KR101667151B1

KR101667151B1 - Vaccum suction device

Info

Publication number: KR101667151B1
Application number: KR1020150068627A
Authority: KR
Inventors: 이우승
Original assignee: 이우승
Priority date: 2015-05-18
Filing date: 2015-05-18
Publication date: 2016-10-18

Abstract

The present invention relates to a vacuum adsorption apparatus capable of improving quality and productivity by preventing foreign matter generated between a fixed pipe and a sliding pipe from adhering to a suction pad or a workpiece and easily cleaning or removing foreign substances, A sliding pipe inserted in the fixing pipe and having an outer circumferential surface in close contact with an inner circumferential surface of the fixing pipe and sliding up and down; A vacuum connector coupled to an upper end of the sliding pipe to form a vacuum inside the sliding pipe from the vacuum generator; a vacuum connector coupled to a lower end of the sliding pipe, An adsorption pad which is brought into close contact with the workpiece to be vacuum-adsorbed, And a water receiver coupled between the sliding pipe and the suction pad to receive foreign substances generated by contact friction between the base fixing pipe and the sliding pipe.

Description

[0001] VACCUM SUCTION DEVICE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a vacuum adsorption apparatus connected to a vacuum generator for picking up and transferring a workpiece by vacuum adsorption.

In general, a vacuum adsorption apparatus having a suction pad is used for picking up and transporting a plate-shaped workpiece, such as a flat panel display panel, an electronic substrate, or a press-processed metal plate.

Such a vacuum adsorption apparatus picks up the workpiece before or after processing, and inputs the workpiece to the processing apparatus or transfers it to the next process. 1, a vacuum pipe 20 is installed in a fixed plate 10 which is movable vertically and horizontally, and a suction pad 30 is coupled to a lower end of the vacuum pipe 20 . The vacuum pipe 20 is connected to the vacuum generator 1 and a vacuum is formed therein. When the upper surface of the workpiece M is brought into close contact with the adsorption pad 30, the workpiece M is adsorbed. Here, a plurality of vacuum pipes 20 and an adsorption pad 30 may be provided depending on the area of the workpiece M.

On the other hand, if the adsorption face of the workpiece M is flat, even if the vacuum pipe 20 of the vacuum adsorption apparatus is simply fixed to the fixed plate 10, the workpiece M can be easily conveyed through the adsorption. However, as shown in Fig. 2, when the adsorption face of the workpiece M is not flat and uneven, or a projection or a step is formed by processing or the like, the vacuum pipe 20 fixed to the fixing plate 10 The adsorption will not be properly performed over the entire area of the workpiece M.

There is a need for a vacuum adsorption apparatus capable of adjusting the height difference, i.e., level, of the vacuum pipe 20 when the adsorption surface of the workpiece M as described above is uneven. As shown in FIG. 3, the vacuum adsorption apparatus having the level adjusting function includes a fixed plate 10 installed vertically and horizontally movably, a fixed pipe 40 coupled to the fixed plate 10, A sliding pipe 20 elastically inserted in the inside of the sliding pipe 40 and having an outer peripheral surface in close contact with the inner peripheral surface of the fixed pipe 40 and sliding up and down; And an adsorption pad (30) which adheres to the work (M) and vacuum adsorbs it.

4, even when a step is formed on the suction surface of the workpiece M, the sliding pipe 20 is moved up and down with respect to the fixed pipe 40, The height difference between the adsorption pad 30 and the adsorption pad 30 'coupled to the other sliding pipe 20' can be adjusted.

However, when the sliding pipe 20 slides up and down with respect to the fixed pipe 40 in the case of the vacuum adsorption apparatus capable of adjusting the level of the height difference described above, as shown in FIGS. 5 and 6, The inner circumferential surface and the outer circumferential surface of the sliding pipe 20 come into close contact with each other, and friction is generated between them. At this time, abrasion occurs little by little due to contact friction generated between the inner circumferential surface of the fixed pipe 40 and the outer circumferential surface of the sliding pipe 20, and such abrasion causes metal dust or foreign matter.

6, the foreign substances generated in the upper direction of the fixed pipe 40 are easily accumulated on the fixing plate 10 or cleaned, while the foreign substances generated in the lower direction of the fixed pipe 40 There is a problem that it is directly attached to the adsorption pad 30 and the workpiece M.

As a result, a foreign matter adheres to the adsorption pad 30, which lowers the adsorption force and causes troublesome problems such as frequent cleaning of the adsorption pad 30. In particular, foreign matter adheres to the workpiece M, There is a fatal problem that deteriorates the quality due to foreign substances adhering to the subsequent processing.

It is an object of the present invention, which is devised to solve the problems as described above, to prevent quality of foreign matter generated between a fixed pipe and a sliding pipe from being adhered to a suction pad or a workpiece, And to provide a vacuum adsorption apparatus which can be easily removed.

Other objects, specific advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments with reference to the accompanying drawings.

According to an aspect of the present invention, there is provided a vacuum adsorption apparatus comprising: a fixed plate movably installed vertically and horizontally; a fixed pipe coupled to the fixed plate; A sliding pipe which is in close contact with an inner circumferential surface of the pipe and slides up and down; a spring which provides an elastic force such that the sliding pipe faces downward with respect to the fixed pipe; A vacuum connector coupled to an upper end of the pipe, an adsorption pad coupled to a lower end of the sliding pipe to closely contact the workpiece and vacuum adsorbed thereon, and a foreign matter generated by contact friction between the fixed pipe and the sliding pipe A coupling between the sliding pipe and the adsorption pad It comprises the water receptacle.

The fixing pipe is inserted through the fixing plate and has a fixing thread formed on an outer circumferential surface thereof, and is coupled to the fixing plate by tightening coupling of a pair of upper and lower nuts.

The sliding pipe is formed with a large diameter peripheral portion on an upper outer circumferential surface so as to be in close contact with a circumferential inner circumferential portion of the fixed pipe, Shaped outer circumferential surface is formed on the lower outer circumferential surface so as to be in close contact with the inner circumferential surface of the lower end of the outer circumferential surface.

The spring has a smaller diameter than the outer periphery of the sliding pipe and has a lower end supported by the upper end of the outer periphery of the sliding pipe and a lower end supported by the inner periphery of the fixed pipe, And is inserted into the outer peripheral portion.

The present invention further includes a pair of bushings coupled to the upper and lower inner circumferential surfaces of the fixed pipe in a ring shape and in contact with the outer circumferential surface of the sliding pipe.

The bushing is made of polytetrafluoroethylene (PTFE), and is press-fitted to the upper and lower inner circumferential surfaces of the fixed pipe.

The sliding pipe is formed with upper and lower threads at the upper and lower ends, respectively. The vacuum connector is screwed into the upper thread of the sliding pipe. The water pipe is screwed into the lower thread of the sliding pipe .

The sliding pipe may further include a pad connecting hole which is in close contact with the lower surface of the water receiver and is screwed to a lower portion of the sliding pipe so that the water receiving portion is positioned and communicated with the inside of the sliding pipe. do.

In addition, the water receptacle may include a cup-shaped lower face portion in a cup shape and an annular peripheral portion protruding upward along the periphery of the lower face portion.

The vacuum adsorption apparatus according to the present invention is characterized in that the water receiving part is provided between the sliding pipe and the adsorption pad so as to receive foreign matter generated by contact friction between the fixed pipe and the sliding pipe so that the foreign matter directly adheres to the adsorption pad or the workpiece So that it is possible to improve the quality and productivity and to easily separate only the waterbath, so that it is easy to clean and remove the foreign matter.

In addition, a bushing made of polytetrafluoroethylene (PTFE) with a low coefficient of friction with a smooth surface on the contact friction surface between the fixed pipe and the sliding pipe is installed to drastically reduce the foreign matter generated between the fixed pipe and the sliding pipe have.

1 is a perspective view showing a general vacuum adsorption apparatus,
FIG. 2 is a side view showing a state in which a workpiece having a stepped portion is adsorbed through the embodiment of FIG. 1,
3 is a perspective view illustrating a vacuum adsorption apparatus provided with a level adjusting function according to the related art,
4 is a side view showing a state in which a workpiece having a step is adsorbed through the embodiment of FIG. 3,
FIGS. 5 and 6 are perspective views showing a process of foreign matter generated by contact friction when the sliding pipe slides up and down with reference to the fixed pipe in the embodiment of FIG. 3,
7 is a perspective view showing an embodiment of a vacuum adsorption apparatus according to the present invention,
8 is a side view showing a state in which a workpiece having a stepped portion is adsorbed through the embodiment of FIG. 7,
9 and 10 are perspective views showing a process of foreign matter generated by contact friction when the sliding pipe slides up and down with reference to the fixed pipe in the embodiment of FIG. 7,
11 is an exploded perspective view of the embodiment of Fig. 9,
Figures 12 and 13 are side cross-sectional views of the embodiment of Figures 9 and 10,
14 is a perspective view showing another embodiment of the vacuum adsorption apparatus according to the present invention,
Fig. 15 is an exploded perspective view of the embodiment of Fig. 14,
FIGS. 16 and 17 are side cross-sectional views showing a process of sliding the sliding pipe up and down with reference to the fixed pipe based on the embodiment of FIG.

Hereinafter, preferred embodiments of the vacuum adsorption apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

7 to 17, the vacuum adsorption apparatus according to the present invention includes a fixed plate 100, a fixed pipe 200, a sliding pipe 300, a spring 400, a vacuum connector 500, a suction pad 600 And the water receiver 700, and may further include a bushing 800. The fixed pipe 200 may include a fixed thread 210, upper and lower nuts 220 and a shaft inner circumferential portion 230. The sliding pipe 300 may include a shaft diameter outer circumferential portion 310, 320, an upper thread 330, and a lower thread 340.

The fixed plate 100 is a flat or block shaped plate as shown in FIG. 7, and a fixed pipe 200, which will be described later, is fixedly installed and vertically and horizontally movable. The clamping plate 100 can be coupled to a manipulator and can be coupled onto a guide rail for vertical and horizontal movement, allowing vertical and horizontal movement. The movement of the fixing plate 100 is for moving the adsorption pad 300 to be described later by moving toward the workpiece M and vacuum-adsorbing the adsorbed workpiece M to the next machining process.

The fixed pipe 200 is coupled to the fixed plate 100 as shown in FIG. More specifically, the fixing pipe 200 is inserted into the fixing plate 100, and a fixing thread 210 is formed on the outer circumference of the fixing pipe 200, and the fixing pipe 200 is coupled to the fixing plate 100 by tightening the pair of upper and lower nuts 220 . The fixed pipe 200 can be vertically shifted and fixed through tightening engagement of the fixed thread 210 of the fixed pipe 200 and the upper and lower nuts 220 to adjust the position in relation to the other fixed pipe 200 . As shown in FIGS. 12 and 13, the fixed pipe 200 is formed with a shaft inner circumferential portion 230, which is stepped down to a stepped inner circumferential surface, in a relation with the sliding pipe 300, which will be described later, And a spring force.

7 to 17, the sliding pipe 300 is inserted into the fixed pipe 200, and the outer peripheral surface of the sliding pipe 300 closely contacts the inner surface of the fixed pipe 200 and slides up and down. 12 and 13, the sliding pipe 300 is formed with a large diameter peripheral portion 310 on the upper outer circumferential surface so as to be in close contact with the inner circumferential portion 230 of the shaft of the stationary pipe 200, And an elongated out-of-round outer circumferential portion 320 is formed on the lower outer circumferential surface so as to be in close contact with the inner circumferential surface of the lower end of the fixed pipe 200. Therefore, the sliding pipe 300 is inserted into the fixed pipe 200 and can slide up and down.

The spring 400 provides an elastic force such that the sliding pipe 300 faces downward with respect to the fixed pipe 200, as shown in FIGS. The spring 400 may be installed inside the fixed pipe 200 as shown in the drawing, or may be installed to be exposed to the outside, though it is not shown in the drawing. That is, it is sufficient that the spring 400 can provide an elastic force such that the sliding pipe 300 faces downward with respect to the fixed pipe 200. 11-13, the spring 400 has a smaller diameter than the outer periphery peripheral portion 320 of the sliding pipe 300, and the lower end of the spring 400 has a smaller diameter than the outer diameter of the sliding pipe 300. In other words, Diameter outer circumferential portion 310 of the sliding pipe 300 so that the upper end of the outer circumferential portion 310 of the sliding pipe 300 is supported at the upper end of the outer circumferential portion 320 of the sliding pipe 300. Accordingly, the spring 400 is inserted into the fixed pipe 200 and is not exposed to the outside, but provides the elastic force such that the sliding pipe 300 faces downward with respect to the fixed pipe 200 will be.

The vacuum connector 500 is coupled to the upper end of the sliding pipe 300 to form a vacuum inside the sliding pipe 300 from the vacuum generator 1 as shown in FIG. That is, when the vacuum generator 1 is driven, a vacuum is formed inside the sliding pipe 300 through the vacuum connector 500. When a vacuum is formed inside the sliding pipe 300 through the vacuum connector 500, a negative pressure is generated up to the adsorption pad 600 to be described later, so that the adsorption surface of the workpiece M is vacuum-adsorbed.

The adsorption pad 600 is coupled to the lower end of the sliding pipe 300 as shown in FIGS. 7 to 17, and is brought into close contact with the workpiece M to be vacuum-adsorbed. The adsorption pad 600 may be any structure or shape capable of adsorbing the workpiece M, but may be a bellows-type rubber tube such that the adsorption face of the workpiece M may be easily adsorbed even when the adsorption face of the workpiece M is inclined or projected. Lt; / RTI > The bellows shape is a corrugated shape such as a bellows, and the bellows type rubber tube is a corrugated rubber tube.

7 through 17, the water pan 700 includes a sliding pipe 300 and a suction pad (not shown) so as to receive foreign substances generated by contact friction between the fixed pipe 200 and the sliding pipe 300. [ 600). As shown in FIGS. 10 and 11, the water receiver 700 includes a cup-shaped lower surface portion 710 and a cup-like bottom surface portion 710 protruding upward along the periphery of the lower surface portion 710 to receive foreign matter more easily. And may include an annular peripheral portion 720. Therefore, as shown in FIG. 10, the foreign matter is not directly adhered to the adsorption pad 600 and the workpiece M but is received by the water receiving surface 700, thereby improving the quality and productivity. (700) can be separated, so that it is easy to clean or remove foreign matter.

10 to 13, the upper and lower ends of the sliding pipe 300 are formed with an upper thread 330 and a lower thread 340, respectively. At this time, the vacuum connector 500 is screwed to the upper thread 330 of the sliding pipe 300, and the water pan 700 is coupled to the lower thread 340 of the sliding pipe 300. When the sliding pipe 300 is inserted into the fixed pipe 200 and slides up and down, the downward sliding distance restriction is made by the vacuum connector 500, and the upper sliding limit is restricted by the water pan 700 As shown in FIG.

7 through 17 so that the water pan 700 can be firmly coupled between the sliding pipe 300 and the adsorption pad 600. The water pan 700 is in close contact with the lower surface of the water pan 700, A pad connecting hole 610 which is screwed to the lower thread 340 of the sliding pipe 300 and communicates the suction pad 600 with the inside of the sliding pipe 300 is fixed .

In addition, foreign matter generated by contact friction between the fixed pipe 200 and the sliding pipe 300 can be received by the water receiver 700 and can be easily processed, but more preferably, The contact friction between the pipe 300 is minimized to reduce the amount of foreign matter generated. To this end, a pair of bushings 800 are installed on the friction surface between the fixed pipe 200 and the sliding pipe 300, as shown in Figs.

That is, the bushing 800 is provided with a pair of rings, and is engaged with the upper and lower inner circumferential surfaces of the fixed pipe 200 and contacts the outer circumferential surface of the sliding pipe 300. The bushing 800 may be made of any material as long as it has a low coefficient of friction, and may be made of synthetic resin, ceramic, carbon, or the like. Particularly, the bushing 800 is made of polytetrafluoroethylene (PTFE) and can be press-fitted into the upper and lower inner circumferential surfaces of the fixed pipe 200, respectively. Polytetrafluoroethylene, which is a non-flammable fluorocarbon resin belonging to the organic polymer series, is well known as PTFE, which is abbreviated as PTFE or Teflon which is a trade name of DuPont, and is known for its chemical resistance to all chemicals and its smooth surface. Therefore, by replacing the friction surface between the fixed pipe 200 and the sliding pipe 300, the bushing 800 made of polytetrafluoroethylene has high heat resistance and chemical resistance even when it is deteriorated by frictional contact due to frequent sliding. The friction coefficient is low due to the smooth surface, and the amount of foreign matter generated by abrasion can be drastically reduced.

As described above, the vacuum adsorption apparatus according to the present invention is configured such that the sliding pipe 300 and the adsorption pad 600 are disposed between the sliding pipe 300 and the sliding pipe 300 so as to receive foreign substances generated by contact friction between the fixing pipe 200 and the sliding pipe 300 This water receptacle 700 is provided so that the foreign matter is not directly adhered to the adsorption pad 600 and the workpiece M but is received by the water receptacle 700 so that the quality and productivity can be improved. So that it is easy to clean and remove foreign matter.

A bushing 800 made of polytetrafluoroethylene (PTFE) having a low coefficient of friction as a smooth surface is provided on a contact friction surface between the fixed pipe 200 and the sliding pipe 300, Foreign matter generated between the sliding pipes 300 can be drastically reduced.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

M: Workpiece
100: Fixed plate
200: Fixed pipe 210: Fixed thread
220: Upper and lower nuts 230: Housewife
300: Sliding pipe
310: Shaft diameter outer circumference 320: Outer diameter housewife
330: upper thread 340: lower thread
400: spring
500: Vacuum connector 510: Vacuum generator
600: Adsorption pad 610: Pad connection port
700: This water table
710: Lower part 720: Peripheral part
800: Bushing

Claims

A stationary plate movably installed vertically and horizontally,
A fixed pipe coupled to the fixed plate,
A sliding pipe inserted into the fixed pipe and having an outer circumferential surface closely contacting the inner circumferential surface of the fixed pipe and sliding up and down;
A spring for providing an elastic force such that the sliding pipe faces downward with respect to the fixed pipe,
A vacuum connector coupled to an upper end of the sliding pipe to form a vacuum from the vacuum generator inside the sliding pipe,
An adsorption pad coupled to a lower end of the sliding pipe,
And a cup-shaped water receiver coupled between the sliding pipe and the adsorption pad to receive foreign matter generated by contact friction between the fixed pipe and the sliding pipe,
The water-
And an annular circumferential portion protruding upward along the circumference of the lower surface portion and the lower surface portion.

The method according to claim 1,
The fixed pipe includes:
Wherein the fixing plate is inserted through the fixing plate and has a fixing thread formed on an outer circumferential surface thereof, and is coupled to the fixing plate by tightening coupling of a pair of upper and lower nuts.

The method according to claim 1,
The fixed pipe includes:
A shaft inner circumferential portion which is stepped down in a stepped manner is formed on the upper inner circumferential surface,
The sliding pipe includes:
Wherein a long diameter outer peripheral portion is formed on an upper outer circumferential surface so as to be in close contact with a circumferential inner circumferential surface of the fixing pipe and an elongated outer circumferential outer circumferential portion is formed on the lower outer circumferential surface so as to be in close contact with the inner circumferential surface.

The method of claim 3,
The spring
The lower end of the sliding pipe is supported by the upper end of the outer periphery of the sliding pipe and the upper end is inserted into the outer periphery of the shaft diameter of the sliding pipe so that the upper end of the sliding pipe is supported by the inner periphery of the sliding pipe. .

The method according to claim 1,
Further comprising a pair of bushings coupled to the upper and lower inner circumferential surfaces of the fixed pipe in a ring shape and in contact with the outer circumferential surface of the sliding pipe, respectively.

6. The method of claim 5,
The bushing
(PTFE), and is press-fitted into each of the upper and lower inner circumferential surfaces of the fixed pipe.

The method according to claim 1,
The sliding pipe includes:
An upper thread and a lower thread are formed at the upper and lower ends, respectively,
Wherein the vacuum connector comprises:
Screwed to an upper thread of the sliding pipe,
The water-
Wherein the sliding pipe is screwed to a lower thread of the sliding pipe.

8. The method of claim 7,
Further comprising a pad connecting hole which is in close contact with a lower surface of the water receiver and is screwed to a lower portion of the sliding pipe so that the water receiving portion is positioned and communicated with the inside of the sliding pipe, Absorption device.

delete