인프라코어 주식회사 Reflector Cooling Structure For Laser Machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942880A (en) 1968-09-27 1976-03-09 Avco Corporation Laser mirror
JP2003008264A (en) * 2001-06-26 2003-01-10 Nissan Motor Co Ltd Cooling device of electronic component

Also Published As

Publication number Publication date
KR20160130692A (en) 2016-11-14

Similar Documents

Publication Publication Date Title
US20180130653A1 (en) Optics for controlling light transmitted through a conical quartz dome
US9423590B2 (en) Liquid cooled EUV reflector
US8354051B2 (en) Method and installation for the production of containers
US20170358900A1 (en) Low Size and Weight, High Power Fiber Laser Pump
JP2011525051A (en) Cooling device for electronic elements
EP2480390B1 (en) Heating installation and reflecting device for a heating installation.
KR101688561B1 (en) Beam reflector
US9312419B2 (en) Solar energy converter
JP5146436B2 (en) Laser light absorbing device and solid-state laser device
JP2015515124A (en) System and method for cooling a disk laser
JPH05215481A (en) Refrigerating machine for optical device
WO2011113591A2 (en) Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and euv source with such a collector
EP3300189B1 (en) Solid laser amplification device
JP4333342B2 (en) Laser processing equipment
KR101225806B1 (en) Mould
CN103050869A (en) Micro-pore cooling mirror with mirror surface of non-equal thickness
JP6737703B2 (en) Mold
KR20200092721A (en) Cooling device using heat pipe for injection mold
JP7307369B2 (en) Diffraction element fixing device
US10802181B2 (en) Beam dumps having tailored absorbing surfaces
KR20240050798A (en) Laser Cutting Head
CN216850730U (en) Reflection unit and high-power laser system
KR102670445B1 (en) Apparatus and method for controlling substrate thickness
US20100059491A1 (en) Apparatus for improving residual stress in tubular body
CN115548838A (en) Cooling device and method for single-chip jet impact optical element

Legal Events

Date Code Title Description
A201 Request for examination
A302 Request for accelerated examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
FPAY Annual fee payment

Payment date: 20191125

Year of fee payment: 4