KR101205751B1 - Printing device and film forming method - Google Patents

Printing device and film forming method Download PDF

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Publication number
KR101205751B1
KR101205751B1 KR1020107027057A KR20107027057A KR101205751B1 KR 101205751 B1 KR101205751 B1 KR 101205751B1 KR 1020107027057 A KR1020107027057 A KR 1020107027057A KR 20107027057 A KR20107027057 A KR 20107027057A KR 101205751 B1 KR101205751 B1 KR 101205751B1
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KR
South Korea
Prior art keywords
ink
substrate
light
control signal
nozzle
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KR1020107027057A
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Korean (ko)
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KR20110004892A (en
Inventor
신스케 이구치
겐 후지이
Original Assignee
가부시키가이샤 알박
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/21Ink jet for multi-colour printing
    • B41J2/2132Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding
    • B41J2/2139Compensation for malfunctioning nozzles creating dot place or dot size errors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/21Ink jet for multi-colour printing
    • B41J2/2132Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding
    • B41J2/2142Detection of malfunctioning nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/084Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to condition of liquid or other fluent material already sprayed on the target, e.g. coating thickness, weight or pattern

Abstract

A color filter having a small variation in emission intensity of a pixel is provided. After the fluorescent ink is impacted on the substrate 5, the impacted fluorescent ink is irradiated with light to measure the emitted light, and the emitted light is measured. The control apparatus 30 compares a measurement result with a reference value, determines the excess or deficiency of the discharge amount of fluorescent ink, and changes the control signal so that the energization conditions of a discharge control element may change with respect to the nozzle 22 which judged that there exists an excess or deficiency. Since the discharge amount becomes a target value after the control signal is changed, no variation occurs in the amount of ink disposed in the recesses 6.

Description

Printing device, film formation method {PRINTING DEVICE AND FILM FORMING METHOD}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for ejecting ink, and more particularly, to a technique for ejecting a fluorescent ink for a self-luminous display device.

In recent years, an inkjet printing apparatus (inkjet printing apparatus) is used, ink is ejected from the nozzle of the printing apparatus, and the color filter of a display apparatus is formed.

However, there is a problem that the discharge amount of the ink discharged from the inkjet printing apparatus is not stable due to the influence of the change of the head over time, the jetting pattern, the variation of the characteristics of the ink, and the like. The variation in the discharge amount of the ink directly affects the variation in the chromaticity of the pixel.

In order to solve this problem, a method of correcting the variation in the discharge amount of each nozzle by forming the discharge color filter at a color concentration of at least two levels or more and measuring the color concentration is known (see Patent Document 1 below). .

In a self-luminous display such as an organic EL or an FED, a fluorescent ink that emits visible light when ultraviolet rays are irradiated, unlike a liquid crystal display device, is used. Fluorescent inks are often colorless under visible light, and when applied to a printing object by an inkjet printing apparatus, the color density of each pixel cannot be measured accurately. The variation in the discharge amount of each nozzle directly affects the variation in the light emission intensity of the pixel, thereby degrading the display quality.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is a print head which has a control apparatus and a some nozzle, and discharges the ink of the quantity according to the control signal from the said control apparatus from the nozzle, and a board | substrate with respect to the said print head. And a moving device that moves linearly in the direction, wherein the control device is a printing device configured to impact the ink at an impact position parallel to the impact direction crossing the moving direction of the substrate, from the nozzle, wherein The control apparatus which is located downstream of the movement direction of a board | substrate, irradiates the ink which irradiated the said ink which arrived at the said impact position, and the light receiving apparatus which measures the light emission of the said ink irradiated with the said measurement light, The said control apparatus Is a printing device configured to be able to change the control signal based on the measurement result of the light receiving device.

Moreover, this invention has the memory | storage device which the said measurement result is memorize | stored corresponding to the position on the said board | substrate of the said recessed part, and the said control signal is a printing apparatus which changes from the content memorize | stored in the said memory device.

Moreover, this invention is a printing apparatus which has a sensor moving apparatus which moves the said irradiation apparatus and the said light receiving apparatus to the direction along the impact direction.

Moreover, this invention is a film-forming method which transmits a control signal to the discharge control elements respectively formed in the some nozzle of a printhead, discharges the ink containing fluorescent substance from the said nozzle, and reaches a board | substrate and forms a fluorescent film, The ink impregnated on the substrate is irradiated with electromagnetic waves to emit light, and the emitted light emitted from the ink is measured, and the measurement result of the emitted light of the ink discharged from one of the plurality of nozzles is measured and set in advance. By comparing the reference value, it is judged that the discharge amount of the ink discharged from one nozzle is insufficient, and if it is determined that the discharge amount is small, the control signal is changed so that the discharge amount of one nozzle is increased, and the discharge amount If judged to be large, it is a film formation method of changing the control signal to reduce the discharge amount.

In addition, the present invention is a film forming method for moving the substrate relative to the print head and landing the ink at a plurality of impact positions, wherein the light emission of the plurality of spaced apart inks ejected by one nozzle is discharged. It is a film-forming method which changes the said control signal of one said nozzle based on light.

In addition, the present invention is to move the substrate relative to the print head, to perform a partial coating to partially impact the ink on the substrate to determine the excess or insufficient of the discharge amount, and to change the control signal, A film forming method in which a print head is moved to an uncoated portion where the ink of the substrate is not reached, and the ink is landed on the uncoated portion with the changed control signal.

In addition, the present invention is a film forming method for forming the fluorescent film on a plurality of the substrates, wherein the ink is touched on one substrate to measure the emitted light, and then the control signal is changed to another substrate. It is a film-forming method which impacts ink.

Moreover, this invention is a film-forming method which dries the said ink, after measuring the said luminous light of the said ink which hit the said board | substrate.

This invention is comprised as mentioned above, and the impact position which makes an ink reach | attach a board | substrate is predetermined. Since the impact position and the nozzle correspond on a one-to-one basis, the excess or shortage of ink can be known for each nozzle.

The measurement result of the light receiving device also changes depending on the amount of ink that reaches the substrate. For example, when the ink amount is large, the light emission intensity is high, and when the ink amount is low, the light emission intensity is low.

On the basis of the measurement result of the light receiving device, the energization condition of the discharge control element of the nozzle is changed to increase the discharge amount when the ink amount is insufficient, and to reduce the discharge amount when the ink amount is excessive. The intensity of the emitted light of the ink to be impacted (for example, fluorescent ink) can be the same for each color.

The discharge amount to the printing object can be made uniform. A self-luminous display device is obtained in which the chromaticity variation of the pixel and the variation in emission intensity are small.

(A): Top view for demonstrating the printing apparatus of this invention, (b): A side view thereof.
Fig.2 (a): Top view (1) and (b): A side view (1) for demonstrating the film-forming process using the printing apparatus of this invention.
Fig.3 (a): top view (2) and (b): side view (2) for demonstrating the film-forming process using the printing apparatus of this invention.
(A) and (b): A figure for demonstrating the recessed part of a substrate surface.
5 is a block diagram for explaining a control system of the printing apparatus of the present invention.

Reference numeral 10 in Figs. 1A, 3B, 3A, 3B shows a printing apparatus of one example of the present invention. 1 (a) to 3 (a) are plan views seen from above, and FIGS. 1 (b) to 3 (b) are side views seen from the side.

Referring to Figs. 1A and 1B, the printing apparatus 10 includes a substrate conveying mechanism (moving apparatus) 7, a printing mechanism 8, and a measuring apparatus 9. The board | substrate conveyance mechanism 7 has the base movement shaft 11 arrange | positioned horizontally, and the mounting base 12 is mounted horizontally on it.

The board | substrate conveyance mechanism 7 has the large moving apparatus 31, and the mounting base 12 is equipped with the large moving apparatus 31 by the large moving apparatus 31 along the direction in which the large moving shaft 11 extends. The image is configured to reciprocate linearly in a horizontal plane. The printing mechanism 8 and the measuring device 9 each have a head moving shaft 14 and a sensor moving shaft 15. The head movement shaft 14 and the sensor movement shaft 15 are arranged horizontally above the large movement shaft 11, respectively.

The print head 21 is attached to the head moving shaft 14, and the irradiation device 40 and the light receiving device 50 are attached to the sensor moving shaft 15.

The printing mechanism 8 and the measuring apparatus 9 have the head movement apparatus 32 and the sensor movement apparatus 33, respectively. By the head moving device 32, the print head 21 is configured to be able to reciprocate along the direction in which the head moving shaft 14 extends, and the sensor moving device 33 receives the irradiation device 40 and the light receiving unit. The apparatus 50 is comprised so that the sensor movement shaft 15 can reciprocate together or separately along the direction which extends ((a), (b) of FIG. 2, (a), (b) of FIG. ), Illustration of each of the mobile devices 31 to 33 is omitted.

The direction in which the head movement shaft 14 and the sensor movement shaft 15 extend and the direction in which the large movement shaft 11 extends are arranged in the direction orthogonal to each other, so that the print head 21 and the irradiation device 40 ) And the light receiving device 50 move in a direction orthogonal to the moving direction of the mounting table 12.

If both ends of the large moving shaft 11 are called moving start positions of the mounting table 12 and the other end is moving destination position, the head moving shaft 14 is moved starting position from the sensor moving shaft 15. The sensor moving shaft 15 is disposed at a position closer to the moving target position than the head moving shaft 14.

(A), (b) has shown the state which arrange | positioned the board | substrate 5 which is a printing object on the mounting table 12, and stopped it at the movement start position. The substrate 5 may be a resin substrate or a glass substrate.

In the state where the board | substrate 5 is stopped on the movement start position, the print head 21 is arrange | positioned so that it may become closer to the movement destination position than the board | substrate 5. When the mounting table 12 is moved, the substrate 5 disposed on the mounting table 12 also moves together with the mounting table 12.

The head moving shaft 14 and the print head 21, the sensor moving shaft 15, the irradiation device 40, and the light receiving device 50 are located above the moving path of the substrate 5 on the mounting table 12. The substrate 5 is moved from the movement start position without colliding with the head moving shaft 14, the print head 21, the sensor moving shaft 15, the irradiation device 40, and the light receiving device 50. Go to.

When discharging ink to the substrate 5 by this printing apparatus 10, the print head 21 is moved in advance by the head moving apparatus 32 to move the print head above the movement path of the substrate 5. (21) is stopped.

In this state, when the mounting table 12 is moved in the direction of the moving destination position by the large moving device 31, the substrate 5 enters the position immediately below the print head 21. On the surface of the board | substrate 5, a black strip | belt-shaped light shielding thin film (for example, Cr layer) is arrange | positioned at grid shape, and comprises the black matrix. The recessed part (ink pocket) which consists of a pit part is formed between the thin films of a black matrix, and in this board | substrate 5, the recessed part becomes an impact position of ink.

4A is a partial surface view of the substrate 5, where 6 is a concave portion, 17 is a black matrix, a positive y-axis direction is a moving direction of the substrate 5, and an x-axis is a horizontal direction. And the direction orthogonal to the moving direction of the board | substrate 5 are shown.

If the row along the moving direction of the mounting table 12 is a column and the row along the orthogonal direction is a row, in FIG. 4A, the recesses 6 in the fourth row and 12 columns are formed. It is shown.

A plurality of nozzles 22 are formed on the surface of the print head 21 that faces the substrate 5. This nozzle 22 is arrange | positioned along the moving direction and the orthogonal direction of the board | substrate 5, and is arrange | positioned so that the space | interval of the orthogonal direction may become equally spaced with the space | interval of the orthogonal direction of the recessed part 6.

Each nozzle 22 has different recesses 6 passing through the positions immediately below the nozzles 22 when the substrate 5 is moved, and therefore, a row of recesses aligned along the moving direction. The part 6 passes through the position just under the same nozzle 22.

The print head 21 is connected to a plurality of tanks (here, three) of the ink supply system 35 (in (a), (b) and (a) and (b) of FIG. 2, The illustration of the ink supply system 35 is omitted).

Fluorescent ink with red emitted light, fluorescent ink with green emitted light, and fluorescent ink with blue emitted light are disposed in each tank, and each nozzle 22 has any one of red, green, and blue light. One color of fluorescent ink is supplied.

Each concave portion 6 is determined so that the emitted light has a fluorescent ink layer of any one color of red, green, and blue, and the nozzles 22 for ejecting ink of the corresponding colors, respectively, The recessed part 6 is arrange | positioned in the position which just passes under. Fluorescent ink of one color is discharged and landed on one recessed part 6.

Inside each nozzle 22, a discharge control element for generating pressure in the print head 21, such as a piezoelectric element or a heater, to eject ink from the nozzle 22 is formed for each nozzle 22. When the discharge control element is energized, fluorescent ink is discharged from the nozzle 22 to the concave portion 6, and the fluorescent ink reaches the concave portion 6.

When the direction orthogonal to the moving direction of the board | substrate 5 is an impact direction, fluorescent ink will be in the same number of recesses 6 as the nozzle 22 arrange | positioned in an impact direction as shown to FIG. 4 (b). Any one of (18R, 18G, 18B) is impacted.

The fluorescent inks 18R, 18G, and 18B have a solvent (water, an organic solvent, etc.) and a phosphor dispersed or dissolved in the solvent, and are in a liquid state before being dried.

The one recessed part 6 is discharged and impacted by a predetermined number of times, the fluorescent ink of the same color. When the number of times is set a plurality of times, the fluorescent inks 18R, 18G, and 18B are discharged while the substrate 5 is moved, and the same color among the fluorescent inks 18R, 18G, and 18B is located at different positions in the same recesses 6. Fluorescent ink may be impacted.

When the fluorescent ink 18R, 18G, 18B is discharged a set number of times, the substrate 5 is moved to move the recessed portion 6 on which the fluorescent ink 18R, 18G, 18B is impacted to the downstream side in the moving direction, and the fluorescent ink ( The concave portion 6 before the 18R, 18G, and 18B is impacted is moved directly below the nozzle 22 from the upstream side in the moving direction, and is disposed directly below the fluorescent ink 18R, 18G, 18B from each nozzle 22. ) Number of times.

(A) and (b) of FIG. 2 repeats the movement of the board | substrate 5 and the process of discharging a predetermined number of times, and the fluorescent ink (the ink) is formed in the recessed part 6 from the end to the other end of the column which the nozzle 22 passes. The state which arrange | positioned 18R, 18G, and 18B is shown.

When the number of the recesses 6 parallel to the x-axis direction extending in the direction perpendicular to the moving direction of the substrate 5 is larger than the number of the nozzles 22, the nozzles 22 are stopped and the substrate 5 is stopped. Even if the fluorescent inks 18R, 18G, and 18B are discharged once and the fluorescent inks 18R, 18G, and 18B can be applied to a portion of the substrate 5, they cannot be applied to all of the regions.

In this case, after the substrate 5 is moved and applied, the print head 21 is moved in the x-axis direction so that the recesses 6 adjacent to the region to which the fluorescent inks 18R, 18G, and 18B are applied are nozzles. If it passes through the position just below 22, and the movement of the board | substrate 5 and the discharge of a set number of times are repeated, the fluorescent ink 18R will also be in the area | region adjacent to the area | region to which fluorescent ink 18R, 18G, and 18B was apply | coated. , 18G, 18B) can be applied.

Thus, the movement of the board | substrate 5, the movement of the print head 21 in the x-axis direction, and application | coating of fluorescent ink 18R, 18G, and 18B are repeated, and all the recessed parts 6 of one board | substrate 5 are repeated. ), The fluorescent inks 18R, 18G, and 18B are disposed.

Each time the print head 21 is moved in the x-axis direction, the substrate 5 is returned to the movement start position, and the substrate 5 is moved in the same movement direction to discharge the fluorescent inks 18R, 18G, and 18B. The fluorescent inks 18R, 18G, and 18B may be discharged while moving in the reverse direction without returning the substrate 5 to the movement start position.

The board | substrate 5 in which fluorescent ink 18R, 18G, 18B was arrange | positioned at all the recessed parts 6 is moved toward the moving destination position, and is arrange | positioned just under the measuring apparatus 9 (FIG. 3A) , (b)).

5 is a block diagram of a control system of the printing apparatus 10, and reference numeral 30 denotes a control apparatus. The irradiation device 40, the light receiving device 50, the print head 21, the large moving device 31, the head moving device 32, and the sensor moving device 33 are connected to the control device 30. , They are controlled by the control device 30.

The control apparatus 30 operates the sensor movement apparatus 33, and arrange | positions the irradiation apparatus 40 and the light receiving apparatus 50 on the recessed part 6. As shown in FIG. Here, the irradiation apparatus 40 and the light receiving apparatus 50 move together.

The irradiation device 40 is, for example, an ultraviolet irradiation device using a high-pressure mercury lamp as a light source, and in this case, the measurement light, which is laser light in the ultraviolet region, is irradiated in a spot shape, and the fluorescent ink in any one of the recesses 6 ( 18R, 18G, and 18B) are irradiated with the measurement light. Since the fluorescent inks 18R, 18G, and 18B contain phosphors, when the measurement light is irradiated, visible light of any color of red, green, and blue is emitted as emitted light.

The light receiving device 50 has a light receiving unit not shown. The positional relationship between the light receiving device 50 and the irradiating device 40 is such that the recess 6 to which the measurement light is irradiated and the light receiving portion face each other, and from the fluorescent inks 18R, 18G, and 18B in the recess 6. The light receiving unit receives the emitted light emitted.

A measuring circuit is formed inside the light receiving device 50 to measure the light emission intensity, luminance, wavelength, and the like of the received light. The control apparatus 30 has the memory | storage device 60 shown in FIG. 5, and the measurement result measured by the light receiving device 50 is memorize | stored.

As described above, the rows of concave portions 6 aligned along the moving direction of the substrate 5 pass directly under the same nozzle 22. The irradiating device 40 and the light receiving device 50 are moved, and one to a plurality of recesses 6 are irradiated with the measurement light for each row through which the nozzles 22 pass to receive the emitted light, and the measurement result is measured. The storage device 60 stores the correspondence with the columns and the rows of the recesses 6.

That is, in the storage device 60, the measurement results of the emitted light of the fluorescent ink 18R, 18G, and 18B discharged with respect to all the nozzles 22 which discharged the fluorescent ink 18R, 18G, and 18B, and the discharge position thereof. The positional information of the concave portion 6 is stored in association with each other.

The measurement result to be stored is any one or both of measured values such as intensity, luminance, chromaticity of emitted light, and calculated values calculated from the measured values. When each nozzle 22 hits fluorescent ink 18R, 18G, and 18B to two or more recessed parts 6 of the same board | substrate 5, the computed value of one nozzle 22 is fluorescent ink 18R, 18G. , 18B) can be used as a measurement result of the deviation, average value, and total value of the difference in the difference between the measured values of the plurality of recessed parts 6.

The reference value of the measurement result is set in advance in the storage device 60. The control apparatus 30 compares the measurement result memorize | stored by the memory | storage device 60, or a reference value, and determines whether the excess or lack occurred in the discharge amount of the ink from the nozzle 22. FIG. Since the row of the recesses 6 through which the nozzles 22 pass is determined, the control device 30 specifies the nozzles 22 in which excessive or shortage has occurred from the positional information of the recesses 6.

When the control signal transmitted from the control device 30 to the discharge control element is changed, the energization conditions (drive waveform, magnitude of applied voltage, voltage application time, etc.) to the discharge control element are changed, and the discharge amount from the nozzle 22 is changed. It is supposed to increase and decrease.

The energization condition to be changed is determined in advance, and the relationship between the energization condition and the measurement result is examined in advance, and the target value of the relationship and the measurement result is set in the storage device 60.

Before the start of the discharge from the nozzle 22 to the new board | substrate 5, the control apparatus 30 has the energization conditions of a discharge control element with respect to the nozzle 22 which judged that the shortage and shortage generate | occur | produced, and a measurement result is a target value. Change the control signal as much as possible.

That is, for the nozzle 22 determined to have a small discharge amount, the control signal is changed to increase the discharge amount, and for the nozzle 22 determined to have a large discharge amount, the control signal is changed to reduce the discharge amount. The control signal is not changed with respect to the nozzle 22 determined that excessive shortage does not occur in the discharge amount.

By changing the control signal, the lack of discharge amount is corrected, and therefore, the set amount of fluorescent inks 18R, 18G, and 18B are disposed in the recesses 6.

The board | substrate 5 which the measurement of the emitted light was complete | finished is carried in to the drying apparatus which is not shown in figure, and the fluorescent ink 18R, 18G, 18B is dried in the drying apparatus, and a solvent is removed, if necessary, fluorescent ink after drying (18R, 18G, 18B) is crystallized by a laser annealing apparatus or the like. The fluorescent inks 18R, 18G, and 18B after drying are solid and become self-luminous color filters (fluorescent films) of display devices such as FEP, PDP, and organic EL elements.

In the case where the fluorescent inks 18R, 18G, and 18B are continuously disposed on the plurality of substrates 5, the emission light may be measured for each substrate 5 or may be performed for each of the plurality of substrates.

In addition, as shown in Figs. 2A and 2B, the emitted light is measured in the state where the fluorescent inks 18R, 18G, and 18B are applied to a part of the substrate 5, and the control signal is applied. After changing, you may apply fluorescent ink 18R, 18G, and 18B to the area | region adjacent to the area | region to which fluorescent ink 18R, 18G, and 18B were apply | coated. In this case, the discharge amount is corrected in the same substrate 5 and can be discharged at the discharge amount after correction.

The measurement of the emitted light may be performed after the fluorescent inks 18R, 18G, and 18B are dried by a drying apparatus, but correction of the discharge amount of the nozzle 22 is delayed (usually after discharged to two or three substrates). Since the fluorescent inks 18R, 18G, and 18B may be discharged for a long time while abnormality occurs in the discharge amount of the nozzle 22, the emission light is preferably measured before drying.

When the two or more fluorescent inks 18R, 18G, and 18B are impacted on the substrate 5, the reference value is determined for each color of the emitted light of the fluorescent inks 18R, 18G, and 18B. The results will match for each color.

There may be only one reference value set in the control apparatus 30, and two or more may be sufficient as the amount of change of a measured value, and the upper limit of a measured value. In addition, the target value may be the same as or different from the reference value.

In the said Example, although the case where the measurement light was irradiated to every recessed part 6 was demonstrated, you may make it irradiate a measurement light to two or more recessed parts 6 at once. In this case, two or more light receiving portions are formed in the light receiving device 50 so that the light emitted from the two or more recesses 6 can be received, and the light emitted from the two or more recesses 6 is simultaneously received. You may also The arrangement of the light receiving device 50 and the irradiation device 40 is not particularly limited and may be attached to the same head moving shaft 14 as the print head 21.

The measurement light is an electromagnetic wave that excites and emits phosphors contained in the fluorescent inks 18R, 18G, and 18B, and is ultraviolet light here. The irradiation device 40 is, for example, an ultraviolet irradiation device or a short wavelength ultraviolet laser irradiation device, and may be an electron gun or the like that irradiates electrons.

Although the light receiving apparatus 50 is not specifically limited, It is a luminance meter, a spectrophotometer, an XYZ sensor, etc. The light receiving device 50 measures, for example, the emission intensity at the wavelength of 650 nm in the red light emission, the emission intensity at the center in the wavelength of 540 nm in the green light emission, and the emission intensity at the wavelength of 440 nm in the blue light emission. do.

As mentioned above, although the case where the light emission of the ink which landed on the board | substrate 5 used for manufacture of an actual display apparatus was measured was demonstrated, this invention is not limited to this. For example, a plurality of points of fluorescent inks 18R, 18G, and 18B are landed on the dummy substrate for measurement from the plurality of nozzles 22, and the emitted light of the fluorescent inks 18R, 18G, and 18B that has landed on the dummy substrate. Measure From the measurement result, fluorescent ink 18R, 18G, and 18B may be apply | coated to the board | substrate 5 used for actual manufacture by changing a control signal.

The measurement of the emitted light does not need to be performed for all the nozzles 22 of the print head 21, but may be performed for the nozzles 22 used when starting printing next.

The printing apparatus and the film deposition method of the present invention are suitable for the deposition of a color filter that emits visible light by irradiating electromagnetic waves without using a light source, and are an organic EL (Electro-Luminescence) display device and a surface-conduction electron-emitter (SED). Display, surface field display), FED (Field Emission Display), PDP (Plasma Display Panel) and the like.

In an inkjet printer using a printing head (Diamtix head SE-3) having 128 actuators using a piezo element as the discharge control element, the measurement light having a wavelength of 365 nm is irradiated, received by a spectrophotometer, and the nozzle 22. As a result of adjusting the discharge amount of, the chromaticity deviation of the substrate 5 could be suppressed to within 3 σ 0.002 by the x and y colorimeters.

5 ... ... Substrate 10... ... printer
21 ... ... Printhead 22.. ... Nozzle
30 ... ... Control unit 40.. ... Probe
50... ... Light-receiving device

Claims (8)

controller,
A print head which has a plurality of nozzles, and discharges ink of an amount corresponding to a control signal from said control device from said nozzle, and
Has a movement device for linearly moving the substrate relative to the print head,
The control device is a printing device configured to impact the ink at an impact position parallel to the impact direction crossing the moving direction of the substrate from the nozzle.
An irradiation apparatus which is located downstream of the moving direction of the substrate from the print head and irradiates the measurement light of an ultraviolet region to the ink which has arrived at the impact position; and
It has a light-receiving device for measuring the light emission of the visible region emitted by the ink irradiated with the measurement light,
And the control device is configured to be able to change the control signal based on a measurement result of the light receiving device.
The method of claim 1,
And a storage device in which the measurement result is stored in correspondence with the position on the substrate of the impact position, and the control signal is changed from the content stored in the storage device.
The method according to claim 1 or 2,
And a sensor moving device for moving the irradiation device and the light receiving device in a direction along the impact direction.
Transmits a control signal to a discharge control element respectively formed in a plurality of nozzles of the print head,
A film forming method in which an ink containing a phosphor that emits visible light when ultraviolet rays are irradiated is discharged from the nozzle, and is deposited on a substrate to form a fluorescent film.
Irradiated with the measurement light in the ultraviolet region to the ink hit the substrate to emit light;
By measuring the emitted light of the visible light emitted from the ink,
Among the plurality of nozzles, an excess or shortage of the discharge amount of the ink discharged from the one nozzle is determined by comparing a measurement result of the emitted light of the ink discharged from one of the nozzles with a preset reference value,
And when the discharge amount is determined to be small, changing the control signal to increase the discharge amount of one of the nozzles, and when determining that the discharge amount is large, changing the control signal to reduce the discharge amount.
The method of claim 4, wherein
Move the substrate relative to the print head,
A film forming method for reaching the ink at a plurality of impact positions,
And the control signal of one of the nozzles is changed based on the emitted light of the plurality of spaced inks discharged by one of the nozzles.
The method according to claim 4 or 5,
After the substrate is moved relative to the print head, a partial coating for partially landing the ink on the substrate is performed to determine the oversufficiency of the discharge amount, and the control signal is changed.
And depositing the ink on the uncoated portion by the changed control signal by moving the print head to an uncoated portion on which the ink of the substrate is not reached.
The method according to claim 4 or 5,
A film forming method for forming the fluorescent film on a plurality of substrates,
After the ink is impacted on one of the substrates to measure the emitted light,
And depositing the ink onto another substrate by the changed control signal.
The method of claim 4, wherein
After measuring the luminescence light of the ink impacted on the substrate,
The film-forming method which dries the said ink.
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