KR101569792B1 - Filter assembly for sampling for transmission electron microscope analysis and Manufacturing device thereof - Google Patents

Filter assembly for sampling for transmission electron microscope analysis and Manufacturing device thereof Download PDF

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Publication number
KR101569792B1
KR101569792B1 KR1020140075145A KR20140075145A KR101569792B1 KR 101569792 B1 KR101569792 B1 KR 101569792B1 KR 1020140075145 A KR1020140075145 A KR 1020140075145A KR 20140075145 A KR20140075145 A KR 20140075145A KR 101569792 B1 KR101569792 B1 KR 101569792B1
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KR
South Korea
Prior art keywords
filter
housing
grid
support
ring
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KR1020140075145A
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Korean (ko)
Inventor
김진영
진현철
오필주
김화진
서지훈
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한국과학기술연구원
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Priority to KR1020140075145A priority Critical patent/KR101569792B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The present invention relates to a filter assembly for sampling for transmission electron microscope analysis and a manufacturing device thereof. The filter assembly according to an embodiment of the present invention includes a filter, a filter support on which a grid penetrating the filter is installed and which includes holes; a filter housing in which the filer, the grid, and the filter supporter are installed, and which includes an exhaust hole for fluid, and a filter ring which pushes the filter installed in the filter housing and the edge of the filter to fix the filter.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter assembly for sampling a sample for transmission electron microscope analysis,

The present invention relates to a filter assembly for sample collection and a filter manufacturing apparatus for transmission electron microscopy, and more specifically, to a filter for collecting fine particles such as carbon particles, And to a filter manufacturing apparatus and a filter manufacturing apparatus capable of accurately observing chemical characteristics.

In general, transmission electron microscope (TEM) is used to grasp the nanostructure of the carbon particle material. Sample preparation for transmission electron microscopy is required. First, the particles to be observed are mixed with highly volatile substances such as ethanol, and the solution is dispersed sufficiently in the solution by using an ultrasonic washing machine. Then, the hole-formed membrane was wetted with a tweezers solution in a grid and then dried in a dust-free room to complete the sample. Also, when the particle size is large, a specimen may be produced through ion milling as in Patent Document 1.

For carbon particulate matter that floats in the atmosphere or is discharged from the combustion process of a marine engine, carbon particles must be collected on the grid to make the TEM specimen. In general, the method used to capture carbon particulate matter is a high-volume pump that collects total dust (TSP) and ultrafine dust (PM2.5) particles and low-volume ) There is a method of collecting by using a cyclone and a filter pack.

Particularly, when the filter pack is used in the atmosphere or at a specific emission source, the carbon particles are adsorbed by the quartz filter, and thus it is impossible to prepare the TEM specimens by the methods described above.

Inside the collecting device, the carbon particles were collected without affecting the quartz filter and the grid. However, when the grid is placed on the quartz filter and the sampling is performed, the grid moves on the quartz filter to eliminate the grid, or to the side of the filter pack or to the corner, so that the carbon particles are not collected or lost in the specimen.

In addition, when the carbon particles collected in the quartz filter are buried in the grid, or when the sampling is completed and the specimen is held by the tweezers, the filter is damaged or the carbon particles are buried. Since the grid is placed on the quartz filter, the flow of the fluid must pass through the two filter layers (quartz filter layer and grid layer). In this case, the flow and flow rate of the fluid passing through the single filter layer are different, Is not normally collected.

KR 10-0975851 B

SUMMARY OF THE INVENTION The present invention provides a filter assembly for collecting carbon particle material discharged from pollutants in the air, pollutants in ships, power plants, and the like.

It is another object of the present invention to provide a filter assembly capable of producing a TEM specimen that can be accurately observed with a transmission electron microscope.

More specifically, it is possible to arrange such that the filter and the grid do not affect each other in one collecting device, thereby reducing errors that may occur during measurement. Thereby providing a filter assembly capable of analyzing the physical and chemical properties of the carbonaceous particulate matter and the nanostructure of the substance at once.

A sample collection filter assembly for a transmission electron microscopy analysis according to an embodiment of the present invention includes a filter, a filter support mounted on the grid disposed through the filter, the filter support including a plurality of holes, And a filter ring in which a filter support is mounted and includes a discharge port for discharging the fluid and a filter ring for pressing and fixing the periphery of the filter support and the filter support mounted on the filter housing.

A step of a size corresponding to the size of the grid may be formed in the hole of the plurality of holes of the filter support on which the grid is mounted.

The filter housing includes a first housing through which fluid passes, a second housing larger than the first housing and having a size corresponding to the filter support, a second housing having a size larger than the second housing, 3 housing.

The filter ring may include a support portion mounted on the third housing, and a pushing portion attached to the support portion and mounted on the second housing to press and fix the edge of the filter.

At least one of the filter housing, the filter support, and the filter ring may be comprised of a material comprising Teflon.

A filter manufacturing apparatus for a sample collecting assembly according to another embodiment of the present invention includes a filter support including a groove having a shape corresponding to a filter, a filter mounted on the filter support, and a grid is disposed on the filter And a grid punch which passes through the punching hole and punches the through hole into the filter.

At least one of the filter fixing member and the drawing punch may be made of a material including stainless steel.

According to an embodiment of the present invention, it is possible to provide a filter assembly for trapping carbon particle material discharged from contaminants in the air, pollutants in vessels, power plants, and the like.

More specifically, it is possible to arrange the filter and the grid in such a way that the filter and the grid do not affect each other, thereby reducing the error that may occur during the measurement, thereby analyzing the physical and chemical properties of the collected carbon particle material and the nanostructure of the material at once A filter assembly including a filter assembly.

It is also possible to provide a filter assembly that can prevent grid damage by securing the grid on the filter while completely separating the grid and filter to form the same flow field in the filter and grid.

When the grid is mounted on the filter assembly, the filter and the grid are placed in the filter assembly, but the filter and the grid do not overlap each other, and a constant flow rate is passed through the filter and the grid, Thereby providing a possible filter assembly.

1 is an exploded perspective view and partial enlarged view of a filter assembly according to an embodiment of the present invention.
2 is a side view of a filter housing according to an embodiment of the present invention.
3 is a side view (a) and a top view (b) of a filter support according to an embodiment of the invention.
4 is a side view (a) and a bottom view (b) of a filter ring according to one embodiment of the present invention.
5 is a perspective view showing a filter manufacturing apparatus according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

Hereinafter, with reference to FIGS. 1 to 5, a filter assembly for sample collection for transmission electron microscope analysis according to various embodiments of the present invention and a manufacturing apparatus thereof will be described.

1 is an exploded perspective view and partial enlarged view of a filter assembly according to an embodiment of the present invention. The filter assembly 1 of Figure 1 includes a filter housing 10, a filter support 20, a filter 30, a grid 40 and a filter ring 50.

When the carbon particles are collected by mounting the grid on the filter, a lot of errors are caused by the overlap of the filter and the grid. However, the filter assembly according to an embodiment of the present invention provides a filter assembly 1 capable of independently mounting a filter and a grid.

The filter assembly 1 is formed to mount the filter 30 and the grid 40 and includes a filter ring 50 for fixing the filter 30 to the assembly 1 at the top, And a filter housing 10 which fixes the filter support 20 and the filter ring 50, the filter 30 and the filter support 20 therein and allows the sucked fluid to flow in a certain direction.

The filter 30 includes a through hole 31 in which the grid 40 is disposed. Accordingly, it is possible to simultaneously collect the TEM sample when the carbon particle material is collected. That is, since the filter 30 and the grid 40 do not overlap each other, the error caused by overlapping of the filter and the grid can be reduced.

The filter housing 10 is formed to allow the fluid to flow in a predetermined direction through the exhaust port 11 (see FIG. 2) formed below the components mounted inside the filter housing while mounting the components constituting the filter assembly.

The filter support 20 is for fixing the filter 30 and the grid 40 so that fluid can flow smoothly and includes a plurality of holes h. 1 and FIG. 3, the filter support 20 may be a disc-shaped support having a porous structure. However, a variety of rigid structures having narrower and smaller holes may be applied.

1, a step S surrounding the hole H may be formed in the hole H in which the grid 40 of the plurality of holes h of the filter support 20 is disposed. Hence, the grid 40 can be accurately positioned and fixed at the position of the hole H.

The filter ring 50 is for fixing the position of the filter 30 and the filter support 20 to the filter housing 10 without affecting the sample collection. The outer diameter of the filter ring (50) is formed to correspond to the inner diameter of the filter housing (10). Accordingly, when the filter ring 50 is mounted on the filter housing 10, the filter ring 50 can be fixed without moving.

In addition, the inner diameter of the filter ring 50 may be smaller than the diameter of the filter 30. When the filter ring 50 is mounted on the filter housing 10, the peripheral portion of the filter 30 can be pressed and the filter 30 can be prevented from escaping out of the filter ring 50.

The filter ring 50 includes an opened inner open portion 55 and a size of the inner open portion 55, that is, an inner diameter of the filter ring 50 is set to be larger than that of the first housing 13 As shown in FIG. Accordingly, the fluid introduced through the inner open portion 50 can pass through the filter ring 50 without obstruction obstructing the flow of the fluid from the first housing 13 to the first housing 13.

3 is a side view (a) and a plan view (b) of a filter support according to an embodiment of the present invention, and Fig. 4 is a cross-sectional view of a filter support according to an embodiment of the present invention. (A) and a bottom view (b) of a filter ring according to an embodiment of the invention.

Referring to FIG. 2, the filter housing 10 may include a first housing 13, a second housing 15, and a third housing 17 including two stepped portions.

The first housing 13 is a space for the fluid to flow out and the second housing 15 is arranged for the filter support 20 and the filter 30 and the grid 40 and optionally a part of the filter ring 50 And the third housing 17 is a space for fixing the filter 30 and the filter support 20 by disposing all or a part of the filter ring 50. [

The second housing 15 is formed to have a size corresponding to the size of the filter support 20 and the third housing 17 can be formed to have a size corresponding to the size of the filter ring 50. The first housing 13 may be formed to have a smaller size than the filter support 20.

The filter housing 20 can be fixed to the second housing 15 in such a manner that the filter support 20 is fitted and the filter ring 50 can be fixed to the third housing 17.

4, the filter ring 50 is provided with a support 51 mounted on the third housing 17 and a second housing 15 formed on one side of the support 51 and mounted on the second housing 15 And a pressing part 53 for pressing and fixing the edge of the filter 30. Thereby, the filter can be fixed so as not to shake in the height direction.

According to an embodiment of the present invention, the filter housing 10, the filter support 20, and the filter ring 50 are made of a material that does not react with a sample or a substance in the air. For example, .

In addition, in the above-described embodiment, the filter assembly has been described as having a disc-shaped or cylindrical structure in order to be applied to a disk-shaped filter. However, the present invention is not limited thereto. to be.

The filter assembly may be made of various materials such as a quartz filter, a Teflon filter, and a nylon filter.

2 to 4, according to an embodiment of the present invention, when a 47 mm quartz filter is used as the filter 30, the diameter of the first housing 13 of the filter housing 10 R1 is 42 mm and the diameter R2 of the second housing 15 is 48 mm and the diameter R3 of the third housing 17 is 51 mm. Here, the diameter of the filter support 20 may be 47 mm and may be formed to fit the second housing 15. A plurality of holes h of 2.3 mm may be formed in the filter support 20. The holes H in which the grids are disposed may have a step size of 3 mm An additional portion may be formed.

On the other hand, the diameter of the support portion 51 of the filter ring 50 is 51 mm, the diameter of the pushing portion 53 is 48 mm, the diameter of the opened inner open portion in the filter ring 50 is 42 mm And is formed to be equal to the diameter of the first housing 13, so that a constant fluid flow can be formed.

The height of the second housing 15 may be 3 mm and the thickness of the filter support 20 mounted thereon may be 1 mm and the diameter of the pressing portion 53 of the filter ring 50 may be 1.5 mm so as to hold the filter support 20 and the filter 30 firmly by the filter ring 50 when the filter 30 is mounted.

FIG. 5 shows a filter assembly manufacturing apparatus, and more particularly, a manufacturing apparatus for the filter 30 according to an embodiment of the present invention.

1 includes a filter manufacturing apparatus 60 for processing a filter 30 to produce a filter assembly 1 according to the embodiment of FIG.

The filter manufacturing apparatus 60 includes a filter support 61 including a groove portion 63 having a shape corresponding to the filter 30, a filter mounted on the filter support 61, A filter fixing member 63 including a punching hole 64 formed through a position where the grid 40 is disposed on the filter 30 and a filter fixing member 63 passing through the punching hole 64, And a grid punch 65 for punching a through hole 31 at a position where the grid 40 is disposed.

The filter support 61 is for fixing the position of the filter by mounting the filter on it. For example, when using a 47 mm quartz filter, the filter support 61 may include a groove portion 62 having a size of 47 mm.

A filter fixing member 63 for placing the filter 30 on the filter support 61 and for pressing and fixing the filter 30 thereon is disposed and the filter fixing member 63 can be made heavy enough to fix the filter sufficiently For example, stainless steel fasteners may be applied thereto.

The filter fixing member 63 is formed at a position corresponding to the through hole 31 in which the grid 40 is disposed inside the filter 30 and the punching hole 64 through which the grid punch 60 passes is formed .

The grid punch 60 passes through the filter fixing member 63 to form a through hole having the same size as the grid 40. [ According to one embodiment, a stainless steel blade may be formed at the tip of the punch 60 for punching a 3 mm circular through hole to mount a 3 mm grid.

 According to one embodiment of the present invention, various filters can be processed with a filter processing apparatus. A quartz filter has been described as an example, but the present invention is not limited thereto, and various filters such as a Teflon filter and a nylon filter can be applied thereto.

The filter assembly according to an embodiment of the present invention can be applied to the collection of carbon particle materials discharged from pollutants in the air, pollution sources such as ships and power plants, and the like. The physical and chemical And can be applied to identify features and nanostructures.

In addition, in the filter assembly, since the filter and the grid are independently arranged without affecting each other, the error caused by overlapping the filter and the grid can be reduced. That is, accurate analysis of carbon particles is possible.

 Furthermore, since the grid and the filter are completely separated and exist independently, the same flow field can be formed and the reliability of the measurement can be further increased.

It is also possible to solve the problem that the grid is damaged or damaged in the sampling process by fixing the grid on the filter or on the filter support. Accordingly, it is possible to provide a collecting apparatus which is easier to use and highly reliable.

1: Filter assembly
10: Filter housing
13: first housing
15: second housing
17: Third housing
20: filter support
30: Filter
31: Through hole
40: grid
50: Filtering
60: Filter manufacturing apparatus
61: Filter support
62:
63: Filter fixing member
64: Punching hole
65: Grid punch

Claims (7)

A filter assembly for sample collection for transmission electron microscopy,
A filter, comprising: a filter support mounted on a grid disposed through the filter, the filter support comprising a plurality of holes;
A filter housing in which the filter, the grid and the filter support are mounted, and a discharge port for discharging the fluid; And
And a filter ring for pressing and fixing a peripheral portion of the filter mounted on the filter housing,
And a stepped portion having a size corresponding to the size of the grid is formed in the hole of the filter support, on which the grid is mounted.
delete The method according to claim 1,
The filter housing includes a first housing through which the fluid passes,
A second housing larger than the first housing and having a size corresponding to the filter support,
And a third housing larger than the second housing and having a size corresponding to the filter ring.
The method of claim 3,
The filter ring,
And a pushing portion formed on one surface of the support portion and mounted on the second housing to press and fix the peripheral portion of the filter.
The method according to claim 1,
Wherein at least one of the filter housing, the filter support, and the filter ring is comprised of a material comprising Teflon.
An apparatus for producing a filter for a sample collecting assembly according to claim 1,
A filter support including a groove having a shape corresponding to the filter;
A filter fixing member pressing and fixing a filter mounted on the filter support and including a punching hole penetratingly formed corresponding to a position where the grid is disposed in the filter,
And a grid punch which passes through the punching hole and punches a through hole in the filter.
The method according to claim 6,
Wherein at least one of the filter fixing member and the grid punch is made of a material including stainless steel.
KR1020140075145A 2014-06-19 2014-06-19 Filter assembly for sampling for transmission electron microscope analysis and Manufacturing device thereof KR101569792B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220036191A (en) 2020-09-15 2022-03-22 한국과학기술연구원 Particulate Matter Collecting Apparatus for Temperature Measurement of Particulate Matter Collection

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3128324B2 (en) 1992-05-20 2001-01-29 株式会社東芝 Ceramic multilayer package for semiconductor
JP2006322880A (en) 2005-05-20 2006-11-30 Hitachi Ltd Sheet for collecting sample, method for manufacturing, and hazardous material detection system
KR100985025B1 (en) 2010-04-20 2010-10-04 (주)랩코 Suspended particulates measuring apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3128324B2 (en) 1992-05-20 2001-01-29 株式会社東芝 Ceramic multilayer package for semiconductor
JP2006322880A (en) 2005-05-20 2006-11-30 Hitachi Ltd Sheet for collecting sample, method for manufacturing, and hazardous material detection system
KR100985025B1 (en) 2010-04-20 2010-10-04 (주)랩코 Suspended particulates measuring apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220036191A (en) 2020-09-15 2022-03-22 한국과학기술연구원 Particulate Matter Collecting Apparatus for Temperature Measurement of Particulate Matter Collection

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