KR100809285B1 - 다축 감지용 촉각센서 및 그 제조방법 - Google Patents
다축 감지용 촉각센서 및 그 제조방법 Download PDFInfo
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- KR100809285B1 KR100809285B1 KR1020060039997A KR20060039997A KR100809285B1 KR 100809285 B1 KR100809285 B1 KR 100809285B1 KR 1020060039997 A KR1020060039997 A KR 1020060039997A KR 20060039997 A KR20060039997 A KR 20060039997A KR 100809285 B1 KR100809285 B1 KR 100809285B1
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- South Korea
- Prior art keywords
- tactile sensor
- electrodes
- piezoresistive
- insulating layer
- horizontal axis
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- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 19
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 10
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 10
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 10
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 10
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 10
- 229920002379 silicone rubber Polymers 0.000 claims description 10
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 7
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 7
- XRBURMNBUVEAKD-UHFFFAOYSA-N chromium copper nickel Chemical compound [Cr].[Ni].[Cu] XRBURMNBUVEAKD-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 8
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 3
- 230000006870 function Effects 0.000 description 3
- 239000004944 Liquid Silicone Rubber Substances 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 206010028980 Neoplasm Diseases 0.000 description 1
- 230000003592 biomimetic effect Effects 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002406 microsurgery Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
- G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
- G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
Claims (12)
- 서로 평행하게 배열된 복수의 가로축 압저항 전극;상기 복수의 가로축 압저항 전극 위쪽에 위치하고, 서로 평행하게 배열된 복수의 세로축 압저항 전극;상기 복수의 가로축 압저항 전극과 상기 복수의 세로축 압저항 전극 사이의 절연층; 및상기 세로축 압저항 전극 위쪽에 위치하는 돌출부를 포함하고, 상기 돌출부는 두 개의 상기 세로축 압저항 전극과 두 개의 상기 가로축 압저항 전극에 의한 사각형 영역에 형성된 것을 특징으로 하는 다축 감지용 촉각센서.
- 제 1 항에 있어서,상기 촉각센서의 하부에는 캐비티가 형성되어 있는 다축 감지용 촉각센서.
- 제 1 항에 있어서,상기 세로축 압저항 전극 상에는 상기 세로축 압저항 전극의 보호를 위한 절연층이 형성되어 있는 다축 감지용 촉각센서.
- 삭제
- 제 1 항에 있어서,상기 가로축 압저항 전극 및 세로축 압저항 전극은 니켈크롬(NiCr) 또는 구리니켈크롬(CuNiCr)인 다축 감지용 촉각센서.
- 제 1 항에 있어서,상기 돌출부는 실리콘 고무 또는 PDMS인 다축 감지용 촉각센서.
- 제 1 항 또는 제 3 항에 있어서,상기 절연층은 실리콘 고무 또는 PDMS인 다축 감지용 촉각센서.
- 기판의 상부에 서로 평행하게 배열된 복수의 가로축 압저항 전극을 형성하는 단계;상기 가로축 압저항 전극이 형성된 기판의 전면에 제1절연층을 형성하는 단계;상기 제1절연층의 상부에 상기 가로축 압저항 전극과 직교하고, 서로 평행하게 배열된 복수의 세로축 압저항 전극을 형성하는 단계;상기 세로축 압저항 전극이 형성된 기판의 전면에 제2절연층을 형성하는 단계;두 개의 상기 세로축 압저항 전극과 두 개의 상기 가로축 압저항 전극에 의한 사각형 영역에 돌출부를 형성하는 단계; 및상기 기판의 하부에 캐비티를 형성하는 단계를 포함하는 다축 감지용 촉각센서 제조방법.
- 기판의 하부에 캐비티를 형성하는 단계;기판의 상부에 서로 평행하게 배열된 복수의 가로축 압저항 전극을 형성하는 단계;상기 가로축 압저항 전극이 형성된 기판의 전면에 제1절연층을 형성하는 단계;상기 제1절연층의 상부에 상기 가로축 압저항 전극과 직교하고, 서로 평행하게 배열된 복수의 세로축 압저항 전극을 형성하는 단계;상기 세로축 압저항 전극이 형성된 기판의 전면에 제2절연층을 형성하는 단계; 및두 개의 상기 세로축 압저항 전극과 두 개의 상기 가로축 압저항 전극에 의한 사각형 영역에 돌출부를 형성하는 단계를 포함하는 다축 감지용 촉각센서 제조방법.
- 제 8 항 또는 제 9 항에 있어서,상기 기판은 실리콘 고무 또는 PDMS인 다축 감지용 촉각센서 제조방법.
- 제 8 항 또는 제 9 항에 있어서,상기 가로축 압저항 전극 및 세로축 압저항 전극은 니켈크롬(NiCr) 또는 구리니켈크롬(CuNiCr)으로 형성하는 다축 감지용 촉각센서 제조방법.
- 제 8 항 또는 제 9 항에 있어서,상기 제1절연층 및 제2절연층은 실리콘 고무 또는 PDMS으로 형성하는 다축 감지용 촉각센서 제조방법.
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KR1020060039997A KR100809285B1 (ko) | 2006-05-03 | 2006-05-03 | 다축 감지용 촉각센서 및 그 제조방법 |
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KR20070107458A KR20070107458A (ko) | 2007-11-07 |
KR100809285B1 true KR100809285B1 (ko) | 2008-03-04 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101473947B1 (ko) * | 2013-05-07 | 2014-12-19 | 한국과학기술연구원 | 힘 및 위치 감지용 촉각 센서 및 그 제조 방법 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH026A (ja) * | 1987-11-23 | 1990-01-05 | Polaroid Corp | 写真カメラ |
US5209126A (en) * | 1991-01-04 | 1993-05-11 | Bonneville Scientific | Force sensor |
JPH0719975A (ja) * | 1993-06-30 | 1995-01-20 | Mitsui Eng & Shipbuild Co Ltd | 圧力センサチップ、触覚センサ、および触覚センサの製造方法 |
JP2002221403A (ja) | 2001-01-25 | 2002-08-09 | Nippon Telegr & Teleph Corp <Ntt> | 表面形状認識用センサの製造方法 |
JP2002328003A (ja) | 2001-01-31 | 2002-11-15 | Nippon Telegr & Teleph Corp <Ntt> | 表面形状認識用センサおよびこの製造方法 |
WO2004053782A1 (en) | 2002-12-12 | 2004-06-24 | Danfoss A/S | Tactile sensor element and sensor array |
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- 2006-05-03 KR KR1020060039997A patent/KR100809285B1/ko active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH026A (ja) * | 1987-11-23 | 1990-01-05 | Polaroid Corp | 写真カメラ |
US5209126A (en) * | 1991-01-04 | 1993-05-11 | Bonneville Scientific | Force sensor |
JPH0719975A (ja) * | 1993-06-30 | 1995-01-20 | Mitsui Eng & Shipbuild Co Ltd | 圧力センサチップ、触覚センサ、および触覚センサの製造方法 |
JP2002221403A (ja) | 2001-01-25 | 2002-08-09 | Nippon Telegr & Teleph Corp <Ntt> | 表面形状認識用センサの製造方法 |
JP2002328003A (ja) | 2001-01-31 | 2002-11-15 | Nippon Telegr & Teleph Corp <Ntt> | 表面形状認識用センサおよびこの製造方法 |
WO2004053782A1 (en) | 2002-12-12 | 2004-06-24 | Danfoss A/S | Tactile sensor element and sensor array |
Non-Patent Citations (1)
Title |
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논문 2006년 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101473947B1 (ko) * | 2013-05-07 | 2014-12-19 | 한국과학기술연구원 | 힘 및 위치 감지용 촉각 센서 및 그 제조 방법 |
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