KR101685803B1 - Film type tactile sensor possible to detect a proximity - Google Patents

Film type tactile sensor possible to detect a proximity Download PDF

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Publication number
KR101685803B1
KR101685803B1 KR1020150055826A KR20150055826A KR101685803B1 KR 101685803 B1 KR101685803 B1 KR 101685803B1 KR 1020150055826 A KR1020150055826 A KR 1020150055826A KR 20150055826 A KR20150055826 A KR 20150055826A KR 101685803 B1 KR101685803 B1 KR 101685803B1
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South Korea
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electrode
tactile sensor
layer
proximity detection
cmc
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KR1020150055826A
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Korean (ko)
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KR20160125565A (en
Inventor
최혁렬
띠엔 닷 응웬
박준우
한효승
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성균관대학교산학협력단
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices

Abstract

The present invention relates to a tactile sensor capable of proximity detection, comprising: a substrate formed as a film type; An electrode layer having a plurality of anode electrodes and a plurality of cathode electrodes disposed on the substrate and having at least one of the plurality of cathode electrodes disposed between neighboring anode electrodes; And a CMC layer formed of carbon micro-coils in a spiral coil state dispersed in silicon and formed to cover the substrate on which the electrode layer is formed.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a tactile sensor,

Field of the Invention [0002] The present invention relates to a tactile sensor of a film type capable of proximity detection, and more particularly, to a tactile sensor which is manufactured in the form of a flexible film and is capable of proximity detection applicable to the skin of a robot.

The 6-DOF force / torque sensor currently used in the wrists, elbows and other joints of the robot and the multi-axis load cell that detects the pressure and slip for the gripper of the robot are the most rudimentary tactile sensors and are applied to the robot hands It is not easy to do.

In addition, the conventional six-degree-of-freedom force / torque sensor and the conventional multi-axis load cell are not suitable from the viewpoint of necessity of a tactile sensor capable of recognizing the contact situation in future.

Recently, several researchers have been developing tactile sensors using MEMS fabrication technology, which is one of the semiconductor integrated circuit manufacturing technologies. Stanford University has developed a tactile sensor consisting of a signal processing unit and a 3-axis force sensor sensing unit measuring 100 μm × 100 μm through a CMOS process. However, these studies are disadvantageous in that they are not flexible because they are tactile sensors fabricated by silicon based micromachined integration system technology. In order to solve such a problem, a biomimetic artificial skin having flexibility is recently developed and applied to an intelligent robot. However, since a silicon wafer which is a brittle material was used, it had a disadvantage that it could not be attached to a curved surface.

Therefore, it is required to develop a manufacturing technology of a tactile sensor which is thinner and more flexible than a conventional tactile sensor so that it can be applied to curved surfaces such as a joint of a robot and a finger tip.

Korean Patent Laid-Open Publication No. 10-2014-0125903

Embodiments of the present invention provide a film-type tactile sensor that is thinner than conventional tactile sensors and is capable of thin and flexible proximity detection that can be applied to the skin of a robot.

Embodiments of the present invention also provide a film-type tactile sensor capable of proximity detection that can operate with a tactile sensor and a proximity sensor.

A tactile sensor of a film type capable of proximity detection according to an embodiment of the present invention includes: a substrate formed in a film type; An electrode layer having a plurality of anode electrodes and a plurality of cathode electrodes disposed on the substrate and having at least one of the plurality of cathode electrodes disposed between neighboring anode electrodes; A CMC layer formed of carbon micro-coils in a spiral coil state dispersed in silicon and formed to cover the substrate on which the electrode layer is formed; . ≪ / RTI >

Wherein the substrate is formed of a nonconductive material having flexibility, and the nonconductive material is at least one of polyethylene, polyphenylene ether, polyimide, and colorless and transparent polyimide One can be included.

The carbon micro-coils are formed of a mixture of a conductive material and a polymeric material. The polymeric material may be a silicone rubber, an acrylonitrile butadiene rubber (NBR), a polydimethylsiloxane (PDMS) -dimethylsiloxane). < / RTI >

The plurality of cathode electrodes are electrically connected to each other, and the anode electrodes may be formed separately without being connected to each other.

Wherein the CMC layer has a shape in which the shape of the carbon micro-coils located at a point where the applied pressure is applied is deformed when an object is contacted from the outside and a pressure is applied to the object, Alternatively, the capacitance value may be measured to detect the contact position of the object.

Wherein the CMC layer changes the electromagnetic field formed by the carbon microcoils and the electrode layer located at a distance closest to the object when the object approaches the one surface and changes the electrostatic field of the CMC layer It is possible to measure the approaching degree of the object by measuring the capacitance value.

According to the embodiments of the present invention, it is possible to provide a tactile sensor of film type capable of proximity detection capable of being applied to the skin of a robot and capable of performing close and flexible proximity detection.

In addition, according to the embodiment of the present invention, it is possible to provide a film-type tactile sensor capable of detecting proximity not only of the position where an object comes in contact with the outside but also the proximity of an object.

1 is a sectional view of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention;
2 is a process diagram showing a method of manufacturing a film type tactile sensor capable of proximity detection according to an embodiment of the present invention.
3 is an exemplary view illustrating formation of an electrode layer and a CMC pad according to an embodiment of the present invention.
4 is a view illustrating an electrode layer and a CMC pad according to another embodiment of the present invention;
5 is an exemplary view showing the operation principle of a conventional tactile sensor.
6 is an exemplary view showing the operation principle of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention;
Fig. 7 is an exemplary view showing a principle of detecting the position of an object to be contacted from the outside by a tactile sensor of a film type capable of proximity detection according to an embodiment of the present invention; Fig.
FIG. 8 is an exemplary view showing a principle in which a tactile sensor of a film type capable of proximity detection according to an embodiment of the present invention measures an approaching degree of an object. FIG.
FIG. 9 is a graph illustrating capacitance values of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention, the capacitance of which changes according to a distance to a nearby object. FIG.
10 is a graph showing contact sensing data of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention.
FIG. 11 is a graph showing capacitance values of a tactile sensor of a film type capable of proximity detection according to an embodiment of the present invention, the capacitance of which changes according to the magnitude of force applied by an object contacting from the outside.

Hereinafter, exemplary embodiments according to the present invention will be described in detail with reference to the contents described in the accompanying drawings. However, the present invention is not limited to or limited by the exemplary embodiments. Like reference numerals in the drawings denote members performing substantially the same function.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. Also, in certain cases, there may be a term selected arbitrarily by the applicant, in which case the meaning thereof will be described in detail in the description of the corresponding invention. Therefore, the term used in the present invention should be defined based on the meaning of the term, not on the name of a simple term, but on the entire contents of the present invention.

When an element is referred to as "including" an element throughout the specification, it is to be understood that the element may include other elements as well, without departing from the spirit or scope of the present invention.

1 is a sectional view of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention.

1, a tactile sensor 100 of a film type capable of proximity detection according to an embodiment of the present invention includes a substrate 110, electrode layers 120, 121, 122-1 and 122-2, CMC and a micro coils layer 130.

The substrate 110 is formed of a film type, and may be formed of a nonconductive material having flexibility.

In more detail, the substrate 110 is a nonconductive material having a flexible line, at least one of polyethylene, polyphenylene ether, polyimide, and colorless and transparent polyimide And the like.

The electrode layers 120 (121, 122-1, 122-2) may be formed on the substrate 110. The electrode layers 120 (121, 122-1, 122-2) may include a plurality of anode electrodes 122 (122-1, 122-2) and a plurality of cathode electrodes 121.

More specifically, the electrode layers 120 (121, 122-1 and 122-2) will be described in detail with reference to FIGS. 3 and 4.

FIG. 3 is a view illustrating an electrode layer and a CMC pad according to an embodiment of the present invention. FIG. 4 is a view illustrating an electrode layer and a CMC pad according to another embodiment of the present invention.

The electrode layer 120 according to an embodiment of the present invention includes a plurality of anode electrodes 122-122-2, 122-3, and 122-4 and a plurality of cathode electrodes 121 . A plurality of anode electrodes 122: 122-1, 122-2, 122-3, and 122-4 are disposed on a substrate 110, and a plurality of anode electrodes 122: 122-1, 122-2, 122- 3, and 122-4, one of the plurality of cathode electrodes 121 may be disposed between neighboring anode electrodes.

Referring to FIG. 3A, an electrode layer 120 (121, 122-1, 122-2, 122-3, 122-4) according to an embodiment of the present invention includes a plurality of cathodes The first anode electrode 122-1, the second anode electrode 122-2, and the third anode electrode 122-1, 122-2, 122-3, and 122-4, which are the electrodes 121 and the plurality of anode electrodes 122-1, 122-2, And may be formed in a unit array shape including the anode electrode 122-3 and the fourth anode electrode 122-4.

More specifically, a plurality of anode electrodes 122-1, 122-2, 122-3 and 122-4 constituting the electrode layers 120 (121, 122-1, 122-2, 122-3, 122-4) 2, 122-3, and 122-4 and a plurality of cathode electrodes 121 may be formed on the same plane on the substrate. The first anode electrode 122-1, the second anode electrode 122-2, and the third anode electrode 122-2 constituting the plurality of anode electrodes 122-1, 122-2, 122-3, -3) and the fourth anode electrode 122-4 may be formed to have a predetermined gap from each other.

The first anode electrode 122-1 and the second anode electrode 122-2 constituting the plurality of cathode electrodes 121 and the plurality of anode electrodes 122-1, 122-2, 122-3, 122-2, the third anode electrode 122-3, and the fourth anode electrode 122-4 may each operate as a sensing area. The tactile sensor 100 of the film type capable of proximity detection according to the embodiment of the present invention can operate not only as a tactile sensor but also as a proximity sensor through the sensing area and the CMC layer 130. [

A plurality of anode electrodes 122-1, 122-2, 122-3 and 122-4 constituting electrode layers 120 (121: 122-1, 122-2, 122-3 and 122-4) Each anode electrode may include one anode pad (not shown) and one anode signal line (not shown). One anode pad of each anode electrode constituting the plurality of anode electrodes 122-1, 122-2, 122-3, and 122-4 may be formed on the substrate 110. [ One anode signal line may be formed to extend along the longitudinal direction of the substrate 110 while being electrically connected to one anode pad (not shown).

One positive electrode signal line and one positive electrode signal line constituting each positive electrode constituting the plurality of positive electrode electrodes 122-1, 122-2, 122-3 and 122-4 are connected to the other positive electrode signal line And they may be formed separately.

The plurality of cathode electrodes 121 may include a plurality of cathode electrode pads (not shown) and one cathode signal line (not shown). One cathode signal line may be electrically connected to a plurality of cathode electrode pads and may extend along the longitudinal direction of the substrate 110 so that the plurality of cathode electrodes 121 may be electrically connected together. Accordingly, the plurality of cathode electrodes 121 may be electrically connected to each other.

At least one of the plurality of cathode electrode pads of the plurality of cathode electrodes 121 is connected to one of the plurality of anode electrodes 122-1, 122-2, 122-3 and 122-4 among neighboring anode electrodes As shown in FIG.

Referring to FIG. 3B, a CMC pad unit 130 according to an embodiment of the present invention includes a substrate 120 having electrode layers 120 (121, 122-1, 122-2, 122-3, 122-4) (Not shown).

Referring to FIG. 4A, electrode layers 120 and 121 and 122-1 to 122-16 according to an embodiment of the present invention include a plurality of cathode electrodes 121 and a plurality of May be formed in a large-area array shape in which a plurality of unit arrays including the first anode electrode 122-1 to the sixteenth anode electrode 122-16, which are the anode electrodes 122-1 to 122-16, .

More specifically, a plurality of anode electrodes 122-1 to 122-16 and a plurality of cathode electrodes 122-1 to 122-16 constituting an electrode layer 120 (121, 122-1 to 122-16) according to an embodiment of the present invention, (121) may be formed on the same plane on the substrate. The first anode electrode 122-1 through the sixteenth anode electrode 122-4 constituting the plurality of anode electrodes 122-1 through 122-16 may be formed to have a predetermined gap therebetween. Also, at least one of the plurality of cathode electrodes 121 may be formed to be disposed between neighboring anode electrodes among a plurality of anode electrodes 122-1 to 122-4.

The first anode electrode 122-1 through the sixteenth anode electrode 122-16 constituting the plurality of cathode electrodes 121 and the plurality of anode electrodes 122-1 through 122-16 are connected to a sensing region (Sensing area).

Each of the anode electrodes constituting the plurality of anode electrodes 122-1 to 122-16 constituting the electrode layers 120: 121 and 122-1 to 122-16 is connected to one anode pad (not shown) And may include an anode signal line (not shown). One anode pad of each anode electrode constituting the plurality of anode electrodes 122-1 through 122-16 may be formed on the substrate 110. [ One anode signal line may be formed to extend along the longitudinal direction of the substrate 110 while being electrically connected to one anode pad (not shown).

One anode pad and one anode signal line constituting each of the anode electrodes constituting the plurality of anode electrodes 122-1 to 122-4 are not electrically connected to the other anode electrode and the other anode signal line, As shown in FIG.

The plurality of cathode electrodes 121 may include a plurality of cathode electrode pads (not shown) and one cathode signal line (not shown). A plurality of cathode electrode pads of the plurality of cathode electrodes 121 may be formed on the substrate 110. The plurality of cathode electrode pads may be electrically connected to each other. One cathode signal line may be formed to extend along the longitudinal direction of the substrate 110, which is electrically connected to a plurality of cathode electrode pads. Accordingly, the plurality of cathode electrodes 121 may be electrically connected to each other.

At least one of the plurality of cathode electrode pads of the plurality of cathode electrodes 121 may be disposed between adjacent anode electrodes of the plurality of anode electrodes 122-1 to 122-16.

The CMC layer 130 includes electrode layers 120 and 121 and 122-1 to 122-16 and a substrate 110 on a substrate 110 on which electrode layers 120 and 121 and 122-1 to 122-16 are formed. As shown in Fig.

Referring to FIG. 4B, the CMC pad unit 130 according to the embodiment of the present invention is formed to cover the substrate 110 on which the electrode layers 120 (121, 122-1 to 122-16) are formed .

The CMC layer 130 according to the embodiment of the present invention includes an electrode layer 120 (121, 122-1, 122-2) formed on a substrate 110 formed as shown in FIG. 1 and a substrate 110 (Not shown).

More specifically, the CMC layer 130 may be formed of carbon micro-coils in a spiral coil state dispersed in silicon. The carbon micro-coils may be formed of a mixture of a conductive material and a polymer material. The polymer material may include at least one of silicone rubber, acrylonitrile butadiene rubber (NBR), and poly-dimethylsiloxane (PDMS).

Meanwhile, the tactile sensor 100 of the film type capable of proximity detection according to the embodiment of the present invention may include a touch layer (not shown). The touch layer may be formed on the CMC layer 130.

According to the embodiment of the present invention, the tactile sensor 100 of a film type capable of proximity detection can operate as a tactile sensor for detecting a contact position of an object when an object is contacted from outside and pressure is applied thereto.

More specifically, according to an embodiment of the present invention, when a pressure is applied to one surface of a CMC layer 130 of a tactile sensor 100 of a film type capable of proximity detection, The resistance value or the capacitance value is changed by the pressure externally applied. This is because the shape of the carbon micro-coils inside the contact point of the CMC layer 130 applied by the contacted object is changed by the pressure applied from the outside, and the shape of the carbon micro- This is because the capacitance value is changed.

Accordingly, the tactile sensor 100 of the film type capable of proximity detection according to the embodiment of the present invention measures a resistance value or a capacitance value inside a contact point which is changed by a pressure applied by an object to be contacted, Lt; RTI ID = 0.0 > a < / RTI > contact point.

In addition, according to the embodiment of the present invention, the tactile sensor 100 of the film type capable of proximity detection can be operated as a proximity detection sensor for detecting an object approaching from the outside.

More specifically, according to an embodiment of the present invention, a tactile sensor 100 of a film type capable of proximity detection includes a CMC layer 130, a CMC layer 130 located nearest to an object, , The electromagnetic field formed by the carbon micro-coils and the electrode layers 120 (121, 122-1, 122-2) is changed. This is because the electromagnetic field formed by the carbon micro-coils and the electrode layers 120: 121, 122-1 and 122-2 is changed in the CMC layer 130 located at the closest distance to the object, This is because the capacitance value changes.

Therefore, the tactile sensor 100 of the film type capable of proximity detection according to the embodiment of the present invention can measure the proximity of the object by measuring the capacitance value of the CMC layer 130, which is changed by an object approaching from the outside It can operate as a proximity sensor.

2 is a process diagram showing a method of manufacturing a film type tactile sensor capable of proximity detection according to an embodiment of the present invention.

Referring to FIG. 2 (a), a substrate 110 may be prepared. The substrate 110 may be formed of a nonconductive material having flexibility.

More specifically, the substrate 110 may be fabricated in the form of a thin sheet using a dispensing machine of an elastic polymeric insulator material. The substrate 110 is a nonconductive material having a flexible wire and includes at least one of polyethylene, polyphenylene ether, polyimide, and colorless and transparent polyimide . ≪ / RTI >

2B, a mask 140 having an electrode pattern for forming the electrode layers 120 (121, 122-1, 122-2) can be disposed on the substrate 110 have.

2 (c), a material of the electrode layers 120 (121, 122-1, 122-2) is formed in an empty space of the mask pattern 140 in the shape of an electrode pattern for forming the electrode layer 120 Can be filled and cured.

2 (d), a mask 140 having an electrode pattern shape is removed from the upper portion of the substrate 110 where the material of the electrode layers 120 (121, 122-1, 122-2) is cured, The layers 120 (121, 122-1, 122-2) can be formed.

2 (e), a mask 150 having a CMC pattern for forming the CMC layer 130 can be disposed on the electrode layers 120 (121, 122-1, 122-2) have.

2 (f), the CMC layer 130 may be filled with the material of the CMC pattern-shaped mask 150 in the empty space of the mask 150 to be cured.

Referring to FIG. 2 (g), the CMC layer 130 may be formed by removing the mask 150 having the CMC pattern shape from above the substrate 110 on which the CMC layer 130 is hardened.

More specifically, the empty space of the mask 150 of the CMC layer pattern shape may be filled with a material of the CMC layer 130 formed of carbon micro-coils in a spiral coil state dispersed in silicon. The carbon micro-coils may be formed of a mixture of a conductive material and a polymer material. The conductive material may include a carbon microcoil. Examples of the polymeric material include silicone rubber, acrylonitrile butadiene rubber (NBR), poly (dimethyl siloxane) (PDMS) dimethylsiloxane).

Meanwhile, a touch layer may be formed on the CMC layer 130. The touch layer may be formed to cover the CMC layer 130. The touch layer may be formed of a silicone-based material having flexibility and elasticity.

5 is an exemplary view showing the operation principle of a conventional tactile sensor.

5A, the structure of a conventional tactile sensor includes two electrode layers 511 and 512 including a first electrode 511 and a second electrode 512, a first electrode 511 And a dielectric 520 formed between the first electrode 512 and the second electrode 512. When the pressure is applied to the conventional tactile sensor from an external object, the values of the capacitance of the first electrode 511 and the second electrode 512 are changed. By measuring the changed capacitance value, It is possible to detect the point of contact.

Referring to FIG. 5 (b), a conventional tactile sensor can detect a conductive object 540 approaching from the outside. When the distance d between the sensing electrode 530 and the conductive object is changed, the capacitance value of the conventional tactile sensor changes as shown in Fig. 5 (c) according to the changed distance d. That is, the capacitance value of the conventional tactile sensor increases as the distance d between the sensing electrode 530 and the conductive object 540 increases, and decreases as the distance d increases.

6 is an exemplary view showing the operation principle of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention.

6A, a tactile sensor 100 of a film type capable of proximity detection includes electrode layers 611 and 612 including a first electrode 611 and a second electrode 612, , 612). ≪ / RTI > The first electrode 611 and the second electrode 612 may be formed on the same plane. The tactile sensor 100 of the film type capable of detecting proximity can change the capacitance value between the first electrode 611 and the second electrode 612 when an object is contacted from the outside and a changed capacitance value By measuring, it is possible to detect a contact point where an object comes into contact with the outside.

Referring to FIG. 6 (b), a film type tactile sensor 100 capable of proximity detection can detect an object 640 approaching from the outside. That is, the conventional multiaxial force sensor can detect only a conductive object in close proximity, while a film type tactile sensor 100 capable of proximity detection can also detect an object that is not conductive.

More specifically, the conventional tactile sensor operates on the principle of sensing a change in capacitance between the first electrode 511 and the second electrode 512 symmetrically opposed to each other with the dielectric 520 interposed therebetween. In the conventional tactile sensor, when a conductive object comes close to any one of the first electrode 511 and the second electrode 512, the electromagnetic field generated by the first electrode 511 and the second electrode 512 The area is changed by the conductive object, the capacitance value is changed in accordance with the change of the electromagnetic field, and the change in the capacitance value is detected to detect the proximity of the conductive object.

On the other hand, the first electrode 631 and the second electrode 632 of the film type tactile sensor capable of proximity detection are formed on the same plane at a predetermined interval. An area of the electromagnetic field formed by the first electrode 631 and the second electrode 632 can operate as a sensing area. The first electrode 511 and the second electrode 512 of the conventional tactile sensor are formed symmetrically with each other while the first electrode 631 and the second electrode 632 of the tactile sensor of the film type, And the proximity degree of the object can be detected by detecting the capacitance value changed in accordance with the change of the electromagnetic field. A main factor giving a change in the area of the electromagnetic field formed by the first electrode 631 and the second electrode 632 formed on the same plane is the distance between the electrodes 631 and 632 and the object. The electrodes 631 and 632 formed on the same plane form an electromagnetic field, so that even if an object other than the conductive object to be approached approaches, it can be detected. The electrodes 631, 632 and When the distance d between the objects is changed, the capacitance value of the film type tactile sensor capable of proximity detection is changed according to the changed distance d as shown in Fig. 6 (c). That is, the capacitance value of the tactile sensor of the film type capable of proximity detection decreases as the distance d between the electrodes 631 and 632 and the object 640 approaches, and increases as the distance increases.

7 is an exemplary diagram showing a principle of detecting the position of an object to be contacted from the outside by a film type tactile sensor capable of proximity detection according to an embodiment of the present invention.

7A, a tactile sensor 100 of a film type capable of proximity detection according to an embodiment of the present invention includes a CMC layer 130 to which pressure is applied when an object is contacted from outside, The carbon micro-coils 144 are deformed in shape.

Referring to FIG. 7 (b), the resistance value or capacitance value of the CMC layer 130 is also changed in accordance with the shape of the carbon micro-coils 131 inside the contact point of the CMC layer 130. The resistance value or the electrostatic capacitance value of the changed CMC layer 130 may be measured to detect a contact point where an object is in contact with the outside.

When the resistance value or the capacitance value of the CMC layer 130 is changed, the resistance value or the capacitance value of the tactile sensor 100 of the film type capable of detecting close proximity is obtained. It is possible to detect the contact point where an object comes in contact with the outside by measuring the resistance value or the capacitance value of the tactile sensor 100 of the film type which can detect the proximity change.

FIG. 8 is an exemplary view showing a principle of a proximity-detectable film type tactile sensor according to an embodiment of the present invention, which measures the approaching degree of an object.

Referring to FIG. 8A, the CMC layer 130 and the electrode layers 120, 121, 122-1 and 122-2 of the tactile sensor 100 of the film type capable of proximity detection according to the embodiment of the present invention, Can form an electromagnetic field.

Referring to FIG. 8 (b), when an object is approaching, an electromagnetic field formed by the carbon micro-coils 131 and the electrode layers 120 (121, 122-1, 122-2) And the degree of approach of the object can be measured by measuring the capacitance value of the CMC layer 130 which is changed by the change of the electromagnetic field.

FIG. 9 is a graph illustrating capacitance values of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention, the capacitance of which changes according to a distance to a nearby object. FIG.

First, a tactile sensor 100 of a film type capable of proximity detection according to an embodiment of the present invention includes a substrate formed of a plastic material having flexibility and nonconductive characteristics, and an electrode layer formed of a copper material on a substrate It is in a state of being manufactured.

Referring to FIG. 9A, the X-axis shows a distance change between a tactile sensor 100 of a film type capable of proximity detection and an object. The Y axis represents a value obtained by dividing the capacitance value of the film type tactile sensor 100 capable of proximity detection in the state where the object is not in proximity to the capacitance value being changed. n represents a state in which the CMC layer 130 is not formed on the electrode layer 120 of the tactile sensor 100 of the film type capable of proximity detection and s represents the state of the tactile sensor 100 of the film type And a silicon layer is formed on the electrode layer 120.

CMC shows a state in which the CMC pad unit 140 is formed on the electrode layer 120 of the multi-axis force sensor 100 capable of proximity detection. The CMC pad unit 140 may be formed by setting different weight ratios of the carbon micro-coils in the helical coil state dispersed in the silicon among the total weight. The CMC pad unit 140 is formed by setting the weight ratio of the carbon micro-coils in a helical coil state dispersed in silicon among the total weight to 2%.

A state (n) in which the CMC layer 130 is not formed on the upper part of the electrode layer 120 and a tactile sensor 100 of the film type capable of detecting proximity are formed in a state where the CMC pad part 140 is formed on the electrode layer 120, It is understood that the sensing sensitivity is good according to the distance that the silicon layer is formed over the electrode layer 120 of the electrode layer 120 compared to the state (s).

9B, the X-axis shows a state where only the electrode layer 120 is formed, a state where a silicon layer is formed on the electrode layer 120, and a state where the CMC pad portion 140 is formed on the electrode layer 120 . The CMC pad portion 140 used in FIG. 9 (b) is formed by setting the weight ratio of the carbon micro-coils in the helical coil state dispersed in silicon to 2% of the total weight. And the Y axis represents the gain of the multi-axis force sensor 100 capable of proximity detection.

The CMC pad portion 140 is formed on the electrode layer 120 and the CMC pad portion 140 is not formed on the electrode layer 120 and the electrode layer 120, the sensing sensitivity is good depending on the distance that the silicon layer is formed.

10 is a graph showing contact sensing data of a film type tactile sensor capable of proximity detection according to an embodiment of the present invention. Is a graph showing the value of the electrostatic capacity varying with the magnitude of the force applied by an object contacting from the outside.

10A shows a state in which a silicon layer is formed on an electrode layer 120 of a tactile sensor 100 of a film type capable of proximity detection and FIG. 10B shows a state in which a silicon layer is formed on an electrode layer 120 And the CMC pad portion 140 is formed on the electrode layer 120. The CMC pad unit 140 is formed by setting the weight ratio of the carbon micro-coils in the spiral coil state dispersed in silicon to 8% of the total weight.

10 (a) and 10 (b), the X axis of the upper graph represents the time (ms) during which the force exerted from the outside is contacted, and the Y axis represents the magnitude of the force externally applied. The X-axis of the lower graph represents the time (ms) in which the external force is applied, and the Y-axis represents the value of capacitance of the tactile sensor 100 of the film type capable of proximity detection, .

The capacitance value of the film type tactile sensor 100 which can be detected in proximity by a force applied from the outside as compared with a state in which the silicon layer is formed on the electrode layer 120 in the state of being formed by the weight ratio of 8% Lt; RTI ID = 0.0 > size. ≪ / RTI >

Referring to FIG. 11, a change in capacitance with respect to a force applied from the outside by the CMC layer 130 formed on the electrode layer 120 is greater in the tactile sensor 100 of the film type, which is capable of proximity detection. That is, in the state where the CMC pad portion 140 is formed on the electrode layer 120, the capacitance value is more sensitively changed according to the force externally applied, compared with the state where the silicon layer is formed on the electrode layer 120 Able to know.

Generally, the terms used herein are intended to be generically "open" in the claims, particularly in the claims (e.g., the claims text) (e.g., And "to" should be interpreted as "including at least", and "including" should be interpreted as "including but not limited to"). Where a specific number is intended for the recited claims, such intent is expressly set forth in the claims, and it is understood that such intent is not intended to be in the absence of such description.

Only certain features of the invention have been illustrated and described herein, and various modifications and changes can occur to those skilled in the art. It is, therefore, to be understood that the claims are intended to cover such modifications and changes as fall within the true spirit of the invention.

100: Film type tactile sensor capable of proximity detection
110: substrate
120: electrode layer
121: a plurality of cathode electrodes
122: anode electrode
122-1: first anode electrode
122-2: second anode electrode
130: CMC Reid
131: carbon micro-coil
140: mask of electrode pattern shape
150: mask of CMC pattern shape
511: first electrode
512: second electrode
520: Dielectric
530: sensing electrode
540: Conductive object
611: first electrode
612: Second electrode
620: Dielectric
631: first electrode
632: second electrode
640: object

Claims (6)

A substrate formed in a film type;
An electrode layer having a plurality of anode electrodes and a plurality of cathode electrodes disposed on the substrate and having at least one of the plurality of cathode electrodes disposed between neighboring anode electrodes; And
A CMC layer formed of spirally coiled carbon micro-coils dispersed in silicon and formed to cover the substrate on which the electrode layer is formed;
Lt; / RTI >
Wherein the CMC layer changes the electromagnetic field formed by the carbon microcoils and the electrode layer located at a distance closest to the object when the object approaches the one surface and changes the electrostatic field of the CMC layer And a tactile sensor capable of proximity detection for measuring an access degree of the object by measuring a capacitance value.
The substrate processing apparatus according to claim 1,
Wherein the nonconductive material is at least one of polyethylene, polyphenylene ether, polyimide, and colorless and transparent polyimide. Tactile sensor capable of proximity detection.
The method of claim 1, wherein the carbon micro-
And at least one of a silicone rubber, an acrylonitrile butadiene rubber (NBR), and a poly-dimethylsiloxane (PDMS) may be used as the polymer material, and the polymer material may be a mixture of a conductive material and a polymer material. A tactile sensor capable of proximity detection.
The organic light emitting display according to claim 1,
Wherein the anode electrodes are connected to each other electrically and the anode electrodes are not connected to each other and are separately formed.
The apparatus of claim 1, wherein the CMC layer comprises:
When a pressure is applied to an object in contact with an object on one side, the shape of the carbon micro-coils located at the point where the applied pressure is applied is deformed, and the resistance value or the capacitance value of the CMC layer And a tactile sensor capable of proximity detection for detecting a contact position of the object.
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