KR100556317B1 - Prevention device of soot blocking by using the difference of rotation speed between inner and outer tube in MCVD equipment - Google Patents

Prevention device of soot blocking by using the difference of rotation speed between inner and outer tube in MCVD equipment Download PDF

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KR100556317B1
KR100556317B1 KR1020020046610A KR20020046610A KR100556317B1 KR 100556317 B1 KR100556317 B1 KR 100556317B1 KR 1020020046610 A KR1020020046610 A KR 1020020046610A KR 20020046610 A KR20020046610 A KR 20020046610A KR 100556317 B1 KR100556317 B1 KR 100556317B1
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tube
outer tube
chute
inner tube
rotating
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KR20040013610A (en
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김원배
김철민
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엘에스전선 주식회사
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01846—Means for after-treatment or catching of worked reactant gases
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/07—Controlling or regulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Abstract

본 발명에 따른 MCVD 설비용 슈트막힘 방지장치에 있어서 내외부 튜브의 회전속도차이를 이용한 슈트막힘 방지장치는, 광섬유모재로 사용되는 석영튜브(10)에 연장형성된 외부튜브(100), 상기 외부튜브(100)에 삽입설치되며 주입되는 가스들을 배출하기 위한 내부튜브(200) 및 상기 외부튜브(100)와 내부튜브(200)를 서로 상대적으로 회전하도록 하기 위한 회전수단(130)을 포함한다.In the chute prevention apparatus for MCVD equipment according to the present invention, the chute prevention apparatus using the rotational speed difference of the inner and outer tubes, the outer tube 100, the outer tube (100) formed on the quartz tube 10 used as the optical fiber base material It is inserted into the installation 100 and includes an inner tube 200 for discharging the injected gas and a rotating means 130 for rotating the outer tube 100 and the inner tube 200 relative to each other.

MCVD 공법, 슈트, 외부튜브, 내부튜브MCVD method, chute, outer tube, inner tube

Description

엠씨브이디 설비용 슈트막힘 방지장치에 있어서 내외부 튜브의 회전속도차이를 이용한 슈트막힘 방지장치{Prevention device of soot blocking by using the difference of rotation speed between inner and outer tube in MCVD equipment}Prevention device of soot blocking by using the difference of rotation speed between inner and outer tube in MCVD equipment}

본 명세서에 첨부되는 다음의 도면들은 본 발명의 바람직한 실시예를 예시하는 것이며, 후술하는 발명의 상세한 설명과 함께 본 발명의 기술사상을 더욱 이해시키는 역할을 하는 것이므로, 본 발명은 그러한 도면에 기재된 사항에만 한정되어 해석되어서는 아니 된다.The following drawings attached to this specification are illustrative of preferred embodiments of the present invention, and together with the detailed description of the invention to serve to further understand the technical spirit of the present invention, the present invention is a matter described in such drawings It should not be construed as limited to.

도 1은 종래의 배기슈트막힘 방지장치를 나타낸 도면이다.1 is a view showing a conventional exhaust chute clogging prevention device.

도 2는 본 발명에 따른 슈트막힘 방지장치를 나타낸 도면이다.2 is a view showing a chute blocking apparatus according to the present invention.

<도면 주요 참조부호에 대한 설명><Description of drawing reference numerals>

10..석영튜브 20..보조가스주입구 30..배출구10. Quartz tube 20. Secondary gas inlet 30. Outlet

100..외부튜브 110..외부튜브회전모터 120..외부튜브고정척100. Outer tube 110. Outer tube rotary motor 120. Outer tube fixing

130..회전수단 150..로터리조인트 200..내부튜브130. Rotating means 150. Rotary joint 200 Inner tube

210..내부튜브회전모터 220..내부튜브고정척210. Inner tube rotating motor 220. Inner tube fixing

본 발명은 엠씨브이디 설비용 슈트제거장치에서 내외부 튜브의 회전속도차이를 이용한 슈트막힘 방지장치에 관한 것으로서, 더욱 상세하게는 상기 엠씨브이디 공법을 이용하여 광섬유모재를 제조할 때 발생되는 슈트가 내부튜브로 배출되지 못하고 외부튜브로 유입되어 퇴적되거나 또는 그 경계지점에 증착되어 가스흐름을 방해하는 것을 방지하기 위한 슈트막힘 방지장치에 관한 것이다. The present invention relates to a chute prevention device using the difference in the rotational speed of the inner and outer tubes in the chute removal device for MCVD equipment, more specifically, the chute generated when manufacturing the optical fiber base material using the MCVD method The present invention relates to a chute-blocking device for preventing the gas flow from being discharged into the inner tube and deposited into the outer tube or deposited at its boundary point.

일반적으로 광섬유를 제조하기 위한 전구체인 광섬유모재는 광섬유의 대부분을 이루고 있는 실리카성분과 굴절율을 조절하기 위한 도펀트 및 반응을 촉진시키는 화학물질들간에 화학반응을 통하여 제조되며, 이러한 반응을 이용하여 광섬유 프리폼을 제조하는 방법으로는 수정 화학 기상 증착공법(Modified Chemical Vapour Deposition 이하;MCVD), 외부증착법(OVD), 기상축증착법(VAD)등이 있다.In general, an optical fiber base material which is a precursor for manufacturing an optical fiber is manufactured through a chemical reaction between a silica component constituting most of the optical fiber, a dopant for controlling the refractive index, and chemicals that promote the reaction. Examples of methods for preparing the polymers include Modified Chemical Vapor Deposition (MCVD), External Vapor Deposition (OVD), and Vapor Phase Deposition (VAD).

여기서, MCVD공법이란 석영튜브 속에 SiCl4 나 GeCl4 와 산소가스를 동시에 불어 넣고 외부로부터 열을 가함으로써 열산화반응을 일으켜 투명한 유리막을 증착시키는 방법을 말한다.Here, the MCVD method refers to a method of depositing a transparent glass film by thermal oxidation reaction by simultaneously blowing SiCl 4 or GeCl 4 and oxygen gas into a quartz tube and applying heat from the outside.

상기 MCVD공법에서 입자부착에 관한 메커니즘은 열영동현상(Thermophoresis)으로 미세한 입자가 온도구배가 있는 기체 중에 있을 때 그 입자가 기체 분자와의 운동량 교환으로 입자가 온도가 높은 곳에서 낮은 곳으로 이동하여 증착하는 것을 말하여 특히, MCVD공법에 있어서 SiO2를 주재료로 하는 모재내의 굴절율 조절은 각 부착층마다 SiCl4, GeCl4 의 양을 조절하여 원하는 분포를 만들며, 이때 슈트입자를 석영튜브의 내벽 바깥부분을 먼저 증착하고 나중에 중심부분을 증착한다. In the MCVD method, the mechanism for particle adhesion is thermophoresis, and when the fine particles are in a gas having a temperature gradient, the particles move from a high temperature to a low place by exchanging momentum with gas molecules. In particular, in the MCVD method, the refractive index control in the base material mainly composed of SiO 2 is controlled by controlling the amount of SiCl 4 and GeCl 4 in each adhesion layer, whereby the chute particles are formed outside the inner wall of the quartz tube. The part is deposited first and the core part later.

하지만, 석영튜브에 입자가 증착되는 효율은 매우 낮아서 40~ 50% 정도에 불과하기 때문에 석영튜브에 증착되지 못한 슈트들은 기체의 흐름을 따라서 배기튜브를 통하여 배출되어야 된다. 그러나, 증착되지 못한 슈트들은 여전히 높은 온도구배를 가지고 있으며 배기튜브의 온도 역시 열영동현상이 발생할 수 있을 만큼 충분히 낮아서 또 다른 열영동을 유도할 수 있을 뿐 아니라, 배기튜브 또한 슈트와 동일한 재질의 실리카로 제조되어 있으므로 슈트가 쉽게 부착되며 이를 효율적으로 배출구로 유도하지 못할 경우 공정이 중단되거나 모재 불량이 발생하게 된다.However, since the efficiency of depositing the particles in the quartz tube is very low, which is only about 40 to 50%, the chutes that are not deposited in the quartz tube must be discharged through the exhaust tube along the gas flow. However, undeposited chutes still have a high temperature gradient and the temperature of the exhaust tube is also low enough to cause thermophoresis, which can induce another thermophoresis, as well as the silica tube of the same material as the chute. Since the chute is easily attached and cannot be efficiently led to the outlet, the process may be stopped or the base material may be defective.

또한, 상기 배기튜브의 내부는 증착조건이 균일하도록 최대한 안정된 유동흐름을 유지하기 때문에 보조가스가 유입되는 경계지점에서는 슈트가 나뭇가지 모양으로 길게 자라는 현상이 발생하며, 이것이 또한 모재 불량의 원인이 되었다.In addition, since the inside of the exhaust tube maintains the most stable flow flow so that the deposition conditions are uniform, the chute grows into a branch shape at the boundary point where the auxiliary gas is introduced, which also causes the base material defect. .

도 1을 참조해서 좀 더 자세히 설명하면, 석영튜브(1)에 연장설치되는 배기튜브(2)와 내부튜브(3)는 척(4)에 고정되고 모터(5)에 의해 함께 회전하게 된다. 아울러, 배기튜브(2)에는 가스주입구(6)를 통해 보조가스가 유입되면서 미증착 슈트 및 잔존 반응가스를 내부튜브(3)을 거쳐 배출구(7)로 빠져나가도록 유도하게 된다. 이때, 상술한 바와 같이 상기 배기튜브(2)와 내부튜브(3)는 동일한 속도로 회전하고, 보조가스가 가스흐름의 반대방향으로 유입되기 때문에 그 경계지점에서 배출가스의 정체로 인한 미증착 슈트들의 증착이 용이하게 발생하게 되며, 나아가 동일하게 회전하는 배기튜브(2)와 내부튜브(3)는 슈트들의 성장에 의해 결국 튜브 내부가 막히는 문제점이 발생하였다. 1, the exhaust tube 2 and the inner tube 3 extending to the quartz tube 1 are fixed to the chuck 4 and rotated together by the motor 5. In addition, the auxiliary tube is introduced into the exhaust tube 2 through the gas inlet 6 to guide the undeposited chute and the remaining reaction gas to the outlet 7 through the inner tube 3. At this time, as described above, the exhaust tube 2 and the inner tube 3 rotate at the same speed, and because the auxiliary gas flows in the opposite direction of the gas flow, the undeposited chute due to the stagnation of the exhaust gas at the boundary point. Deposition of these easily occurs, and the exhaust tube (2) and the inner tube (3), which rotates in the same way, the inside of the tube is clogged by the growth of the chute.

선행기술의 또 다른 예로서, 슈트가 쌓이는 부분에 슈트의 제거를 위한 봉을 설치하여 주기적으로 증착된 슈트를 긁어내거나, 또는 구조를 변경하여 가스의 정체구역을 최소화 함으로서 슈트에 의한 배출구 막힘을 개선하고자 시도하고 있으나, 근본적으로 상기 문제들을 해결하지 못하고 있다.As another example of the prior art, by installing a rod for removing the chute in the area where the chute is stacked, it is possible to scrape the chute deposited periodically, or to change the structure to minimize the stagnation zone of the gas to improve the blockage of the outlet by the chute. Attempts have been made, but these problems are not fundamentally solved.

본 발명은 상기와 같은 문제점을 해결하기 위해 창안된 것으로서, 배기튜브와 그 내부에 삽입되는 내부튜브를 별도의 회전모터에 연결하여 서로 상대적으로 회전하도록 함으로써, 두 튜브의 경계지점에 발생하는 슈트입자의 성장에 의한 배기구의 흐름 저하 및 막힘현상을 줄일 수 있는 MCVD 설비용 슈트제거장치에 있어서 내외부 튜브의 회전속도차이를 이용한 슈트막힘 방지장치를 제공하는 데 그 목적이 있다.The present invention has been made to solve the above problems, by connecting the exhaust tube and the inner tube inserted therein to a separate rotary motor to rotate relative to each other, chute particles generated at the boundary of the two tubes SUMMARY OF THE INVENTION An object of the present invention is to provide a chute blocking apparatus using a difference in rotational speed of inner and outer tubes in a chute removing apparatus for an MCVD apparatus capable of reducing a flow decrease and clogging phenomenon due to the growth of an exhaust port.

상기와 같은 목적을 달성하기 위하여 본 발명에 따른 MCVD 설비용 슈트막힘방지장치에 있어서 내외부 튜브의 회전속도차이를 이용한 슈트막힘 방지장치는, 광섬유모재로 사용되는 석영튜브에 연장형성된 외부튜브, 상기 외부튜브에 삽입설치되며 주입되는 가스들을 배출하기 위한 내부튜브 및 상기 외부튜브와 내부튜브를 서로 상대적으로 회전하도록 하기 위한 회전수단을 포함한다.In order to achieve the above object, in the chute preventing apparatus for MCVD equipment according to the present invention, the chute blocking apparatus using the rotational speed difference of the inner and outer tubes includes an outer tube extending from the quartz tube used as the optical fiber base material, the outer It is inserted into the tube and includes an inner tube for discharging the injected gas and the rotating means for rotating the outer tube and the inner tube relative to each other.

이하 첨부된 도면을 참조로 본 발명의 바람직한 실시예를 상세히 설명하기로 한다. 이에 앞서, 본 명세서 및 청구범위에 사용된 용어나 단어는 통상적이거나 사전적인 의미로 한정해서 해석되어서는 아니 되며, 발명자는 그 자신의 발명을 가장 최선의 방법으로 설명하기 위해 용어의 개념을 적절하게 정의할 수 있다는 원칙에 입각하여 본 발명의 기술적 사상에 부합하는 의미와 개념으로 해석되어야만 한다. 따라서, 본 명세서에 기재된 실시예와 도면에 도시된 구성은 본 발명의 가장 바람직한 일 실시예에 불과할 뿐이고 본 발명의 기술적 사상을 모두 대변하는 것은 아니므로, 본 출원시점에 있어서 이들을 대체할 수 있는 다양한 균등물과 변형예들이 있을 수 있음을 이해하여야 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the present specification and claims should not be construed as being limited to the common or dictionary meanings, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention. Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

도 2는 본 발명의 일 실시예에 따른 개략도를 나타낸 도면이다. 이를 참조해서 설명하면, 본 발명의 슈트막힘 방지장치는 외부튜브(100), 내부튜브(200) 및 상기 튜브(100,200)를 홀딩하며 회전시키기위한 회전수단(130)으로 구성되어 있으며, 이때 상기 내부튜브(200)는 외부튜브(100)의 내부에 격납되도록 설치된다.2 shows a schematic diagram according to an embodiment of the present invention. Referring to this, the chute blocking device of the present invention is composed of an outer tube 100, the inner tube 200 and the rotating means 130 for holding and rotating the tubes (100,200), wherein the inner The tube 200 is installed to be stored inside the outer tube 100.

MCVD공법에 있어서 상기 외부튜브(100)는 배기튜브(exhaust tube)라고도 불리며, 반응가스인 SiCl4, GeCl4 및 산소가스가 투입되어 배출구(30)로 이동되면서 외부열원에 의해 생성되는 슈트입자(soot)들이 증착하는 석영튜브(10)에 연장설치되어 있다. In the MCVD method, the outer tube 100 is also called an exhaust tube, and chute particles generated by an external heat source as the reaction gas, SiCl 4 , GeCl 4, and oxygen gas, are introduced into the outlet 30. Soot is extended to the quartz tube 10 to be deposited.

또한, 상기 내부튜브(200)는 외부열원에 의해 산화반응하면서 발생된 슈트입자(soot) 중 상기 석영튜브(10)에 증착되지 못한 슈트입자들을 외부로 배출하기 위한 연결 튜브로서 상기 외부튜브(100)의 내부에 삽입설치된다. 아울러, 상기 외부튜브(100)에는 보조가스주입구(20)가 연결되어 상기 반응가스의 흐름과 역방향으로 질소, 압축산소 등의 보조가스가 투입되어 반응가스 및 미증착된 슈트입자들이 상기 내부튜브(200)를 통해 원활히 외부로 배출되도록 유도한다.In addition, the inner tube 200 is a connection tube for discharging chute particles not deposited on the quartz tube 10 out of the chute particles generated by oxidation by an external heat source to the outside tube 100. It is inserted and installed inside. In addition, an auxiliary gas inlet 20 is connected to the outer tube 100 so that an auxiliary gas such as nitrogen or compressed oxygen is introduced in a reverse direction to the flow of the reaction gas, thereby reacting the gas and undeposited chute particles with the inner tube ( 200 to induce to be discharged to the outside smoothly.

본 발명에 따르면, 상기 외부튜브(100)와 내부튜브(200)의 경계지점에서 발생하는 슈트의 성장을 억제하기 위하여 튜브(100,200)가 상대적으로 회전 가능하도록 회전수단(130)을 설치한다. 즉, 상기 회전수단(130)은 상기 외부튜브(100)를 회전시키기 위한 외부튜브회전모터(110)와, 상기 내부튜브(200)를 회전시키기 위한 내부튜브회전모터(210)를 별도로 포함하며, 이 모터(110,210)들은 상기 튜브 (100,200)를 각각 홀딩하는 고정척(120, 220)에 연결된다. 이때, 상기 튜브(100,200)는 실링을 실시하여 가스의 유출을 방지하는 것이 바람직하며, 상기 내부튜브(200)의 실링시 내부튜브와 외부튜브가 상대적으로 회전이 가능하도록 로터리 조인트(Rotary joint)(150)를 채용하는 것이 바람직하다. According to the present invention, in order to suppress the growth of the chute generated at the boundary point between the outer tube 100 and the inner tube 200, the tube 100, 200 is provided with a rotation means 130 to be relatively rotatable. That is, the rotating means 130 includes an outer tube rotating motor 110 for rotating the outer tube 100 and an inner tube rotating motor 210 for rotating the inner tube 200 separately, The motors 110 and 210 are connected to fixed chucks 120 and 220 holding the tubes 100 and 200, respectively. At this time, the tube (100,200) is preferably sealed to prevent the outflow of gas, during the sealing of the inner tube 200, a rotary joint (Rotary joint) so that the inner tube and the outer tube can be relatively rotated ( 150) is preferably employed.

또한, 상기 외부튜브(100)에 삽입설치된 내부튜브(200)가 서로 중심축이 어긋날 경우 편심회전하는 내부튜브(200)의 종단이 미증착 슈트입자들의 흐름에 노출되어 슈트입자들이 증착될 수 있으므로, 두 튜브(100, 200)의 회전중심을 맞추기 위한 센터정렬장치를 설치하는 것이 바람직하다. 이러한 센터정렬장치는 예컨대, 내부튜브의 척을 이동하는 수단과 내부튜브의 중심과 외부튜브의 중심을 측정하는 감지장치로 구성될 수 있다.In addition, when the inner tube 200 inserted into the outer tube 100 is shifted from each other, the ends of the inner tube 200 which are eccentrically rotated are exposed to the flow of undeposited chute particles so that the chute particles may be deposited. It is preferable to install a center alignment device for matching the center of rotation of the two tubes (100, 200). Such a center alignment device may include, for example, a means for moving the chuck of the inner tube and a sensing device for measuring the center of the inner tube and the center of the outer tube.

그러면, 상기와 같은 구성을 가진 본 발명에 따른 MCVD 설비용 슈트 제거장치에 있어서 내외부 튜브의 회전속도차이를 이용한 슈트막힘 방지장치의 동작을 살펴보기로 한다.Then, in the chute removal apparatus for MCVD equipment according to the present invention having the above configuration will be described the operation of the chute blocking apparatus using the difference in the rotational speed of the inner and outer tubes.

외부튜브(100)와 내부튜브(200)는 각각 고정척(120,220)에 홀딩됨과 동시에 회전모터(110,210)에 의해 회전하게 된다. 예컨대, 외부튜브회전모터(110)는 회전에 의해 외부열원의 열이 석영튜브(10)상에 균일하게 퍼지도록하여 슈트입자들이 용이하게 석영튜브에 증착되도록 한다. 아울러, 내부튜브회전모터(210)는 상기 외 부튜브회전모터(110)와 바람직하게는 서로 반대 방향 또는 서로 다른 회전속도로 회전하여, 상기 외부튜브(100)와 내부튜브(200)의 경계지점에 적층되는 슈트입자들이 증착 및 성장하는 것을 원칙적으로 예방하게 된다. The outer tube 100 and the inner tube 200 are held by the fixed chucks 120 and 220, respectively, and rotated by the rotary motors 110 and 210, respectively. For example, the outer tube rotating motor 110 allows the heat of the external heat source to be uniformly spread on the quartz tube 10 by rotation, so that the chute particles are easily deposited on the quartz tube. In addition, the inner tube rotation motor 210 is rotated at the opposite direction or different rotation speeds with the outer tube rotation motor 110, preferably, the boundary point between the outer tube 100 and the inner tube 200. In principle, it is to prevent the deposition and growth of the chute particles deposited on the.

다른 한편으로, 본 발명에 따르면 외부튜브(100)와 내부튜브(200)의 상대적인 회전에 의하여 경계지점에 국부적인 와류 유동이 발생하게 된다. 따라서, 이 와류 유동에 의해 슈트입자들은 더욱 원활히 배출될 수 있으며, 외부튜브(100)로 주입되는 비교적 차가운 가스에 의해 발생하기 쉬운 열영동현상을 방지하여 미증착 슈트가 튜브 내부에 증착하려는 경향을 최소화 할 수 있다.On the other hand, according to the present invention, a local vortex flow occurs at the boundary point by the relative rotation of the outer tube 100 and the inner tube 200. Therefore, by the vortex flow, the chute particles can be discharged more smoothly, and the tendency of undeposited chute to deposit inside the tube can be prevented by the thermophoretic phenomenon which is likely to be caused by the relatively cold gas injected into the outer tube 100. It can be minimized.

이상과 같이, 본 발명은 비록 한정된 실시예와 도면에 의해 설명되었으나, 본 발명은 이것에 의해 한정되지 않으며 본 발명이 속하는 기술분야에서 통상의 기술사상과 아래에 기재될 특허청구범위의 균등범위 내에서 다양한 수정 및 변형이 가능함은 물론이다.As mentioned above, although this invention was demonstrated by the limited embodiment and drawing, this invention is not limited by this and is within the equal range of a common technical idea in the technical field to which this invention belongs, and a claim to be described below. Of course, various modifications and variations are possible.

본 발명의 MCVD 설비용 슈트제거장치에 있어서 내외부 튜브의 회전속도차이를 이용한 슈트막힘 방지장치에 따르면, 내부튜브와 외부튜브를 고정하는 척과 모터를 따로 설치하여 두 튜브의 회전을 서로 상이하게 함으로서 경계지점에 발생하는 슈트의 적층에 따른 튜브의 막힘현상을 효율적으로 방지할 수 있으며, 석영튜브내에 증착되는 입자의 거동을 항상 균일하게 유지할 수 있게 되어 광섬유의 품질 및 수율을 향상시킬 수 있다.According to the chute prevention device using the difference in the rotational speed of the inner and outer tubes in the chute removal apparatus for MCVD equipment of the present invention, by installing a chuck and a motor for fixing the inner tube and the outer tube separately, the rotation of the two tubes are different from each other. It is possible to effectively prevent the clogging of the tube due to the stacking of the chute generated at the point, and to maintain the uniformity of the particles deposited in the quartz tube at all times, thereby improving the quality and yield of the optical fiber.

Claims (7)

삭제delete MCVD 설비용 슈트막힘 방지장치에 있어서,In the chute blocking apparatus for MCVD facilities, 광섬유모재로 사용되는 석영튜브(10)에 연장형성된 외부튜브(100);An outer tube 100 formed on the quartz tube 10 used as the optical fiber base material; 상기 외부튜브(100)에 삽입설치되며 주입되는 가스들을 배출하기 위한 내부튜브(200);및An inner tube 200 inserted into the outer tube 100 to discharge the injected gases; and 상기 외부튜브(100)와 내부튜브(200)를 서로 다른 속도로 회전시키는 회전수단(130);을 포함하고,And; rotating means 130 for rotating the outer tube 100 and the inner tube 200 at different speeds. 상기 회전수단(130)은 상기 외부튜브(100)를 홀드하기 위한 외부튜브고정척 (120)과 상기 외부튜브를 회전시키기 위한 외부튜브회전모터(110)와, 상기 내부튜브(200)를 홀드하기 위한 내부튜브고정척(220)과 상기 내부튜브를 회전시키기 위한 내부튜브회전모터(210)를 포함하는 것을 특징으로 하는 슈트막힘 방지장치.The rotating means 130 is an outer tube fixing chuck 120 for holding the outer tube 100, an outer tube rotating motor 110 for rotating the outer tube, and holding the inner tube 200. Chute prevention device, characterized in that it comprises an inner tube fixing chuck 220 and an inner tube rotating motor 210 for rotating the inner tube. 제 2항에 있어서,The method of claim 2, 상기 외부튜브(100) 및 상기 내부튜브(200)를 상대적으로 회전시키기 위한 수단으로서 로터리조인트(150)를 더 포함하는 것을 특징으로 하는 슈트막힘 방지장치.Shut clogging device, characterized in that it further comprises a rotary joint (150) as a means for relatively rotating the outer tube (100) and the inner tube (200). 제 2항에 있어서,The method of claim 2, 상기 회전수단(130)은 외부튜브(100)와 내부튜브(200)를 단위 시간당 회전수는 동일하지만 서로 반대 방향으로 회전시키는 것을 특징으로 하는 슈트막힘 방지장치.The rotating means 130 is a chute prevention device, characterized in that for rotating the outer tube 100 and the inner tube 200 is the same number of revolutions per unit time in the opposite direction. 삭제delete 삭제delete 제2항 내지 제4항 중 어느 한 항에 있어서,The method according to any one of claims 2 to 4, 상기 외부튜브(100)와 내부튜브(200)의 회전축을 일치시키도록 하는 센터정렬장치를 더 포함하는 것을 특징으로 하는 슈트막힘 방지장치.Shut clogging device, characterized in that it further comprises a center alignment device to match the rotation axis of the outer tube 100 and the inner tube (200).
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