KR101083605B1 - 표면 플라즈몬 공명 센서 - Google Patents
표면 플라즈몬 공명 센서 Download PDFInfo
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- KR101083605B1 KR101083605B1 KR1020090033085A KR20090033085A KR101083605B1 KR 101083605 B1 KR101083605 B1 KR 101083605B1 KR 1020090033085 A KR1020090033085 A KR 1020090033085A KR 20090033085 A KR20090033085 A KR 20090033085A KR 101083605 B1 KR101083605 B1 KR 101083605B1
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- surface plasmon
- photonic crystal
- plasmon resonance
- resonance sensor
- thin film
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- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 title claims abstract description 56
- 239000002184 metal Substances 0.000 claims abstract description 48
- 229910052751 metal Inorganic materials 0.000 claims abstract description 48
- 239000004038 photonic crystal Substances 0.000 claims abstract description 43
- 239000010409 thin film Substances 0.000 claims abstract description 32
- 230000007547 defect Effects 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 230000002950 deficient Effects 0.000 claims abstract description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 229910004541 SiN Inorganic materials 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 2
- 239000002061 nanopillar Substances 0.000 claims description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 2
- 230000008859 change Effects 0.000 abstract description 8
- 238000007689 inspection Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N2021/258—Surface plasmon spectroscopy, e.g. micro- or nanoparticles in suspension
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Mathematical Physics (AREA)
- Nanotechnology (AREA)
- Theoretical Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
Claims (13)
- 베이스 기판과;상기 베이스 기판 상에 형성된 금속 박막층과;상기 금속 박막 상에 형성된 결함을 갖는 광결정층이 구비되고;상기 광결정층은 금속 광결정층이며;상기 금속 광결정층 상에 형성된 결함이 있는 유전체 광결정층을 포함하는 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 삭제
- 삭제
- 삭제
- 제 1항에 있어서, 상기 베이스 기판과 상기 금속 박막층 사이에 Cr층이 개재되는 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 제 1항에 있어서, 상기 금속 박막층은 Au, Al, Ag 또는 Cu 중에서 선택된 어느 하나인 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 제 1항에 있어서, 상기 금속 광결정층은 Au, Al, Ag 또는 Cu 중에서 선택된 어느 하나인 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 제1항에 있어서, 상기 유전체 광결정층은 ZnO, TiO2, SiO2 또는 SiNx 중에서 선택된 어느 하나인 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 제 1항에 있어서, 상기 광결정층은 나노 홀 또는 나노 기둥을 포함하는 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 제 1항에 있어서, 상기 표면 플라즈몬 공명 센서는 고굴절률을 갖는 매질 상에 형성되는 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 제 10항에 있어서, 상기 고굴절률을 갖는 매질은 프리즘인 것을 특징으로 하는 표면 플라즈몬 공명 센서.
- 삭제
- 삭제
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KR1020090033085A KR101083605B1 (ko) | 2009-04-16 | 2009-04-16 | 표면 플라즈몬 공명 센서 |
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KR1020090033085A KR101083605B1 (ko) | 2009-04-16 | 2009-04-16 | 표면 플라즈몬 공명 센서 |
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KR20100114622A KR20100114622A (ko) | 2010-10-26 |
KR101083605B1 true KR101083605B1 (ko) | 2011-11-16 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018041267A1 (zh) * | 2016-08-29 | 2018-03-08 | 上海交通大学 | 金属微纳米结构及端面具有金属微纳米结构的光纤 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014168041A1 (ja) * | 2013-04-12 | 2014-10-16 | 日本精工株式会社 | 標的物質捕捉装置 |
KR102470256B1 (ko) * | 2020-12-23 | 2022-11-25 | 광운대학교 산학협력단 | 복수의 네트워크 나노구조체를 포함하는 광검출기용 기판 및 이를 이용하는 광검출기 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20080225293A1 (en) | 2006-07-25 | 2008-09-18 | The Regents Of The University Of Michigan | Photonic crystal sensor |
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20080225293A1 (en) | 2006-07-25 | 2008-09-18 | The Regents Of The University Of Michigan | Photonic crystal sensor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018041267A1 (zh) * | 2016-08-29 | 2018-03-08 | 上海交通大学 | 金属微纳米结构及端面具有金属微纳米结构的光纤 |
US11137353B2 (en) | 2016-08-29 | 2021-10-05 | Shanghai Jiaotong University | Metallic micro/nano-structure and optical fiber having a micro/nano-structure on the end-facet |
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KR20100114622A (ko) | 2010-10-26 |
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