KR101419359B1 - Rail car and overhead hoist shuttle or transport system using the same - Google Patents
Rail car and overhead hoist shuttle or transport system using the same Download PDFInfo
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- KR101419359B1 KR101419359B1 KR1020130038033A KR20130038033A KR101419359B1 KR 101419359 B1 KR101419359 B1 KR 101419359B1 KR 1020130038033 A KR1020130038033 A KR 1020130038033A KR 20130038033 A KR20130038033 A KR 20130038033A KR 101419359 B1 KR101419359 B1 KR 101419359B1
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- Prior art keywords
- branching
- guide
- unit
- rail
- running
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Platform Screen Doors And Railroad Systems (AREA)
Abstract
The conveyance truck is started. A straight branching guide for guiding straight running to a branching area to which the running rail and the branching and joining rails are connected, and a curve branch for guiding the running of the branching, wherein the branching and guiding rails connect the plurality of running rails to the plurality of running rails, A carrier unit installed to be capable of traveling on a running rail of a rail system on which a guide is installed, and carrying an object from a starting point to a destination; And a plurality of branch rollers installed to be capable of rolling on the basis of a line along a traveling direction of the carrier unit and being moved in the vertical direction so that either the straight running or the branching traveling is selected during the rolling, And a branching roller unit for selectively supporting one of the plurality of branching rollers to any one of the straight branching guide and the curve branching guide.
Description
BACKGROUND OF THE
OHS or OHT (Overhead Hoist Shuttle OR Transport) is installed in large hospitals, semiconductor and flat panel display manufacturing plants where there are many small carry objects to be transported. The ceiling trolley system includes a conveyance truck that runs along a rail installed on a ceiling and conveys an object, and a track having a rail for guiding the running of the conveyance truck.
For example, when such a ceiling trolley system is installed in a semiconductor or display flat panel production line, a traveling rail is installed using a ceiling space in a clean room. The transportation trolley driven on the traveling rail is a semiconductor wafer, a substrate, a mask, And the like are transported between the transporting ports.
The running rail is supported by a support or the like from a ceiling of a clean room, and is made up of a running rail body and a feed rail. The conveying bogie includes a traveling driving unit, which can travel within the traveling rail main body, and receives a signal from the power feeding rail by the power receiving unit.
The ceiling trolley system has branching and joining rails connecting the running rails spaced apart from each other so as to allow movement of the brakes between mutually spaced running rails. The branching and joining rails to which these running rails can be connected are provided with branches There is a confluence section where the section and the bogie are merged.
Such a conveying bogie has a branching roller capable of selecting traveling along a branching rail in a branching section and a joining section. In the conventional conveying brakes, the position of the branching roller can not be changed quickly, so that entry into the branching rail may be delayed, The directional switching and contact action of the branching rollers from the rail to the branch rail is not smooth, so that the branching roller may be subjected to an impact due to the position error of the branching rollers, resulting in failure. Problems have been raised that can reduce reliability.
Also, when the conveyance truck is stopped on the rail due to power failure or failure of the conveyance truck on the rail system and the conveyance truck needs to be taken out to the outside, the operation of manually moving the conveyance truck to the entry / .
However, if the stopping point of the conveyance truck can be moved to the entry / exit port through the straight section, it is possible to carry out the unloading operation. However, if it is necessary to move the conveyance truck through the branch rail to the entry / exit port, It is impossible to automatically perform the position change to the branching roller. Even if it is attempted to manually perform the position switching of the branching roller, even if the narrow space of the orbit and the driving part of the branching roller It was very difficult to proceed with the torture.
SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus and method for quickly and smoothly changing the direction of a conveying carriage in response to a positional change of a branching roller that travels a conveying carriage from a running rail to a branching rail, And which can improve the reliability of the logistics transportation without causing a failure during the branch traveling process, and to provide a transportation system using the same.
According to an aspect of the present invention, there is provided a railway vehicle comprising: a plurality of running rails; and a branching and joining rails interconnecting the plurality of running rails, wherein the running rails and the branching and joining rails A carrier unit installed to be able to run on the running rail of the rail system on which the straight branching guide and the curve branching guide for guiding the running of the branch are installed and which transports the object from the starting point to the destination; And a plurality of branch rollers installed to be capable of rolling on the basis of a line along the traveling direction of the carrier unit and being moved in the vertical direction so that either the straight running or the branching traveling is selected during rolling, And a branching roller unit for selectively holding one of the plurality of branching rollers in contact with any one of the rectilinear branching guide and the curve branching guide when the unit enters the branching region .
Wherein the branching roller unit comprises: a roller installation frame in which the branching roller is rotatably installed on a line crossing the traveling direction of the carrier unit; A frame drive shaft coupled to the roller installation frame; And a branch roller driver connected to the frame drive shaft to rotate the frame drive shaft.
The roller installation frame may include a plurality of seesaw slopes arranged so as to be inclined with respect to each other such that the plurality of diverging rollers are moved upward by rotational movement to be held in contact with any one of the linear branching guide and the curve branching guide .
The above-described conveyance truck further includes a plurality of seesaw bearings provided on the carrier unit, wherein the frame drive shaft is rotatably installed, and the roller installation frame is rotatably supported on the seesaw bearing by the frame drive shaft And a seesaw rotation part coupled to the seesaw slope part to couple the plurality of seesaw slopes to each other.
The branching roller may be provided on the seesaw slope portion, and a slope may be provided on the joining portion of the seesaw slope portion and the seesaw rotation portion such that the seesaw slope portion is inclined.
An encoder-type roller position sensing unit may be installed in the seesaw bearing unit to sense a rotation angle of the seesaw rotation unit.
The branching roller driving unit includes: a branching driving motor installed on the carrier unit to drive the frame driving shaft; And a worm gear box installed between the branch drive motor and the frame drive shaft to transmit a drive force from the branch drive motor to the frame drive shaft.
The worm gear box includes a gear housing coupled to the branch drive motor to receive a drive force of the branch drive motor; A worm gear installed in the gear housing and coupled to a rotation shaft of the branch drive motor; And a worm wheel mounted on the gear housing, the worm wheel being gear-coupled to the worm gear and coupled to the frame drive shaft.
The branch roller driving unit may further include a manual input shaft coupled to the worm gear so as to manually rotate the rotation shaft of the branch driving motor from outside the gear housing.
Wherein the frame drive shaft is disposed on a center line of the carrier unit along a traveling direction of the carrier unit, the worm gear is disposed so as to cross the frame drive shaft, A pair can be vertically moved and disposed opposite to each other.
Wherein the carrier unit comprises: a plurality of carrier bodies spaced apart from the running rail; A plurality of traveling wheels installed on the carrier body to move the carrier body along the traveling rails; A plurality of traveling motors provided on at least one of the plurality of carrier bodies corresponding to the plurality of traveling wheels; And a plurality of support rollers mounted on the carrier main body and supported by the running rails to guide movement of the carrier main body.
The traveling motor may be a servo motor having a built-in encoder capable of sensing the rotation speed.
The carrier unit may further include an external encoder installed on the other of the plurality of carrier bodies to sense a rotational speed of the plurality of traveling wheels rotated along the traveling rail.
A slide moving device installed at a lower portion of the carrier unit and capable of moving the object in a deflected direction from a center line of the carrier unit; And a loading platform installed at a lower portion of the slide moving device to pick up and lower the object.
Wherein the loading and unloading apparatus comprises: a chuck gripper unit capable of holding the object; And a lift unit connected to the chuck gripper unit and capable of moving the chuck gripper unit up and down and rotating the chuck gripper unit.
A loading frame installed on the carrier unit, the loading frame being configured to allow the object to be drawn into the loading unit; And a drop prevention device installed at a lower portion of the stacking frame to support the object.
The drop prevention device includes a pair of rotation support members disposed to face the lower portion of the stacking frame and rotatably coupled to the lower portion of the stacking frame to support the object; And a drop prevention driving unit coupled to the loading frame to rotate the rotation support member.
The drop prevention drive unit includes a rotation link having one end rotatably coupled to a lower portion of the rotation support member and the other end rotatably coupled to the stacking frame; A supporting link having one end rotatably coupled to the rotating link and the other end rotatably coupled to the loading frame; And a link driving module having one end coupled to the rotating link and the other end coupled to the stacking frame, the link driving module rotating the rotating link to rotate the rotating supporting member.
Further comprising: a support holder unit installed on the carrier unit and fixing the carrier unit to the running rail according to a deflected position of the object, wherein the support holder unit is movably installed at a lower portion of the carrier unit, A support holder member which is moved in a direction opposite to a direction in which the object is moved when it is moved and is held in contact with the running rail located in a direction opposite to the moving direction of the object; And a holder movement driving unit mounted on the carrier unit to move the support holder member.
According to another aspect of the present invention, there is provided a railway vehicle comprising: a plurality of running rails; and a branching and joining rails interconnecting the plurality of running rails, wherein the running rails and the branching and joining rails A rail system in which a straight branching guide and a curve branching guide for guiding a branching run are installed; And a conveyance system including the above-described conveyance bogie.
Wherein the rail system includes a curve branching section in which the branching and joining rails are provided and the carrier unit is branched so that the traveling direction before and after the branching is reversed; A curve joining guide connected to the curve branching guide and disposed in the confluence region along the branching rail, wherein one of the branching rollers is continuously contacted and supported; And a joining straight guide disposed along the running rail disposed in the joining region and connected to the curve joining guide.
According to an aspect of the present invention, a plurality of branching rollers are rolled and rotated about a line along the traveling direction of the carrier unit so that at least one of the plurality of branching rollers is guided and supported by either the linear branching guide or the curve branching guide The operation of switching the direction of the conveying carriage in accordance with the change of the position of the branching roller that travels the conveying carriage from the running rail to the branching rail can be performed quickly and smoothly so that the branching travel of the conveying carriage to the branching rail is quick, It is possible to provide a transportation bogie capable of improving the reliability of the transportation of the logistics without causing a failure during the branch traveling process and a transportation system using the transportation bogie.
1 is a layout diagram of a transport system according to an embodiment of the present invention.
Fig. 2 is a running state diagram of the conveying bogie with respect to the branching region and the confluence region in the branching and merging section of Fig. 1. Fig.
3 is a cross-sectional view showing a state in which the carrier unit is in a branching state with respect to I-I in Fig.
4 is a cross-sectional view showing the carrier unit in a straight running state with respect to I-I in Fig.
Fig. 5 is a state of branching and running of a conveyance truck with respect to the curve branching guide and the curve joining guide of Fig. 1;
Fig. 6 is a state diagram showing a moving and loading direction of the object with respect to the conveyance truck of Fig. 1;
Fig. 7 is a side view of Fig. 6. Fig.
8 is a plan view of the carrier unit driven by the traveling motor of Fig.
Figure 9 is a top view of another carrier unit being pulled by the carrier unit of Figure 8;
10 is a perspective view of the branching roller unit of Fig.
11 is a perspective view of a worm gear and a worm wheel installed in the worm gear box of Fig.
12 is a sectional view showing a state in which the carrier unit is in a branching state with respect to II-II in Fig. 1 according to another embodiment of the present invention.
Fig. 13 is a branch traveling state diagram of the carrier truck for the branching area and the joining area related to Fig. 12. Fig.
FIG. 14 is a straight running state of the conveyance truck with respect to the branching area and the confluence area related to FIG. 12. FIG.
Figure 15 is a detail view in which additional elements are configured in the carrier unit of Figure 12;
16 is a side view of the conveyance truck of the conveyance system of Fig.
17 is an enlarged view of the carrier unit of Fig.
18 is a plan view of the carrier unit of Fig.
In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.
FIG. 1 is a layout diagram of a transportation system according to an embodiment of the present invention. FIG. 2 is a traveling state of a transportation bogie with respect to a branching region and a merging region of the branching and merging section of FIG. Fig. 4 is a cross-sectional view showing the carrier unit in a straight running state with respect to I-I in Fig. 1, Fig. 5 is a cross-sectional view showing a state in which the curve branching guide and the curve merge Fig. 7 is a side view of Fig. 6, Fig. 8 is a sectional view of the traveling carriage of Fig. 1 driven by the traveling motor of Fig. 6 10 is a perspective view of the branching roller unit of Fig. 6, and Fig. 11 is a plan view of the carrier unit mounted on the worm gear box of Fig. 10 Worm gears and worm wheels It is an attempt.
1 and 2, a conveyance system according to an embodiment of the present invention includes a
First, as shown in Fig. 1, the
Hereinafter, the conveyance system and the conveyance truck according to the present embodiment will be described in detail with reference to Figs. 1 to 7. Fig.
Fig. 2 conceptually shows the branching travel of the conveying truck by the branching
The
The traveling
A straight branching
The
In FIG. 1, the branching and joining
The
The
The
According to the present embodiment, the connecting portions of the straight rail
That is, the
The
Hereinafter, the transport system according to the present embodiment will be described in detail with reference to FIGS. 1 to 11. FIG. In this embodiment, the rolling rotation is defined as a case where the rolling unit is rotated about a line along the traveling direction of the carrier unit, that is, the longitudinal direction.
The branching
The plurality of branching
When the
The pair of the branching
The branching
The
The straight branching
The straight branching
According to the present embodiment, any one of the branching
One
By switching the position of the pair of
To this end, the
The merging
The
On the other hand, the
The branching
The
The
The
Accordingly, the pair of
The traveling direction of the
A pair of branching
That is, a pair of seesaw slopes 156 are coupled to the
In addition, an encoder type roller
That is, the branching
The branching
The
The
The process of transmitting the rotational force from the
On the other hand, the branching
That is, the failure of the power supply path to the
At this time, the
In order to branch the
The
The
6, the
The pair of traveling
The branching and joining
At this time, the
The
The actual speed of each traveling
The conveying system according to the above-described embodiment is provided with a conveyance truck 140 (OHS) for supporting and conveying the
In the following embodiments, the elements having the same functions as those of the above-described
Elements using the same reference numerals as the above-described embodiments of the
12 is a sectional view showing a state in which the carrier unit is in a branched traveling state according to II-II in Fig. 1 according to another embodiment of the present invention, Fig. 13 is a sectional view showing the state in which the carrier truck is branched Fig. 15 is a detailed view in which additional elements are formed in the carrier unit of Fig. 12, and Fig. 16 is a detailed view of the transport system of the transport system of Fig. 15, Fig. 17 is an enlarged view of the carrier unit of Fig. 15, and Fig. 18 is a plan view of the carrier unit of Fig. 15. Fig.
As shown in Figs. 1 and 12 to 18, the
Hereinafter, additional components of the transport system according to another embodiment of the present invention will be described in detail with reference to Figs. 1 and 11 to 16.
The conveying
The
The loading and unloading
The elevating
The elevating
The
The stacking
The drop prevention device 180 provided below the stacking
The drop prevention device 180 according to the present embodiment is arranged to be opposed to the lower portion of the stacking
That is, the
The drop prevention drive unit 185 according to the present embodiment includes a
The
When the soled
On the other hand, when the soled
The
The
The
The
The center of gravity of the
The other one of the traveling
According to the present embodiment, however, since the
That is, the
The
The
For example, when the
The
That is, the end portion of the
The holder
The
The holder movement drive unit 260 capable of moving the
When the
According to the present embodiment, the
To this end, the holder movement drive unit 260 includes a
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.
100: Object 101: Rail system
102: straight ahead section 103: curve connection section
104: branching and confluence period 105:
107: branching region 108: junction region
110: running rail 111: branching and joining rail
112: Straight branch guide 113: Curve branch guide
115: straight rail main body 116: branch rail main body
117: rail member 120: bar code
121: contactless power supply 123: communication sensor
125: Reflector for entrance confirmation sensor
131: Curve joining guide
132: joining straight guide 140: conveying carriage
141: Carrier unit 142: Carrier body
144: Driving wheel 145: Support roller
146: Travel motor 147: Load frame
148: movement bar 150: branching roller unit
151, 152: branching roller 153: branching roller drive section
154: Roller position detection unit 155: Roller installation frame
156: Seesaw slope part 157: Frame drive shaft
158: seesaw bearing part 159: seesaw rotation part
160: slope surface 161: branch drive motor
162: Worm gear box 163: Gear housing
164: worm gear 165: worm wheel
166: Manual input shaft 167: Built-in encoder
168: External encoder
170: Slide moving device 175: Loading and unloading device
176: Chuck gripper unit 177: Lift unit
180: Fall prevention device 181:
185: drop prevention driving unit 186: rotation link
187: Support link 188: Link drive module
190: Solenoid 191: Sol Body
192: Sol Road
250: support holder unit 251: support holder member
252: side wall supporting portion 253:
255: holder movement guide part 256: holder movement member
257: Linear guide 260:
261: Holder moving motor 263: Ball screw module
264: screw round bar 265: female screw
266: drive pulley 267: drive belt
268: Follow pulley
Claims (21)
And a plurality of branch rollers installed to be capable of rolling on the basis of a line along the traveling direction of the carrier unit and being moved in the vertical direction so that any one of the straight running and the branching traveling is selected during rolling rotation, And a branching roller unit for selectively contacting any one of the plurality of branching rollers to any one of the linear branching guide and the curve branching guide when entering the branching region,
Wherein the branching roller unit comprises:
A roller mounting frame in which the branching rollers are rotatably mounted on a line intersecting the traveling direction of the carrier unit;
A frame drive shaft coupled to the roller installation frame; And
And a branch roller driver connected to the frame drive shaft to rotate the frame drive shaft,
Wherein the branching roller driver comprises:
A branch drive motor installed on the carrier unit to drive the frame drive shaft;
A gear housing which is provided between the branch drive motor and the frame drive shaft so as to transmit a drive force from the branch drive motor to the frame drive shaft and is coupled to the branch drive motor so as to receive a drive force of the branch drive motor; And a worm wheel mounted on the gear housing and geared to the worm gear to be coupled to the frame drive shaft, the worm gear box comprising: And
And a manual input shaft coupled to the worm gear so as to manually rotate the rotation shaft of the branch driving motor from outside the gear housing.
The roller installation frame includes a plurality of viewpoint slopes arranged so as to be mutually inclined such that the plurality of branch rollers are moved upward by rotational movement to be contacted with any one of the linear branching guide and the curve branching guide Bogie
Further comprising a plurality of seesaw bearings mounted on the carrier unit, wherein the frame drive shaft is rotatably mounted,
The roller installation frame
Further comprising a seesaw portion rotatably coupled to the seesaw bearing portion by the frame drive shaft and coupling the plurality of seesaws to oppose each other.
The branching roller is provided in a pair in the seesaw slope portion,
Wherein a slope is provided at an engagement portion between the seesaw slope portion and the seesaw rotation portion such that the seesaw slope portion is inclined.
Wherein the seesaw bearing unit is provided with an encoder type roller position sensing unit for sensing a rotation angle of the seesaw rotation unit.
Wherein the frame drive shaft is disposed on a center line of the carrier unit along a traveling direction of the carrier unit, the worm gear is disposed so as to cross the frame drive shaft,
Wherein the plurality of branching rollers are arranged to face each other on both sides of the center line of the frame drive shaft and are vertically moved.
A conveyance system comprising a conveyance truck according to any one of claims 1 to 6.
The rail system comprises:
A curve branching section in which the branching and joining rails are provided and the carrier unit is branched so as to reverse the traveling direction before and after the branching;
A curve joining guide connected to the curve branching guide and disposed in a confluence region along the branching and joining rails, wherein one of the branching rollers is continuously contacted and supported; And
And a joining straight guide disposed along the running rail disposed in the joining region and connected to the curve joining guide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020130038033A KR101419359B1 (en) | 2013-04-08 | 2013-04-08 | Rail car and overhead hoist shuttle or transport system using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020130038033A KR101419359B1 (en) | 2013-04-08 | 2013-04-08 | Rail car and overhead hoist shuttle or transport system using the same |
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KR1020130038033A KR101419359B1 (en) | 2013-04-08 | 2013-04-08 | Rail car and overhead hoist shuttle or transport system using the same |
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Cited By (6)
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KR20160119711A (en) * | 2015-04-06 | 2016-10-14 | 가부시키가이샤 다이후쿠 | Article transport facility |
EP3208168A1 (en) * | 2016-02-22 | 2017-08-23 | Luis Carrillo Lostao | Bearing assembly, arrangement of beams for changing direction of a carriage with the bearing assembly and railchanging system with said bearing assembly and arrangement of beams |
JP2018062241A (en) * | 2016-10-12 | 2018-04-19 | 株式会社ダイフク | Rail inspection device and rail inspection system |
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KR20210093730A (en) * | 2020-01-20 | 2021-07-28 | (주)휴민텍 | Driving system |
CN114951714A (en) * | 2021-02-18 | 2022-08-30 | 丰田自动车株式会社 | Lifting device and workpiece processing system |
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JP2018062241A (en) * | 2016-10-12 | 2018-04-19 | 株式会社ダイフク | Rail inspection device and rail inspection system |
CN110890311A (en) * | 2019-11-15 | 2020-03-17 | 重庆电子工程职业学院 | Wafer rotation bearing structure and processing device thereof |
KR20210093730A (en) * | 2020-01-20 | 2021-07-28 | (주)휴민텍 | Driving system |
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