KR101626322B1 - Shape measurement apparatus - Google Patents

Shape measurement apparatus Download PDF

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Publication number
KR101626322B1
KR101626322B1 KR1020150162039A KR20150162039A KR101626322B1 KR 101626322 B1 KR101626322 B1 KR 101626322B1 KR 1020150162039 A KR1020150162039 A KR 1020150162039A KR 20150162039 A KR20150162039 A KR 20150162039A KR 101626322 B1 KR101626322 B1 KR 101626322B1
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KR
South Korea
Prior art keywords
measurement
permanent magnet
arm
electromagnet
stylus
Prior art date
Application number
KR1020150162039A
Other languages
Korean (ko)
Inventor
황재은
Original Assignee
황재은
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Application filed by 황재은 filed Critical 황재은
Priority to KR1020150162039A priority Critical patent/KR101626322B1/en
Application granted granted Critical
Publication of KR101626322B1 publication Critical patent/KR101626322B1/en
Priority to PCT/KR2016/012296 priority patent/WO2017086625A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/08—Measuring force or stress, in general by the use of counterbalancing forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/08—Measuring force or stress, in general by the use of counterbalancing forces
    • G01L1/086—Measuring force or stress, in general by the use of counterbalancing forces using electrostatic or electromagnetic counterbalancing forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/122—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using permanent magnets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/127—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using inductive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G01L25/006—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency for measuring work or mechanical power or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028—Force sensors associated with force applying means
    • G01L5/0038—Force sensors associated with force applying means applying a pushing force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

The present invention relates to a shape measurement apparatus, comprising: a measurement arm part having a stylus to measure a shape by contacting a measurement target, and an arm to support the stylus; a measurement arm support part to support the measurement arm part such that the measurement arm part perform a left and a right straight line motion and an up/down pivot rotation along the shape of the measurement target; a measurement force correction part accommodated in the measurement arm support part, correcting a measurement force of the stylus to apply constant measurement pressure to a surface of the measurement target even though the shape of the measurement target is changed while the stylus is rotated up and down; and a control part which senses shape variation of the measurement target, controlling the measurement force correction part to correct the measurement pressure as much as the shape variation. The measurement arm support part comprises: a support part main body; a driving block to support the measurement arm part in a longitudinal direction of the support part main body to be able to move the measurement arm part in a left and right straight line; and a joint plate which includes one end fixated to the measurement arm part in a vertical direction to the measurement arm part, and is rotatably combined to the driving block in the up/down rotary direction of the arm. The measurement force correction part comprises: a permanent magnet combined to protrude in a fixated length in a direction which the joint block is combined to the driving block; and an electromagnet comprised to surround an outer circumference of the permanent magnet, having one end to rotate the joint plate while being moved back and forth along a longitudinal direction of the permanent magnet by applying a current in one direction by being combined to the joint plate.

Description

{SHAPE MEASUREMENT APPARATUS}

The present invention relates to a shape measuring instrument, and more particularly to a shape measuring instrument provided with a measuring force correcting means for correcting a measuring force so that a measuring force applied to a surface of an object to be measured becomes constant.

The shape measuring device is a device that obtains the shape information of the object in a three-dimensional space coordinate system by measuring the shape of the object quickly and accurately. The shape measuring device is used for evaluating the machining accuracy by comparing the shape measurement result of the processed product or part with the designed shape dimension or for the reverse design of the product without design data such as drawings.

An example of a shape measuring instrument is disclosed in Japanese Patent Application No. 10-1217217 entitled " Automatic Measuring Force Correction Device of Contact Surface Profile Measuring Machine ".

In the conventional shape measuring device, the stylus presses the measurement object downward to apply the measurement force, moves in the contact state, and the displacement sensor reads the coordinate value to measure the surface shape.

1 is a schematic view schematically showing a process of measuring a shape by contacting a stylus 11a of a conventional shape measuring instrument 10 with a surface of an object T to be measured. The stylus 11a is disposed at the end of the measuring arm 11 and the lower end of the stylus 11a presses the surface of the measured object T at a constant measuring pressure And moves along the surface of the object T to measure the shape of the object T to be measured.

At this time, the measuring arm 11 is rotated at a predetermined angle up and down at the other end of the measuring arm 11, and the stylus 11a applies a constant measuring pressure to the surface of the measured object T 15 are provided. The measurement force control section 15 is provided with permanent magnets 15c and electromagnets 15a and 15b provided above and below the permanent magnets 15c.

Conventionally, when the current is applied, the measuring force control section 15 moves only in one direction according to the current application direction. That is, the measuring arm 11 is rotated in the direction indicated by A or the measuring arm 11 is rotated in the direction indicated by B when a current in the opposite direction is applied according to the current application direction.

The conventional shape measuring instrument 10 is difficult to maintain the measurement arm 11 horizontally because the measurement arm 11 is rotated only upwardly or downwardly according to the current application direction of the measurement force control section 15. [ That is, since the stylus 11a is lifted upward or downward according to the current application direction, it is difficult to control the position of the stylus 11a in the middle.

Also, in the conventional shape measuring instrument 10, the measuring arm 11 is lowered sharply downward due to the own weight of the measuring arm 11 even when no current is applied. Further, when a current is applied in the downward direction of the measurement arm 11, even if a smaller amount of current is applied than when the current is applied in the upward direction, the weight of the measurement arm 11 acts together It is disadvantageous in that it is difficult to control the position.

In order to solve the difficulty of the intermediate control of such a position, a technique of continuously applying a current in the direction in which the measuring arm 11 moves in the upward direction and a current in the direction in which the measuring arm 11 moves in the downward direction is alternately applied Was developed. In this case, intermediate control of the position is possible, but there are other problems such as noise and vibration. In addition, there is a problem that an error occurs in measurement of the stylus 11a when vibration is generated.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and provide a shape measuring device capable of correcting the measuring force so that the intermediate position of the stylus can be controlled even if a current is applied in one direction.

It is another object of the present invention to provide a shape measuring device capable of simply realizing position control of a stylus in a vertical direction.

It is still another object of the present invention to provide a shape measuring device which can increase the reliability of measurement results by keeping the measuring force constant without noise and vibration with a simple structure.

The above objects and various advantages of the present invention will become more apparent from the preferred embodiments of the present invention by those skilled in the art.

The object of the present invention can be achieved by a shape measuring device for measuring the shape of the object to be measured along the surface of the object to be measured. The shape measuring device of the present invention includes a stylus for measuring a shape in contact with an object to be measured, a measuring arm portion having an arm for supporting the stylus, A measurement arm supporting part for supporting the measurement arm part such that the measurement arm part is linearly moved in the left and right directions along the shape of the measured object and pivoted up and down; A measuring force storage unit accommodated in the measurement arm and supporting the stylus to vertically rotate the stylus to apply a constant measuring pressure to the surface of the measured object even if the shape of the measured object varies; And a control unit for sensing the shape change of the measured object and controlling the measurement force correcting unit so that the measured pressure is corrected by the shape change. A driving block for supporting the measurement arm in a linearly movable manner in the longitudinal direction of the support body; And a joint plate rotatably coupled to the driving block in a direction in which the arm is vertically rotated, wherein the measuring force correcting unit comprises: A permanent magnet which is coupled to the joint plate so as to protrude by a predetermined length in a direction in which the joint plate is coupled; And an electromagnet which is provided to surround the outer periphery of the permanent magnet and has one end coupled to the joint plate and moved back and forth along the longitudinal direction of the permanent magnet by application of a current in one direction and rotating the joint plate .

According to an embodiment of the present invention, a pivot shaft may be rotatably supported between the driving block and the joint plate so that the joint plate is rotated in accordance with the moving direction of the electromagnet.

According to one embodiment, the permanent magnets include a first permanent magnet and a second permanent magnet disposed at both ends with respect to the magnet coupling plate, and the electromagnets are disposed at both ends of the coil bobbin, The first electromagnet and the second electromagnet may be arranged such that the same polarity as that of the first permanent magnet and the second permanent magnet are parallel to each other.

According to one embodiment, the first electromagnet is disposed at a half of the total length of the first permanent magnet, and the second electromagnet is disposed at a half of the entire length of the second permanent magnet .

In the shape measuring device according to the present invention, the first electromagnet and the second electromagnet forming the measurement force corrector are disposed by winding the coils in the same direction. Thus, even if a current is applied only in one direction, position control can be performed such that the stylus is at the intermediate position or rotated up and down.

Thereby, there is an advantage that reliable measurement results can be obtained with less vibration and noise when compared with the case where the conventional direction current is alternately and continuously applied to control the stylus to the intermediate position.

Further, the amount of current applied to the first electromagnet and the second electromagnet can be adjusted differently, and the vertical position of the stylus can be easily controlled.

1 is a schematic view schematically showing a measuring force correction process of a conventional shape measuring instrument,
2 is a perspective view showing the configuration of a shape measuring instrument according to the present invention,
FIG. 3 is a perspective view illustrating a process of combining a measurement arm portion and a measurement arm portion of the shape measuring device according to the present invention,
FIG. 4 is an exploded perspective view showing the configuration of the measurement and measurement section of the shape measuring apparatus according to the present invention,
FIG. 5 is an exploded perspective view of the shape measuring instrument according to the present invention, in which the measurement arm portion, the measurement arm portion, and the measurement arm portion are exploded,
FIG. 6 is an enlarged perspective view showing the relationship between the measurement and measurement unit of the shape measuring apparatus according to the present invention and the measurement /
7 and 8 are views illustrating a process of adjusting the angle of the measurement arm by the measurement and control unit of the shape measuring apparatus according to the present invention,
FIG. 9 and FIG. 10 are diagrams for explaining the principle of measurement arm correction of the measurement and control unit of the shape measuring apparatus according to the present invention.

For a better understanding of the present invention, a preferred embodiment of the present invention will be described with reference to the accompanying drawings. The embodiments of the present invention may be modified into various forms, and the scope of the present invention should not be construed as being limited to the embodiments described in detail below. The present embodiments are provided to enable those skilled in the art to more fully understand the present invention. Therefore, the shapes and the like of the elements in the drawings can be exaggeratedly expressed to emphasize a clearer description. It should be noted that in the drawings, the same members are denoted by the same reference numerals. Detailed descriptions of well-known functions and constructions which may be unnecessarily obscured by the gist of the present invention are omitted.

2 is a perspective view showing the configuration of the shape measuring apparatus 100 according to the present invention. The shape measuring apparatus 100 according to the present invention is configured such that the stylus 149 coupled to the arm 147 moves along the surface of the measured object T in the forward and backward directions (X axis) (Z-axis) and forms the surface shape of the measured object T in three-dimensional coordinates.

The shape measuring apparatus 100 according to the present invention includes a base 110 disposed horizontally on the ground surface, a vertical axis 120 disposed perpendicularly to the base 110, a measurement arm portion 120 vertically moved along the vertical axis 120, And a measurement arm 130 detachably connected to the measurement arm support 130 by a magnetic force and measuring the shape of the measurement target T. [ A linear movement part 150 provided in the measurement arm support part 130 and supporting the measurement arm part 140 to move in the forward and backward directions, And a control unit for sensing a change in the shape of the measurement target T and controlling the measurement force correction unit 160 to correct the measurement force by a shape change (Not shown).

The base 110 is horizontally disposed on the ground and supports the vertical axis 120. The vertical axis 120 is provided with a driving unit 121 at an upper portion thereof so that the measurement and measurement unit 130 is moved up and down.

The measurement and measurement arm 130 supports the measurement arm 140 to measure the shape of the measurement target T stably. 3 is an exploded perspective view showing a combined structure of the measurement arm support part 130 and the measurement arm part 140. As shown in FIG. As shown in the figure, the measurement arm support part 130 includes a support body 131, a vertical axis coupling part 133 provided at the rear of the support body 131 to be coupled to the vertical axis 120, And a body coupling block 135 movably coupled by a linear moving part 150 to the body.

The support body 131 covers an upper portion of the base plate 134. [ The base plate 134 is provided with a linear moving part 150 for driving the body combining block 135 to move forward and backward and a measuring strength indicator 160 for rotating the body combining block 135 in the Z- do. A displacement sensor (not shown) that detects the displacement of the stylus 149 and a displacement detected by the displacement sensor (not shown) are analyzed on the base plate 134 so that the measurement force corrector 160 corrects the measurement force (Not shown) for matching displacement with three-dimensional coordinates.

On the front plate surface of the support body 131, a movable rail 137 for supporting the body coupling block 135 to move back and forth is formed. Here, the angle at which the stylus 149 is rotated in the Z-axis direction by the shape change of the measurement target T is limited by the width of the movable rail 137. [ The shape displacement exceeding the width of the movable rail 137 is corresponded by moving the measurement arm support portion 130 up and down along each vertical axis 120 of the control unit (not shown).

The body coupling block 135 is coupled to the joint plate 159 received in the inside of the support body 131 through the moving rail 137. [ When the joint plate 159 is coupled to the driving block 153 and the driving block 153 is linearly moved by the driving of the lead screw 155, the body coupling block 135 moves forward and backward along the X- .

A front magnet coupling plate 135a, an upper magnet coupling plate 135b and a side magnet coupling plate 135c are provided on the outer circumferential surface of the body coupling block 135 and are detachably coupled to the measurement arm 140 by a magnetic force.

The pair of right and left front magnet coupling plates 135a are provided on the front surface of the body coupling block 135. [ The front magnet coupling plate 135a is coupled to the front magnet 143 provided on the body 141 by a magnetic force. The upper surface magnet coupling plate 135b is provided on one side of the upper surface of the body coupling block 135. The upper surface magnet coupling plate 135b is coupled to an upper surface magnet (not shown) provided on the body 141 by a magnetic force. The lateral magnet coupling plate 135c is provided on the rear side surface of the body coupling block 135. [ The side magnet coupling plate 135c is coupled to the side magnet 145 provided on the body 141 by a magnetic force.

Here, the front direction is the direction in which the stylus 149 is oriented, and the rear direction is the direction opposite to the stylus 149.

The front magnet coupling plate 135a, the top magnetic coupling plate 135b and the side magnet coupling plate 135c are formed to be embedded in the outer circumferential surface of the body coupling block 135 and are formed of a metal plate material do.

The measurement arm 140 is detachably coupled to the measurement arm support 130 and contacts the surface of the measurement target T with the stylus 149 to detect the shape of the measurement target T. [ The measurement arm 140 according to the present invention is detachably coupled to the measurement and measurement holder 130 by the magnetic force of the magnet.

At this time, the magnetic force of the magnet is such that the combined state is maintained for a force in the reference range required when the stylus 149 detects the shape of the measurement target T, for example, in the range of 4 to 12 g, For example, a force of 13 g or more, the engaging state is released so that the measuring arm 140 is separated from the measurement arm holder 130.

The measurement arm 140 may include a body 141 coupled to the body coupling block 135 and a body coupling block 135 formed when the body 141 is recessed into the body 141 to couple the body 141 to the body coupling block 135. [ A front face magnet 143, an upper face magnet (not shown), and a side face magnet 145 formed on the inner surface of the block receiving groove 142. The block receiving groove 142 is formed in the block receiving groove 142,

A stylus 149 and an arm 147 for supporting the stylus 149 are provided in front of the measuring arm 140. The rear end of the measuring arm 140 is provided with a weight And a weight 148 for centering is provided.

The linear moving part 150 supports the body coupling block 135 and the measurement arm 140 coupled to the body coupling block 135 so as to be linearly moved in the X-axis direction (see FIG. 2). 4 and 5, the rectilinear motion unit 150 includes a main frame 151 disposed in parallel to the upper portion of the base plate 134, a driving block 150 coupled to the main frame 151 to be slidably moved along the main frame 151, A lead screw 155 for applying a driving force to move the driving block 153 along the main frame 151, a pivot shaft 157 coupled to a side surface of the driving block 153, And includes a joint plate 159 which is coupled to the block 135 and the measurement force control portion 160 and which causes the measurement force control portion 160 to pivot the body coupling block 135 about the pivot axis 157 by a predetermined angle do.

The main frame 151 is provided between the base plate 134 and the support body 131 to support the driving block 153 so that the driving block 153 is moved along the movement rail 137. The upper end of the driving block 153 is slidably engaged with the main frame 151 and the screw coupling ring 154 is screwed into the lead screw 155.

When the drive motor 156 rotates in the forward and reverse directions under the control of a control unit (not shown), the lead screw 155 coupled to the drive shaft (not shown) of the drive motor 156 rotates normally. Although not shown in the drawing, threads are formed on the outer periphery of the lead screw 155.

A screw coupling ring 154 extending to one side of the driving block 153 has a thread corresponding to the lead screw 155 formed on the inner wall surface. When the lead screw 155 is rotated, the screw coupling ring 154 is moved along the lead screw 155, and the driving block 153 is moved along the main frame 151 by the driving force.

6, the pivot shaft 157 is provided on the side wall of the driving block 153 in a direction perpendicular to the body coupling block 135 so that the joint plate 159 is pivotally rotated (Z-axis direction in Fig. 2). The pivot shaft 157 is idly rotatably provided in the driving block 153 by a pivot support member 158. Although not shown in the drawing, a plurality of bearings (not shown) are provided between the pivot shaft 157 and the joint plate 159 to assist rotation of the pivot shaft 157.

The joint plate 159 serves to transmit the measurement force of the measurement force control unit 160 to the measurement arm 140 through the body coupling block 135. The upper end of the joint plate 159 is fixed to the body coupling block 135. The middle region of the joint plate 159 is pivotally supported on the pivot shaft 157, As shown in Fig.

Reinforcing holes 159a and 159b through which a pair of pivot supporting members 158 are inserted are formed in the middle region and the lower region of the joint plate 159, respectively. The pivot support member 158 is inserted into the support part recombination holes 159a and 159b so that the plate surface of the joint plate 159 is placed on the pivot shaft 157 as shown in Figure 7 (b) The joint plate 159 can be rotated.

An upper portion of the joint plate 159 is provided with a coupling block coupling hole 159c which is disposed in contact with the side surface of the body coupling block 135 and into which the coupling member 159d is inserted. The engaging member 159d is inserted into the interior of the body engaging block 135 through the engaging block engaging hole 159c to fix the joint plate 159 to the body engaging block 135. [ The rotation of the joint plate 159 by the measurement force control unit 160 is transmitted to the body coupling block 135 and the arm 147 of the measurement arm 140 coupled to the body coupling block 135 and the stylus 149, respectively.

A bracket coupling hole 159e is provided on a side surface of the joint plate 159. The bracket coupling hole 159e is engaged with the coil bracket 169 of the measurement force control section 160. [ The bracket coupling hole 159e is positioned to correspond to the coupling hole 169a of the coil bracket 169, and a coupling member (not shown) not shown in the figure is inserted. (Not shown) is fastened to the joint plate 159 so that the Z-axis rotation angle for the measurement force correction of the measurement force control unit 160 can be transmitted.

The measurement force controller 160 moves the stylus along the surface of the measurement target T according to the shape change of the measurement target T under the control of the control unit .

The measurement strength controller 160 controls the stylus 149 such that the stylus 149 can be moved along the surface of the measured object T at a position where the shape of the measured object T is changed by the control of the controller 147) in a predetermined angle range.

6 and 7 (a) and 7 (b), the measurement force controller 160 includes a first permanent magnet 161 and a second permanent magnet 161, which are provided with a predetermined length around the magnet coupling plate 163, A coil bobbin 166 wound around the coil bobbin 166 so as to surround the periphery of the first permanent magnet 161 and the second permanent magnet 162 in the form of a ring; And a first electromagnet 165 and a second electromagnet 167 which exhibit a magnetic force by application.

The first permanent magnet 161 and the second permanent magnet 162 are integrally formed at both ends of the magnet coupling plate 163 and are fixed to the driving block 153 by the block fixing member 164.

The coil bobbin 166 is disposed to surround the first permanent magnet 161 and the second permanent magnet 162 and the coil bracket 169 provided at one side is fixed to the joint plate 159. Since the first permanent magnet 161 and the second permanent magnet 162 are fixed to the driving block 153, the position of the first permanent magnet 161 is fixed and the coil bobbin 166 is controlled by the control unit (not shown) 165 and the second electromagnet 167 in the forward and backward directions along the first permanent magnet 161 and the second permanent magnet 162.

Here, the first permanent magnet 161 and the second permanent magnet 162 are disposed so as to face each other with the magnet coupling plate 163 as a center. That is, the N pole and the S pole of the first permanent magnet 161 are arranged from the block fixing member 164 side, and the S pole and the N pole of the second permanent magnet 162 are disposed in contact with the magnet coupling plate 163 do.

The first electromagnet 165 is arranged such that the N pole and the S pole are disposed so that the end of the N pole is positioned between the N pole and the S pole of the first permanent magnet 161, 2 S pole and N pole of the second electromagnet 167 are sequentially arranged. That is, the permanent magnets 161 and 162 and the electromagnets 165 and 167 are arranged in parallel with each other with the same polarity.

The first electromagnet 165 and the second electromagnet 167 are wound around the coil bobbin 166 in the same direction. This makes it possible to control the intermediate position of the arm 147 even if a current is applied in one direction.

9 and 10 are diagrams for explaining the principle related to the configuration of the measuring strength indicator 160 of the present invention.

In the measurement force controller 160 of the present invention, the permanent magnets 20 and the electromagnets 30 are arranged so that the same polarities are parallel to each other. When the electric current is applied, the permanent magnet 20 in the center of the electromagnet 30 is balanced in position.

As shown in Fig. 9, when a current i is applied to the coil of the electromagnet 30, a magnetic force line E is formed around the coil. At this time, the magnetic force lines are formed so as to be oriented from the north pole to the south pole.

When the permanent magnet 20 is disposed in the center of the magnetic force line, that is, in the magnetic core, the magnetic force line M of the permanent magnet 20 tends to be aligned with the magnetic force line E of the electromagnet 30. If the permanent magnet 20 is disposed in the magnetic core in the direction opposite to the direction of the magnetic line of force E, the magnetic line of force M of the permanent magnet 20 must be aligned with the magnetic line of force E of the electromagnet 30, I have the power to turn around and my position is not balanced.

Therefore, the measurement force control unit 160 of the present invention is arranged such that the polarities of the permanent magnets 20 and the magnetic lines of force M of the electromagnet 30 are the same.

10 (a), current is applied so that the electrodes of the electromagnet 30 are aligned with the electrodes of the permanent magnet 20, and when the position of the permanent magnet 20 is fixed, The force is applied so that the permanent magnets 20 and the electrodes are in parallel with each other.

10 (b), when the external electromagnet 30 is moved downward as shown by the solid line in FIG. 10 (b), the electromagnet 30 is positioned in the same position as the permanent magnet 20 The force is applied in the direction of the dotted line.

Similarly, when the electromagnet 30 is moved upward as shown by a solid line in FIG. 10 (c), the electromagnet 30 applies a force in a downward direction as shown by a dotted line.

10 (d) and 10 (e), the magnitude of the force applied by the electromagnet 30 for positioning the permanent magnets 20 in parallel with each other is the same as that of the permanent magnets 20 / 2, that is, when the end of the electromagnet 30 is located at the center of the electrode.

 The measuring force control unit 160 according to the present invention is designed such that the first electromagnet 165 is designed to be located at a half of the length of the first permanent magnet 161 and the second electromagnet 167 is designed to be positioned at the second permanent magnet 162 Lt; RTI ID = 0.0 > 1/2. ≪ / RTI > This causes the first electromagnet 165 and the second electromagnet 167 to generate the maximum force to be positioned in parallel with the first permanent magnet 161 and the second permanent magnet 162.

Here, when the same current is applied to the first electromagnet 165 and the second electromagnet 167, the first electromagnet 165 and the second electromagnet 167, as shown in FIGS. 7A and 7B, Are balanced with each other and positioned between the first permanent magnet 161 and the second permanent magnet 162. As a result, the arm 147 also maintains a horizontal state.

When a large current is applied to the second electromagnet 167 as compared to the first electromagnet 165, the second electromagnet 167 is rotated by the second electromagnet 167 as shown in FIGS. 8A and 8B, Since the force to be parallel with the first permanent magnet 162 is increased, it is attracted to the second permanent magnet 162.

When the coil bobbin 166 is moved downward toward the second permanent magnet 162, the joint plate 159 coupled to the coil bobbin 166 is rotated clockwise about the pivot shaft 157, The body coupling block 135 coupled to the joint plate 159 and the measurement arm 140 are rotated at a certain angle? Downward.

On the other hand, when a larger current than the second electromagnet 167 is applied to the first electromagnet 165, the first electromagnet 165 is moved toward the first permanent magnet 161 and the joint plate 159 is pivoted The measurement arm 140 is rotated in the counterclockwise direction about the axis 157, and the measurement arm 140 is rotated in the upward direction.

The angle alpha at which the arms 147 of the measurement arm 140 and the stylus 149 pivot upward and downward due to the rotation of the joint plate 159 is limited by the width of the movable rail 137. As shown in FIG. 3, the joint plate 159 is exposed to the outside for a predetermined length through the moving rail 137, and the body coupling block 135 is coupled to the exposed portion. Therefore, the angle at which the joint plate 159 can be pivoted is limited by the width of the movable rail 137. [

The stylus 149 and the arm 147 are pivoted up and down by the width of the moving rail 137. When the angle exceeds the angle, the stylus 149 and the arm 147 are moved along the vertical axis 120 under the control of a control unit Is moved up and down.

Since the coil for forming the first electromagnet 165 and the second electromagnet 167 is wound in the same direction, the measuring force control unit 160 according to the present invention can control the horizontal position control of the arm 147, Is possible. That is, when the same amount of current is applied to the first electromagnet 165 and the second electromagnet 167 as described above, the first electromagnet 165 and the second electromagnet 167 balance the forces, The position of the stylus 149 and the arm 147 can be controlled in the horizontal direction.

Therefore, the conventional shape measuring unit 10 shown in FIG. 1 can reduce the number of times of alternately applying currents in different directions for horizontal position control, thereby preventing noise and vibration There are advantages to be able to.

The measuring force control unit 160 according to the present invention controls the amount of current applied to the first electromagnet 165 and the second electromagnet 167 differently so that the arm 147 can be easily biased upward and downward have.

The control unit (not shown) converts the position sensed by the displacement sensor (not shown) according to the positional change of the stylus 149 into a coordinate value to measure the shape of the subject T to be measured. A control unit (not shown) controls the driving motor 156 to linearly move the driving block 153 at a constant speed. Then, the stylus 149 is set so as to press the surface of the measurement target T at a constant pressure.

At this time, the measurement pressure applied to the object to be measured by the stylus 149 can be set in accordance with the material to be measured.

The control unit (not shown) controls the measuring force control unit 160 so that the predetermined measuring pressure can be kept constant according to the material of the target T when the stylus 149 moves. To this end, the control unit (not shown) controls the measuring force control unit 160 based on the real time position information of the stylus 149 transmitted from the displacement sensor (not shown) and the measured pressure information of the stylus 149.

When the rotation angle of the arm 147 pivoted in the Z-axis direction exceeds the maximum allowable angle, the control unit (not shown) drives the driving unit 121 of the vertical axis 120 And controls the measurement and measurement section 130 to move in the Y-axis direction.

A process of measuring the shape of an object T to be measured by the shape measuring apparatus 100 according to the present invention having such a configuration will be described with reference to FIGS. 2 to 10. FIG.

An example in which the shape measuring instrument 100 according to the present invention measures the shape of the disc-shaped object to be measured T as shown in Fig. 2 will be described as an example.

The displacement according to the movement of the stylus 149 is measured in the shape of the subject T based on the coordinate value of the position where the stylus 149 is first positioned. For this purpose, as shown in FIG. 2, the stylus 149 is moved from the initial position located at the center of the uppermost portion of the measured object T, and the shape is measured.

The measuring arm 140 is moved in the X-axis direction by the linear moving part 150 while being coupled to the body coupling block 135 by a magnetic force. At this time, the stylus 149 presses the surface of the measurement target T at a predetermined measurement pressure.

When the stylus 149 is moved in the horizontal direction in the X-axis direction at the initial position, the object to be measured T is bent so that the stylus 149 is spaced apart from the surface of the object T to be measured. When the stylus 149 is lifted, the measurement pressure applied to the measured object T by the stylus 149 is reduced.

For example, when the stylus 149 is moved from the surface of the measurement target T while the measurement pressure applied to the measurement target T by the stylus 149 is set to 5 g, the measured pressure is reduced to 4 g do. At this time, since the moving distance in the X-axis direction is very fine, the actual stylus 149 is not completely separated from the measured object T, but presses at a pressure smaller than the set pressure.

The control unit (not shown) receives the change of the measurement pressure applied from the stylus 149 and the displacement of the stylus 149 applied from the displacement sensor (not shown), and the stylus 149 again applies the measurement pressure of 5 g And controls the measurement strength indicator 160 so as to be able to perform the measurement.

The control unit (not shown) controls the measuring force control unit 160 in a direction in which the stylus 149 is moved downward so that the measured pressure of 4 g, which is the difference from the reference measured pressure, is additionally added.

7, the first electromagnet 165 and the second electromagnet 167 are connected to each other by a magnetic coupling plate (not shown), as shown in FIG. 7A and FIG. 7B, 163). In this case, the same amount of current is applied to the first electromagnet 165 and the second electromagnet 167.

The control unit (not shown) applies a larger current to the first electromagnet 165 than the second electromagnet 167 to add a measuring pressure of 1 g. At this time, the larger the measured pressure to be corrected, the larger the difference in the current value between the first electromagnet 165 and the second electromagnet 167 becomes.

When a large current is applied to the first electromagnet 165, the first electromagnet 165 is moved toward the first permanent magnet 161 and the joint plate 159 is moved counterclockwise about the pivot shaft 157 . Thus, the arm 147 and the stylus 149 move downward and come into close contact with the surface of the measurement target T and apply a measurement pressure of 5 g.

On the other hand, a measurement pressure larger than the measurement pressure of 5 g set according to the shape of the measurement target T may be applied. The case where the measurement target T has a gradually increasing inclined surface may be an example.

In this case, the control unit (not shown) controls the measuring force control unit 160 to move the stylus 149 in the upward direction so that the measured pressure of 5 g is maintained.

In this way, the shape measuring apparatus 100 according to the present invention can closely measure the shape by closely pressing the surface of the entire subject T at the same measurement pressure.

As described above, according to the shape measuring apparatus of the present invention, the first electromagnet and the second electromagnet forming the measurement force corrector are disposed by winding the coils in the same direction. Thus, even if a current is applied only in one direction, position control can be performed such that the stylus is at the intermediate position or rotated up and down.

Thereby, there is an advantage that reliable measurement results can be obtained with less vibration and noise when compared with the case where the conventional direction current is alternately and continuously applied to control the stylus to the intermediate position.

Further, the amount of current applied to the first electromagnet and the second electromagnet can be adjusted differently, and the vertical position of the stylus can be easily controlled.

It will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims. There will be. Therefore, it is to be understood that the present invention is not limited to the above-described embodiments. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims. It is also to be understood that the invention includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

100: shape measuring instrument 110: base
120: vertical axis 130:
131: Support body 133: Vertical shaft coupling part
134: base plate 135: body coupling block
135a: front magnet coupling plate 135b: upper surface magnet coupling plate
135c: side magnet coupling plate 137: moving rail
140: measurement arm part 141: body
142: block receiving groove 143: front magnet
145: side magnet 147: arm
148: weight weight 149: stylus
150: straight line moving part 151: main frame
153: driving block 154: screw-engaging ring
155: lead screw 156: drive motor
157: pivot shaft 158: pivot support member
159: joint plate 159a, and b:
159c: engaging block engaging hole 159d: engaging member
159e: bracket coupling hole 160:
161: first permanent magnet 162: second permanent magnet
163: magnet coupling plate 164: block fixing member
165: first electromagnet 166: coil bobbin
167: second electromagnet 169: coil bracket
169a: fastening ball

Claims (4)

A shape measuring device for measuring a shape of an object to be measured along a surface of an object to be measured,
A stylus for measuring a shape in contact with the object to be measured; a measurement arm having an arm for supporting the stylus;
A measurement arm supporting part for supporting the measurement arm part such that the measurement arm part is linearly moved in the left and right directions along the shape of the measured object and pivoted up and down;
A measuring force storage unit accommodated in the measurement arm and supporting the stylus to vertically rotate the stylus to apply a constant measuring pressure to the surface of the measured object even if the shape of the measured object is variable;
And a control unit for sensing the shape change of the measured object and controlling the measurement force correcting unit so that the measured pressure is corrected by the shape change,
Wherein the measurement-
A support body;
A driving block for supporting the measurement arm in a linearly movable manner in the longitudinal direction of the support body;
And a joint plate rotatably coupled to the driving block in a direction in which the arm is vertically rotated, one end of the joint plate being fixed to the measurement arm in a direction perpendicular to the measurement arm,
The measurement force correction unit
A permanent magnet which is coupled to the driving block so as to protrude by a predetermined length in a direction in which the joint plate is engaged;
And an electromagnet which surrounds the outer periphery of the permanent magnet and moves back and forth along the longitudinal direction of the permanent magnet by being coupled to the joint plate and applied with a current in one direction,
Wherein the permanent magnets include a first permanent magnet and a second permanent magnet disposed on both ends of the magnet coupling plate,
The electromagnet is provided with coils wound in the same direction on both ends of the coil bobbin,
Wherein the first electromagnet and the second electromagnet are disposed so as to have the same polarity as that of the first permanent magnet and the second permanent magnet,
The first electromagnet is disposed at a position 1/2 of the entire length of the first permanent magnet,
And the second electromagnet is disposed at a position 1/2 of the entire length of the second permanent magnet.
The method according to claim 1,
And a pivot shaft rotatably supported between the driving block and the joint plate for supporting the joint plate to rotate in accordance with a moving direction of the electromagnet.
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KR1020150162039A 2015-11-18 2015-11-18 Shape measurement apparatus KR101626322B1 (en)

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KR1020150162039A KR101626322B1 (en) 2015-11-18 2015-11-18 Shape measurement apparatus
PCT/KR2016/012296 WO2017086625A1 (en) 2015-11-18 2016-10-28 Shape measurement apparatus

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KR950013779B1 (en) * 1990-08-17 1995-11-16 가부시키가이샤 도시바 Displacement measuring apparatus
JP2002507281A (en) * 1997-06-10 2002-03-05 ケーエルエー−テンカー コーポレイション Improved probe surface shape measuring device and array

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Publication number Priority date Publication date Assignee Title
KR101944080B1 (en) * 2018-07-24 2019-01-30 황재은 Shape measurement apparatus
WO2020022671A1 (en) * 2018-07-24 2020-01-30 황재은 Shape measurement apparatus
GB2590847A (en) * 2018-07-24 2021-07-07 Eun Hwang Jae Shape measurement apparatus
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