KR101682998B1 - Method for calculating cross-plane thermal conductivity of nanoscale thin film - Google Patents

Method for calculating cross-plane thermal conductivity of nanoscale thin film Download PDF

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KR101682998B1
KR101682998B1 KR1020150106117A KR20150106117A KR101682998B1 KR 101682998 B1 KR101682998 B1 KR 101682998B1 KR 1020150106117 A KR1020150106117 A KR 1020150106117A KR 20150106117 A KR20150106117 A KR 20150106117A KR 101682998 B1 KR101682998 B1 KR 101682998B1
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thin film
probe
nano thin
nano
thermal conductivity
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KR1020150106117A
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Korean (ko)
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김덕종
김재현
이학주
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재단법인 파동에너지 극한제어 연구단
한국기계연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

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  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

Disclosed is a method for measuring cross-plane thermal conductivity of a nano-scale thin film. The measurement method according to an embodiment of the present invention comprises the following steps: disposing a nano-scale thin film on a substrate; heating the nano-scale thin film using a thermoelectric probe of a scanning thermal microscope (SThM); calculating the quantity of heat transferred from the thermoelectric probe to the nano-scale thin film and the temperature on one surface of the nano-scale thin film, which has been in contact with the thermoelectric probe, when the thermoelectric probe is vertically displaced; and measuring the cross-plane thermal conductivity of the nano-scale thin film using the quantity of heat transferred from the thermoelectric probe to the nano-scale thin film and the temperature on the surface of the nano-scale thin film, which has been in contact with the thermoelectric probe.

Description

[0001] The present invention relates to a method for measuring thermal conductivity in a thickness direction of a nano-

Embodiments of the present invention relate to a method of measuring thermal conductivity in a thickness direction of a nano thin film, and more particularly, to a method of measuring thermal conductivity in a thickness direction of a nano thin film using a scanning probe thermography microscope.

Recently, two-dimensional nanomaterials have attracted attention from academia due to their unique physical properties, and researches related to the development of application items utilizing the characteristics of the nanomaterials are being actively carried out in the world.

Among the various properties of the two-dimensional nanomaterials, thermal properties such as thermal conductivity are also of interest. Up to now, thermal conductivity in the plane direction has been studied, but cross- Thermal conductivity is not under study.

The above-described background technology is technical information that the inventor holds for the derivation of the present invention or acquired in the process of deriving the present invention, and can not necessarily be a known technology disclosed to the general public prior to the filing of the present invention.

Embodiments of the present invention provide a method of measuring thermal conductivity in a thickness direction of a nano thin film.

According to an embodiment of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: disposing a nanofilm on a substrate; Heating the nanotubes with a probe of a scanning thermal microscope (SThM); Calculating a calorie transferred from the probe to the nano thin film and a temperature on one surface of the nano thin film in contact with the probe when a displacement in the height direction occurs in the probe; And measuring the thermal conductivity in the thickness direction of the nano thin film by using a calorie transferred from the probe to the nano thin film and a temperature on one surface of the nano thin film in contact with the probe, A method of measuring the thermal conductivity in the thickness direction is disclosed.

In the present embodiment, the thickness direction thermal conductivity of the nano thin film can be calculated by the following equation.

[Mathematical Expression]

(Thermal conductivity in the thickness direction) =

(The thickness of the nano thin film) / (the cross sectional area of the tip of the probe) / (the thickness direction temperature difference of the nano thin film)

In this embodiment, the temperature of the other surface of the nano thin film opposite to the one surface may be set to be substantially equal to the melting point of the substrate in contact with the other surface.

In this embodiment, in the step of heating the nanotubes with a thermoelectric probe of a scanning thermal microscope (SThM), the probe may heat the nanotubes while pressurizing the nanotubes to a certain degree.

In this embodiment, at least a part of the substrate melts when the probe heats the nano thin film and reaches a point where the temperature of at least a part of the substrate in contact with the nano thin film melts, A displacement in the height direction may occur in the probe in contact therewith.

In this embodiment, a cooling element may be further provided on one side of the substrate.

Other aspects, features, and advantages will become apparent from the following drawings, claims, and detailed description of the invention.

The cross-plane thermal conductivity of the nanotubes can be calculated easily and quickly by the method of measuring the thermal conductivity of the nanotubes in the thickness direction according to the embodiments of the present invention.

FIG. 1 and FIG. 2 are cross-sectional views illustrating a method of measuring thermal conductivity in a thickness direction of a nano thin film according to an embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention and methods of achieving them will be apparent with reference to the embodiments described in detail below with reference to the drawings. However, the present invention is not limited to the embodiments described below, but may be implemented in various forms. In the following embodiments, the terms first, second, and the like are used for the purpose of distinguishing one element from another element, not the limitative meaning. Also, the singular expressions include plural expressions unless the context clearly dictates otherwise. Also, the terms include, including, etc. mean that there is a feature, or element, recited in the specification and does not preclude the possibility that one or more other features or components may be added. Also, in the drawings, for convenience of explanation, the components may be exaggerated or reduced in size. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, and thus the present invention is not necessarily limited to those shown in the drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals refer to like or corresponding components throughout the drawings, and a duplicate description thereof will be omitted .

Recently, two-dimensional nanomaterials have attracted attention from academia due to their unique physical properties, and researches related to the development of application items utilizing the characteristics of the nanomaterials are being actively carried out in the world.

The thermal properties of such two-dimensional nanomaterials are also of interest. Up to now, studies have been made on the thermal conductivity in the in-plane direction, but the thermal conductivity in the cross- It is not in the situation.

The present invention is characterized by measuring the thermal conductivity in the cross-plane direction of a nano thin film using a scanning thermal microscope (SThM).

First, the scanning probe microscope will be described in more detail as follows.

With the rapid development of nanotechnology, a variety of nanomaterials and nanodevices are being developed rapidly. In accordance with the Thermodynamics 2 rule, the operation of a nanodevice inevitably generates heat, and the energy transfer characteristics of a nanomaterial often exhibit properties different from those of a bulk material. Therefore, the measurement of thermal phenomena at the nanoscale is very important for the characterization of the nanomaterials and the analysis of the behavior of the nanodevices. Due to this importance, the development and use of scanning thermal microscope (SThM), which is a tool for experimentally analyzing the heat phenomenon at micro and nanoscale, has been actively studied.

The scanning probe thermal microscope is a tool for measuring the thermal properties such as temperature at micro and nanoscale at the highest resolution of the currently known methods. Shi et al. Experimentally demonstrated that the spatial resolution of a scanning probe thermography microscope is higher than 100 nm by measuring the temperature around an electrically heated multi-wall carbon nanotube.

The method of measuring the thickness direction thermal conductivity of a nano thin film according to an embodiment of the present invention uses the scanning probe microscope to calculate the amount of heat flowing into the nano thin film 210 and the temperature of the upper surface of the nano thin film 210 Thereby easily and quickly calculating the cross-plane thermal conductivity of the nano thin film. This will be described in more detail as follows.

FIG. 1 and FIG. 2 are cross-sectional views illustrating a method of measuring thermal conductivity in a thickness direction of a nano thin film according to an embodiment of the present invention. 1 and 2, the X-axis direction may be defined as an in-plane direction, and the Y-axis direction may be defined as a thickness direction or a cross-plane direction.

Referring to FIG. 1, a nano thin film 210 to be measured is placed on a substrate 200 having a melting point already known, and a probe 230 of a scanning probe thermometer, (210).

Then, heat is generated in the probe (SThM probe) 220 of the scanning probe thermography microscope to gradually increase the temperature of the surface of the nanofiltration film 210 in contact with the probe 220. That is, a thermoelectric probe of a scanning probe thermography microscope is brought into contact with the nanomembrane 210, and a thermocouple junction of the tip 220 is heated by an alternating current and the temperature amplitude of the thermocouple is measured.

 When the temperature of the surface of the nano thin film 210 is gradually increased in this way and the temperature of the substrate 200 contacting the nano thin film 210 reaches a melting point, At least a part of the nano thin film 210 is melted and thus the probe 220 in contact with the nano thin film 210 shows the displacement in the thickness direction. That is, the probe 220 pressing the substrate 200 from the melted portion of the substrate 200 is lowered downward in the Y-axis direction by a certain amount.

At this time, the amount of heat flowing from the probe 220 to the nano thin film 210 and the temperature of the upper surface of the nano thin film 210 can be measured. At this time, the temperature of the lower surface of the nano thin film 210 is the melting point of the substrate 200 Can be assumed.

In order to calculate the thermal conductivity, a problem that a heat source is formed on the surface of the nano thin film 210 and thermal conduction is performed in an in-plane and a cross-plane direction is performed by assuming a thermal conductivity of the nano thin film, It is necessary to find the thermal conductivity value that matches the experimental result and the analytical result of the temperature difference in the thickness direction.

The in-plane directional thermal conductivity may be a value already reported in the academic field or a thermal conductivity in the plane (in-plane) or cross-plane direction may be fitted using two values as variables. .

If the thermal conductivity in the in-plane direction can be ignored, the cross-plane thermal conductivity of the nano thin film can be calculated using Equation (1) below.

[Equation 1]

(Cross-sectional thermal conductivity) =

(The thickness of the nano thin film) / (the cross-sectional area of the tip of the probe) / (the thickness direction temperature difference of the nano thin film)

In this way, heat is generated in the probe (SThM probe) 220 of the scanning probe microscope to gradually increase the temperature of the surface of the nanofiltration film 210 in contact with the probe 220, The temperature of the nano thin film 210 and the temperature of the upper surface of the nano thin film 210 are calculated at the time when the probe 220 reaches the probe 220 and a rapid displacement in the height direction occurs, the cross-plane thermal conductivity can be calculated.

Although not shown in the drawing, the in-plane thermal conduction is negligible and the thermal conduction in the cross-plane direction has a dominant influence. In this case, (Not shown) may be additionally disposed so that a temperature gradient is generated in the cross-sectional direction.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the exemplary embodiments, and that various changes and modifications may be made therein without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

200: substrate
210: Nano thin film
220: Scanning probe Thermo microscope probe (SThM probe)

Claims (6)

Disposing a nano thin film on a substrate;
Heating the nanotubes with a thermoelectric probe of a scanning thermal microscope (SThM);
Calculating a calorie transferred from the probe to the nano thin film and a temperature on one surface of the nano thin film in contact with the probe when a displacement in the height direction occurs in the probe; And
And measuring the thermal conductivity in the thickness direction of the nano thin film by using a calorie transferred from the probe to the nano thin film and a temperature on one surface of the nano thin film in contact with the probe,
Wherein the probe heats the nano-thin film and at least a portion of the substrate is melted when the temperature of at least a portion of the substrate in contact with the nano-film reaches a melting point, And a displacement in a height direction of the nano thin film is generated. The method according to claim 1,
Wherein the thickness direction thermal conductivity of the nano thin film is calculated by the following equation.
[Mathematical Expression]
(Thermal conductivity in the thickness direction) =
(The thickness of the nano thin film) / (the cross sectional area of the tip of the probe) / (the thickness direction temperature difference of the nano thin film) The method according to claim 1,
Wherein the temperature of the other surface of the nano thin film opposite to the one surface is set to be substantially the same as the melting point of the substrate contacting the other surface of the nano thin film. The method according to claim 1,
In the step of heating the nanotubes with a thermoelectric probe of a scanning thermal microscope (SThM)
Wherein the probe is heated while pressurizing the nano thin film to a certain degree. delete The method according to claim 1,
The method of claim 1, further comprising a cooling element on one side of the substrate.

KR1020150106117A 2015-07-27 2015-07-27 Method for calculating cross-plane thermal conductivity of nanoscale thin film KR101682998B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107966470A (en) * 2017-09-15 2018-04-27 武汉嘉仪通科技有限公司 A kind of method and device for measuring film transverse thermal conductivity
KR20190010705A (en) 2019-01-23 2019-01-30 한서대학교 산학협력단 Equipment and Method for Mesuring the Conductivity of Ultrathin Thermal Sheet

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007064917A (en) * 2005-09-02 2007-03-15 Beteru:Kk Device for measuring thermal physical property of pellicular sample and method for the same
KR20110004925A (en) * 2009-06-29 2011-01-17 고려대학교 산학협력단 Quantitative temperature and thermal conductivity measuring method using scanning thermal microscope
JP2011038933A (en) * 2009-08-12 2011-02-24 Sii Nanotechnology Inc Softening-point measuring apparatus and thermal conductivity measuring apparatus
US20110043787A1 (en) * 2009-08-20 2011-02-24 Carlos Duran Photoelastic method for absolute determination of zero cte crossover in low expansion silica-titania glass samples

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007064917A (en) * 2005-09-02 2007-03-15 Beteru:Kk Device for measuring thermal physical property of pellicular sample and method for the same
KR20110004925A (en) * 2009-06-29 2011-01-17 고려대학교 산학협력단 Quantitative temperature and thermal conductivity measuring method using scanning thermal microscope
JP2011038933A (en) * 2009-08-12 2011-02-24 Sii Nanotechnology Inc Softening-point measuring apparatus and thermal conductivity measuring apparatus
US20110043787A1 (en) * 2009-08-20 2011-02-24 Carlos Duran Photoelastic method for absolute determination of zero cte crossover in low expansion silica-titania glass samples

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107966470A (en) * 2017-09-15 2018-04-27 武汉嘉仪通科技有限公司 A kind of method and device for measuring film transverse thermal conductivity
CN107966470B (en) * 2017-09-15 2020-05-22 武汉嘉仪通科技有限公司 Method and device for measuring transverse thermal conductivity of thin film
KR20190010705A (en) 2019-01-23 2019-01-30 한서대학교 산학협력단 Equipment and Method for Mesuring the Conductivity of Ultrathin Thermal Sheet

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