KR101451007B1 - 레이저가공장치 및 레이저가공방법 - Google Patents

레이저가공장치 및 레이저가공방법 Download PDF

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Publication number
KR101451007B1
KR101451007B1 KR1020130023331A KR20130023331A KR101451007B1 KR 101451007 B1 KR101451007 B1 KR 101451007B1 KR 1020130023331 A KR1020130023331 A KR 1020130023331A KR 20130023331 A KR20130023331 A KR 20130023331A KR 101451007 B1 KR101451007 B1 KR 101451007B1
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KR
South Korea
Prior art keywords
shot
shot number
irradiation
incident
laser
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KR1020130023331A
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English (en)
Korean (ko)
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KR20130102011A (ko
Inventor
야스유키 오쿠다이라
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
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Publication of KR20130102011A publication Critical patent/KR20130102011A/ko
Application granted granted Critical
Publication of KR101451007B1 publication Critical patent/KR101451007B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Manufacturing Of Printed Wiring (AREA)
KR1020130023331A 2012-03-06 2013-03-05 레이저가공장치 및 레이저가공방법 KR101451007B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-048817 2012-03-06
JP2012048817A JP5818721B2 (ja) 2012-03-06 2012-03-06 レーザ加工装置及びレーザ加工方法

Publications (2)

Publication Number Publication Date
KR20130102011A KR20130102011A (ko) 2013-09-16
KR101451007B1 true KR101451007B1 (ko) 2014-10-17

Family

ID=49386100

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130023331A KR101451007B1 (ko) 2012-03-06 2013-03-05 레이저가공장치 및 레이저가공방법

Country Status (3)

Country Link
JP (1) JP5818721B2 (ja)
KR (1) KR101451007B1 (ja)
TW (1) TWI542430B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6234296B2 (ja) * 2014-03-27 2017-11-22 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
TWI569688B (zh) * 2014-07-14 2017-02-01 Ａｓｍｌ荷蘭公司 雷射源中之光電磁感測器之校正技術
JP6682146B2 (ja) * 2016-12-12 2020-04-15 住友重機械工業株式会社 レーザパルス切出装置及びレーザ加工方法
CN112676697B (zh) * 2020-12-31 2022-08-05 苏州科韵激光科技有限公司 一种显示面板的激光修复光学***及激光修复设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0350746B2 (ja) * 1984-12-24 1991-08-02 Tokuyama Soda Kk
JPH11170074A (ja) * 1997-12-12 1999-06-29 Matsushita Electric Ind Co Ltd レーザ加工装置およびその制御方法
KR20040090643A (ko) * 2003-04-18 2004-10-26 류재식 인쇄제판용 판재의 자동 절단장치 및 그 방법
JP2006224174A (ja) * 2005-02-21 2006-08-31 Sumitomo Heavy Ind Ltd レーザ加工装置及びパルスエネルギのしきい値設定方法
JP2007245159A (ja) * 2006-03-13 2007-09-27 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工方法
KR20110105339A (ko) * 2010-03-18 2011-09-26 올림푸스 가부시키가이샤 레이저 가공 방법 및 레이저 가공 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2858236B2 (ja) * 1996-03-19 1999-02-17 住友重機械工業株式会社 レーザ加工装置
JP3794120B2 (ja) * 1997-09-02 2006-07-05 松下電器産業株式会社 レーザ孔加工方法および装置
JPH11317576A (ja) * 1998-05-06 1999-11-16 Hitachi Ltd 基板製造方法
JP3920710B2 (ja) * 2002-06-04 2007-05-30 日立ビアメカニクス株式会社 レーザ加工方法
JP4174267B2 (ja) * 2002-08-21 2008-10-29 日立ビアメカニクス株式会社 レーザ加工方法
US7244906B2 (en) * 2005-08-30 2007-07-17 Electro Scientific Industries, Inc. Energy monitoring or control of individual vias formed during laser micromachining
US9211609B2 (en) * 2005-12-28 2015-12-15 Intel Corporation Laser via drilling apparatus and methods
JP2007196274A (ja) * 2006-01-27 2007-08-09 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工方法
JP5064778B2 (ja) * 2006-12-11 2012-10-31 オリンパス株式会社 レーザ加工装置
JPWO2011152312A1 (ja) * 2010-06-04 2013-08-01 イビデン株式会社 配線板の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0350746B2 (ja) * 1984-12-24 1991-08-02 Tokuyama Soda Kk
JPH11170074A (ja) * 1997-12-12 1999-06-29 Matsushita Electric Ind Co Ltd レーザ加工装置およびその制御方法
KR20040090643A (ko) * 2003-04-18 2004-10-26 류재식 인쇄제판용 판재의 자동 절단장치 및 그 방법
JP2006224174A (ja) * 2005-02-21 2006-08-31 Sumitomo Heavy Ind Ltd レーザ加工装置及びパルスエネルギのしきい値設定方法
JP2007245159A (ja) * 2006-03-13 2007-09-27 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工方法
KR20110105339A (ko) * 2010-03-18 2011-09-26 올림푸스 가부시키가이샤 레이저 가공 방법 및 레이저 가공 장치

Also Published As

Publication number Publication date
JP2013184168A (ja) 2013-09-19
TWI542430B (zh) 2016-07-21
KR20130102011A (ko) 2013-09-16
TW201350241A (zh) 2013-12-16
JP5818721B2 (ja) 2015-11-18

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