KR100958289B1 - 전자파 차폐용 촉매 전구체 수지 조성물, 이를 이용한 금속패턴 형성방법 및 이에 따라 형성된 금속패턴 - Google Patents
전자파 차폐용 촉매 전구체 수지 조성물, 이를 이용한 금속패턴 형성방법 및 이에 따라 형성된 금속패턴 Download PDFInfo
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- KR100958289B1 KR100958289B1 KR1020080057233A KR20080057233A KR100958289B1 KR 100958289 B1 KR100958289 B1 KR 100958289B1 KR 1020080057233 A KR1020080057233 A KR 1020080057233A KR 20080057233 A KR20080057233 A KR 20080057233A KR 100958289 B1 KR100958289 B1 KR 100958289B1
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- South Korea
- Prior art keywords
- catalyst precursor
- resin composition
- pattern
- catalyst
- metal pattern
- Prior art date
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- 239000012018 catalyst precursor Substances 0.000 title claims abstract description 96
- 239000011342 resin composition Substances 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims abstract description 75
- 229910052751 metal Inorganic materials 0.000 claims abstract description 73
- 239000002184 metal Substances 0.000 claims abstract description 73
- 239000003054 catalyst Substances 0.000 claims abstract description 63
- 238000007772 electroless plating Methods 0.000 claims abstract description 34
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical class [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229920006026 co-polymeric resin Polymers 0.000 claims abstract description 31
- 125000000524 functional group Chemical group 0.000 claims abstract description 29
- 239000000178 monomer Substances 0.000 claims abstract description 24
- 238000007747 plating Methods 0.000 claims abstract description 20
- 239000002243 precursor Substances 0.000 claims abstract description 14
- 239000000126 substance Substances 0.000 claims abstract description 13
- 239000003960 organic solvent Substances 0.000 claims abstract description 12
- 230000007261 regionalization Effects 0.000 claims abstract description 8
- 239000007787 solid Substances 0.000 claims description 19
- 150000008064 anhydrides Chemical class 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 16
- 150000004985 diamines Chemical class 0.000 claims description 15
- -1 fluorinated silver sulfonate Chemical class 0.000 claims description 15
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 14
- 150000001732 carboxylic acid derivatives Chemical group 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 12
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 12
- 239000002253 acid Substances 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 229920005989 resin Polymers 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 9
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 claims description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 6
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 claims description 6
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 claims description 6
- 239000003504 photosensitizing agent Substances 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 4
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 claims description 4
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 claims description 4
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 claims description 4
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 claims description 4
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 claims description 4
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 claims description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 4
- 239000002202 Polyethylene glycol Substances 0.000 claims description 4
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 claims description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims description 4
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 claims description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 4
- 238000007645 offset printing Methods 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 4
- 229920001223 polyethylene glycol Polymers 0.000 claims description 4
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 claims description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims description 4
- 238000007650 screen-printing Methods 0.000 claims description 4
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 claims description 3
- 150000008062 acetophenones Chemical class 0.000 claims description 3
- 239000012965 benzophenone Substances 0.000 claims description 3
- 150000008366 benzophenones Chemical class 0.000 claims description 3
- 150000002148 esters Chemical class 0.000 claims description 3
- 238000007641 inkjet printing Methods 0.000 claims description 3
- 150000002576 ketones Chemical class 0.000 claims description 3
- 150000003918 triazines Chemical class 0.000 claims description 3
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 claims description 2
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 claims description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 claims description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims description 2
- MTVLEKBQSDTQGO-UHFFFAOYSA-N 2-(2-ethoxypropoxy)propan-1-ol Chemical compound CCOC(C)COC(C)CO MTVLEKBQSDTQGO-UHFFFAOYSA-N 0.000 claims description 2
- JJBFVQSGPLGDNX-UHFFFAOYSA-N 2-(2-methylprop-2-enoyloxy)propyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)COC(=O)C(C)=C JJBFVQSGPLGDNX-UHFFFAOYSA-N 0.000 claims description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 claims description 2
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 claims description 2
- VFZKVQVQOMDJEG-UHFFFAOYSA-N 2-prop-2-enoyloxypropyl prop-2-enoate Chemical compound C=CC(=O)OC(C)COC(=O)C=C VFZKVQVQOMDJEG-UHFFFAOYSA-N 0.000 claims description 2
- CCTFMNIEFHGTDU-UHFFFAOYSA-N 3-methoxypropyl acetate Chemical compound COCCCOC(C)=O CCTFMNIEFHGTDU-UHFFFAOYSA-N 0.000 claims description 2
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical group OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 claims description 2
- DBCAQXHNJOFNGC-UHFFFAOYSA-N 4-bromo-1,1,1-trifluorobutane Chemical compound FC(F)(F)CCCBr DBCAQXHNJOFNGC-UHFFFAOYSA-N 0.000 claims description 2
- 125000004172 4-methoxyphenyl group Chemical group [H]C1=C([H])C(OC([H])([H])[H])=C([H])C([H])=C1* 0.000 claims description 2
- 239000004925 Acrylic resin Substances 0.000 claims description 2
- 229920000178 Acrylic resin Polymers 0.000 claims description 2
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 claims description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 claims description 2
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 claims description 2
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 claims description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 claims description 2
- 150000001242 acetic acid derivatives Chemical class 0.000 claims description 2
- 125000003158 alcohol group Chemical group 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 2
- 235000010323 ascorbic acid Nutrition 0.000 claims description 2
- 229960005070 ascorbic acid Drugs 0.000 claims description 2
- 239000011668 ascorbic acid Substances 0.000 claims description 2
- CHIHQLCVLOXUJW-UHFFFAOYSA-N benzoic anhydride Chemical compound C=1C=CC=CC=1C(=O)OC(=O)C1=CC=CC=C1 CHIHQLCVLOXUJW-UHFFFAOYSA-N 0.000 claims description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 claims description 2
- 229910000365 copper sulfate Inorganic materials 0.000 claims description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 2
- 125000004386 diacrylate group Chemical group 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 2
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 claims description 2
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- XNGIFLGASWRNHJ-UHFFFAOYSA-N o-dicarboxybenzene Natural products OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 claims description 2
- 229920006122 polyamide resin Polymers 0.000 claims description 2
- 229920000515 polycarbonate Polymers 0.000 claims description 2
- 239000004417 polycarbonate Substances 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 2
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 2
- 229920001721 polyimide Polymers 0.000 claims description 2
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- 239000005056 polyisocyanate Substances 0.000 claims description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 2
- 150000005846 sugar alcohols Polymers 0.000 claims description 2
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical class CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 claims description 2
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 claims description 2
- 239000008096 xylene Substances 0.000 claims description 2
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 claims 1
- CBDPWKVOPADMJC-UHFFFAOYSA-N ethyl 4,4-difluoro-3-oxobutanoate Chemical compound CCOC(=O)CC(=O)C(F)F CBDPWKVOPADMJC-UHFFFAOYSA-N 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
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- 239000004800 polyvinyl chloride Substances 0.000 claims 1
- 229920000915 polyvinyl chloride Polymers 0.000 claims 1
- CQLFBEKRDQMJLZ-UHFFFAOYSA-M silver acetate Chemical group [Ag+].CC([O-])=O CQLFBEKRDQMJLZ-UHFFFAOYSA-M 0.000 claims 1
- 230000009885 systemic effect Effects 0.000 claims 1
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- REYHXKZHIMGNSE-UHFFFAOYSA-M silver monofluoride Chemical compound [F-].[Ag+] REYHXKZHIMGNSE-UHFFFAOYSA-M 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 8
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- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 8
- 230000009467 reduction Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 238000013007 heat curing Methods 0.000 description 5
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 4
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 4
- RSWGJHLUYNHPMX-ONCXSQPRSA-N abietic acid Chemical compound C([C@@H]12)CC(C(C)C)=CC1=CC[C@@H]1[C@]2(C)CCC[C@@]1(C)C(O)=O RSWGJHLUYNHPMX-ONCXSQPRSA-N 0.000 description 4
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- 239000012685 metal catalyst precursor Substances 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- KZJPVUDYAMEDRM-UHFFFAOYSA-M silver;2,2,2-trifluoroacetate Chemical compound [Ag+].[O-]C(=O)C(F)(F)F KZJPVUDYAMEDRM-UHFFFAOYSA-M 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
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- 229920003002 synthetic resin Polymers 0.000 description 4
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 4
- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 3
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Abstract
Description
Claims (28)
- (a) 카르복시산 관능기 및 카도(Cado) 관능기를 갖는 공중합체 수지,(b) 플루오르화 은이온 유기 착화물 전구체,(c) 다관능성 에틸렌계 불포화 결합을 갖는 단량체,(d) 광개시제, 및(e) 유기용매를 포함하는 금속 패턴 형성용 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 카르복시산 관능기 및 카도(Cado) 관능기를 갖는 공중합체 수지는 카도 관능기를 갖는 다이알코올 및 다이아민으로 구성되는 그룹으로 부터 선택된 최소 일종과 다이산무수화물의 반응에 의해 합성됨을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 2항에 있어서, 상기 카도 관능기를 갖는 다이알코올 및 다이아민으로 구성되는 그룹으로 부터 선택된 최소 일종은 상기 다이산무수화물 100몰(mol%)을 기준으로 110-150몰로 반응시킴을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 공중합체 수지는 중량평균 분자량이 2,000-15,000인 것을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 공중합체 수지는 산가가 90-300㎎ KOH/g임을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 플루오르화 은이온 유기 착화물은 플루오르화 은아세테이트계, 플루오르화 은설폰네이트계, 플루오르화 β-카르보닐케톤계 실버(I)착화물 및 플루오르화 β-카르보닐에스테르계 실버(I)착화물로 구성되는 그룹으로부터 선택된 최소 1종 이상임을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 8항에 있어서, 상기 플루오르화 은이온 유기 착화물은 1,5-사이클로옥타다이엔-헥사플루오르아세틸아세토네이토실버(I) 착화물, 1,1,1-트라이플루오르-2,4-펜탄다이온나토실버(I)착화물, 5,5-다이메틸-1,1,1-트라이플루오르-2,4-헥산다이온네이트실버(I)착화물, 1-(4-메토시페닐)-4,4,4-트리플루오르부탄다이온네이토실버(I)착화물, 5,5,6,6,7,7,8,8,9,10,10,11,12,12,12-헵타데카플루오르데칸-2,4-다이온네이토실버(I)착화물 1,1,1,2,2,3,3-헵타플루오르-7,7-다이메틸-4,6-옥탄다이온네이토실버(I)착화물, 1,1,1,3,5,5,5-헵타플루오르펜탄-2,4-다이온네이토실버(I)착화물, 1,1,1,5,5,5-헥사플루오르펜탄-2,4-다이온네이토실버(I)착화물, 5,5,6,6,7,7,8,8,8-노나플루오르옥탄-2,4-다이온네이토실버(I)착화물, 5H,5H-퍼플루오르노난-4,6-다이온네이토실버(I)착화물, 6H,6H-퍼플루오르-운데칸-5,7-다이온네이토실버(I)착화물, 8H,8H-퍼플루오르펜타데칸-7,8-다이온네이토실버(I)착화물, 6H,6H-퍼플루오르운데칸-5,7-다이온네이토실버(I)착화물, 1-페닐-2H,2H-퍼플루오르헥산-1,3-다이온네이토실버(I)착화물, 1-페닐-2H,2H-퍼플루오르운데칸-1,3-다이온네이토실버(I)착화물, 5,6,6,6-테트라플루오르-5-(헵타플루오르프로폭시)헥산-2,4-다이온네이토실버(I)착화물, 1,1,5,5-테트라플루오르펜탄-2,4 다이온네이토실버(I)착화물, 5,5,6,6,7,7,8,8,9,9,9-운데칸플루오르-노난-2,4-다이온네이토실버(I)착화물, 에틸 3-클로로-4,4,4-트리플루오르아세토아세테이토실버(I)착화물, 에틸-4,4-디플루오르아세토아세테이토실버(I)착화물, 에틸-4,4,4-트리플루오르아세토아세테이토실버(I)착화물, 이소프로필-4,4,4-트리플루오르아세토아세테이토실버(I)착화물, 메틸-4,4,5,5,5-펜타플루오르-3-옥소펜타노네이토실버(I)착화물, 에틸-4,4,5,5,-펜타플루오르-3-옥소-펜타노네이토실버(I)착화물 및 1,1,1,5,5,6,6,6-옥타플루오르-2,4-헥산다이오네이토실버(I)착화물로 구성되는 그룹으로부터 선택된 최소 1종 이상임을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 플루오르화 은이온 유기 착화물 전구체는 금속패턴 형성 조성물중의 유기 고형분 100중량부에 대하여 2~40중량부로 첨가되는 것을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 다관능성 에틸렌계 불포화 결합을 갖는 단량체는 에틸렌글리콜디아크릴레이트, 에틸렌글리콜디메타아크릴레이트, 에틸렌기의 수가 2~14인 폴리에틸렌글리콜 디아크릴레이트, 폴리에틸렌글리콜 디메타아크릴레이트, 트리메틸올프로판트리아크릴레이트, 트리메틸올프로판 트리메타아크릴레이트, 펜타에리스리톨트리아크릴레이트, 펜타에리스리톨 트리메타아크릴레이트, 펜타에리스리톨테트라아크릴레이트, 펜타에리스리톨 테트라메타아크릴레이트, 프로필렌기의 수가 2~14인 프로필렌글리콜디아크릴레이트, 또는 프로필렌글리콜디메타아크릴레이트, 디펜타에리스리톨펜타아크릴레이트, 디펜타에리스리톨펜타메타아크릴레이트, 디펜타에리스리톨헥사아크릴레이트, 디펜타에리스리톨헥사메타아크릴레이트 등의 다가 알코올을 α,β-불포화 카르복실산에 에스테르화하여 얻어지는 화합물; 트리메틸올프로판 트리글리시딜에테르아크릴산 부가물, 비스페놀 A 디글리시딜에테르아크릴산 부가물 등의 글리시딜기를 함유하는 화합물에 아크릴산 또는 메타아크릴산을 부가하여 얻어지는 화합물;β-히드록시에틸아크릴레이트 또는 β-히드록시에틸메타크릴레이트의 프탈산에스테르와 같은 수산화기 또는 에틸렌계 불포화 결합을 갖는 화합물과 다가 카르복실산과의 에스테르 화합물; β-히드록시에틸 아크릴레이트 또는 β-히드록시에틸메타크릴레이트의 톨루엔디이소시아네이트 부가물과 같이 수산화기 또는 에틸렌계 불포화 결합을 갖는 화합물과 같은 다가(multi) 폴리이소시아네이트와의 부가물로 구성되는 그룹으로부터 선택된 최소 1종 이상임을 특징으 로 하는 촉매 전구체 수지 조성물.
- 제 11항에 있어서, 상기 다관능성 에틸렌계 불포화 결합을 갖는 단량체는 에틸렌성 불포화 결합을 갖는 관능기수가 2 이상인 것을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 다관능성 에틸렌계 불포화 결합을 갖는 단량체는 상기 공중합체 수지 100 중량부에 대하여 20~150 중량부로 첨가됨을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 광개시제는 아세토페논류, 벤조페논류, 미히라(Michler) 벤조일벤조에이트, α-아밀록심에스테르, 티옥산톤류 및 트리아진류로 구성되는 그룹으로부터 선택된 최소 1종 이상임을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 광개시제는 상기 공중합체 수지 100중량부에 대하여 1~25중량부로 사용되는 것을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 촉매 전구체 수지 조성물은 n-부틸아민, 트리에틸아민 및 트리-n-부틸포스파인으로 구성되는 그룹으로부터 선택된 1종 이상의 광증감제를 추가로 포함함을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 16항에 있어서, 상기 광증감제는 공중합체 수지와 광개시제 혼합양 100중량부에 대하여 10중량부 이하로 추가로 포함됨을 특징으로 하는 촉매 전구체 수지 조성물.
- 제 1항에 있어서, 상기 유기용매는 메탄올, 에탄올, n-프로판놀, 이소프로판올, 에틸렌글리콜, 프로필렌글리콜과 같은 알코올류; 아세톤, 메틸에틸케톤, 시클로헥사논, n-메틸-2-피롤리돈과 같은 케톤류; 톨루엔, 크실렌, 테트라메틸벤젠과 같은 방향족 탄화수소류; 셀로솔브, 메틸셀로솔브, 에틸셀로솔브, 3-메톡프로필아세테이트, 프로필렌글리콜 모노메틸에테르, 프로필렌글리콜에틸에테르, 디프로필렌 글리콜모노메틸에테르, 디프로필렌글리콜에틸에테르와 같은 글리콜에테르류; 에틸아세테이트, 부틸아세테이트, 셀로솔브아세테이트, 에틸셀로솔브아세테이트, 부틸 셀로솔브아세테이트, 프로필렌글리콜 모노메틸에테르아세테이트, 프로필렌글리콜에틸에테르아세테이트와 같은 아세테이트류; N,N-다이메틸아세타아마이드, N,N-다이메틸포름아마이드, 아세토나이트라이드와 같은 아마이드류로 구성되는 그룹으로부터 선택된 최소 1종 이상임을 특징으로 하는 촉매 전구체 수지 조성물.
- (a) 청구항 1 내지 18중 어느 한항의 촉매 전구체 수지 조성물을 이용하여 기재에 촉매 전구체 패턴을 형성하는 단계;(b) 상기 형성된 촉매 전구체 패턴을 환원시켜 촉매패턴을 형성하는 단계; 및(c) 상기 촉매패턴에 무전해 도금하는 단계를 포함하는 금속 패턴 형성방법.
- 제 19항에 있어서, 상기 기재는 유리, 폴리카보네이트, 아크릴 수지, PET, TAC(Tri-acetyl cellulose), 폴리염화비닐수지, 폴리아마이드 수지, 폴리이미드 수지, 에폭시계 수지로 구성되는 그룹으로부터 선택된 수지로된 시트 또는 필름인 것을 특징으로 하는 금속패턴 형성방법.
- 제 19항에 있어서, 상기 촉매 패턴 형성단계는 포토리소그라피법, 오프셋 프린팅, 잉크젯 프린팅, 임프린트 또는 스크린프린팅법으로 행함을 특징으로 하는 금속패턴 형성방법.
- 제 19항에 있어서, 상기 환원단계는 소듐보레인하이드라이드 또는 아스코르브산 환원제로 수행됨을 특징으로 하는 금속패턴 형성방법.
- 제 19항에 있어서, 상기 환원단계는 UV 노광 및 열로 구성되는 그룹으로 부터 선택된 최소 하나를 적용하여 수행되는 것을 특징으로 하는 금속패턴 형성방법.
- 제 19항에 있어서, 상기 무전해 도금은 구리도금 또는 은도금임을 특징으로 하는 금속패턴 형성방법.
- 제 24항에 있어서, 상기 무전해 도금은 황산동, 포르말린 및 EDTA를 포함하는 도금액을 이용함을 특징으로 하는 금속패턴의 형성방법.
- (a) 청구항 1 내지 18중 어느 한항의 촉매 전구체 수지 조성물을 이용하여 기재에 촉매 전구체 패턴을 형성하는 단계;(b) 상기 형성된 촉매 전구체 패턴을 환원시켜 촉매패턴을 형성하는 단계; 및(c) 상기 촉매패턴에 무전해 도금하는 단계를 포함하는 금속 패턴 형성방법으로 형성된 금속패턴.
- 청구항 26의 금속패턴을 포함하는 부품 또는 소자.
- 청구항 26의 금속패턴을 포함하는 전자파 차폐재 또는 연성 회로 기판.
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KR20230140951A (ko) * | 2022-03-30 | 2023-10-10 | 재단법인대구경북과학기술원 | 투명 전극 및 광열층의 동시 패터닝 방법 및 이를 통하여 제조된 투명 전극 구조체 |
KR102642598B1 (ko) | 2022-03-30 | 2024-03-04 | 재단법인대구경북과학기술원 | 투명 전극 및 광열층의 동시 패터닝 방법 및 이를 통하여 제조된 투명 전극 구조체 |
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