KR100950201B1 - 반도체소자의 비어홀 형성방법 - Google Patents
반도체소자의 비어홀 형성방법 Download PDFInfo
- Publication number
- KR100950201B1 KR100950201B1 KR1020030012404A KR20030012404A KR100950201B1 KR 100950201 B1 KR100950201 B1 KR 100950201B1 KR 1020030012404 A KR1020030012404 A KR 1020030012404A KR 20030012404 A KR20030012404 A KR 20030012404A KR 100950201 B1 KR100950201 B1 KR 100950201B1
- Authority
- KR
- South Korea
- Prior art keywords
- via hole
- metal line
- forming
- interlayer insulating
- film
- Prior art date
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47F—SPECIAL FURNITURE, FITTINGS, OR ACCESSORIES FOR SHOPS, STOREHOUSES, BARS, RESTAURANTS OR THE LIKE; PAYING COUNTERS
- A47F5/00—Show stands, hangers, or shelves characterised by their constructional features
- A47F5/08—Show stands, hangers, or shelves characterised by their constructional features secured to the wall, ceiling, or the like; Wall-bracket display devices
- A47F5/0892—Suspended show stands, e.g. secured to the ceiling by means of cords or chains
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47F—SPECIAL FURNITURE, FITTINGS, OR ACCESSORIES FOR SHOPS, STOREHOUSES, BARS, RESTAURANTS OR THE LIKE; PAYING COUNTERS
- A47F7/00—Show stands, hangers, or shelves, adapted for particular articles or materials
- A47F7/0042—Show stands, hangers, or shelves, adapted for particular articles or materials for flat articles, e.g. panels, tiles
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F11/00—Indicating arrangements for variable information in which the complete information is permanently attached to a movable support which brings it to the display position
- G09F11/12—Indicating arrangements for variable information in which the complete information is permanently attached to a movable support which brings it to the display position the display elements being carried by endless belts, chains, or the like
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F23/00—Advertising on or in specific articles, e.g. ashtrays, letter-boxes
- G09F23/06—Advertising on or in specific articles, e.g. ashtrays, letter-boxes the advertising matter being combined with articles for restaurants, shops or offices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
Claims (3)
- 반도체기판 상에 식각공정으로 비어홀을 형성하는 방법에 있어서,상기 반도체기판 상에 하부메탈라인, 제1층간절연막, 상부메탈라인 및 반사방지막을 순차적으로 적층한 후, 상기 상부메탈라인을 식각하는 단계와;상기 상부메탈라인의 식각 후에 노출되는 상기 제1층간절연막의 표면, 상기 반사 방지막 및 상기 상부메탈라인 측면을 덮는 질화막을 적층하는 단계와;상기 질화막 상에 제2층간절연막을 적층하고 평탄화하는 단계와;상기 제2층간절연막 상에 감광막을 적층한 후, 노광공정으로 개방부위를 형성하는 단계와;상기 질화막을 식각방지막으로 하여 상기 감광막의 개방부위를 통하여 상기 제2층간절연막을 식각하여 비어홀을 형성하는 단계와;상기 질화막의 상기 비어홀에 노출되는 부분을 식각하여 상기 상부메탈라인의 측면 부분 및 상기 제1층간절연막의 표면 부분이 상기 비어홀에 개방되도록 하는 단계로 이루어진 것을 특징으로 하는 반도체소자의 비어홀 형성방법.
- 제 1 항에 있어서,상기 질화막의 두께는, 200 ∼ 400Å의 범위에서 형성되는 것을 특징으로 하는 반도체소자의 비어홀 형성방법.
- 삭제
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030012404A KR100950201B1 (ko) | 2003-02-27 | 2003-02-27 | 반도체소자의 비어홀 형성방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030012404A KR100950201B1 (ko) | 2003-02-27 | 2003-02-27 | 반도체소자의 비어홀 형성방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040077027A KR20040077027A (ko) | 2004-09-04 |
KR100950201B1 true KR100950201B1 (ko) | 2010-03-29 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020030012404A KR100950201B1 (ko) | 2003-02-27 | 2003-02-27 | 반도체소자의 비어홀 형성방법 |
Country Status (1)
Country | Link |
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KR (1) | KR100950201B1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101051808B1 (ko) * | 2008-10-21 | 2011-07-27 | 매그나칩 반도체 유한회사 | 국부연결배선을 이용한 반도체장치 제조 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020048527A (ko) * | 2000-12-18 | 2002-06-24 | 박종섭 | 반도체 소자의 비아 홀 형성 방법 |
KR20020049346A (ko) * | 2000-12-19 | 2002-06-26 | 박종섭 | 반도체 소자의 제조방법 |
KR20020082158A (ko) * | 2001-04-23 | 2002-10-30 | 닛본 덴기 가부시끼가이샤 | 반도체 디바이스 및 그 제조 방법 |
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2003
- 2003-02-27 KR KR1020030012404A patent/KR100950201B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020048527A (ko) * | 2000-12-18 | 2002-06-24 | 박종섭 | 반도체 소자의 비아 홀 형성 방법 |
KR20020049346A (ko) * | 2000-12-19 | 2002-06-26 | 박종섭 | 반도체 소자의 제조방법 |
KR20020082158A (ko) * | 2001-04-23 | 2002-10-30 | 닛본 덴기 가부시끼가이샤 | 반도체 디바이스 및 그 제조 방법 |
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KR20040077027A (ko) | 2004-09-04 |
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