KR100691172B1 - Method and apparatus for controlling movement of dual pumpkit - Google Patents

Method and apparatus for controlling movement of dual pumpkit Download PDF

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Publication number
KR100691172B1
KR100691172B1 KR1020060046435A KR20060046435A KR100691172B1 KR 100691172 B1 KR100691172 B1 KR 100691172B1 KR 1020060046435 A KR1020060046435 A KR 1020060046435A KR 20060046435 A KR20060046435 A KR 20060046435A KR 100691172 B1 KR100691172 B1 KR 100691172B1
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South Korea
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movement
pump
axis
axis direction
kit
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KR1020060046435A
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Korean (ko)
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홍승민
문찬영
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주식회사 프로텍
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/54—Arrangements or details not restricted to group B23Q5/02 or group B23Q5/22 respectively, e.g. control handles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2705/00—Driving working spindles or feeding members carrying tools or work
    • B23Q2705/10—Feeding members carrying tools or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A method and an apparatus for controlling movement of a dual pump kit is provided to improve the productivity by variously and precisely controlling the movement of a plurality of pump kits at the same time. A method for controlling movement of a dual pump kit includes a movement operation unit(10) having a plurality of first and second pump kits(5,6) moving along X, Y movement rails(7,8). The method includes the steps of: controlling the movement so that the first pump kit is located at a working position of a product by moving the movement operation unit to the XY direction; controlling the movement so that the second pump kit is arranged with reference to the first pump kit to locate the first pump kit of the movement operation unit to a predetermined pitch; and working a product by moving the first and second pump kits in the Z direction simultaneously or individually when the first and second pump kits are moved to and arranged in the work position.

Description

듀얼 펌프키트의 이동제어방법 및 장치{Method and apparatus for controlling movement of dual pumpkit}Method and apparatus for controlling movement of dual pump kits {Method and apparatus for controlling movement of dual pumpkit}

도 1은 본 발명의 전체적인 구성을 보여주는 평면도.1 is a plan view showing the overall configuration of the present invention.

도 2는 본 발명의 전체적인 구성을 보여주는 정면도.2 is a front view showing the overall configuration of the present invention.

도 3은 본 발명의 이동작동수단을 보여주는 정면 사시도.Figure 3 is a front perspective view showing a moving operation means of the present invention.

도 4는 도 3의 측면 사시도.4 is a side perspective view of FIG. 3;

도 5는 도 3의 요부 사시도.5 is a perspective view of main parts of FIG. 3;

도 6은 도 3의 요부 분해 사시도.6 is an exploded perspective view of the main portion of FIG. 3;

도 7은 본 발명의 이동작동수단의 평면도.7 is a plan view of the movement operation means of the present invention.

도 8은 본 발명의 이동작동수단의 정면도.8 is a front view of the movement operating means of the present invention.

도 9는 본 발명의 이동작동수단의 측면도.9 is a side view of the movement operating means of the present invention.

도 10 내지 도 12는 본 발명의 엑튜에이터를 보여주는 구성도.10 to 12 is a block diagram showing the actuator of the present invention.

** 도면의 주요 부분에 대한 부호의 설명 **** Description of symbols for the main parts of the drawing **

5,6: 펌프키트 7,8: 이동레일5,6: pump kit 7,8: movable rail

7',8': 이동부 10: 이동작동수단7 ', 8': moving part 10: moving operation means

12: 베이스프레임 13,14: 제1,2작동프레임12: base frame 13,14: 1st, 2nd operation frame

15,16,17: 제1,2,3보조프레임15, 16, 17: 1st, 2nd, 3rd auxiliary frame

20,30,40,50: 엑튜에이터20,30,40,50: actuator

23,33,43,53: 스크류축23,33,43,53: screw shaft

25,35,45,55: 라이너25,35,45,55: liner

본 발명은 반도체 제조 공정, 기타 기계, 기구 제조공정에서 이송라인을 따라 공급되는 생산품에 다양한 작업(에폭시와 같은 레진의 디스펜싱작업, 반도체칩의 픽킹 및 이송작업)을 일정하게 행하기 위한 제1,2펌프키트를 복수로 구비하여 X,Y,Z축으로 상호 피치정렬 및 이동제어하되, 상기 복수의 펌프키트를 동시 기동하도록 사용하거나 각각 개별 기동하도록 사용하므로 생산성 향상은 물론 작업 효율성을 극대화하는 듀얼 펌프키트의 이동제어방법 및 이동제어장치에 관한 것이다.The present invention provides a method for uniformly performing various operations (dispensing of resins such as epoxy, picking and transferring of semiconductor chips) to a product supplied along a transfer line in a semiconductor manufacturing process, other machines, and apparatus manufacturing processes. 2 pump kits are provided with a plurality of pitch alignment and movement control on the X, Y, and Z axes, but the pump kits are used to start the pumps at the same time or individually. The present invention relates to a movement control method and a movement control apparatus of a dual pump kit.

일반적으로 반도체 제조공정, 기타 기계, 기구 제조공정에서 이송라인을 따라 생산품, 예를 들면 PCB을 일정하고 규칙적으로 공급 제어하면서, 상기 PCB 상의 반도체칩에 에폭시와 같은 접착제 기능의 레진의 분배도포, 봉합작업을 위하여 이에 맞는 레진을 일정하게 분배도포하는 작업을 행하거나, 반도체칩의 이송작업을 위한 진공흡착의 픽킹작업, 그립핑작업을 행하게 된다.In general, during the semiconductor manufacturing process, and other machinery and equipment manufacturing process, the distribution, sealing and sealing of resin-responsive resin such as epoxy to the semiconductor chip on the PCB, while controlling and regularly supplying the product, for example, PCB along the transfer line. For the work, the work to uniformly distribute and apply the resin, or the picking operation of vacuum adsorption and the gripping work for the transfer operation of the semiconductor chip.

여기서 이러한 작업을 행하는데, 사용하는 기구를 총칭하여 펌프키트라 칭한다.Here, in performing this operation, the mechanism to be used is collectively called a pump key.

이러한 펌프키트는 주로 단일 형태로 구성하여 각각 X,Y,Z축으로 이동제어 하므로 상기 이송라인을 따라 일정하고 규칙적으로 이송되는 생산품에 액상의 재료를 공급하거나 픽킹, 그립핑작업하게 된다.These pump kits are mainly configured in a single shape and controlled to move in the X, Y, and Z axes, respectively, so that the liquid material is supplied or picked and gripped to a product regularly and regularly transported along the transfer line.

따라서 상기한 단일 펌프키트에 의한 이동제어는 작업 생산성이 저하되는 단점이 있었다.Therefore, the movement control by the single pump kit has a disadvantage in that the work productivity is lowered.

뿐만아니라 상기한 단일 펌프키트를 단순히 X,Y,Z축으로 이동제어하는 것만으로는 다양한 작업을 행할 수 없는 단순한 형태의 액상재료 공급이나 픽킹, 그립핑에만 한정할 수 밖에 없는 문제점이 있었다.In addition, there is a problem that only the liquid pump supply or picking, gripping of a simple form that can not perform a variety of operations by simply controlling the movement of the single pump kit to the X, Y, Z axis.

그리하여 작업 생산성(작업성)을 높이기 위해 복수의 펌프키트를 구비하기 위해서는 그 이동제어장치가 복잡하게 구성되어야 하는 문제점이 있었던 것이다.Thus, in order to have a plurality of pump kits in order to increase work productivity (workability), there was a problem that the movement control device must be complicated.

본 발명은 상기한 종래 기술이 갖는 제반 문제점을 근본적으로 해결하고자 창출된 것으로서, The present invention was created to fundamentally solve all the problems of the prior art,

본 발명은 반도체 제조 공정, 기타 기계, 기구 제조공정에서 이송라인을 따라 공급되는 생산품에 다양한 작업(에폭시와 같은 레진의 디스펜싱작업, 반도체칩의 픽킹 및 이송작업)을 행하기 위한 펌프키트를 복수로 구비하여 작업형태에 따라서 상호 피치정렬 및 이동제어하되, 상기 복수의 펌프키트를 동시 기동하도록 사용하거나 각각 개별 기동하도록 사용함은 물론, 펌프키트 간의 피치제어의 보정에 의해 생산품의 작업인 에폭시와 같은 레진의 디스펜싱작업, 반도체칩의 픽킹 및 이송작업에 구애없이 다양하고 정밀한 이동제어로 생산성 향상, 작업 효율성을 극대화 하도록 범용화한 것에 있다.The present invention provides a plurality of pump kits for performing various operations (dispensing of resins such as epoxy, picking and transferring of semiconductor chips) to a product supplied along a transfer line in a semiconductor manufacturing process, other machines, and apparatus manufacturing processes. Pitch alignment and movement control according to the type of work, and to use the plurality of pump kits at the same time, or to start each individually, as well as correction of the pitch control between the pump kits, such as epoxy work of the product Regardless of resin dispensing, semiconductor chip picking and conveying, various precision movement control can be used to improve productivity and maximize work efficiency.

이러한 본 발명의 목적은,The purpose of this invention,

이송라인을 따라 일정하고 규칙적으로 이송되는 생산품으로 펌프키트를 이동 제어하면서 작업하되, Work while controlling the movement of the pump kit to the product regularly and regularly transported along the transfer line,

복수의 제1,2펌프키트를 갖는 이동작동수단을 구비하여 X,Y축 이동레일을 따라 이동하는 X,Y축 이동부에 의해 X,Y 축방향으로 이동 제어하도록 구성하고,A movement operation means having a plurality of first and second pump kits and configured to control movement in the X and Y axis direction by an X and Y axis moving part moving along the X and Y axis moving rails,

상기 이동작동수단은 베이스프레임상에 제1모터와 제2모터를 구비하여, 상기 제1모터에 연동하는 Z축방향의 엑튜에이터에 의해 제1펌프키트를 갖는 제1작동프레임을 Z축방향으로 이동제어하도록 구성하며,The movement operation means includes a first motor and a second motor on the base frame, and the first operation frame having the first pump kit in the Z axis direction by an actuator in the Z axis direction interlocked with the first motor. Configured to control movement,

상기 제2모터에는 X축,Y축, Z축 방향의 엑튜에이터에 의해 제2펌프키트를 갖는 제2작동프레임을 X,Y,Z축으로 이동제어하도록 구성하는 것에 의해 달성된다.The second motor is achieved by configuring the second operating frame having the second pump kit to move in the X, Y and Z axes by means of actuators in the X, Y and Z axes.

다음은 상기한 본 발명의 목적을 달성하기 위한 방법에 대해 살펴보기로 한다.Next, a method for achieving the above object of the present invention will be described.

이송라인을 따라 일정하고 규칙적으로 이송되는 생산품으로 펌프키트를 이동 제어하면서 작업함에 있어서, In working while controlling the pump kit to the product which is transported regularly and regularly along the transfer line,

X,Y축 이동레일을 따라 이동하는 복수의 제1,2펌프키트를 갖는 이동작동수단을 구비하여; 상기 이동작동수단을 X,Y축 이동레일을 따라 X,Y 축 방향으로 이동하 여 제1펌프키트가 생산품의 작업위치에 위치하도록 이동 제어하는 위치이동단계와;A moving operation means having a plurality of first and second pump kits moving along the X, Y axis moving rails; A position movement step of moving the movement operation means along the X and Y axis moving rails in the X and Y axis directions so that the first pump kit is positioned at the working position of the product;

상기 이동작동수단의 제1펌프키트를 기준으로 요구하는 일정 피치에 위치하도록 제2펌프키트를 X,Y축 방향으로 이동하여 제1펌프키트를 기준으로 정렬하도록 이동 제어하는 정렬이동단계와;An alignment movement step of controlling the movement of the second pump kit in the X and Y axis directions so as to be aligned with respect to the first pump kit so as to be positioned at a predetermined pitch based on the first pump kit of the movement operation means;

상기 제1,2펌프키트를 작업위치에 이동, 정렬한 상태에서 상기 제1,2펌프키트를 Z축 방향으로 동시에 기동하거나 각각 기동하면서 생산품을 작업하도록 하는작업이동단계;로 이루어진다.And a work movement step of operating the products while simultaneously activating the first and second pump kits in the Z-axis direction or starting the first and second pump kits in a state where the first and second pump kits are moved and aligned.

이러한 본 발명은 에폭시와 같은 레진의 디스펜싱작업, 반도체칩의 픽킹 및 이송작업의 작업용도에 따라 다양한 형태의 펌프키트를 선택 장착한 상태로 제1,2펌프키트를 구비하여, 상기 제1,2펌프키트를 생산품의 작업위치로 이동 제어함과 요구하는 일정 피치로 정렬한 후 상기 생품상에 동시에 또는 각각 기동하면서 작업하도록 사용하므로서 복수의 펌프키트 사용에 따른 작업 생산성 향상은 물론 다양한 작업을 제공하게 되는 것이다.The present invention includes the first and second pump kits in which various types of pump kits are selected and mounted according to the purpose of dispensing a resin such as epoxy, picking and transferring a semiconductor chip, and the first and second pump kits. 2Pump kits are controlled to move to the working position of the product and aligned to the required pitch, and then used to work on the product simultaneously or separately, thereby improving work productivity by using a plurality of pump kits as well as providing various tasks. Will be done.

이하, 상기한 본 발명의 방법을 구현하기 위한 실시 예를 첨부도면을 참조하여 살펴보기로 한다.Hereinafter, an embodiment for implementing the method of the present invention will be described with reference to the accompanying drawings.

즉, 도 1 내지 도 12에 도시된 바와 같이,That is, as shown in Figures 1 to 12,

이송라인을 따라 일정하고 규칙적으로 이송되는 생산품으로 펌프키트를 이동 제어하면서 작업하는 것에 있어서, In working while controlling the movement of the pump kit to the product regularly and regularly transported along the transfer line,

복수의 제1,2펌프키트(5)(6)를 갖는 이동작동수단(10)을 구비하여 X축 이동레일(7)을 따라 이동하는 X축 이동부(7')와, 상기 X축 이동부의 Y축 이동레일(8)을 따라 이동하는 Y축 이동부(8')에 의해 X,Y 축방향으로 이동 제어하도록 구성하되,An X-axis moving part 7 'having a moving operation means 10 having a plurality of first and second pump kits 5 and 6 and moving along the X-axis moving rail 7, and the X-axis moving It is configured to control the movement in the X, Y axis direction by the Y-axis moving part (8 ') moving along the negative Y-axis moving rail (8),

상기 이동작동수단(10)은 베이스프레임(12)상에 제1모터(M1)와 제2모터(M2)를 구비하여, 상기 제1모터(M1)에는 Z축방향의 엑튜에이터(20)를 연동작동케 설치하여 제1펌프키트(5)를 갖는 제1작동프레임(13)을 Z축방향으로 이동제어하도록 구성하고,The movement operation means 10 includes a first motor M1 and a second motor M2 on the base frame 12, and the actuator 20 in the Z-axis direction is provided on the first motor M1. Installed to interlock operation to configure the first operation frame 13 having the first pump kit (5) to move control in the Z-axis direction,

상기 제2모터(M2)에는 X축방향의 엑튜에이터(30)를 연동작동케 설치하여 제1보조프레임(15)을 X축방향으로 이동제어하고, 상기 제1보조프레임(15)에 구비된 제3모터(M3)에 의해 Z축방향의 엑튜에이터(40)를 연동작동케 설치하여 제2보조프레임(16)을 Z축방향으로 이동제어하며, 상기 제2보조프레임(16)에 구비된 제4모터(M4)에 의해 Y축방향의 엑튜에이터(50)를 연동작동케 설치하여 제3보조프레임(17)을 Y축방향으로 이동제어하여 상기 제3보조프레임(17)상의 제2펌프키트(6)를 갖는 제2작동프레임(14)을 X,Y,Z축으로 이동제어하도록 구성하여 이루어진다.The second motor M2 is provided with the actuator 30 in the X-axis direction to interlock to operate and control the movement of the first auxiliary frame 15 in the X-axis direction, and is provided in the first auxiliary frame 15. By installing the actuator 40 in the Z-axis interlocked operation by the third motor (M3) to control the movement of the second sub-frame 16 in the Z-axis direction, provided in the second sub-frame 16 A second pump on the third auxiliary frame 17 is installed by interlocking and operating the actuator 50 in the Y axis direction by the fourth motor M4 to move and control the third auxiliary frame 17 in the Y axis direction. The second operation frame 14 having the kit 6 is configured to move control on the X, Y, and Z axes.

이때, 상기 Z축방향의 엑튜에이터(20)(40)는 제1,3모터(M1)(M3)의 모터축에 축설된 구동풀리(21)(41)에 벨트로 감합된 연동풀리(22)(42)에 축설된 스크류축(23)(43)에 승하강작동하는 라이너(25)(45)를 각각 설치하되, 상기 라이너(25)(45)에 각각 제1작동프레임(13)과 제2보조프레임(16)을 설치하여 승하강 제어하도록 구성된다.At this time, the actuators 20 and 40 in the Z-axis direction are interlocked pulleys 22 fitted with belts to the drive pulleys 21 and 41 arranged on the motor shafts of the first and third motors M1 and M3. Liners 25 and 45 are installed on the screw shafts 23 and 43 arranged on the shaft 42, respectively, and the first operating frame 13 and the liners 25 and 45 are respectively installed. The second auxiliary frame 16 is installed to control the raising and lowering.

또한, 상기 X축 방향의 엑튜에이터(30)는 제2모터(M2)의 모터축과 연결된 스 크류축(33)에 X축 방향으로 이동작동하는 라이너(35)를 설치하되, 상기 라이너(35)에 제1보조프레임(15)을 설치하여 X축 방향으로 이동 제어하도록 구성된다.In addition, the actuator 30 in the X-axis direction is installed on the screw shaft 33 connected to the motor shaft of the second motor (M2) to install a liner 35 to move in the X-axis direction, the liner 35 It is configured to control the movement in the X-axis direction by installing the first auxiliary frame (15).

또한, 상기 Y축 방향의 엑튜에이터(50)는 제4모터(M4)의 모터축에 축설된 구동풀리(51)에 벨트로 감합된 연동풀리(52)에 축설된 볼스크류축(53)에 Y축 방향으로 이동작동하는 라이너(55)를 설치하되, 상기 라이너(55)에 제3보조프레임(17)을 설치하여 Y축 방향으로 이동 제어하도록 구성된다.In addition, the actuator 50 in the Y-axis direction is connected to the ball screw shaft 53 built in the interlocking pulley 52 fitted with a belt to the drive pulley 51 built in the motor shaft of the fourth motor M4. The liner 55 is installed to move in the Y-axis direction, and the third auxiliary frame 17 is installed on the liner 55 to control movement in the Y-axis direction.

그리고, 상기 제1작동프레임(13)에는 이송라인을 따라 이송되는 생산품을 검출하여 위치제어하도록 카메라(60)와 레이져 센서(65)가 구성된다.In addition, the first operation frame 13 is configured with a camera 60 and a laser sensor 65 to detect and position the product transported along the transfer line.

또한, 상기 펌프키트(5)(6)는 생산품의 작업 목적에 따라 SUPER, AUGER, LINER, JET 등과 같은 펌프, 진공흡착기구, 그립퍼를 갖는 그립퍼기구등의 다양한 종류의 펌프키트를 적용 가능함은 물론이다.In addition, the pump kits (5) and (6) can be applied to various types of pump kits such as pumps such as SUPER, AUGER, LINER, JET, vacuum suction mechanisms, gripper mechanisms having grippers, etc. to be.

다음은 상기와 같이 구성되는 본 발명의 작동 및 작용에 대해 살펴보기로 한다.Next will be described the operation and action of the present invention configured as described above.

본 발명은 반도체 제조 공정, 기타 기계, 기구 제조공정에서 이송라인을 따라서 다양한 종류의 펌프키트을 적용하여 작업하되, 상기 펌프키트를 복수(2개)로 구비하여 이를 X,Y,,Z축으로 각각 이동 제어하면서 상기 복수의 펌프키트를 원하는 일정 피치로 동시 기동하면서 작업하거나, The present invention works by applying a variety of pump kits along the transfer line in the semiconductor manufacturing process, other machinery, apparatus manufacturing process, provided with a plurality (two) of the pump kits, respectively, X, Y, Z axis While simultaneously controlling the movement of the plurality of pump kits at the desired constant pitch, or

상기 복수의 펌프키트를 원하는 일정 피치로 각각 기동, 다시말하면 1번 펌프키트 작업 후 2번 펌프키트가 복수 작업을 행하도록 하는 등 다양한 작업을 구현 하도록 함에 그 특징이 있다.Each of the plurality of pump kits is started at a predetermined pitch, that is, it is characterized in that it implements various tasks such as allowing the pump kit number 2 to perform a plurality of tasks after the first pump kit operation.

이러한 작업의 수행에 대하여 보다 구체적으로 살펴보기로 한다.The performance of this task will be described in more detail.

먼저, 상기 복수의 제1,2 펌프키트(5)(6)를 원하는 일정 피치로 동시 기동하면서 작업하는 경우를 살펴보기로 한다.First, a case of working while simultaneously starting the plurality of first and second pump kits 5 and 6 at a predetermined pitch will be described.

먼저 사용하고자 하는 용도의 펌프키트(5)(6)를 각각 제1,2작동프레임(13)(14)상에 설치하되, 동일 작업을 위한 동일 펌프키트를 설치한다.First, the pump kits 5 and 6 for the intended use are installed on the first and second operating frames 13 and 14, respectively, and the same pump kits are installed for the same operation.

그리고, 상기 제1펌프키트(5)의 X,Y축방향을 작업위치 상부로 이동 제어한다.Then, the X, Y axis direction of the first pump kit 5 is moved to the upper control position.

이는 상기 제1펌프키트(5)가 구비된 이동작동수단(10)을 전체적으로 X,Y축 이동레일(7)(8)을 따라 X,Y축 이동부(7')(8')를 X,Y축방향으로 이동 제어하는 것에 의해 상기 제1펌프키트(5)를 요구하는 작업 위치로 이동 제어하게 된다.(위치이동단계)This means that the X and Y axis moving parts 7 'and 8' are moved along the X and Y axis moving rails 7 and 8 with the moving operation means 10 provided with the first pump kit 5 as a whole. By controlling the movement in the Y-axis direction, the first pump kit 5 is moved to the required working position.

이와 같은 상태에서 상기 제1펌프키트(5)와 제2펌프키트(6)를 이송공급되는 생산품과 동일하게 일정 피치로 위치하도록 조절하는 작업을 행한다.In this state, the first pump kit 5 and the second pump kit 6 are adjusted to be positioned at a constant pitch in the same manner as the product to be fed and supplied.

이때 상기 제1펌프키트(5)를 기준으로 제2펌프키트(6)를 X,Y,Z축으로 이동 조절하여 맞추는 작업을 행한다.At this time, the second pump kit 6 is moved and adjusted to the X, Y, and Z axes based on the first pump kit 5.

이는 상기 제2펌프키트(6)를 제2,3,4모터(M2)(M3)(M4)에 의한 X,Y,Z축 방향 엑튜에이터(30)(40)(50) 작동으로 이동제어하게 된다.This is the movement control of the second pump kit 6 by the X, Y, Z axis actuators 30, 40, 50 by the second, third and fourth motors M2, M3 and M4. Done.

즉 상기 제2모터(M2)를 구동하여 엑튜에이터(30)의 스크류축(33)을 회전조절하므로 X측 방향으로 이동작동하는 라이너(35)가 제1보조프레임(15)을 X축 방향으로 이동 제어하여 제1펌프키트(5)와의 피치를 조절한다.That is, the rotation of the screw shaft 33 of the actuator 30 is driven by driving the second motor M2 so that the liner 35 moving in the X direction moves the first auxiliary frame 15 in the X axis direction. By controlling the movement, the pitch with the first pump kit 5 is adjusted.

그리고, 제3모터(M3) 및 제4모터(M4)를 구동하여 엑튜에이터(40)(50)의 스크류축(43)과 볼스크류축(53)을 각각 회전조절하므로 Z축 방향으로 이동작동하는 라이너(45)와 Y축 방향으로 이동작동하는 라이너(55)가 제2,3보조프레임(16)(17)을 Z축 방향 및 Y축 방향으로 이동 제어하므로 상기 제2펌프키트(6)가 제1펌프키트(5)와 일정 피치로 정렬하도록 이동 제어하게 되는 것이다.(정렬이동단계)In addition, since the screw shaft 43 and the ball screw shaft 53 of the actuators 40 and 50 are rotated by driving the third motor M3 and the fourth motor M4, the movement in the Z-axis direction is performed. The second pump kit 6 because the liner 45 and the liner 55 moving in the Y-axis direction control the second and third auxiliary frames 16 and 17 to move in the Z-axis direction and the Y-axis direction. Moves control to align the first pump kit 5 with a predetermined pitch.

이와 같이 제1펌프키트(5)를 기준으로 제2펌프키트(6)를 일정 피치로 정렬하는 작업이 완료되면 이를 Z축 방향으로 동시 기동하면서 작업작업을 행하게 되는 것이다.As such, when the operation of aligning the second pump kit 6 to the predetermined pitch with respect to the first pump kit 5 is completed, the work is performed while simultaneously starting it in the Z-axis direction.

이는 상기 제1모터(M1)와 제3모터(M3)를 구동시켜 상기 제1,2작동프레임(13)(14)을 각각의 엑튜에이터(20)(40)에 의해 승하강 작동하는 것에 의해서 상기 제1,2펌프키트(5)(6)가 동시에 일정 피치로 기동하면서 이송라인을 따라 일정하고 규칙적으로 이송되는 생산품을 작업하게 되는 것이다.(작업이동단계)This is performed by driving the first motor M1 and the third motor M3 to move the first and second operation frames 13 and 14 up and down by the respective actuators 20 and 40. The first and second pump kits 5 and 6 simultaneously start at a constant pitch and work on a product which is regularly and regularly transported along the transfer line.

특히, 상기 복수의 펌프키트에 의해 이송라인의 생산품을 복수로 동시에 작업하게 되면서 생산 효율을 더욱 극대화하게 되는 것이다.In particular, as the plurality of pump kits to work at the same time a plurality of products of the transfer line is to further maximize the production efficiency.

다음은, 상기한 제1,2펌프키트(5)(6)를 일정 피치에서 각각 기동, 다시 말하 면 1번 펌프키트 작업 후 2번 펌프키트가 복수 작업하는 경우를 살펴보기로 한다.Next, the first and second pump kits 5 and 6 will be started at a predetermined pitch, that is, the pump kit No. 2 after the pump kit 2 will be described.

먼저 전술한 실시 예와 동일하게 사용하고자 하는 용도의 펌프키트(5)(6)를 각각 제1,2작동프레임(13)(14)상에 설치하되, 서로 다른 작업을 위한 펌프키트를 설치한다.First, the pump kits 5 and 6 for the purpose of use in the same manner as the above-described embodiments are installed on the first and second operating frames 13 and 14, respectively, and the pump kits for different operations are installed. .

그리고, 상기 제1펌프키트(5)의 X,Y축 방향을 작업위치 상부로 이동 제어한다.Then, the X and Y axis direction of the first pump kit 5 is moved to the upper control position.

이 역시 상기 제1펌프키트(5)가 구비된 이동작동수단(10)을 전체적으로 X,Y축 이동레일(7)(8)을 따라 X,Y축 이동부(7')(8')를 X,Y축방향으로 이동 제어하는 것에 의해 상기 제1펌프키트(5)를 요구하는 작업 위치로 이동 제어하게 된다.(위치이동단계)This also moves the X and Y axis moving parts 7 'and 8' along the X and Y axis moving rails 7 and 8 to the moving operation means 10 provided with the first pump kit 5 as a whole. By controlling the movement in the X and Y axis directions, the first pump kit 5 is moved to the required working position.

이와 같은 상태에서 상기 제1펌프키트(5)와 제2펌프키트(6)를 이송공급되는 생산품과 동일하게 일정 피치로 위치하도록 조절하는 작업을 행한다.In this state, the first pump kit 5 and the second pump kit 6 are adjusted to be positioned at a constant pitch in the same manner as the product to be fed and supplied.

이때 상기 제1펌프키트(5)를 기준으로 제2펌프키트(6)를 X,Y,Z축으로 이동 조절하여 맞추는 작업을 행한다.At this time, the second pump kit 6 is moved and adjusted to the X, Y, and Z axes based on the first pump kit 5.

이는 전술한 바와 동일하게 상기 제2펌프키트(6)를 제2,3,4모터(M2)(M3)(M4)에 의한 X,Y,Z축 방향 엑튜에이터(30)(40)(50) 작동으로 이동제어하므로 상기 제1펌프키트(5)와 동일하게 일정 피치 위치로 제2펌프키트(6)를 정렬하도록 이동 제어하게 되는 것이다.(정렬이동단계)In the same manner as described above, the second pump kit 6 is moved by the second, third and fourth motors M2, M3 and M4 in the X, Y and Z direction actuators 30, 40 and 50. Since the movement is controlled by the operation, the movement is controlled to align the second pump kit 6 at the same pitch position as the first pump kit 5 (alignment movement step).

이와 같이 제1펌프키트(5)를 기준으로 제2펌프키트(6)를 일정 피치로 정렬하는 작업이 완료되면 이를 Z축 방향으로 각각 기동하면서 작업작업을 행하게 되는 것이다.As such, when the operation of aligning the second pump kit 6 with a predetermined pitch on the basis of the first pump kit 5 is completed, the work is performed while starting each of them in the Z-axis direction.

이는 먼저 상기 제1모터(M1)를 구동시켜 상기 제1작동프레임(13)을 엑튜에이터(20)에 의해 승하강 작동하는 것에 의해서 상기 제1펌프키트(5)가 기동하면서 이송라인을 따라 일정하고 규칙적으로 이송되는 생산품을 1차 작업하고, 계속적으로 상기 제3모터(M3)를 구동시켜 상기 제2작동프레임(14)을 엑튜에이터(40)에 의해 승하강 작동하는 것에 의해서 상기 제2펌프키트(6)가 기동하면서 제1펌프키트(5)에 1차 작업된 생산품에 제2펌프키트(6)에 의한 2차 작업을 행하게 되는 것이다.(작업이동단계)This is driven by first driving the first motor (M1) by lifting and lowering the first operation frame 13 by the actuator 20, the first pump kit (5) is a constant along the transfer line And the second pump by firstly working the regularly transported product and continuously driving the third motor M3 to move the second operation frame 14 up and down by the actuator 40. When the kit 6 is started, the second work by the second pump kit 6 is performed on the product firstly worked on the first pump kit 5 (work movement step).

즉, 제1,2펌프키트(5)(6)에 의해 생산품에 복수의 작업을 연속 행하게 되는 것이다.In other words, the first and second pump kits 5 and 6 continuously perform a plurality of operations on the product.

한편, 본 발명은 상기한 작업 이외에 상기 복수의 제1,2펌프키트를 전체적으로 X,Y축방향으로 이동제어하거나 상기 제1펌프키트를 기준으로 제2펌프키트의 X,Y,Z축 방향을 정렬한 후 상기 제1,2펌프키트를 동시에 기동하면서 작동하거나 상기 제1,2펌프키트를 각각 기동하는 방식을 혼합한 다양한 방법으로 다양한 작업을 행할 수 있게 됨은 물론이다.On the other hand, the present invention, in addition to the above-described operation, the overall movement of the plurality of first and second pump kits in the X, Y axis direction or the X, Y, Z axis direction of the second pump kit based on the first pump kit After aligning, the first and second pump kits may be operated while simultaneously operating, or various operations may be performed in various ways by mixing the methods of starting the first and second pump kits, respectively.

이상에서 살펴본 바와 같이 본 발명의 튜얼펌프 이동제어방법 및 장치는 반도체 제조 공정, 기타 기계, 기구 제조공정에서 이송라인을 따라 공급되는 생산품 에 다양한 작업을 행하기 위한 복수의 제1,2펌프키트를 구비하여 X,Y,Z축으로 상호 피치정렬 및 이동제어하되, 상기 복수의 펌프키트를 동시 기동하도록 사용하거나 각각 개별 기동하도록 사용하므로 다양하고 정밀한 이동제어에 의해 생산성 향상은 물론 사용 효율성을 극대화하는 효과를 제공하게 되는 것이다. As described above, the method and apparatus for controlling the movement of a dual pump according to the present invention include a plurality of first and second pump kits for performing various operations on a product supplied along a transfer line in a semiconductor manufacturing process, other machines, and an apparatus manufacturing process. Pitch alignment and movement control on the X, Y, and Z axes, but the pump kits are used to start the pumps simultaneously or individually. Will provide an effect.

Claims (4)

이송라인을 따라 일정하고 규칙적으로 이송되는 생산품으로 펌프키트를 이동 제어하면서 작업함에 있어서, In working while controlling the pump kit to the product which is transported regularly and regularly along the transfer line, X,Y축 이동레일을 따라 이동하는 복수의 제1,2펌프키트를 갖는 이동작동수단을 구비하여; 상기 이동작동수단을 X,Y축 이동레일을 따라 X,Y 축 방향으로 이동하여 제1펌프키트가 생산품의 작업위치에 위치하도록 이동 제어하는 위치이동단계와;A moving operation means having a plurality of first and second pump kits moving along the X, Y axis moving rails; A position movement step of moving the movement operation means in the X and Y axis directions along the X and Y axis movement rails so that the first pump kit is positioned at the working position of the product; 상기 이동작동수단의 제1펌프키트를 기준으로 요구하는 일정 피치에 위치하도록 제2펌프키트를 X,Y축 방향으로 이동하여 제1펌프키트를 기준으로 정렬하도록 이동 제어하는 정렬이동단계와;An alignment movement step of controlling the movement of the second pump kit in the X and Y axis directions so as to be aligned with respect to the first pump kit so as to be positioned at a predetermined pitch based on the first pump kit of the movement operation means; 상기 제1,2펌프키트를 작업위치에 이동, 정렬한 상태에서 상기 제1,2펌프키트를 Z축 방향으로 동시에 기동하거나 각각 기동하면서 생산품을 작업하도록 하는작업이동단계;로 이루어진 것을 특징으로 하는 듀얼 펌프키트의 이동제어방법.And a work movement step of operating the products while simultaneously operating the first and second pump kits in the Z-axis direction or aligning the first and second pump kits in a working position. Movement control method of dual pump kit. 이송라인을 따라 일정하고 규칙적으로 이송되는 생산품으로 펌프키트를 이동 제어하면서 작업하는 것에 있어서, In working while controlling the movement of the pump kit to the product regularly and regularly transported along the transfer line, 복수의 제1,2펌프키트(5)(6)를 갖는 이동작동수단(10)을 구비하여 X축 이동레일(7)을 따라 이동하는 X축 이동부(7')와, 상기 X축 이동부의 Y축 이동레일(8)을 따라 이동하는 Y축 이동부(8')에 의해 X,Y 축방향으로 이동 제어하도록 구성하되,An X-axis moving part 7 'having a moving operation means 10 having a plurality of first and second pump kits 5 and 6 and moving along the X-axis moving rail 7, and the X-axis moving It is configured to control the movement in the X, Y axis direction by the Y-axis moving part (8 ') moving along the negative Y-axis moving rail (8), 상기 이동작동수단(10)은 베이스프레임(12)상에 제1모터(M1)와 제2모터(M2) 를 구비하여, 상기 제1모터(M1)에는 Z축방향의 엑튜에이터(20)를 연동작동케 설치하여 제1펌프키트(5)를 갖는 제1작동프레임(13)을 Z축방향으로 이동제어하도록 구성하고,The movement operation means 10 includes a first motor M1 and a second motor M2 on the base frame 12, and the actuator 20 in the Z-axis direction is provided on the first motor M1. Installed to interlock operation to configure the first operation frame 13 having the first pump kit (5) to move control in the Z-axis direction, 상기 제2모터(M2)에는 X축방향의 엑튜에이터(30)를 연동작동케 설치하여 제1보조프레임(15)을 X축방향으로 이동제어하고, 상기 제1보조프레임(15)에 구비된 제3모터(M3)에 의해 Z축방향의 엑튜에이터(40)를 연동작동케 설치하여 제2보조프레임(16)을 Z축방향으로 이동제어하며, 상기 제2보조프레임(16)에 구비된 제4모터(M4)에 의해 Y축방향의 엑튜에이터(50)를 연동작동케 설치하여 제3보조프레임(17)을 Y축방향으로 이동제어하여 상기 제3보조프레임(17)상의 제2펌프키트(6)를 갖는 제2작동프레임(14)을 X,Y,Z축으로 이동제어하도록 구성하여 이루어진 것을 특징으로 하는 듀얼 펌프키트의 이동제어장치.The second motor M2 is provided with the actuator 30 in the X-axis direction to interlock to operate and control the movement of the first auxiliary frame 15 in the X-axis direction, and is provided in the first auxiliary frame 15. By installing the actuator 40 in the Z-axis interlocked operation by the third motor (M3) to control the movement of the second sub-frame 16 in the Z-axis direction, provided in the second sub-frame 16 A second pump on the third auxiliary frame 17 is installed by interlocking and operating the actuator 50 in the Y axis direction by the fourth motor M4 to move and control the third auxiliary frame 17 in the Y axis direction. The movement control device of the dual pump kit, characterized in that configured to control the movement of the second operating frame (14) having a kit (6) in the X, Y, Z axis. 제2항에 있어서,The method of claim 2, 상기 X축과 Z축 방향의 엑튜에이터(30),(20)(40)는 제2모터(M2) 및 제1,3모터(M1)(M3)의 모터축에 축설된 구동풀리(31),(21)(41)에 벨트로 감합된 연동풀리(32),(22)(42)에 축설된 볼스크류축(33) 및 스크류축(23)(43)에 승하강작동하는 라이너(35),(25)(45)를 각각 설치하되, 상기 라이너(35),(25)(45)에 각각 제1보조프레임(15), 제1작동프레임(13) 및 제2보조프레임(16)을 설치하여 X축 방향 이동 및 승하강 제어하도록 구성되어 이루어진 것을 특징으로 하는 듀얼 펌프키트의 이동제어장치.The actuators 30 and 20 and 40 in the X-axis and Z-axis directions are driven pulleys 31 arranged on the motor shafts of the second motor M2 and the first and third motors M1 and M3. Liner 35 which moves up and down to the ball screw shaft 33 and the screw shaft 23 and 43 arranged in the interlocking pulley 32 and 22 and 42 fitted to the belt by the belt 21 and 41. ), (25) and (45), respectively, but the first auxiliary frame 15, the first operating frame 13 and the second auxiliary frame 16 to the liner 35, 25, 45, respectively Dual pump kit movement control device, characterized in that the configuration is configured to control the X-axis movement and lifting. 제2항에 있어서,The method of claim 2, 상기 Y축 방향의 엑튜에이터(50)는 제4모터(M4)의 모터축에 축설된 구동풀리(51)에 벨트로 감합된 연동풀리(52)에 축설된 볼스크류축(53)에 Y축 방향으로 이동작동하는 라이너(55)를 설치하되, 상기 라이너(55)에 제3보조프레임(17)을 설치하여 Y축 방향으로 이동 제어하도록 구성되어 이루어진 것을 특징으로 하는 듀얼 펌프키트의 이동제어장치.The actuator 50 in the Y-axis direction is Y-axis on the ball screw shaft 53 built in the interlocking pulley 52 fitted with a belt to the drive pulley 51 built in the motor shaft of the fourth motor M4. The movement control device of the dual pump kit, characterized in that the liner 55 is installed to move in the direction, the third auxiliary frame 17 is installed on the liner 55 to control movement in the Y-axis direction. .
KR1020060046435A 2006-05-24 2006-05-24 Method and apparatus for controlling movement of dual pumpkit KR100691172B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107640570A (en) * 2017-10-11 2018-01-30 海盐星达精密机械有限公司 A kind of pump block inwall processing equipment feed streamline
US10346601B2 (en) 2015-03-27 2019-07-09 Samsung Electronics Co., Ltd. Biometric information acquisition method and device for same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980019581A (en) * 1998-03-31 1998-06-05 배종섭 HEAD UNIT OF DISPENSER FOR PRODUCING A IC PACKAGE
KR19990007589A (en) * 1998-10-10 1999-01-25 최녹일 Dispensing device for semiconductor packaging
KR19990037850A (en) 1999-02-03 1999-05-25 최녹일 Apparatus for manufacturing semiconductor chip

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980019581A (en) * 1998-03-31 1998-06-05 배종섭 HEAD UNIT OF DISPENSER FOR PRODUCING A IC PACKAGE
KR19990007589A (en) * 1998-10-10 1999-01-25 최녹일 Dispensing device for semiconductor packaging
KR19990037850A (en) 1999-02-03 1999-05-25 최녹일 Apparatus for manufacturing semiconductor chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10346601B2 (en) 2015-03-27 2019-07-09 Samsung Electronics Co., Ltd. Biometric information acquisition method and device for same
CN107640570A (en) * 2017-10-11 2018-01-30 海盐星达精密机械有限公司 A kind of pump block inwall processing equipment feed streamline

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