KR101182101B1 - Testing apparatus of cooling line - Google Patents

Testing apparatus of cooling line Download PDF

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Publication number
KR101182101B1
KR101182101B1 KR1020120023016A KR20120023016A KR101182101B1 KR 101182101 B1 KR101182101 B1 KR 101182101B1 KR 1020120023016 A KR1020120023016 A KR 1020120023016A KR 20120023016 A KR20120023016 A KR 20120023016A KR 101182101 B1 KR101182101 B1 KR 101182101B1
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KR
South Korea
Prior art keywords
cooling
test solution
test
unit
cooling device
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KR1020120023016A
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Korean (ko)
Inventor
이규백
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이규백
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Priority to KR1020120023016A priority Critical patent/KR101182101B1/en
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Publication of KR101182101B1 publication Critical patent/KR101182101B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Abstract

The present invention relates to a cooling test apparatus, which can selectively test leakage or clogging of a cooling line using cooling water or air in various types of cooling devices including a cooling line, and is convenient for mobility and portability. It relates to a cooling test device that can easily test the leakage or clogging of the cooling line of the cooling device in the place where is installed.

Description

Testing apparatus of cooling line

The present invention relates to a cooling test apparatus, which can test leakage or clogging of a cooling line by using cooling water or air selectively in various kinds of cooling devices having a cooling line, and is convenient in portability and portability. It relates to a cooling test device that can easily test the leakage or clogging of the cooling line of the cooling device in the place where is installed.

Apparatuses having cooling lines are used in various fields. In particular, semiconductor manufacturing facilities, and more particularly semiconductor manufacturing equipment including a reaction chamber is provided with a cooling line for optimizing the process conditions by maintaining the temperature in the reaction chamber to a certain range of temperatures. In general, the cooling line is made of a material with high thermal conductivity, for example, copper. Copper has a low strength, so holes or cracks are generated even at a low impact. If the cooling line is used for a long time, the cooling line and the inside of the cooling line are Some sections of the cooling line are often blocked due to chemical reactions of the flowing coolant or contamination of the coolant.

In semiconductor manufacturing facilities, cooling lines are an important means of controlling optimum process conditions.The yield of semiconductors produced is low when the cooling water leaks from the cooling line or when some sections of the cooling line are blocked and the cooling water does not flow smoothly along the cooling line. Problems arise that can result in a failure or failure of the semiconductor manufacturing equipment.

In order to overcome this problem, the internal temperature of the semiconductor manufacturing equipment is not controlled to an appropriate temperature by periodically cleaning the cooling line of the cooling apparatus, periodically replenishing or replacing the cooling water, or monitoring the internal temperature of the semiconductor manufacturing equipment in real time. In case of failure, various cooling line management methods are used, such as replacing the cooling line.

However, the conventional management method of the cooling line wastes time and money to periodically replenish or replace the cooling water or to clean the cooling line regardless of whether the cooling water is insufficient in the actual cooling line. There is a great deal of waste in replacement. In addition, there is a problem that the operation delay occurs due to the cooling water replenishment or replacement, cooling line cleaning, cooling line replacement.

The present invention is to solve the problems of the above-mentioned conventional cooling line management method, the object of the present invention is to carry and move easily to prevent the cooling line leakage or clogging of the cooling device in the place where the cooling device is installed. It is to provide a cooling test apparatus that can be tested.

Another object of the present invention is to provide a cooling test apparatus that can test the cooling line of the cooling device using a variety of cooling media by selecting the coolant or air as the test medium to test the leakage or clogging of the cooling line of the cooling device. It is.

Another object of the present invention is to select the cooling water or air as a test medium through various combinations of the opening and closing valves, and the cooling test apparatus that can selectively test the leakage or clogging of the cooling line through the various combinations of the opening and closing valves To provide.

In order to achieve the object of the present invention, the cooling test apparatus according to the present invention is discharged from the cooling device through a discharge port for discharging the cooled test solution to the cooling device to be tested with a constant hydraulic pressure, and the cooling line of the cooling device A main unit having an inlet through which a solution is introduced and a measuring unit measuring a flow rate of a test solution flowing into the inlet;

A conduit connecting an exhaust pipe connecting the cooling device in series with the outlet of the main body unit, an air injector for injecting test air into the test cooling device in parallel with the main body unit at one end of the discharge pipe, and a cooling device from the air injection device. And an auxiliary unit having a manometer for measuring the pressure of air injected into the furnace.

More specifically, the main body unit according to the present invention includes a housing having an outlet and an inlet at the outside, a test solution reservoir disposed at the bottom of the housing and storing the test solution, and disposed at the bottom of the housing and tested. A pump for discharging the test solution stored in the solution reservoir at a constant pressure, a cooling unit disposed on the bottom surface of the housing and cooling the test solution discharged from the pump and discharging the cooled test solution to the cooling device through the discharge port; And, passing through the cooling line of the cooling device, characterized in that it comprises a measuring unit for measuring the flow rate of the test solution flowing through the inlet from the cooling device.

Here, the main body unit according to the present invention has a test solution reservoir, a pump, a cooling part, and a measuring part disposed inside the housing, and a moving means for moving the main body unit on the lower surface of the housing.

Preferably, the inside of the housing of the main unit connects the lower end of the test solution reservoir to the pump and supplies a test solution of the test solution reservoir to the pump, and connects the pump and the cooling unit to supply the test solution from the pump to the cooling unit. A third water supply pipe connecting the second water supply pipe, the cooling unit and the discharge pipe and supplying the test solution from the cooling unit to the discharge pipe, and a fourth water supply pipe connecting the inlet and the test solution reservoir and supplying the test solution from the inlet to the test solution reservoir. It includes more.

The auxiliary unit further includes a first on / off valve for controlling opening and closing of the outlet, a second on / off valve for controlling the opening and closing of the inlet, and a third on / off valve for controlling the opening and closing of the connecting pipe.

In order to test the cooling line leakage of the cooling apparatus using the test solution in the cooling test apparatus according to the present invention, the first on-off valve is opened and the second on-off valve and the third on-off valve are controlled to be closed.

In order to test the cooling line leakage of the cooling apparatus using the test air in the cooling test apparatus according to the present invention, the third on-off valve is opened and the first on-off valve and the second on-off valve are controlled to be closed.

In order to test the blockage of the cooling line of the cooling device using the test solution in the cooling test device according to the present invention, the first on-off valve and the second on-off valve are opened and the third on-off valve is controlled to be closed.

The cooling test apparatus according to the present invention has various effects as follows.

First, the cooling test apparatus according to the present invention includes all the components for testing the cooling apparatus inside the housing of the main body unit, and is provided with a moving means such as wheels on the outer lower surface of the housing, thereby making it easy to carry and move. Cooling line leakage or clogging of the cooling unit can be tested where the unit is installed.

Second, the cooling test apparatus according to the present invention can test the cooling line of the cooling apparatus using various cooling media by selecting the cooling water or air to test the leakage or clogging of the cooling line of the cooling apparatus.

Third, the cooling test apparatus according to the present invention may select the coolant or air as a test medium through various combinations of the first to third on / off valves, and select an operation mode through various combinations of the first to third on / off valves. The leakage or blockage of the cooling line can be tested.

1 is a view for explaining an example of testing a cooling apparatus using a cooling test apparatus according to the present invention.
2 shows an external perspective view of a cold test apparatus according to the present invention.
3 shows an internal perspective view of a cold test apparatus according to the present invention.
4 is a view showing in detail the auxiliary unit.

Hereinafter, the cooling test apparatus according to the present invention will be described in more detail with reference to the accompanying drawings.

1 is a view for explaining an example of testing a cooling apparatus using a cooling test apparatus according to the present invention.

Referring to FIG. 1, the cooling test apparatus 100 according to the present invention is moved to a cooling apparatus 300 to be tested and positioned, and optionally, the supply injection apparatus 200 is optionally cooled according to the cooling test apparatus 100. The cooling device 30 is used together with the test. The cooling test apparatus 100 and the supply injection apparatus 200 are driven using commercial power at a place where commercial power can be used. According to the field to which the present invention is applied, the cooling test apparatus 100 or the supply injection apparatus 200 may use a battery power source as a driving power source instead of a commercial power source for convenience of movement and portability, which is within the scope of the present invention.

The cooling device 300 includes a cooling line, and is a device that cools an object to be cooled by using a cooling medium flowing through the cooling line. Or the temperature of a cooling object, such as an electronic equipment, is controlled.

Outside the housing of the cooling test apparatus 100, an inlet port 114 through which the test solution discharged from the cooling apparatus 300 passes through the outlet 113 for discharging a test solution such as cooling water and the cooling line of the cooling apparatus 300. ). On the other hand, the outlet 113 is connected to the cooling line inlet (not shown) of the cooling device 300 through the connecting pipe 41 and the inlet 114 is the cooling line of the cooling device 300 through the connecting pipe 43. It is connected to the outlet (not shown). Therefore, the test solution discharged from the discharge port 113 is supplied to the cooling line through the connection pipe 41 to flow through the cooling line, and the test solution discharged through the cooling line discharge port flows into the inlet port 114 through the connection pipe 43. do.

The cooling test apparatus 100 measures the flow rate of the test solution flowing into the inlet 114, and compares the flow rate of the test solution flowing into the outlet with the set flow rate of the measured test solution and the cooling device to be tested ( It is determined whether there is a blocked part in the cooling line of 300). In addition, while the inlet 114 of the cooling test apparatus 100 is closed, the test solution is discharged to the cooling line of the cooling apparatus 300 through the outlet 113 so that the test solution leaks to the cooling line of the cooling apparatus 300. Determine if the cooling line is leaking.

On the other hand, it is possible to selectively determine whether there is a leakage in the cooling line of the cooling device 300 through the air injection device 200, a state in which the outlet 113 and the inlet 114 of the cooling test device 100 is closed Air is injected into the cooling line of the cooling device 300 at a pressure set in, and the foaming liquid, for example, soapy water, is coated on the cooling line of the cooling device 300 to the bubbles generated in the leaking part of the cooling line. It is determined whether or not the cooling line leaks.

2 shows an external perspective view of the cooling test apparatus according to the present invention, and FIG. 3 shows an internal perspective view of the cooling test apparatus according to the present invention.

Referring to the outside of the cooling test apparatus in more detail with reference to FIG. 2, the cooling test apparatus 100 includes a main unit 110 and an auxiliary unit 120, and the main unit 110 includes the cooling test apparatus 100. It consists of various components for operating the auxiliary unit 120 is attached to the main body unit 110 is composed of various components to assist the operation of the main body unit (110).

First, the outside of the main body unit 110 is a discharge port for discharging the housing 111, the wheels 112 installed on the lower surface of the housing 111, the cooled test solution to the cooling device 300 to be tested at a constant flow rate. 113, an inlet 114 through which the test solution discharged from the cooling device passes through the cooling line of the cooling device, a flow rate gauge 115 indicating a flow rate of the test solution flowing into the inlet 114, and a main body unit ( A power button 116 for applying power to the 110 and a power line 117 for supplying driving power to the main body unit 110 from a commercial power source.

On the other hand, the auxiliary unit 120 is discharge pipe 121 for connecting the cooling line of the cooling device 300 in series with the discharge port 113 of the main body unit 110, the main body unit 110 and one end of the discharge pipe 121 In parallel, the connector 123 connecting the air injector 200 for injecting the test air into the cooling device 300, the pressure of the air injected from the air injector 200 to the cooling device 300 is measured. The first on-off valve 125, the second on-off valve 126, and the third on-off valve 127, which select the pressure gauge 124, the test medium from the air or the test solution, or select the test mode of the main body unit 100. Equipped. Here, the test mode of the main body unit refers to a leakage test mode for determining whether a leakage part exists in the cooling line of the cooling device and a blockage test mode for determining whether a blocked part exists in the cooling line.

On the other hand, referring to the inside of the cooling test apparatus in more detail with reference to Figure 3, the test solution reservoir 130 is disposed on the bottom surface of the housing and stores the test solution. The pump 140 is disposed on the bottom surface of the housing and discharges the test solution stored in the test solution reservoir 130 to the cooling unit 150 at a constant flow rate. The cooling unit 150 is disposed on the bottom surface of the housing, and cools the test solution discharged from the pump 140 using a cooling fan and discharges the cooled test solution to the cooling device through the discharge port 113. On the other hand, the measuring unit (not shown) measures the flow rate of the test solution flowing through the inlet 114 from the cooling device through the cooling line of the cooling device. The flow rate of the test solution measured through the measuring unit (not shown) is displayed through the flow gauge. In the cooling test apparatus according to the present invention, all the various components located inside the housing of the main body unit are located on the bottom surface of the housing, thereby improving stability during movement to improve mobility.

Here, the first water supply pipe 171 connects the lower end of the test solution reservoir 130 and the pump 140 and supplies the test solution of the test solution reservoir 130 to the pump 140. The second water supply pipe 173 connects the pump 140 and the cooling unit 150 and supplies a test solution from the pump 140 to the cooling unit 150. The third water supply pipe 175 connects the cooling unit 150 and the discharge pipe 113 and supplies a test solution from the cooling unit 150 to the discharge pipe 113. Meanwhile, the fourth water supply pipe connects the inlet 114 and the test solution reservoir 130 and supplies the test solution from the inlet 114 to the test solution reservoir 130. Here, the first water supply pipe 171 is disposed at the bottom of the test solution reservoir 130 to smoothly discharge the test solution stored from the test solution reservoir 130 to the pump 140, and the test solution is stored in the test solution reservoir ( The test solution may be continuously provided to the pump 140 even if it is not sufficiently filled in 130.

Preferably, the first water supply pipe 171 and the second water supply pipe 173 are connected to the distribution connection pipe 178 so that the test solution introduced through the first water supply pipe 171 is introduced into the pump 140 through the connection pipe. The test solution discharged from the pump 140 to the distribution connector 178 again at a constant flow rate is discharged to the cooling unit 150 through the second water supply pipe 173. Here, when the amount of the test solution discharged to the cooling unit 150 through the second water supply pipe 173 is less than the amount of the test solution introduced into the pump 140 through the first water supply pipe 171, the second water supply pipe 173 The difference between the amount of the test solution discharged to the cooling unit 150 and the amount of the test solution introduced into the pump 140 through the first water supply pipe 171) is determined by the distribution connecting pipe 178 and the test solution reservoir 130. It is discharged to the test solution reservoir 130 through the auxiliary water pipe 179 to connect.

In summary, when the flow of the test solution is examined while testing whether the leaked portion exists in the cooling line of the cooling apparatus using the test solution, the test solution stored in the test solution reservoir 130 may be the first water supply pipe 171. It is discharged to the pump 140 along. The pump 140 discharges the test solution to the cooling tank 150 along the second water supply pipe 173 at a set flow rate, and the test solution cooled in the cooling bath 150 discharges the 113 through the third water supply pipe 175. To be discharged. The cooled test solution discharged to the outlet 113 flows into the cooling line of the cooling device and enters the inlet 114. The flow rate of the test solution introduced into the inlet 114 is measured by the measuring unit 160, and the introduced test solution is moved to the test solution reservoir 130 along the fourth water supply pipe 177.

4 is a view showing in detail the auxiliary unit.

Looking in more detail with respect to the auxiliary unit 120 with reference to Figure 4, is screwed with the outlet 113 of the main body unit 110 is formed extending from the outlet 113 and the cooling device in series with the main unit 110 The test pipe is injected into the cooling device 300 in parallel with the main body unit 110 by being screwed to the end of the discharge pipe 121 connecting the cooling line of the 300, the discharge pipe 121 in contact with the discharge port 113 in parallel. To adjust the opening and closing of the connecting pipe 123 for connecting the air injector 200, the pressure gauge 124 for measuring the pressure of the air injected into the cooling device 300 from the air injector 200, and the outlet 113. To control the test solution to be discharged to the cooling device or to control the opening and closing of the first opening and closing valve 125, the inlet 114 to control the air injected from the air injection device 200 is not injected into the outlet 113, the test To control the solution into the inlet (114) B by adjusting the opening and closing of the second on-off valve 126 and the connecting pipe 123 to prevent the air injected into the cooling line of the cooling device from the air injection device 200 to enter the inlet 114 (air injection device ( And a third open / close valve 127 for controlling the air of the gas 200 to be injected into the cooling line of the cooling device or to prevent the test solution from flowing into the connection pipe 123.

Hereinafter, the operation of the main body unit and the auxiliary unit in the leakage test mode and the clogging test mode of the cooling test apparatus according to the present invention will be described in detail.

Referring first to the leak test mode, the first on-off valve 125 and the second on-off valve 126 and the third on-off valve 127 are opened in order to determine whether there is a leakage in the cooling line of the cooling apparatus using the test solution. To close it. By opening the first opening / closing valve 125 and closing the second opening / closing valve 126 and the third opening / closing valve 127, the test solution is discharged at a constant pressure to the cooling line of the cooling device 300 through the outlet 113. The leaked part of the cooling line can be determined by a test solution that is discharged and leaks from the leaked part of the cooling line of the cooling device. Preferably, the test solution has a good visual color in order to easily determine the leaked portion of the cooling line.

In addition, the second open / close valve 126 is opened and the first open / close valve 125 and the third open / close valve 127 are closed in order to determine whether there is a leak in the cooling line of the cooling device by using air. By opening the second open / close valve 126 and closing the first open / close valve 125 and the third open / close valve 127, cooling of the cooling device 300 from the air injection device 200 through the connecting pipe 123. The air is discharged at a constant pressure in the line, and the leaking part of the cooling line can be determined by bubbles generated at the leaking part of the cooling line of the cooling device. Preferably, the pressure of the air discharged to the cooling line is checked through the pressure gauge 124 and discharges the air to the cooling line at a pressure in a set range.

Meanwhile, referring to the clogging test mode, the first opening / closing valve 125 and the second opening / closing valve 126 are opened to determine whether there is a blockage in the cooling line of the cooling apparatus using the test solution, and the third opening / closing valve ( 127). By opening the first open / close valve 125 and the second open / close valve 126 and closing the third open / close valve 127, the test solution at the flow rate set in the cooling line of the cooling device 300 through the discharge port 113. This is discharged and the test solution is introduced into the inlet 114 along the cooling line of the cooling device. The flow rate of the incoming test solution is measured, and the measured flow rate of the test solution is compared with the set flow rate to determine whether there is a blockage in the cooling line of the cooling device.

100: cooling test device 200: air injection device
300: cooling device 110: main body unit
120: auxiliary unit 111: housing
112: wheel 113: outlet
114: inlet 115: flow gauge
116: power switch 117: power line
121: discharge pipe 123: connector
124: pressure gauge 125: first opening and closing valve
126: second on-off valve 127: third on-off valve
130: test solution reservoir 140: pump
150: cooling unit
171: first water supply pipe 173: second water supply pipe
175: third water supply pipe 177: fourth water supply pipe
178: dispensing connector 179: auxiliary water pipe

Claims (7)

An outlet for discharging the cooled test solution to a cooling device to be tested at a constant flow rate, an inlet through which a test solution discharged from the cooling device passes through the cooling line of the cooling device, and the test solution flowing into the inlet port A main unit having a measuring unit measuring a flow rate of the main body; And
A discharge pipe connecting the cooling device in series with the discharge port of the main body unit, a connecting pipe connecting an air injecting device for injecting test air into the cooling device in parallel with the main body unit to one end of the discharge pipe, and the air And an auxiliary unit having a manometer for measuring the pressure of the air injected from the injection device into the cooling device. The method of claim 1, wherein the main body unit
A housing having an outlet and an inlet at the outside;
A test solution reservoir disposed on a bottom surface of the housing and storing a test solution;
A pump disposed on a bottom surface of the housing and discharging the test solution stored at the test solution reservoir at a predetermined pressure;
A cooling unit disposed on an inner bottom surface of the housing and cooling the test solution discharged from the pump and discharging the cooled test solution to the cooling device through the discharge port; And
And a measuring unit measuring a flow rate of the test solution flowing through the cooling line of the cooling device and flowing through the inlet from the cooling device. The method of claim 2, wherein the main body unit
A first water supply pipe connecting the lower end of the test solution reservoir to the pump and supplying the test solution of the test solution reservoir to the pump;
A second water supply pipe connecting the pump and the cooling unit and supplying the test solution from the pump to the cooling unit;
A third water supply pipe connecting the cooling unit and the discharge pipe and supplying the test solution from the cooling unit to the discharge pipe;
And a fourth water supply pipe connecting the inlet to the test solution reservoir and supplying the test solution from the inlet to the test solution reservoir. The method of claim 2, wherein the auxiliary unit
A first opening / closing valve for controlling opening and closing of the outlet;
A second opening / closing valve for controlling opening and closing of the inlet; And
And a third open / close valve configured to control the opening and closing of the connecting pipe. The method of claim 4, wherein the test solution is used to test cooling line leakage of the cooling device.
The first opening / closing valve is opened,
And the second on-off valve and the third on-off valve are controlled to be closed. 5. The method of claim 4, wherein the test air is used to test cooling line leakage of the test cooling device.
The third on-off valve is opened,
And the first on-off valve and the second on-off valve are controlled to be closed. The method of claim 4, wherein the test solution is used to test cooling line blockage of the test cooling device.
The first opening / closing valve and the second opening / closing valve are opened,
And the third on-off valve is closed controlled.
KR1020120023016A 2012-03-06 2012-03-06 Testing apparatus of cooling line KR101182101B1 (en)

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KR1020120023016A KR101182101B1 (en) 2012-03-06 2012-03-06 Testing apparatus of cooling line

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Application Number Priority Date Filing Date Title
KR1020120023016A KR101182101B1 (en) 2012-03-06 2012-03-06 Testing apparatus of cooling line

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KR101182101B1 true KR101182101B1 (en) 2012-09-19

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102147162B1 (en) 2019-12-10 2020-08-24 비오티 주식회사 Multi step gas leak test system for high pressure
KR20210006728A (en) 2019-07-09 2021-01-19 비오티 주식회사 Gas leak test system for high pressure
KR20210006729A (en) 2019-07-09 2021-01-19 비오티 주식회사 Gas leak test system with multi-test function

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210006728A (en) 2019-07-09 2021-01-19 비오티 주식회사 Gas leak test system for high pressure
KR20210006729A (en) 2019-07-09 2021-01-19 비오티 주식회사 Gas leak test system with multi-test function
KR102147162B1 (en) 2019-12-10 2020-08-24 비오티 주식회사 Multi step gas leak test system for high pressure

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