KR100724218B1 - 전기 광학 장치 및 전자 기기 - Google Patents
전기 광학 장치 및 전자 기기 Download PDFInfo
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- KR100724218B1 KR100724218B1 KR1020030027433A KR20030027433A KR100724218B1 KR 100724218 B1 KR100724218 B1 KR 100724218B1 KR 1020030027433 A KR1020030027433 A KR 1020030027433A KR 20030027433 A KR20030027433 A KR 20030027433A KR 100724218 B1 KR100724218 B1 KR 100724218B1
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- nitride film
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (13)
- 화상 표시 영역을 갖는 전기 광학 장치로서,기판 상에, 주사선 및 데이터선의 교점에 대응하여 마련된 박막 트랜지스터와,상기 박막 트랜지스터에 대응하여 마련된 화소 전극과,상기 화상 표시에 기여하게 될 광이 투과하는 영역을 제외하는 영역에 형성되고, 적어도 상기 데이터선의 표면 상에 형성된 질화막을 구비한 것을 특징으로 하는 전기 광학 장치.
- 제 1 항에 있어서,상기 화소 전극은 매트릭스 형상으로 배열되어 이루어지고, 또한상기 주사선 및 상기 데이터선은, 상기 화소 전극의 매트릭스 형상에 대응하여, 서로 교차하는 방향을 따라 형성되어 이루어지며,상기 질화막은, 적어도 상기 데이터선의 표면상 및 상기 주사선상에 형성되어 있는 것을 특징으로 하는 전기 광학 장치.
- 제 1 항에 있어서,상기 질화막은, 상기 화소 전극, 상기 주사선 및 상기 데이터선이 형성되는 영역으로서 규정되는 화상 표시 영역의 주위에 형성되어 있는 것을 특징으로 하는 전기 광학 장치.
- 제 3 항에 있어서,상기 질화막은, 상기 화상 표시 영역의 주위 이외에, 상기 데이터선상에만 형성되어 있는 것을 특징으로 하는 전기 광학 장치.
- 삭제
- 제 1 항에 있어서,상기 데이터선상에 형성되는 상기 질화막의 폭은, 해당 데이터선의 폭보다도 크게 되어 있는 것을 특징으로 하는 전기 광학 장치.
- 제 6 항에 있어서,상기 질화막의 둘레는, 상기 데이터선의 둘레보다도, 그 양측에 대해 각각 0.1∼2.2㎛ 만큼 크게 되어 있는 것을 특징으로 하는 전기 광학 장치.
- 제 1 항에 있어서,상기 질화막의 두께는 3∼100nm인 것을 특징으로 하는 전기 광학 장치.
- 제 1 항에 있어서,상기 기판에 전기 광학 물질을 사이에 두고 대향하는 다른 기판과, 해당 다른 기판상에 상기 주사선 및 상기 데이터선과 위치적으로 대응하도록 형성된 차광막을 더 구비하고,상기 질화막의 폭은, 상기 차광막의 폭보다도 작게 되어 있는 것을 특징으로 하는 전기 광학 장치.
- 제 9 항에 있어서,상기 질화막의 둘레는, 상기 차광막의 둘레보다도, 그 양측에 대해 각각 1㎛ 이내로 작게 형성되어 있는 것을 특징으로 하는 전기 광학 장치.
- 기판 상에,주사선 및 데이터선의 교점에 대응하여 마련된 박막 트랜지스터와,상기 박막 트랜지스터에 대응하여 마련된 화소 전극과,적어도 상기 데이터선의 표면 상에 형성된 질화막을 구비하되,상기 기판에 전기 광학 물질을 사이에 두고 대향하는 다른 기판과, 해당 다른 기판 상에 상기 데이터선과 위치적으로 대응하도록 형성된 차광막을 더 구비하고,상기 질화막의 폭은 상기 차광막의 폭보다 크게 되어 있는 것을 특징으로 하는 전기 광학 장치.
- 제 1 항에 있어서,상기 질화막은 플라즈마 CVD 법에 의해 형성되는 것을 특징으로 하는 전기 광학 장치.
- 청구항 1에 기재된 전기 광학 장치를 구비하여 이루어지는 것을 특징으로 하는 전자 기기.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2002130834A JP3700674B2 (ja) | 2002-05-02 | 2002-05-02 | 電気光学装置及び電子機器 |
JPJP-P-2002-00130834 | 2002-05-02 |
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KR20030086919A KR20030086919A (ko) | 2003-11-12 |
KR100724218B1 true KR100724218B1 (ko) | 2007-05-31 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020030027433A KR100724218B1 (ko) | 2002-05-02 | 2003-04-30 | 전기 광학 장치 및 전자 기기 |
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Country | Link |
---|---|
US (1) | US6806500B2 (ko) |
JP (1) | JP3700674B2 (ko) |
KR (1) | KR100724218B1 (ko) |
CN (2) | CN1211699C (ko) |
TW (1) | TWI258628B (ko) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW594201B (en) * | 2003-03-28 | 2004-06-21 | Toppoly Optoelectronics Corp | Reflective LCD having two driving matrixes |
KR100692685B1 (ko) * | 2003-12-29 | 2007-03-14 | 비오이 하이디스 테크놀로지 주식회사 | 반사투과형 액정표시장치용 어레이 기판 및 그의 제조 방법 |
TWI300863B (en) * | 2004-03-19 | 2008-09-11 | Toppoly Optoelectronics Corp | Transmissive liquid crystal display |
KR100699995B1 (ko) * | 2004-09-02 | 2007-03-26 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자 및 그 제조 방법 |
KR20070004229A (ko) * | 2005-07-04 | 2007-01-09 | 삼성전자주식회사 | 박막트랜지스터기판 및 이의 제조방법 |
KR20080099541A (ko) * | 2007-05-09 | 2008-11-13 | 삼성전자주식회사 | 표시 장치 및 그 제조 방법 |
KR101784995B1 (ko) | 2010-10-21 | 2017-10-13 | 삼성디스플레이 주식회사 | 박막 트랜지스터, 그를 포함하는 유기 전계 발광 표시장치 및 그들의 제조방법 |
CN102955313B (zh) * | 2012-11-19 | 2015-12-02 | 京东方科技集团股份有限公司 | 阵列基板、显示装置、电子器件 |
JP6361327B2 (ja) * | 2014-07-02 | 2018-07-25 | セイコーエプソン株式会社 | 電気光学装置、及び電子機器 |
CN105093752A (zh) * | 2015-08-18 | 2015-11-25 | 深圳市华星光电技术有限公司 | 液晶面板 |
CN108305881B (zh) * | 2018-03-23 | 2020-08-11 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示面板、显示装置 |
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KR20010083298A (ko) * | 2000-02-10 | 2001-09-01 | 구본준, 론 위라하디락사 | 액정 표시장치 제조방법 |
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JP3059915B2 (ja) * | 1994-09-29 | 2000-07-04 | 三洋電機株式会社 | 表示装置および表示装置の製造方法 |
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- 2002-05-02 JP JP2002130834A patent/JP3700674B2/ja not_active Expired - Lifetime
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- 2003-04-24 CN CNB031222870A patent/CN1211699C/zh not_active Expired - Lifetime
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- 2003-04-30 KR KR1020030027433A patent/KR100724218B1/ko active IP Right Grant
- 2003-04-30 TW TW092110200A patent/TWI258628B/zh not_active IP Right Cessation
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KR19990030140A (ko) * | 1997-09-25 | 1999-04-26 | 니시무로 타이죠 | 도전막 부착 기판 및 그 제조방법 |
KR20010083298A (ko) * | 2000-02-10 | 2001-09-01 | 구본준, 론 위라하디락사 | 액정 표시장치 제조방법 |
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CN1211699C (zh) | 2005-07-20 |
KR20030086919A (ko) | 2003-11-12 |
JP2003323134A (ja) | 2003-11-14 |
TWI258628B (en) | 2006-07-21 |
CN2625930Y (zh) | 2004-07-14 |
US6806500B2 (en) | 2004-10-19 |
JP3700674B2 (ja) | 2005-09-28 |
TW200307842A (en) | 2003-12-16 |
US20030234899A1 (en) | 2003-12-25 |
CN1455289A (zh) | 2003-11-12 |
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