KR101505702B1 - 전자부품 검사 방법과 이에 이용되는 장치 - Google Patents
전자부품 검사 방법과 이에 이용되는 장치 Download PDFInfo
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- KR101505702B1 KR101505702B1 KR1020107019709A KR20107019709A KR101505702B1 KR 101505702 B1 KR101505702 B1 KR 101505702B1 KR 1020107019709 A KR1020107019709 A KR 1020107019709A KR 20107019709 A KR20107019709 A KR 20107019709A KR 101505702 B1 KR101505702 B1 KR 101505702B1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008053642A JP5038191B2 (ja) | 2008-03-04 | 2008-03-04 | 電子部品検査方法およびそれに用いられる装置 |
JPJP-P-2008-053642 | 2008-03-04 | ||
PCT/JP2009/054092 WO2009110518A1 (ja) | 2008-03-04 | 2009-03-04 | 電子部品検査方法およびそれに用いられる装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100124742A KR20100124742A (ko) | 2010-11-29 |
KR101505702B1 true KR101505702B1 (ko) | 2015-03-30 |
Family
ID=41056071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020107019709A KR101505702B1 (ko) | 2008-03-04 | 2009-03-04 | 전자부품 검사 방법과 이에 이용되는 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5038191B2 (ja) |
KR (1) | KR101505702B1 (ja) |
CN (1) | CN101960295B (ja) |
TW (1) | TWI490477B (ja) |
WO (1) | WO2009110518A1 (ja) |
Families Citing this family (33)
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JP5209441B2 (ja) * | 2008-10-30 | 2013-06-12 | 芝浦メカトロニクス株式会社 | 実装部品の検査装置及び検査方法 |
JP2011021999A (ja) * | 2009-07-15 | 2011-02-03 | Kyodo Design & Planning Corp | 基板検査装置 |
CN102269713B (zh) * | 2011-08-02 | 2013-04-17 | 武汉科技大学 | 一种连铸结晶器铜板表面图像采集装置 |
KR101306289B1 (ko) | 2011-09-15 | 2013-09-09 | (주) 인텍플러스 | 평판 패널 검사방법 |
CN102590224A (zh) * | 2012-01-18 | 2012-07-18 | 肇庆市宏华电子科技有限公司 | 一种片式电子元件外观检测机 |
CN104280398A (zh) * | 2013-07-05 | 2015-01-14 | 上海维锐智能科技有限公司 | 一种电子元器件的自动测试装置 |
JP6176789B2 (ja) * | 2014-01-31 | 2017-08-09 | 有限会社共同設計企画 | 電子部品検査装置 |
JP2015149451A (ja) * | 2014-02-07 | 2015-08-20 | デクセリアルズ株式会社 | アライメント方法、電子部品の接続方法、接続体の製造方法、接続体、異方性導電フィルム |
WO2016147535A1 (ja) * | 2015-03-16 | 2016-09-22 | セイコーエプソン株式会社 | 電子部品搬送装置、電子部品検査装置、結露あるいは着霜の検査用試験片、および結露あるいは着霜の検査方法 |
CN106370656B (zh) * | 2015-07-23 | 2019-03-05 | 旭东机械工业股份有限公司 | 自动化显微取像设备及取像方法 |
KR102663900B1 (ko) | 2016-05-26 | 2024-05-08 | 삼성디스플레이 주식회사 | 유기발광표시장치 및 유기발광표시장치의 제조 방법 |
CN107031124A (zh) * | 2016-12-14 | 2017-08-11 | 江苏宇驰包装股份有限公司 | 一种可调节物料位置的压痕机 |
CN108364879B (zh) * | 2017-01-26 | 2020-07-24 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件的缺陷扫描方法及扫描装置 |
WO2018142188A1 (en) * | 2017-02-02 | 2018-08-09 | Ismeca Semiconductor Holding Sa | Assembly and method for inspecting components |
JP7015987B2 (ja) * | 2017-10-03 | 2022-02-04 | パナソニックIpマネジメント株式会社 | 部品実装装置および実装基板の製造方法 |
CN107748428A (zh) * | 2017-10-18 | 2018-03-02 | 歌尔股份有限公司 | 屏幕检测自动对焦方法及装置 |
TWI662262B (zh) * | 2018-04-20 | 2019-06-11 | 國立臺灣大學 | 具等向性轉換函數之量化差分相位對比顯微系統 |
CN108802046B (zh) * | 2018-06-01 | 2021-01-29 | 中国电子科技集团公司第三十八研究所 | 一种混合集成电路组件缺陷光学检测装置及其检测方法 |
JP7035857B2 (ja) * | 2018-07-03 | 2022-03-15 | オムロン株式会社 | 検査方法、検査システム及びプログラム |
CN108645868A (zh) * | 2018-08-10 | 2018-10-12 | 北京妙想科技有限公司 | 一种小张印铁双面质量检测设备 |
TWI705744B (zh) * | 2019-04-26 | 2020-09-21 | 旭東機械工業股份有限公司 | 壓合機構 |
CN110031467A (zh) * | 2019-05-10 | 2019-07-19 | 厦门柯尔自动化设备有限公司 | 导电粒子检测光学模组 |
CN110208289A (zh) * | 2019-05-27 | 2019-09-06 | 武汉中导光电设备有限公司 | 基于图像清晰度的自动面型跟踪对焦***及方法 |
CN110132982A (zh) * | 2019-05-27 | 2019-08-16 | 武汉中导光电设备有限公司 | 一种高灵敏度的自动光学检测方法及设备 |
CN110702685A (zh) * | 2019-09-24 | 2020-01-17 | 深圳市华星光电半导体显示技术有限公司 | 显示面板的缺陷检测方法及缺陷检测*** |
CN112735307A (zh) * | 2019-10-28 | 2021-04-30 | 深圳汉和智造有限公司 | 一种获取导电粒子压痕图像的装置及获取方法 |
JP2021081252A (ja) * | 2019-11-15 | 2021-05-27 | 義晴 加藤 | 電子部品検査装置及び電子部品検査方法 |
KR20210116777A (ko) * | 2020-03-13 | 2021-09-28 | (주)테크윙 | 전자부품 처리장비용 촬영장치 |
CN111239143B (zh) * | 2020-03-17 | 2021-04-27 | 合肥市商巨智能装备有限公司 | 液晶面板缺陷复判方法 |
CN111522074B (zh) * | 2020-05-29 | 2023-04-25 | 深圳市燕麦科技股份有限公司 | 麦克风检测设备及麦克风检测方法 |
CN113322653B (zh) * | 2021-06-01 | 2022-08-30 | 苏州精梭智能技术有限公司 | 一种自动定位纺织品缺陷检测*** |
CN113865509A (zh) * | 2021-09-29 | 2021-12-31 | 苏州华兴源创科技股份有限公司 | 自动跟随检测装置 |
TWI832503B (zh) * | 2022-10-20 | 2024-02-11 | 英業達股份有限公司 | 生產線零件進料時序資料誤差追認修正系統 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08178858A (ja) * | 1994-12-26 | 1996-07-12 | Nec Corp | スルーホール検査装置 |
JPH0996513A (ja) * | 1995-09-29 | 1997-04-08 | Dainippon Printing Co Ltd | 画像取得装置 |
US20030057379A1 (en) | 1998-05-15 | 2003-03-27 | Montagu Jean I. | Focusing of microscopes and reading of microarrays |
JP2006090990A (ja) | 2004-09-27 | 2006-04-06 | Mitsubishi Heavy Ind Ltd | 透明電極膜基板の検査装置及びその方法並びにプログラム |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3816615B2 (ja) * | 1997-01-29 | 2006-08-30 | オリンパス株式会社 | 基板検査装置 |
AU4851300A (en) * | 1999-05-19 | 2000-12-05 | Digimarc Corporation | Methods and systems for controlling computers or linking to internet resources from physical and electronic objects |
US7518652B2 (en) * | 2000-05-03 | 2009-04-14 | Aperio Technologies, Inc. | Method and apparatus for pre-focus in a linear array based slide scanner |
US7127098B2 (en) * | 2001-09-13 | 2006-10-24 | Hitachi, Ltd. | Image detection method and its apparatus and defect detection method and its apparatus |
TWI264532B (en) * | 2001-11-05 | 2006-10-21 | Olympus Corp | Substrate inspection device |
AUPS047702A0 (en) * | 2002-02-13 | 2002-03-07 | Silverbrook Research Pty. Ltd. | Methods and systems (ap68) |
JP2006170622A (ja) * | 2004-12-10 | 2006-06-29 | Olympus Corp | 外観検査装置 |
JP2006184303A (ja) * | 2004-12-24 | 2006-07-13 | Olympus Corp | 画像検査装置 |
JP2006234553A (ja) * | 2005-02-24 | 2006-09-07 | Dainippon Screen Mfg Co Ltd | 外観検査装置および外観検査方法 |
US20090039908A1 (en) * | 2006-04-26 | 2009-02-12 | Tokyo Electron Limited | Microstructure inspecting apparatus and microstructure inspecting method |
-
2008
- 2008-03-04 JP JP2008053642A patent/JP5038191B2/ja not_active Expired - Fee Related
-
2009
- 2009-03-04 KR KR1020107019709A patent/KR101505702B1/ko not_active IP Right Cessation
- 2009-03-04 TW TW098107032A patent/TWI490477B/zh not_active IP Right Cessation
- 2009-03-04 WO PCT/JP2009/054092 patent/WO2009110518A1/ja active Application Filing
- 2009-03-04 CN CN2009801075498A patent/CN101960295B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08178858A (ja) * | 1994-12-26 | 1996-07-12 | Nec Corp | スルーホール検査装置 |
JPH0996513A (ja) * | 1995-09-29 | 1997-04-08 | Dainippon Printing Co Ltd | 画像取得装置 |
US20030057379A1 (en) | 1998-05-15 | 2003-03-27 | Montagu Jean I. | Focusing of microscopes and reading of microarrays |
JP2006090990A (ja) | 2004-09-27 | 2006-04-06 | Mitsubishi Heavy Ind Ltd | 透明電極膜基板の検査装置及びその方法並びにプログラム |
Also Published As
Publication number | Publication date |
---|---|
CN101960295B (zh) | 2012-07-04 |
KR20100124742A (ko) | 2010-11-29 |
TW201000885A (en) | 2010-01-01 |
JP5038191B2 (ja) | 2012-10-03 |
WO2009110518A1 (ja) | 2009-09-11 |
JP2009210414A (ja) | 2009-09-17 |
TWI490477B (zh) | 2015-07-01 |
CN101960295A (zh) | 2011-01-26 |
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