KR100514380B1 - Fabrication of Organic-Inorganic Hybride Ion exchange Filter for Regenerable Gas Scrubber - Google Patents
Fabrication of Organic-Inorganic Hybride Ion exchange Filter for Regenerable Gas Scrubber Download PDFInfo
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- KR100514380B1 KR100514380B1 KR10-2002-0043600A KR20020043600A KR100514380B1 KR 100514380 B1 KR100514380 B1 KR 100514380B1 KR 20020043600 A KR20020043600 A KR 20020043600A KR 100514380 B1 KR100514380 B1 KR 100514380B1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2055—Carbonaceous material
- B01D39/2065—Carbonaceous material the material being fibrous
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
- B01D2239/0604—Arrangement of the fibres in the filtering material
- B01D2239/0618—Non-woven
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
- B01D2239/065—More than one layer present in the filtering material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/10—Filtering material manufacturing
Abstract
본 발명은 유기휘발성분(VOC) 및 이온성 유해가스를 동시에 처리가 가능하도록 한 배기가스 처리 스크러버용 유·무기 복합필터의 제조에 관한 것으로, 그 목적은 종래의 산업 유해가스 처리에 있어 사용하는 습식 및 건식 스크러버 방법에 있어서, VOC 또는 이온성 유해가스등 한종류의 처리에 국한되는 단점이 있고, 습식의 경우 처리후 다량의 폐수가 발생하여 2차 오염이 야기되며, 활성탄과 같은 무기물 흡착제를 사용한 필터는 1회용이고 특히 공정상 압력강하의 단점이 있어, 이들의 단점인 압력강하가 적고 VOC 및 이온성 유해가스를 고효율로 동시에 제거하고, 특히 1회용이 아닌 재생이 가능한 장수명의 배가스 처리 스크러버용 유·무기 복합필터 제조방법을 제공하는데 있다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of an organic / inorganic composite filter for exhaust gas treating scrubbers capable of simultaneously treating organic volatile matter (VOC) and ionic noxious gases. In the wet and dry scrubber method, there is a disadvantage that it is limited to one type of treatment such as VOC or ionic harmful gas, and in the case of wet, a large amount of waste water is generated after treatment, causing secondary pollution, and inorganic adsorbent such as activated carbon. The filter used is disposable and has the disadvantage of pressure drop especially in the process, which has the disadvantage of low pressure drop and high efficiency of removing VOC and ionic harmful gas at the same time, especially the long life flue gas treatment scrubber that can be recycled instead of disposable The present invention provides a method for manufacturing a solvent-inorganic composite filter.
본 발명의 구성은 무기흡착제로 활성탄소섬유(ACF) 부직포와 유기흡착제로 섬유상 이온교환체(IXF) 부직포를 일정비율로 혼합한 스크러버 장치에 탈·부착이 간편하도록 만든 신개념의 표준필터이다.The configuration of the present invention is a new concept standard filter made to be easily attached and detached to a scrubber device in which a mixture of activated carbon fiber (ACF) nonwoven fabric as an inorganic adsorbent and a fibrous ion exchanger (IXF) nonwoven fabric as an organic adsorbent at a constant ratio.
Description
본 발명은 유기휘발성분(VOC) 및 이온성 유해가스를 동시에 처리가 가능하도록 한 배기가스 처리 스크러버용 유·무기 복합필터의 제조에 관한 것으로, 특히 다양한 종류의 산업 유해가스 처리에 있어 사용하는 습식 및 건식 스크러버 방법에 있어서, VOC 또는 SOx, NOx, HCl, HF, H2S와 같은 산성가스와 암모니아, 아민류등과 같은 염기성 가스 및 중금속이온의 처리에 있어 특정 유해가스에만 성능을 발휘하며, 특히 습식의 경우 처리후 다량의 폐수가 발생하여 2차 오염이 야기되며, 활성탄과 같은 무기물 흡착제를 사용한 필터는 1회용이고 특히 공정상 압력강하의 단점이 있어, 이들의 단점인 압력강하가 적고 VOC 및 이온성 유해가스를 고효율로 동시에 제거하고, 특히 1회용이 아닌 재생이 가능한 장수명의 배가스 처리 스크러버용 유·무기 복합필터 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of organic / inorganic composite filters for exhaust gas treating scrubbers capable of simultaneously treating organic volatile components (VOC) and ionic noxious gases. And in the dry scrubber method, it performs only on certain harmful gases in treating acidic gases such as VOC or SOx, NOx, HCl, HF, H2S, basic gases such as ammonia and amines, and heavy metal ions, especially wet In this case, a large amount of wastewater is generated after treatment, causing secondary pollution. Filters using inorganic adsorbents such as activated carbon are disposable and have a disadvantage of pressure drop in the process, and thus, their disadvantages are low pressure drop and VOC and ionicity. Method for manufacturing organic / inorganic composite filter for long-life exhaust gas treatment scrubber that removes harmful gases at the same time with high efficiency and is not disposable It relates.
스크러버용 필터중 기존의 무기필터로 사용하는 첨착활성탄은 입상으로 자체 무게등으로 충진용량이 한정되며, 압력강하에 의한 구조설계와 처리시간의 한계가 있으며, 일정기간 사용시 물리적 흡착 용량의 한계가 있어 다량의 유해가스 처리시 포화가 빠르고, 재생이 불가능하여 수명이 짧고, 특히 물리적 흡착에 의한 결합력이 약하여 흡착물질이 떨어져 흡착효율이 낮아지는 단점이 있다. 또한 장기간 사용시 활성탄 자체의 특성 때문에 전기누전등 화재에 취약하며 살수되는 물에의한 2차 폐수가 대량 발생하고, 교체시 스크러버 공정의 작동을 중지해야 하기 때문에 시간과 교체비용이 많이드는 단점이 있다.The impregnated activated carbon used as a conventional inorganic filter among scrubber filters has granular filling capacity due to its own weight, structural design and processing time due to pressure drop, and physical adsorption capacity for a certain period of time. When processing a large amount of harmful gas, the saturation is fast, the regeneration is not possible, the life is short, in particular, the binding force is weak due to physical adsorption, there is a disadvantage that the adsorption material is dropped and the adsorption efficiency is lowered. In addition, due to the characteristics of activated carbon itself over long periods of time, it is vulnerable to electric leakage and other fires, and the secondary wastewater caused by the sprinkled water is generated and the scrubber process needs to be stopped during replacement. .
한편 IXF 필터의 경우 재생이 가능하여 장기간 사용이 가능하고, 흡착속도가 빠르며, 소량의 재생액만 사용하므로 2차 폐수발생의 염려가 없고, 섬유 특성상 압력강하가 없어 따른 속도로 대량처리가 가능하다. 그러나 IXF는 섬유상으로 충진밀도가 낮아 처리속도는 빠르나 총 흡착용량이 적으며, 특히 이온성 유해가스에 대한 선택흡착성은 뛰어나지만 휘발성 유기성분(VOC)등에 대한 흡착성이 낮아 이들 가스의 처리에 한계가 있다.On the other hand, the IXF filter can be regenerated for long-term use, has a fast adsorption rate, and uses only a small amount of regeneration solution, so there is no fear of secondary wastewater generation and there is no pressure drop due to the characteristics of the fiber. . However, IXF is fibrous and has a low packing density, so the treatment speed is fast but the total adsorption capacity is low. In particular, IXF has excellent adsorption to ionic harmful gases, but it has low adsorption to volatile organic components (VOC). have.
본 발명의 목적은 상기와 같은 기존 스크러버용 필터의 문제점 해결을 위한 산업 유해 배기가스 정화를 위한 스크러버용 유·무기 복합 이온교환 필터를 제조하는 방법에 있어서, VOC 또는 이온성 유해가스등을 동시에 처리 가능하고, 처리후 다량의 폐수 발생에 의한 2차 오염이 없으며, 특히 입상의 활성탄을 사용한 종래의 필터와는 달리 1회용이 아니며, 활성탄소섬유와 이온교환 섬유 부직포를 사용하여 제작이 간단하고, 공정상 압력강하가 거의 없으며, 수증기와 소량의 재생액을 사용하여 필터를 간단히 재생하므로써 장기간 사용이 가능한 물리·화학적 흡착으로 VOC 및 이온성 유해가스를 고효율로 동시에 제거할 수 있는 배가스 처리 스크러버용 유·무기 복합필터 제조방법을 제공하는데 있다.An object of the present invention, in the method for manufacturing an organic-inorganic hybrid ion exchange filter for scrubber for the purification of industrial harmful exhaust gas for solving the problems of the conventional scrubber filter as described above, VOC or ionic harmful gas can be treated at the same time After the treatment, there is no secondary pollution caused by the generation of large amount of waste water, and in particular, unlike conventional filters using granular activated carbon, it is not disposable, and it is simple to manufacture using activated carbon fiber and ion exchange fiber nonwoven fabric, and the process There is little phase pressure drop, and oil and flue gas scrubber that can remove VOC and ionic harmful gas with high efficiency simultaneously by physical and chemical adsorption which can be used for a long time by simply regenerating filter using water vapor and small amount of regeneration liquid. An inorganic composite filter is provided.
상기와 같은 발명의 목적을 달성하기 위한 본 발명은, The present invention for achieving the object of the above invention,
전자선 전조사 중합방법으로 제조한 양· 음이온교환 섬유 부직포와 활성탄소섬유 부직포를 단독, 또는 샌드위치 부직포로 제조하여 이들을 플라스틱판에 접착하고, 이들 섬유 고정판을 사각 또는 원통형의 다양한 형태의 표준 케이스에 장착할 수 있도록 혼성섬유의 경우 일정두께의 분리판과 교대로 고정시키고, ACF, IXF 및 분리판을 교대로 배열하여 고정시킨 유·무기 복합필터의 제조방법으로 이루어 진다.The positive and negative ion exchange fiber nonwoven fabric and the activated carbon fiber nonwoven fabric produced by the electron beam irradiation polymerization method are made of single or sandwich nonwoven fabric and bonded to the plastic plate, and the fiber fixing plate is mounted on the standard case of various forms of square or cylindrical shape. The hybrid fiber is made of a method of manufacturing an organic / inorganic composite filter in which alternating fibers are alternately fixed with a predetermined thickness, and ACF, IXF, and alternate plates are alternately arranged and fixed.
본 발명의 구성은 기존의 첨착활성탄을 사용한 필터와 이온교환 섬유를 사용한 필터의 단점을 해결하기 위해 무기 흡착 필터로 첨착 활성탄 대신 활성탄소섬유(ACF)와 유기흡착 필터로 양·음이온교환 섬유(IXF)를 사용하였다.In order to solve the shortcomings of the conventional filter using impregnated activated carbon and the filter using ion exchange fiber, the active carbon fiber (ACF) and organic ion adsorption filter instead of impregnated activated carbon as an inorganic adsorption filter (IXF) ) Was used.
또한 동시에 대량의 유해가스를 처리할 수 있도록 하기위해 수직, 수평 어느방향으로나 조립이 가능하고 유해가스와 접촉을 증가시켜 처리효율을 높일 수 있으며, 탈·부착이 간편하도록 케이스형태로 제조하였다.At the same time, it is possible to assemble in both vertical and horizontal directions to handle a large amount of harmful gases, increase the efficiency of treatment by increasing the contact with harmful gases, and manufactured in a case form for easy removal and attachment.
따라서 입상으로 조립된 기존 스크러버용 필터에 비해 일정 풍속에서 50 파스칼이하로 압력강하가 현저히 낮은 스크러버 이다. Therefore, the scrubber has a significantly lower pressure drop of 50 Pascal or less at a constant wind speed compared to the conventional granulated scrubber filter.
그리고, 본 발명의 유·무기 복합 이온교환 필터는 부직포 형태로 유해가스가 통과되면서 물리·화학적 흡착이 이루어 지기 때문에 매우 처리속도가 빠르고, 특히 재생액이나, 온수로 순환 재생하기 때문에 그 성능이 항상 유지되는 특징이 있다.In addition, the organic / inorganic composite ion exchange filter of the present invention has a very high processing speed because physical and chemical adsorption is performed while harmful gases are passed through the nonwoven fabric, and in particular, its performance is always circulated with regeneration liquid or hot water. There is a feature to be maintained.
이하, 본 발명의 실시예인 구성을 첨부도면에 연계시켜 상세히 설명하면 다음과 같다. Hereinafter, the configuration of an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
본 발명의 도 1은 유해 배기가스 처리용 스크러버의 핵심소재인 고효율 유·무기 복합 이온교환 필터의 제조방법에 따른 분해 사시도로써, 활성탄소섬유와 이온교환 섬유 혼성 부직포를 제조하는 과정, 부직포를 플라스틱 판에 접착하는 과정, 부직포 판과, 분리판을 일정간격으로 조립하고 케이스에 장착하여 복합필터를 제조하는 과정으로 나눌 수 있다.1 is an exploded perspective view of a method for manufacturing a highly efficient organic / inorganic composite ion exchange filter which is a core material of a scrubber for treating harmful exhaust gases, and a process of manufacturing an activated carbon fiber and an ion exchange fiber hybrid nonwoven fabric, and a nonwoven fabric The process of adhering to the plate, the non-woven fabric plate and the separation plate can be divided into a process of manufacturing a composite filter by assembling at a predetermined interval and mounting on the case.
먼저 혼성 이온교환 섬유 부직포를 제조하기 위하여 이온교환 섬유와 활성탄소섬유 비율을 선택하여 무게를 측정하고, 이들을 부직포 제조기에 넣은다음 일정 두께의 혼성부직포(1)를 제조한다. 이때 활성탄소섬유의 부스러짐을 방지하기 위하여 활성탄소섬유를 이온교환 섬유 사이에 배열되도록 유도한다. 또한 활성탄소섬유 부직포를 단독으로 사용하기 위하여 박막의 폴리프로필렌 부직포를 활성탄소섬유의 표면에 열로 세팅하여 활성탄소섬유가 손상되는 것을 방지한 PP보호 부직포(2) 제조가 가능하도록 한다.First, in order to prepare a mixed ion exchange fiber nonwoven fabric, a ratio of ion exchange fibers and activated carbon fibers is selected and weighed, and these are placed in a nonwoven fabric maker, and then a mixed nonwoven fabric 1 of a predetermined thickness is manufactured. In this case, the activated carbon fibers are induced to be arranged between the ion exchange fibers in order to prevent the brittleness of the activated carbon fibers. Also, in order to use the activated carbon fiber nonwoven fabric alone, a polypropylene nonwoven fabric of thin film is set to heat on the surface of the activated carbon fiber to enable the production of a PP protective nonwoven fabric 2 which prevents the activated carbon fiber from being damaged.
한편 상기 과정으로 제조한 부직포를 1∼2mm PVC 또는 아크릴판에 고정하기 위하여 일정크기로 절단한 부직포를 PVC 판의 경우 테트라히드로퓨란(THF)과 같은 PVC상용 용매에 부직포를 수분동안 담가 적신후 이들을 꺼내어 PVC 판에 겹쳐놓고 압력을 가하고 건조시켜 부직포를 접착시킨다(3). 한편 아크릴 판의 경우 클로로포름을 사용하여 상기 PVC판에 부직포를 고정하는 방법과 동일하게 하여 고정시키는 과정으로 활성탄소섬유와 이온교환 섬유의 고유 물성을 손상시키지 않는 것이 특징이다.Meanwhile, the nonwoven fabric cut to a certain size in order to fix the nonwoven fabric prepared in the above process to 1 ~ 2mm PVC or acrylic plate is dipped in a PVC commercial solvent such as tetrahydrofuran (THF) for a few minutes and then wetted. Take out, superimpose on PVC plate, pressurize and dry to bond nonwoven fabric (3). On the other hand, the acrylic plate is characterized in that it does not damage the intrinsic properties of the activated carbon fibers and ion exchange fibers by fixing in the same manner as the method of fixing the nonwoven fabric to the PVC plate using chloroform.
또한 부직포 고정판을 이용한 유·무기 복합 이온교환 필터를 제조하는 과정으로 부직포가 접착된 판을 어떤 형태나 규모의 스크러버에도 적용가능하도록 표준규격으리 필터를 제조하기 위한 과정으로, 가로x세로x높이가 30cm x 30cm x 30cm인 필터로 도 1의 유·무기 복합 이온교환 필터 분해 사시도와 같이 일정간격으로 홈을낸 요철형 지지대(4)에 30cm x 30cm 크기로 절단된 부직포 가 접착된 판을 고정하고 판과 판의 간격을 일정하게 유지하고 겹치는 것을 방지하기 위하여 중간에 (4)의 요철형 지지대를 고정시킨다. 지지대에 고정시킨 판 전체를 고정할 수 있고 같은 크기의 필터를 겹쳐 사용할 경우 필터와 필터의 경계면의 밀착을 유지시키기 위한 30cm x 30cm 크기의 내부 패킹(5)을 고정시킨다. 이렇게 제조된 필터를 동일 크기의 폴리프로필렌 케이스에 장착하고 부직포가 분리되지 않토록 외부패킹(6)을 씌워 고정시켜 유·무기 복합 이온교환 필터(7)를 제조한다. 본 발명의 재생방법은 60℃ 이내의 재생액을 사용하거나 또는 먼저 스팀세척을 한 후 재생액을 이용하여 재생하는 방법을 사용한다. 또한 본 발명의 이온교환섬유의 재생 시 발생하는 미스트는 활성탄소섬유필터에 흡착되는 것을 특징으로 한다.In addition, it is a process for manufacturing organic / inorganic composite ion exchange filter using nonwoven fabric fixing plate.It is a process for manufacturing filter according to standard specification so that nonwoven fabric bonded plate can be applied to any shape or scale scrubber. A 30cm x 30cm x 30cm filter is used to fix the plate bonded to the nonwoven fabric cut to 30cm x 30cm size to the uneven support (4) grooved at regular intervals as shown in the exploded perspective view of the organic / inorganic composite ion exchange filter of FIG. The uneven support of (4) is fixed in the middle to keep the plate and the plate constant and prevent overlap. It is possible to fix the entire plate fixed to the support, and when using the same size of the filter overlap to secure the inner packing (5) of 30cm x 30cm size to maintain close contact between the filter and the filter interface. The filter thus prepared is mounted on a polypropylene case of the same size, and the organic and inorganic composite ion exchange filter 7 is manufactured by covering and fixing the outer packing 6 so that the nonwoven fabric is not separated. The regeneration method of the present invention uses a regeneration solution within 60 ° C or a method of regenerating using a regeneration solution after steam washing first. In addition, the mist generated during the regeneration of the ion exchange fiber of the present invention is characterized in that the adsorption on the activated carbon fiber filter.
상기와 같은 본 발명은 유기휘발 유해성분(VOC)과 SOx, NOx, HCl, HF, H2S와 같은 산성가스, 암모니아, 아민류등과 같은 염기성 가스 및 중금속이온등을 동시에 제거할 수 있고, 기존 활성탄 스크러버 필터와 같이 교체시간이 없고 연속식으로 흡착·재생이 기능하며, 어떤 형태의 스크러버에도 사용이 가능한 장점이 있다.The present invention as described above can remove the organic volatile harmful components (VOC) and acid gases such as SOx, NOx, HCl, HF, H2S, basic gases such as ammonia, amines and heavy metal ions at the same time, the existing activated carbon scrubber Like the filter, there is no replacement time, and it can continuously adsorb and regenerate, and it can be used in any type of scrubber.
특히 본 발명의 스크러버용 필터는 표준규격화가 가능하고 재생가능한 장수명의 필터로 기존 첨착 입상활성탄 스크러버 필터 대체가 가능하고, 규모를 컴팩트하게 제조할 수 있어 소규모의 장치로 기존 대형 스크러버의 효율을 발휘할 수있어 적은 공간에도 설치가능하고, 제조비용이 저렴한 장점이 있다. 그리고 하나의 필터로 동시에 유·무기 가스를 제거할 수 있고, 간단히 재생이 가능하여 장기간 교체없이 사용가능한 장점을 지니고 있다.In particular, the scrubber filter of the present invention is a standardized and renewable long life filter can replace the existing impregnated granular activated carbon scrubber filter, and can be manufactured in a compact size to exhibit the efficiency of the existing large scrubber with a small device There is an advantage that can be installed in a small space, the manufacturing cost is low. In addition, one filter can remove organic and inorganic gases at the same time, and can be easily regenerated, so it can be used for a long time without replacement.
또한 본 발명의 필터로 처리한 이온성 가스는 화학적 결합에 의해 재생액을 사용하지 않는한 탈착되지 않으며 무기 필터에 는 주로 휘발성 유기성분이 흡착되고 일부 이온성 가스도 흡착되어 기존 필터에 비해 성능이 우수하여 유해가스의 완벽한 처리가 가능한 장점이 있다.In addition, the ionic gas treated with the filter of the present invention is not desorbed unless a regeneration solution is used by chemical bonding, and the inorganic filter mainly absorbs volatile organic components, and some ionic gases are also adsorbed. Therefore, there is an advantage that the perfect treatment of harmful gases is possible.
도 1은 본 발명의 유·무기 복합 이온교환 필터의 분해사시도.1 is an exploded perspective view of an organic-inorganic composite ion exchange filter of the present invention.
[도 1의 주요부분에 대한 설명][Description of the main part of Figure 1]
(1) : 혼성 부직포 (2) : PP 보호 부직포(1): hybrid nonwoven fabric (2): PP protective nonwoven fabric
(3) : 부직포 접착 판 (4) : 요철형 지지대(3): nonwoven adhesive plate (4): uneven support
(5) : 내부패킹 (6) : 외부패킹(5): Inner packing (6): Outer packing
(7) : 유·무기 복합 이온교환 필터(7): organic / inorganic composite ion exchange filter
Claims (7)
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| KR101652273B1 (en) * | 2014-01-17 | 2016-08-30 | 코아텍주식회사 | Filler using polymer binders and its manufacturing method |
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| JPH0259018A (en) * | 1988-08-26 | 1990-02-28 | Japan Atom Energy Res Inst | Air cleaner |
| KR940013575A (en) * | 1992-12-31 | 1994-07-15 | 이승동 | Water treatment column |
| JPH06198123A (en) * | 1992-11-05 | 1994-07-19 | Toshiba Eng & Constr Co Ltd | Method for purifying gas and filter for gas filtration |
| JPH10128040A (en) * | 1996-11-01 | 1998-05-19 | Ebara Corp | Corrugate lamination type air filter |
| KR20010017456A (en) * | 1999-08-11 | 2001-03-05 | 이후근 | The method for treating the exhaust gases in the semiconductor process using the Mixed adsorbent |
| KR20010047588A (en) * | 1999-11-22 | 2001-06-15 | 김태일 | Gas scrubber and its method for removing the poisonous gases from exhaust gases using regenerable ion exchange filter |
| US6299771B1 (en) * | 1997-01-31 | 2001-10-09 | Electrophor, Inc. | Composite adsorbent element |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0259018A (en) * | 1988-08-26 | 1990-02-28 | Japan Atom Energy Res Inst | Air cleaner |
| JPH06198123A (en) * | 1992-11-05 | 1994-07-19 | Toshiba Eng & Constr Co Ltd | Method for purifying gas and filter for gas filtration |
| KR940013575A (en) * | 1992-12-31 | 1994-07-15 | 이승동 | Water treatment column |
| JPH10128040A (en) * | 1996-11-01 | 1998-05-19 | Ebara Corp | Corrugate lamination type air filter |
| US6299771B1 (en) * | 1997-01-31 | 2001-10-09 | Electrophor, Inc. | Composite adsorbent element |
| KR20010017456A (en) * | 1999-08-11 | 2001-03-05 | 이후근 | The method for treating the exhaust gases in the semiconductor process using the Mixed adsorbent |
| KR20010047588A (en) * | 1999-11-22 | 2001-06-15 | 김태일 | Gas scrubber and its method for removing the poisonous gases from exhaust gases using regenerable ion exchange filter |
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