KR100531413B1 - 실리콘 결정화 방법 - Google Patents
실리콘 결정화 방법 Download PDFInfo
- Publication number
- KR100531413B1 KR100531413B1 KR10-2003-0031635A KR20030031635A KR100531413B1 KR 100531413 B1 KR100531413 B1 KR 100531413B1 KR 20030031635 A KR20030031635 A KR 20030031635A KR 100531413 B1 KR100531413 B1 KR 100531413B1
- Authority
- KR
- South Korea
- Prior art keywords
- mask
- irradiation
- amorphous silicon
- substrate
- energy
- Prior art date
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 39
- 239000010703 silicon Substances 0.000 title claims abstract description 39
- 238000002425 crystallisation Methods 0.000 title claims abstract description 37
- 239000013078 crystal Substances 0.000 claims abstract description 81
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 238000000034 method Methods 0.000 claims abstract description 51
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 38
- 230000008018 melting Effects 0.000 claims abstract description 32
- 238000002844 melting Methods 0.000 claims abstract description 32
- 230000000903 blocking effect Effects 0.000 claims abstract description 31
- 230000001678 irradiating effect Effects 0.000 claims abstract description 14
- 230000006911 nucleation Effects 0.000 claims abstract description 11
- 238000010899 nucleation Methods 0.000 claims abstract description 11
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 4
- 238000005755 formation reaction Methods 0.000 claims abstract 2
- 230000005540 biological transmission Effects 0.000 claims description 23
- 238000007711 solidification Methods 0.000 claims description 12
- 230000008023 solidification Effects 0.000 claims description 12
- 238000005224 laser annealing Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 abstract description 32
- 239000004973 liquid crystal related substance Substances 0.000 description 25
- 230000008025 crystallization Effects 0.000 description 19
- 239000010409 thin film Substances 0.000 description 10
- 230000009467 reduction Effects 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 238000006356 dehydrogenation reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003204 osmotic effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02672—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using crystallisation enhancing elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
Claims (9)
- 비정질 실리콘층이 형성된 기판을 준비하는 단계;상기 기판 상부의 상기 비정질 실리콘층에 레이저 빔을 조사 후 조사 부위의 양측에서 측면 성장하는 단결정들이 서로 만나지 않고 상기 단결정들 사이에 소핵 형성(nucleation)부를 가질 수 있는 투과부 및 차단부를 갖는 마스크를 위치시키는 단계;상기 마스크를 이용하여 완전 용융 에너지(complete melting energy)로 상기 비정질 실리콘층을 조사하여 조사 부위의 양측의 단결정들과 상기 단결정들 사이의 소핵 형성부를 형성하는 단계;상기 소핵 형성부를 완전 용융 근접 에너지(near complete melting energy)로 조사하여 소핵 형성부 내 소핵을 씨드로 하여 상기 단결정들에 연결되는 결정을 형성하는 단계를 포함하여 이루어진 실리콘 결정화 방법.
- 제 1항에 있어서,상기 마스크의 투과부에 대응되는 기판 상의 조사부위는, 완전 용융 에너지로 1회 조사 후 비정질 실리콘에서 측상으로 성장하는 단결정의 길이보다 큰 폭을 가진 것을 특징으로 하는 실리콘 결정화 방법.
- 제 2항에 있어서,상기 마스크의 투과부에 대응되는 기판 상의 조사 부위는, 1회 조사 후 상기 비정질 실리콘에서 성장하는 단결정 길이의 2배보다 5% 내지 20%의 큰 폭을 가진 것을 특징으로 하는 실리콘 결정화 방법.
- 제 1항에 있어서,상기 마스크의 차단부는 상기 투과부 간격에 비해 같거나 큰 폭을 가지도록 형성된 것을 특징으로 하는 실리콘 결정화 방법.
- 제 3항에 있어서,상기 마스크의 투과부에 대응되는 기판 상의 조사 부위의 폭은 2.6㎛ ~ 3.0㎛인 것을 특징으로 하는 실리콘 결정화 방법.
- 제 1항에 있어서,상기 완전 용융 에너지는 SLS(Sequential Lateral Solidification) 장비를 이용하여 인가함을 특징으로 하는 실리콘 결정화 방법.
- 제 1항에 있어서,상기 완전 용융 근접 에너지는 ELA(Excimer Laser Annealing) 장비를 이용하여 인가함을 특징으로 하는 실리콘 결정화 방법.
- 제 1항에 있어서,상기 완전 용융 근접 에너지의 조사는 기판 전 영역에 고르게 이루어짐을 특징으로 하는 실리콘 결정화 방법.
- 제 1항에 있어서,상기 기판은 스테이지에 고정시킨 후, 상기 스테이지를 이동시켜 마스크로 대응되어 조사되는 부위를 가변시킴을 특징으로 하는 실리콘 결정화 방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR10-2003-0031635A KR100531413B1 (ko) | 2003-05-19 | 2003-05-19 | 실리콘 결정화 방법 |
Applications Claiming Priority (1)
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KR10-2003-0031635A KR100531413B1 (ko) | 2003-05-19 | 2003-05-19 | 실리콘 결정화 방법 |
Publications (2)
Publication Number | Publication Date |
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KR20040099603A KR20040099603A (ko) | 2004-12-02 |
KR100531413B1 true KR100531413B1 (ko) | 2005-11-28 |
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KR10-2003-0031635A KR100531413B1 (ko) | 2003-05-19 | 2003-05-19 | 실리콘 결정화 방법 |
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KR100719682B1 (ko) * | 2005-04-06 | 2007-05-17 | 삼성에스디아이 주식회사 | 박막트랜지스터의 제조방법 |
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- 2003-05-19 KR KR10-2003-0031635A patent/KR100531413B1/ko active IP Right Grant
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