KR100693297B1 - Methods for treating surface of metal - Google Patents

Methods for treating surface of metal Download PDF

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KR100693297B1
KR100693297B1 KR1020040052044A KR20040052044A KR100693297B1 KR 100693297 B1 KR100693297 B1 KR 100693297B1 KR 1020040052044 A KR1020040052044 A KR 1020040052044A KR 20040052044 A KR20040052044 A KR 20040052044A KR 100693297 B1 KR100693297 B1 KR 100693297B1
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metal
metal product
thin film
heat treatment
product
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KR20060003234A (en
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이계영
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주식회사 플라티코리아
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24—Nitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80—After-treatment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

본 발명은 절삭가공이나 비절삭가공 등의 금속가공 중에 생성된 잔류응력, 이상조직, 가공경화, 내부기공(pore)과 같은 가공결함을 제거한 후 금속제품의 표면에 기능성 금속박막 또는 금속층을 추가적으로 형성하여 상기 금속제품의 내구성과 내마모성 등을 향상시키는 표면처리방법에 관한 것이다.The present invention additionally forms a functional metal thin film or metal layer on the surface of a metal product after removing processing defects such as residual stress, abnormal structure, work hardening, and pores generated during metal processing such as cutting or non-cutting. The present invention relates to a surface treatment method for improving durability and wear resistance of the metal product.

본 발명에 따른 금속제품의 표면향상방법은, 응력제거 및 조직을 변형시켜 금속 제품의 체질개선을 위한 열처리공정과, 상기 열처리공정을 거친 금속제품의 표면에 상기 금속제품과 다른 종류의 금속으로 된 금속박막이 물리적 증착법에 따라 증착(蒸着)되는 박막형성공정과, 상기 박막형성공정에서 증착된 금속박막의 일부가 상기 금속제품의 표면에 치환·침투되도록 상기 금속제품이 소정 온도범위에서 가열되는 치환·침투공정 및 상기 치환·침투공정을 거친 금속제품의 표면에 질소계의 탄화층(cemented layer)이 형성되는 침탄질화공정을 포함하며, 필요에 따라 상기 침탄질화공정의 이후에 폴리싱공정이 추가로 실시될 수 있다.The surface enhancement method of a metal product according to the present invention comprises a heat treatment process for improving the constitution of a metal product by removing stress and deformation, and a metal of a different type from the metal product on the surface of the metal product subjected to the heat treatment process. A thin film forming process in which a metal thin film is deposited according to a physical vapor deposition method, and a substitution in which the metal product is heated in a predetermined temperature range so that a part of the metal thin film deposited in the thin film forming process is replaced or penetrated on the surface of the metal product. A carburizing nitriding process in which a nitrogen-based cemented layer is formed on the surface of the metal product which has undergone the permeation process and the substitution / penetration process, and a polishing process is further added after the carburizing and nitriding process as necessary. Can be implemented.

열처리, PVD, 이온코팅, 침탄질화, 장수명화, 기능성 금형, 부품, 이온플레이팅, 세라믹 확산층, 원가절감, 공정자동화, 균일화, 내구성Heat Treatment, PVD, Ion Coating, Carburizing Nitriding, Long Life, Functional Mold, Parts, Ion Plating, Ceramic Diffusion Layer, Cost Reduction, Process Automation, Uniformity, Durability

Description

금속제품의 표면처리방법{Methods for treating surface of metal}Method for treating surface of metal

도 1은 본 발명의 일 실시예에 따른 금속제품의 표면처리방법을 나타낸 작업공정도이다.1 is a working process diagram showing a surface treatment method of a metal product according to an embodiment of the present invention.

도 2는 본 발명의 표면처리방법에 따라 제작된 일 실시예의 금속제품을 단면하여 본 단면도이다.Figure 2 is a cross-sectional view of the metal product of an embodiment produced according to the surface treatment method of the present invention.

도 3은 종래의 표면처리방법과 본 발명의 표면처리방법에 따른 금속제품의 표면을 각각 200배 확대하여 대비한 확대사진이다.3 is an enlarged photograph of a surface of a metal product according to the conventional surface treatment method and the surface treatment method of the present invention, respectively, enlarged 200 times.

[도면 부호의 설명][Description of Drawing Reference]

P10...열처리공정, P20...박막형성공정,P10 ... heat treatment process, P20 ... thin film formation process,

20...금속박막, P30...치환·침투공정,20 ... metal thin film, P30 ...

P40...침탄질화공정, 40...탄화층,P40 ... carburization nitriding process, 40 ... carbonized layer,

P50...폴리싱공정, W...금속소재.P50 polishing process, W ... metal material.

본 발명은 절삭가공이나 비절삭가공 등의 금속가공 중에 생성된 잔류응력, 이상조직, 가공경화, 내부기공(pore)과 같은 가공결함을 다양한 열처리법으로 제거 한 후 금속제품의 표면에 기능성 금속박막 또는 금속층을 추가적으로 형성하여 금속제품의 내구성, 내열성, 내마모성 등을 향상시키는 표면처리방법에 관한 것이다.The present invention is a functional metal thin film on the surface of a metal product after removing the processing defects such as residual stress, abnormal structure, work hardening, internal pores generated during metal processing such as cutting or non-cutting processing by various heat treatment methods Or to form a metal layer further relates to a surface treatment method for improving the durability, heat resistance, wear resistance and the like of a metal product.

금속재료를 사용목적에 맞추어 소정의 모양과 치수를 갖는 금속제품으로 가공할 때 여러가지 가공결함이 나타나게 된다.Various processing defects appear when the metal material is processed into a metal product having a predetermined shape and dimension according to the intended use.

예컨대, 금속재료를 압연·단조·압출·인발·프레스가공 등의 소성가공법에 따라 가공할 때, 완성된 금속제품에는 가공에 따른 응력이 남게 되고 가공경화가 나타난다. 이러한 응력(잔류응력)과 가공경화는 금속제품의 취성을 증가시키므로 금속제품이 외부충격에 취약해지고 내(耐)피로도와 내구성이 낮아지게 된다.For example, when a metal material is processed according to a plastic working method such as rolling, forging, extrusion, drawing, pressing, etc., the finished metal product is left with stresses due to processing and work hardening appears. Since such stress (residual stress) and work hardening increase the brittleness of the metal product, the metal product is vulnerable to external shock, and the fatigue resistance and durability are low.

또한, 용융된 금속재료를 형틀(주형)에 흘려 넣어 냉각·응고시키는 주조법에서는 상기 형틀에 접한 부분부터 굳어지므로 형틀에서 빠져나오지 못한 공기가 금속제품의 내부에 기공(pore)을 형성하거나 혹은 국부적인 냉각속도의 차이로 인한 이상조직이 발생하여 상기 금속제품의 내구성이 떨어지는 문제가 있다.In addition, in a casting method in which a molten metal material is poured into a mold and cooled and solidified, it is hardened from the part in contact with the mold, so that air that has not escaped from the mold forms pores in the metal product or is localized. There is a problem in that the abnormal structure occurs due to the difference in cooling rate and the durability of the metal product falls.

또한, 기계절삭과 같이 금속재료의 일부를 제거하는 방법에서는 금속제품의 표면조도를 높이기 위해 연마기로 표면가공(폴리싱)을 하는데, 이 경우 연마된 표면에 응력이 잔류하므로 내구성이 저하된다.In addition, in the method of removing a part of the metal material, such as mechanical cutting, the surface processing (polishing) with a polishing machine to increase the surface roughness of the metal product, in which case the durability is reduced because stress remains on the polished surface.

한편, 인위적인 제련(製鍊)을 통해 얻어지는 금속재료 자체는 불안정한 상태이므로, 특별한 처리를 하지 않으면 시간경과에 따라 점차 부식되어 산화물·황화물·수산화물·탄산염 등의 형태로 변하게 된다. 이 때문에, 대부분의 금속제품은 모양·치수에 관련된 1차가공 후, 부식방지와 제품의 내구성 향상을 위한 2차가공을 받게 된다.On the other hand, since the metal material itself obtained through artificial smelting is in an unstable state, unless it is treated specially, it will gradually corrode over time and change into an oxide, sulfide, hydroxide, carbonate, and the like. For this reason, most metal products are subjected to secondary processing to prevent corrosion and to improve the durability of the product after primary processing related to shape and dimensions.

상기 2차가공(방법)으로는 ①금속제품의 표면에 내식성 피막을 도금하거나 도색하는 방법과 ②담금질(quenching)처럼 금속제품의 표면을 경화시키는 방법 및 ③침탄과 같은 화학적 처리방법을 예로 들 수 있는데, 이러한 종래 2차가공방법(표면개질방법)에 따르면 상기 금속제품의 표면특성은 향상되지만 금속재료(소재) 내의 가공결함은 그대로 남아 있어 좋은 결과를 얻기 힘든 문제가 있다.Examples of the secondary processing (method) include ① a method of plating or painting a corrosion resistant coating on the surface of the metal product, ② a method of hardening the surface of the metal product such as quenching, and ③ a chemical treatment method such as carburizing. However, according to the conventional secondary processing method (surface modification method), the surface characteristics of the metal product are improved, but processing defects in the metal material (material) remain as it is, so that it is difficult to obtain good results.

또한, 최근에는 PVD공정을 통한 코팅방법이 금속표면처리에 효과적인 기술로 이용되고 있지만, 냉간단조 및 절삭공구 등의 표면가공에 국한되어 있어 500℃ 이상의 고온에서 이루어지는 열간가공 시에는 오히려 열반응에 의한 급격한 산화로 역효과만 날 뿐이었다.In addition, in recent years, the coating method through PVD process is used as an effective technique for metal surface treatment, but it is limited to the surface processing of cold forging and cutting tools, etc. Rapid oxidation only adversely affected.

본 발명은 이러한 종래의 문제점을 개선하기 위해 안출된 것으로서, 열피로나 열충격에 강하고, 내마모성과 내구성이 우수하며, 고온경도가 높고, 소비자로부터 요구받은 다양한 특성의 제품 표면이 구현될 수 있는 새로운 2차가공방법을 제공함에 목적이 있다.The present invention has been made to improve such a conventional problem, and is a new 2 that is resistant to thermal fatigue or thermal shock, excellent wear resistance and durability, high temperature hardness, and can realize a product surface of various characteristics required by consumers The purpose is to provide a tea processing method.

또한, 본 발명은 침투확산과 열처리공정을 통해, 표면처리에 국한된 이온플레이팅의 한계를 극복함으로써 종래 침탄법에 의한 경우보다 뛰어난 세라믹 확산층을 얻을 수 있고, 환경친화적이며, 세라믹 코팅의 장점과 함께 강한 내열성을 부가하여 금속제품의 장수명화에 획기적으로 적용할 수 있는 금속가공공정을 금속산업 분야에 널리 보급하려는데 목적이 있다.In addition, the present invention, through the penetration diffusion and heat treatment process, by overcoming the limitation of the ion plating limited to the surface treatment can obtain a ceramic diffusion layer superior to the case by the conventional carburizing method, environmentally friendly, with the advantages of ceramic coating The purpose is to spread the metal processing process in the metal industry, which can be applied to the long life of metal products by adding strong heat resistance.

이를 위해, 본 발명에서는 2차가공의 대상이 된 금속제품을 다양한 방법으로 열처리하여 상기 금속제품의 응력제거 및 조직을 변형시킨 다음, 수요자로부터 요구 되어진 표면특성이 발휘될 수 있게 상기 금속제품의 표면에 소정의 피막을 물리적인 방법 또는 화학적인 방법으로 형성하게 된다.To this end, in the present invention, the metal product subjected to the secondary processing by heat treatment in various ways to deform the stress and the structure of the metal product, the surface of the metal product so that the surface characteristics required from the consumer can be exhibited The predetermined film is formed in a physical method or a chemical method.

이러한 기술적 과제를 해결하기 위한 본 발명은, 금속제품의 표면처리방법에 있어서, 응력제거 및 조직을 변형시켜 금속 제품의 체질개선을 위한 열처리공정과, 상기 열처리공정을 거친 금속제품의 표면에 상기 금속제품과 다른 종류의 금속으로 된 금속박막이 물리적 증착법에 따라 증착(蒸着)되는 박막형성공정과, 상기 박막형성공정에서 증착된 금속박막의 금속 일부가 상기 금속제품의 표면에 치환·침투되도록 상기 금속제품이 뜨임온도 이하에서 열처리되는 치환·침투공정 및 상기 치환·침투공정을 거친 금속제품의 표면에, 질소계의 탄화층(cemented layer)이 형성되는 침탄질화공정을 포함함을 특징으로 한다. 또한, 필요한 경우에는 상술한 각 공정의 전·후에 금속제품의 표면을 경면(鏡面)화 하는 폴리싱공정이 실시될 수 있다.The present invention for solving the technical problem, in the method of treating the surface of the metal product, the heat treatment step for improving the constitution of the metal product by removing the stress and the structure, and the metal on the surface of the metal product subjected to the heat treatment step A thin film forming process in which a metal thin film made of a metal different from the product is deposited according to a physical vapor deposition method, and the metal part of the metal thin film deposited in the thin film forming process is replaced or penetrated on the surface of the metal product. And a carbonaceous nitriding process in which a nitrogen-based cemented layer is formed on the surface of the metal product subjected to the substitution / penetration process and the product is heat-treated at or below the tempering temperature. If necessary, a polishing step of mirroring the surface of the metal product may be carried out before and after each of the above-described steps.

첨부된 도 1은 본 발명의 일 실시예에 따른 금속제품의 표면처리방법을 나타낸 작업공정도이고, 도 2는 본 발명의 표면처리방법에 따라 제작된 일 실시예의 금속제품을 단면하여 본 단면도이며, 도 3은 종래의 표면처리방법과 본 발명의 표면처리방법에 따른 금속제품의 표면을 각각 200배 확대하여 대비한 확대사진으로서, 상기 도면에 의거하여 본 발명을 더욱 구체적으로 살펴보면 다음과 같다.1 is a working process diagram showing a surface treatment method of a metal product according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view of the metal product of one embodiment manufactured according to the surface treatment method of the present invention. 3 is an enlarged photograph of a conventional surface treatment method and a surface of a metal product according to the surface treatment method of the present invention, respectively, enlarged by 200 times, and the present invention will be described in more detail based on the drawings.

응력제거 및 조직을 변형시켜 금속 제품의 체질개선을 위한 열처리공정(P10)은 표면개질 열처리를 행하고 표면개질에 부합되는 금속재료위에 처리하여야 비로서 더욱 확실한 효과가 나타나므로 금속재료의 체질개선 열처리가 선행되고 다음에 표면개질 열처리 행하며 금속제품의 체질개선을 위한 열처리에 대하여 아래의 3가지 열처리법 중 어느 하나 또는 이들이 조합되어 실시될 수 있다.The heat treatment process (P10) for the improvement of the metal product by stress relief and the deformation of the structure should be performed by the surface modification heat treatment and the treatment on the metal material conforming to the surface modification. The above and subsequent surface modification heat treatment may be performed, and any one of the following three heat treatment methods or a combination thereof may be performed for heat treatment for improving the sieving of a metal product.

①불림(normalizing)① Normalizing

주조, 단조, 압연 등에 의해 열간가공된 금속제품은 각 부위에서의 냉각속도나 응고속도가 상기 금속제품의 형상이나 두께에 따라 상이하므로, 금속제품 또는 금속조직 내에 과열이상조직이나 탄화물의 국부적인 응집, 결정립의 조대화 등이 나타난다. 이와 같은 조직을 적당한 온도에서 열처리하여 오스테나이트의 단상으로 한 후 이것을 대기 중에서 공냉하면, 변태점을 통과하는 사이에 금속조직이 개선되고 결정립은 미세화되는데 이런 (금속)조직이 되면 강도, 인성 등의 기계적 성질이 향상될 뿐 아니라 잔류응력도 제거된다.In the case of metal products hot-worked by casting, forging, rolling, etc., the cooling rate or solidification rate in each part is different depending on the shape and thickness of the metal product. , Coarsening of grains, etc. When such a structure is heat-treated at an appropriate temperature to form a single phase of austenite, and then air-cooled in the air, the metal structure is improved and the grains are refined between the transformation points. In addition to improving properties, residual stresses are also eliminated.

②풀림(annealing)② Annealing

강(鋼)을 연화하여 피삭성이나 소성가공성을 개선하고, 잔류응력을 제거하며, 결정립이나 조직을 조절하고, 성분원소나 불순물의 편석을 확산에 의해 제거하는 열처리법이다. 특히, 과공석강의 피삭성과 소성가공성을 개선하고 담금질 후의 인성을 증가시켜 담금균열을 방지하려는 경우에는 미리 퍼얼라이트의 층상조직을 파괴하고 이것을 구상탄화물로서 페라이트 기지에 분산시키는 것이 유리하다. 이와 같은 목적을 위하여 구상화 담금균열처리를 한다.It is a heat treatment method that softens steel to improve machinability and plastic workability, removes residual stress, controls grains and structures, and removes segregation of elemental elements and impurities by diffusion. In particular, in order to improve the machinability and plasticity of the roughened steel and to increase the toughness after quenching to prevent quenching cracks, it is advantageous to destroy the layered structure of the ferrite beforehand and disperse it as a spherical carbide in the ferrite matrix. For this purpose, spherical immersion cracking treatment is performed.

③뜨임 및 서브제로처리(tempering and sub-zero treatment)③ tempering and sub-zero treatment

외견상 냉간가공으로 보이는 것도 실제로는 열간가공인 경우가 많으므로 담금질(quenching)작업 이후에 앞으로 있을 금형작업의 신속화나 스테인리스강의 가공 등을 고려하면, 예를 들어 냉간가공에 사용되는 금형이라도 열간가공용 금형인 것으로 간주하여 뜨임온도를 가능한 한 높게 설정하는 것이 좋다.What seems to be cold working is actually hot working in many cases, so considering the rapid speed of mold work and stainless steel processing after quenching, for example, even the mold used for cold working can be used for hot working. Considering the mold, it is recommended to set the tempering temperature as high as possible.

따라서, 본 발명의 특성상 급냉경화→1차고온템퍼링→2차고온템퍼링 방식보다는 급냉경화→서브제로처리→고온템퍼링 방식으로 처리하는 것이 바람직하다.Therefore, it is preferable to process by quench hardening → sub zero treatment → high temperature tempering method rather than quench hardening → first high temperature tempering → second high temperature tempering method.

이어서, 상기 열처리공정 이후에 박막형성공정(P20)과, 치환·침투공정(P30)과, 침탄질화공정(P40)이 순차적으로 진행되어 각종 기능성 금속박막 또는 금속층이 금속제품의 표면에 형성되는데, 이들 공정에 대하여 좀 더 구체적으로 설명하면 아래와 같다.Subsequently, after the heat treatment process, a thin film forming process (P20), a substitution / penetration process (P30), and a carburization-nitridation process (P40) are sequentially performed to form various functional metal thin films or metal layers on the surface of the metal product. These processes are described in more detail below.

먼저, 박막형성공정(P20)에서는 목적하는 금속박막의 구성원자를 포함하는 금속재료(타겟)가 이온플레이팅장치나 스퍼터링장치와 같은 물리적 증착장치를 통해, 원자(증발, 승화, 스퍼터링)상태나 분자 상태 또는 클러스터 상태로 금속제품의 표면에 증착되어 도 2에 나타낸 바와 같이 소정의 금속박막(20)으로 형성된다. 이때, 이온플레이팅(방법)을 사용하는 것이 바람직하다. 더욱 구체적으로, 물리적 증착방법에서는 기판(본 발명의 경우 2차가공의 대상이 된 금속제품)에 증착되는 금속입자가 들뜬 비활성가스 분위기 아래에서 도가니의 가열이나 전자빔에 의한 가열 또는 반응성 가스플라즈마의 가열에 의해 생성된다. 특히, 이온플레이팅에서 많이 사용되는 1∼10-2㎀ 압력(분위기가스분자의 평균자유행로는 예를 들어 25℃의 알곤에서 약 0.7∼70㎝) 아래에서는 상기 증착입자가 기판에 도달되기 전까지 분위기가스의 분자와 이온, 전자 등과 충돌하므로 가속된 수 십∼수 천 eV의 이온뿐만 아니라 충돌에 의해 감속된 이온, 가속된 이온이 중성화한 고속의 중성입자 등 다양한 에너지의 이온과 중성입자가 금속박막의 형성에 관여하게 된다. 상기의 박막형성에 관계하는 증착입자 중 수 백eV 정도의 에너지 입자에 의한 스퍼터링으로 표면에 부착된 오염물이나 산화막 등이 제거되어 기판과 박막표면의 청정화가 이루어진다. 그러나, 이와 같은 물리적 증착법에서, 고속의 증착입자가 저속의 증착입자보다 과다해지게 되면 막퇴적보다는 막의 스퍼터링이 위주가 되기 때문에 원하는 금속박막을 형성할 수 없게 된다. 또한, 증착입자가 생성되기 전에 알곤(Ar)과 같은 비활성가스의 이온만 기판에 조사하게 되면, 금속제품의 표면에서 국부적인 과열현상이 나타나고 결정핵의 성장도 촉진된다. 그러므로, 치밀하고 기계적 강도가 높은 금속박막을 쉽게 얻을 수 있는 이온플레이팅법이 바람직하다.First, in the thin film forming process (P20) , a metal material (target) containing members of a desired metal thin film is formed in an atomic (evaporation, sublimation, sputtering) state or molecule through a physical vapor deposition apparatus such as an ion plating apparatus or a sputtering apparatus. It is deposited on the surface of the metal product in a state or cluster state and formed into a predetermined metal thin film 20 as shown in FIG. At this time, it is preferable to use ion plating (method). More specifically, in the physical vapor deposition method, the metal particles deposited on the substrate (in the present invention, the metal product subject to secondary processing) are heated by the crucible or the electron beam or the heating of the reactive gas plasma under an inert gas atmosphere. Is generated by In particular, below 1 to 10 -2 kPa pressure (average free path of the atmosphere gas molecule, for example, about 0.7 to 70 cm in argon at 25 ° C), which is frequently used in ion plating, until the deposited particles reach the substrate. Molecules, ions, and electrons in the atmosphere gas collide with each other, and not only dozens or thousands of eV ions accelerated, but also ions and neutral particles of various energies, such as ions decelerated by collision and high-speed neutral particles neutralized by accelerated ions It is involved in the formation of a thin film. Sputtering by energy particles of about several hundred eV among the deposited particles related to the thin film formation removes contaminants and oxide films on the surface to clean the substrate and the surface of the thin film. However, in such a physical vapor deposition method, when the high-speed deposition particles become larger than the low-speed deposition particles, the sputtering of the film is more important than the film deposition, so that the desired metal thin film cannot be formed. In addition, if only the ions of an inert gas such as argon (Ar) are irradiated onto the substrate before deposition particles are formed, local overheating occurs on the surface of the metal product and the growth of crystal nuclei is also promoted. Therefore, an ion plating method that can easily obtain a thin metal film with high mechanical strength is preferable.

상기 박막형성공정 이후에 실시되는 치환·침투공정(P30)은 금속박막이 형성된 금속제품을 금속증기(hume) 치환 침투처리하여 상기 금속박막의 일부를 금속제품의 표면에 치환·침투시키고, 뜨임(tempering)온도 이하에서 6∼8시간 동안 열처리 하게 된다. 공정에 의하면 상기 금속박막의 결합력이 종래 도금법으로 만든 피막(도금층)보다 크게 증대되므로 쉽게 벗겨지지 않으며, 금속제품의 내구성이 더욱 향상된다. Substitution and permeation step (P30) performed after the thin film forming step is a metal vapor (hume) permeation treatment of the metal product on which the metal thin film is formed to replace and penetrate a part of the metal thin film on the surface of the metal product and temper ( heat treatment for 6-8 hours below tempering temperature. According to the process, since the bonding force of the metal thin film is greatly increased than the film (plating layer) made by the conventional plating method, it is not easily peeled off, and the durability of the metal product is further improved.

상기 침탄질화공정(P40)은 상기 치환·침투공정 이후에 실시되는 가공공정으 로서, 상기 금속박막의 표층부에 질소원자를 확산시켜 도 2에 나타낸 것처럼 상기 표층부에 탄화층(40)을 형성하는 것이다. 후술하는 실시예에서 더욱 명확하게 기술되겠지만, 상기 탄화층(40)은 표면처리된 금속제품의 내구성 향상과 장수명화에 중요한 역할을 하게 된다.The carburizing nitriding step (P40) is a processing step performed after the substitution / penetration step, in which a carbon atom is diffused to the surface layer portion of the metal thin film to form a carbonized layer 40 on the surface layer portion as shown in FIG. . As will be described more clearly in the following embodiments, the carbide layer 40 plays an important role in improving the durability and long life of the surface-treated metal products.

한편, 이상의 가공공정을 거친 금속제품중 경면(鏡面)을 요하는 금형이나 부품에 대해서는 추가로 폴리싱공정(P50)이 수행될 수 있다.On the other hand, the polishing process (P50) may be further performed for a mold or a component that requires a mirror surface among the metal products that have been processed above.

실시예Example

이하, 도 2와 도 3에 의거하여 본 발명의 일 실시예에 대해 설명한다.Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 2 and 3.

도 2에서, 준비된 금속제품(W)에 대해 소정의 열처리를 실시한 다음, 티타늄(Ti) 계열의 금속재료를 타겟으로 하여 두께 약 15㎛의 금속박막(20)을 이온플레이팅법에 따라 박막하고, 이어서 상기 금속박막(20)에 질소 원자를 확산시켜 상기 금속박막(20)와 결합하여 표층부에 두께 약 10㎛의 탄화층(40)을 형성하였다. 이때, 상기 탄화층의 조성은 TiN 또는 TiAlN 인 것이 바람직하다.In FIG. 2, a predetermined heat treatment is performed on the prepared metal product W, and then a thin metal film 20 having a thickness of about 15 μm is formed by an ion plating method using a titanium-based metal material as a target. Subsequently, nitrogen atoms were diffused into the metal thin film 20 to combine with the metal thin film 20 to form a carbonized layer 40 having a thickness of about 10 μm. At this time, the composition of the carbonization layer is preferably TiN or TiAlN.

본 발명은 산업발전에 따른 내열성, 내마모성, 내부식성, 고윤활 특성 등을 동시에 만족시키는 고기능성 금형과 금속제 부품을 저렴한 가격에 공급하기 위해 개발된 것으로서, 열처리공정과 이온플레이팅 공정을 통하여 금속제품의 고급화 및 균일화가 달성 가능하고 공정자동화의 특성이 만족될 수 있다.The present invention was developed to supply high-performance molds and metal parts that satisfy heat resistance, abrasion resistance, corrosion resistance, high lubrication characteristics, etc. according to industrial development at a low price, and metal products through heat treatment and ion plating processes. Can be achieved and the characteristics of process automation can be satisfied.

또한, 표면처리에 국한된 이온플레이팅의 한계를 침투확산과 열처리공정으로 극복함으로써 종래 침탄법에 의한 경우보다 뛰어난 세라믹 확산층을 얻을 수 있다. 따라서, 본 발명에 의하면 내마모성과 내용착성이 우수하고, 고온경도가 높으며, 열피로나 열충격 또는 용손과 히이트체크에 강한 금속제품을 제조할 수 있다.In addition, by overcoming the limitation of ion plating limited to the surface treatment by the penetration diffusion and heat treatment processes, a ceramic diffusion layer superior to the conventional carburizing method can be obtained. Therefore, according to the present invention, it is possible to manufacture a metal product having excellent wear resistance and welding resistance, high temperature hardness, and strong resistance to thermal fatigue, thermal shock, or heat loss and hit check.

또한, 본 발명은 리퀴드메탈의 실용화와 더불어 점점 열간에 가까운 소성가공으로 확대되는 프레스 금형분야, 나노기술과 관련된 IT제품에 적용되고 있는 마그네슘을 포함한 다이케스팅분야, 내열성 및 내마모성의 고기능성을 요구하는 자동차분야와 기계부품분야 등 금속가공과 관련이 있는 산업분야에서 널리 응용될 수 있다.In addition, the present invention is in the press mold field, which is expanded to the plastic processing increasingly close to the practical use of liquid metal, die casting field including magnesium applied to IT products related to nanotechnology, automobiles requiring high functionality of heat resistance and abrasion resistance It can be widely applied in industrial fields related to metal processing, such as field and machine parts field.

Claims (5)

삭제delete 삭제delete 삭제delete 삭제delete 응력제거 및 조직을 변형시켜 금속 제품의 체질개선을 위한 열처리공정(P10)과; 상기 열처리공정을 거친 금속제품의 표면에, 상기 금속제품과 다른 종류의 금속으로 된 금속박막이 물리적 증착법에 따라 증착(蒸着)되는 박막형성공정(P20); 상기 박막형성공정(P20)에서 증착된 금속박막의 금속 일부가 상기 금속제품의 표면에 치환·침투되는 치환·침투공정 (P30); 상기 치환·침투공정(P30)을 거친 금속제품의 표면에 질소원자가 확산하여 탄화층(cemented layer)이 형성되는 침탄질화공정(P40); 상기 침탄질화공정(P40)후에 실시되는 폴리싱공정(P50)에 의한 금속제품의 표면처리방법에 있어서,A heat treatment step (P10) for improving the constitution of the metal product by removing the stress and deforming the structure; A thin film forming step (P20) in which a metal thin film made of a metal different from the metal product is deposited by physical vapor deposition on the surface of the metal product which has undergone the heat treatment step; A substitution / penetration process (P30) in which a part of the metal of the metal thin film deposited in the thin film formation step (P20) is substituted and penetrated on the surface of the metal product; A carburizing nitriding step (P40) in which a carbonized layer is formed by diffusion of nitrogen atoms on the surface of the metal product which has undergone the substitution and penetration process (P30); In the surface treatment method of a metal product by the polishing process (P50) performed after the said carburizing nitriding process (P40), 상기 열처리공정(P10)은 불림, 풀림, 뜨임 및 서브제로처리 중 어느 하나로 선택적으로 행하고,The heat treatment step (P10) is selectively performed by any one of soaking, annealing, tempering and sub-zero treatment, 상기 박막형성공정(P20)은 이온 플레이팅(ion plating)법에 의해 증착하고,The thin film forming process (P20) is deposited by an ion plating method, 상기 치환·침투공정(P30)은 금속증기 치환 침투처리 후 뜨임온도 이하에서 6 ~ 8 시간 열처리하는 것을 특징으로 하는 금속제품의 표면처리방법.The substitution and penetration process (P30) is a surface treatment method of a metal product, characterized in that heat treatment for 6 to 8 hours at a temperature below the tempering temperature after the metal vapor substitution infiltration treatment.
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JPS5980773A (en) 1982-10-29 1984-05-10 Citizen Watch Co Ltd Surface treatment of personal ornament
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JPS5980773A (en) 1982-10-29 1984-05-10 Citizen Watch Co Ltd Surface treatment of personal ornament
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