KR100541918B1 - 평판이송장치 - Google Patents
평판이송장치 Download PDFInfo
- Publication number
- KR100541918B1 KR100541918B1 KR1020030021473A KR20030021473A KR100541918B1 KR 100541918 B1 KR100541918 B1 KR 100541918B1 KR 1020030021473 A KR1020030021473 A KR 1020030021473A KR 20030021473 A KR20030021473 A KR 20030021473A KR 100541918 B1 KR100541918 B1 KR 100541918B1
- Authority
- KR
- South Korea
- Prior art keywords
- shaft
- support bar
- shafts
- substrate
- coupled
- Prior art date
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/10—Arrangements of rollers
- B65G39/12—Arrangements of rollers mounted on framework
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/28—Impact protection
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
Description
Claims (5)
- 고정부재들과;상기 고정부재들에 결합되고 서로 나란하게 배치되며, 기판이 이송되도록 회전 가능한 샤프트들과;상기 샤프트와 함께 회전되도록 상기 샤프트 각각에 결합되는 롤러들과;상기 기판 이송시 상기 샤프트가 처지는 것을 방지하기 위해 상기 고정부재들 사이에 위치되며 상기 샤프트에 의해 이송되는 기판의 아래 위치에서 상기 샤프트를 지지하는 지지바를 포함하는 것을 특징으로 하는 평판 이송 장치.
- 제 1항에 있어서,상기 평판 이송 장치는 상기 샤프트와 상기 지지바 사이에 배치되는 탄성부재를 더 포함하는 것을 특징으로 하는 평판 이송 장치.
- 제 1항 또는 제 2항에 있어서,상기 지지부재는 상기 샤프트의 중심부를 지지하도록 배치되는 것을 특징으로 하는 평판 이송 장치.
- 고정부재들과;상기 고정부재들에 결합되고 서로 나란하게 배치되며, 기판을 이송하기 위해 회전 가능한 샤프트들과;상기 샤프트와 함께 회전되도록 상기 샤프트 각각에 결합되는 롤러들과;상기 샤프트에 의해 이송되는 기판의 아래 위치에서 상기 샤프트를 지지하도록 상기 샤프트에 결합되는 지지바를 포함하되,상기 샤프트는,상기 기판의 일측이 접촉되는 롤러가 결합되는 제 1샤프트와;상기 기판의 타측이 접촉되는 롤러가 결합되는 제 2샤프트와;상기 제 1샤프트와 상기 제 2샤프트를 연결하며, 상기 지지바가 결합되는 연결부재를 구비하는 것을 특징으로 하는 평판 이송 장치.
- 제 4항에 있어서,상기 지지바는,상기 연결부재가 삽입되는 홀이 형성된 상단 지지바와;상기 상단 지지바 아래에 배치되는 하단 지지바와;상기 상단 지지바와 상기 하단 지지바 사이에 배치되어 이들을 결합하는 탄성부재를 포함하는 것을 특징으로 하는 평판 이송 장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030021473A KR100541918B1 (ko) | 2003-04-04 | 2003-04-04 | 평판이송장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030021473A KR100541918B1 (ko) | 2003-04-04 | 2003-04-04 | 평판이송장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040087200A KR20040087200A (ko) | 2004-10-13 |
KR100541918B1 true KR100541918B1 (ko) | 2006-01-11 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020030021473A KR100541918B1 (ko) | 2003-04-04 | 2003-04-04 | 평판이송장치 |
Country Status (1)
Country | Link |
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KR (1) | KR100541918B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101077486B1 (ko) * | 2008-12-29 | 2011-10-27 | 주식회사 케이씨텍 | 대면적 기판 이송장치 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100978852B1 (ko) * | 2008-06-12 | 2010-08-31 | 세메스 주식회사 | 기판 반송 장치 및 그 방법 그리고 그 장치를 갖는 기판제조 설비 |
-
2003
- 2003-04-04 KR KR1020030021473A patent/KR100541918B1/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101077486B1 (ko) * | 2008-12-29 | 2011-10-27 | 주식회사 케이씨텍 | 대면적 기판 이송장치 |
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Publication number | Publication date |
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KR20040087200A (ko) | 2004-10-13 |
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