KR100445298B1 - Interface board - Google Patents
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- KR100445298B1 KR100445298B1 KR10-2002-0024500A KR20020024500A KR100445298B1 KR 100445298 B1 KR100445298 B1 KR 100445298B1 KR 20020024500 A KR20020024500 A KR 20020024500A KR 100445298 B1 KR100445298 B1 KR 100445298B1
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- valve
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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Abstract
본 발명은 인터페이스 보드에 관한 것으로, 보다 상세하게는 디알엠 장비와 같은 반도체 제조에 관한 에칭장비의 메인시스템 컨트롤러로부터 게이트밸브 및 각도제어밸브의 개폐신호를 수신하여 이에 따라 펜더럼밸브의 개폐를 제어하고 팬더럼밸브의 개폐상태 신호를 수신하여 메인시스템 컨트롤러로 송신하기 위한 인터페이스 보드에 관한 것이다.The present invention relates to an interface board, and more particularly, to receive an opening / closing signal of a gate valve and an angle control valve from a main system controller of an etching equipment related to semiconductor manufacturing, such as a DRAM device, thereby controlling opening and closing of a pendulum valve. And an interface board for receiving an open / closed state signal of the panderum valve and transmitting the signal to the main system controller.
Description
본 발명은 인터페이스 보드에 관한 것으로, 보다 상세하게는 디알엠 장비와 같은 반도체 제조에 관한 에칭장비의 메인시스템 컨트롤러로부터 게이트밸브 및 각도제어밸브의 개폐신호를 수신하여 이에 따라 펜더럼밸브의 개폐를 제어하고 팬더럼밸브의 개폐상태 신호를 수신하여 메인시스템 컨트롤러로 송신하기 위한 인터페이스 보드에 관한 것이다.The present invention relates to an interface board, and more particularly, to receive an opening / closing signal of a gate valve and an angle control valve from a main system controller of an etching equipment related to semiconductor manufacturing, such as a DRAM device, thereby controlling opening and closing of a pendulum valve. And an interface board for receiving an open / closed state signal of the panderum valve and transmitting the signal to the main system controller.
일본의 도쿄일렉트론사의 디알엠(DRM)장비와 같은 반도체 에칭장비에는 웨이퍼 처리실의 가스를 배기시키기 위한 배기부가 구성되어 있다.Semiconductor etching equipment such as Tokyo Electron Corporation's DRM equipment is provided with an exhaust portion for exhausting gas from the wafer processing chamber.
종래 반도체 에칭장비의 배기부는 펌프(TMP)와 배기량의 조절을 위한 게이트밸브와 각도조절밸브(APC; Angle Pressure Control) 등으로 구성되며, 펌프는 800와트의 출력을 가진 것이 일반적이다.The exhaust part of the conventional semiconductor etching equipment is composed of a pump (TMP), a gate valve for controlling the displacement, an angle control valve (APC), and the like, and the pump generally has an output of 800 watts.
근래에는 상기 게이트밸브와 각도조절밸브의 기능을 함께 가진 펜더럼밸브(Pendulum Valve)와 고출력인 1300 또는 1400와트의 출력을 가진 펌프가 개발되어 있으며, 배기부의 성능향상을 위하여 이러한 펜더럼밸브와 고출력 펌프를 사용할 필요성이 있다.Recently, a pendulum valve having a function of the gate valve and an angle control valve and a pump having a high output of 1300 or 1400 watts have been developed, and such a pendulum valve and a high output have been developed to improve the performance of the exhaust part. There is a need to use a pump.
따라서, 기존의 게이트밸브와 각도조절밸브 등으로 구성된 장비에서 메인시스템 컨트롤러 및 응용소프트웨어 등을 변경시키지 않고도 게이트밸브와 각도조절밸브 대신에 펜더럼밸브를 사용할 수 있도록 해주는 장치가 요구되고 있다.Therefore, there is a need for a device that allows a pendulum valve to be used in place of the gate valve and the angle control valve without changing the main system controller and the application software in the equipment consisting of the existing gate valve and the angle control valve.
본 발명의 목적은 상기와 같은 제반 요구사항을 해소하기 위해 발명된 것으로, 디알엠 장비와 같은 반도체 제조에 관한 에칭장비의 메인 시스템컨트롤러로부터 게이트밸브 및 각도제어밸브의 개폐신호를 수신하여 이를 펜더럼밸브의 개폐신호로 변환하여 송신하고 펜더럼밸브의 개폐상태 신호를 수신하여 메인시스템 컨트롤러로 송신하는 인터페이스 보드를 제공함에 있다.An object of the present invention was invented to solve the above requirements, and receives the opening and closing signals of the gate valve and the angle control valve from the main system controller of the etching equipment related to the semiconductor manufacturing, such as DRM equipment, and this is the fender The present invention provides an interface board that converts and transmits an open / closed signal of a valve and receives an open / closed state signal of a pendulum valve to a main system controller.
도 1은 본 발명에 따른 인터페이스 보드의 구성도이다.1 is a block diagram of an interface board according to the present invention.
도 2는 본 발명에 따른 인터페이스 보드가 적용된 에칭장비의 배기부를 나타내는 도면이다.2 is a view showing an exhaust portion of the etching equipment to which the interface board according to the present invention is applied.
< 도면의 주요부분에 대한 부호의 설명 ><Description of Symbols for Major Parts of Drawings>
10 - 게이트밸브 개폐신호 수신부10-Gate valve open / close signal receiver
20 - 각도제어밸브 개폐신호 수신부20-Angle control valve open / close signal receiver
30 - 펜더럼밸브 개폐상태신호 수신부30-Pendulum valve open / close status signal receiver
40 - 제어부40-control unit
50 - 펜더럼밸브 개폐신호 송신부50-Pendulum valve open / close signal transmitter
60 - 메인시스템 컨트롤러60-Main System Controller
70 - 펜더럼밸브 컨트롤러70-Pendulum Valve Controller
80 - 펜더럼밸브80-Pendulum Valve
100 - 인터페이스 보드100-interface board
200 - 웨이퍼 처리실200-wafer processing chamber
300 - 펌프300-pump
상기와 같은 목적을 달성하기 위하여 본 발명에 따른 인터페이스 보드는 메인시스템 컨트롤러로부터 게이트밸브의 개폐신호를 수신하는 게이트밸브 개폐신호 수신부와, 메인시스템 컨트롤러로부터 각도제어밸브의 개폐신호를 수신하는 각도제어밸브 개폐신호 수신부와, 펜더럼밸브 컨트롤러로부터 펜더럼밸브의 개폐상태신호를 수신하는 펜더럼밸브 개폐상태신호 수신부와, 상기 게이트밸브 개폐신호 수신부와 각도제어밸브 개폐신호 수신부에 수신된 게이트밸브 개폐신호 및 각도제어밸브 개폐신호로부터 펜더럼밸브 개폐신호를 생성하고 상기 펜더럼밸브 개폐상태신호 수신부에 수신된 펜더럼밸브 개폐상태신호를 메인시스템 컨트롤러로 송신하는 제어부와, 상기 제어부의 펜더럼밸브 개폐신호를 펜더럼밸브 컨트롤러로 송신하는 펜더럼밸브 개폐신호 송신부로 구성되는 것을 특징으로 한다.In order to achieve the above object, an interface board according to the present invention includes a gate valve open / close signal receiving unit for receiving an open / close signal of a gate valve from a main system controller, and an angle control valve for receiving an open / close signal of an angle control valve from a main system controller. An open / close signal receiving unit, a pendulum valve open / close state signal receiving unit for receiving the open / close state signal of the pendulum valve from the pendulum valve controller, a gate valve open / close signal received by the gate valve open / close signal receiving unit and the angle control valve open / close signal receiving unit; A control unit for generating a pendulum valve opening / closing signal from an angle control valve opening / closing signal and transmitting a pendulum valve opening / closing state signal received to the pendulum valve opening / closing state signal receiving unit to a main system controller; Pendulum valves sent to the pendulum valve controller It is characterized by consisting of the open and close signal transmitter.
이하 첨부된 도면을 참조하여 본 발명에 따른 바람직한 실시예를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명에 따른 인터페이스 보드의 구성도로서, 본 발명은 게이트밸브 개폐신호 수신부(10), 각도제어밸브 개폐신호 수신부(20), 펜더럼밸브 개폐상태신호 수신부(30), 제어부(40), 펜더럼밸브 개폐신호 송신부(50)로 구성된다.1 is a block diagram of an interface board according to the present invention, the present invention is a gate valve opening and closing signal receiving unit 10, angle control valve opening and closing signal receiving unit 20, pendulum valve opening and closing state signal receiving unit 30, the control unit 40 And a pendulum valve open / close signal transmitter 50.
상기 게이트밸브 개폐신호 수신부(10)는 반도체 제조에 관한 에칭장비의 메인시스템 컨트롤러(60)로부터 게이트밸브 개폐신호를 수신하여 제어부(40)로 송신하며, 상기 각도제어밸브 개폐신호 수신부(20)는 메인시스템 컨트롤러(60)로부터 각도제어밸브 개폐신호를 수신하여 제어부(40)로 송신한다.The gate valve open / close signal receiving unit 10 receives the gate valve open / close signal from the main system controller 60 of the etching equipment related to semiconductor manufacturing and transmits it to the control unit 40, and the angle control valve open / close signal receiving unit 20 is An angle control valve open / close signal is received from the main system controller 60 and transmitted to the control unit 40.
상기 펜더럼밸브 개폐상태신호 수신부(30)는 펨더럼밸브(80)의 제어장치인 펜더럼밸브 컨트롤러(70)(VAT Controller)로부터 펜더럼밸브(80)의 개폐상태신호, 즉 펜더럼밸브(80)가 오픈된 상태인지 폐쇄된 상태인지 여부를 나타내는 신호를 수신하여 제어부(40)에 송신한다.The pendulum valve opening / closing state signal receiving unit 30 is an open / close state signal of the pendulum valve 80 from a pendulum valve controller 70 (VAT controller) that is a control device of the femder valve 80, that is, a pendulum valve ( Receives a signal indicating whether 80 is in an open state or a closed state and transmits the signal to the controller 40.
상기 제어부(40)는 게이트밸브 개폐신호 수신부(10)에 수신된 게이트밸브 개폐신호와 각도제어밸브 개폐신호 수신부(20)에 수신된 각도제어밸브 개폐신호로부터 펜더럼밸브(80)의 개폐신호를 생성한다. 예컨대, 일본의 도쿄일렉트론사의 디알엠장비에 있어서는 게이트밸브 개폐신호인 PB-2를 펜더럼밸브에 사용되는 PB-6으로 변환하고 각도제어밸브 개폐신호는 변환없이 펜더럼밸브(80) 개폐신호를 생성함이 바람직하다.The control unit 40 receives the opening / closing signal of the pendulum valve 80 from the gate valve opening / closing signal received by the gate valve opening / closing signal receiving unit 10 and the angle control valve opening / closing signal received by the angle control valve opening / closing signal receiving unit 20. Create For example, in Japan's Tokyo Electron's DLM equipment, the gate valve open / close signal PB-2 is converted to PB-6 used in the pendulum valve, and the angle control valve open / close signal is converted to the pendulum valve 80 open / close signal without conversion. It is preferable to produce.
또한, 제어부(40)는 펜더럼밸브 개폐상태신호 수신부(30)에 수신된 펜더럼밸브 개폐상태신호를 메인시스템 컨트롤러(60)로 송신한다.In addition, the control unit 40 transmits the pendulum valve opening / closing state signal received by the pendulum valve opening / closing state signal receiving unit 30 to the main system controller 60.
상기 펜더럼밸브 개폐신호 송신부(50)는 제어부(40)에서 생성된 펜더럼밸브(80) 개폐신호를 펜더럼밸브 컨트롤러(70)로 송신하며, 이 신호에 의해 펜더럼밸브(80)의 개폐가 제어된다.The pendulum valve open / close signal transmitter 50 transmits a pendulum valve 80 open / close signal generated by the controller 40 to the pendulum valve controller 70, and the pendulum valve 80 opens and closes according to the signal. Is controlled.
도 2는 본 발명에 따른 인터페이스 보드가 적용된 에칭장비의 배기부를 나타내는 도면이며, 웨이퍼 처리실(200)과 펌프(300) 사이에 설치된 펜더럼밸브(80)의 개폐에 의해 웨이퍼 처리실(200)의 배기가 이루어진다.2 is a view showing an exhaust portion of an etching apparatus to which the interface board according to the present invention is applied, and exhausts the wafer processing chamber 200 by opening and closing the pendulum valve 80 provided between the wafer processing chamber 200 and the pump 300. Is done.
기존의 게이트밸브와 각도제어밸브가 설치된 에칭장비에서 게이트밸브와 각도제어밸브를 제거하고 펜더럼밸브(80)를 설치하게 되면, 메인시스템 컨트롤러(60)의 게이트밸브 개폐신호와 각도제어밸브 개폐신호를 펜더럼밸브 컨트롤러(70)에 그대로 송신하면 펜더럼밸브(80)가 제대로 동작하지 않는다. 따라서, 도 2에서와 같이, 본 발명에 의한 인터페이스 보드(100)는 메인시스템 컨트롤러(60)와 펜더럼밸브 컨트롤러(70)를 상호 연결하는 기능을 담당하게 된다.When the gate valve and the angle control valve are removed from the etching equipment in which the existing gate valve and the angle control valve are installed and the pendulum valve 80 is installed, the gate valve open / close signal and the angle control valve open / close signal of the main system controller 60 are installed. If it is sent to the pendulum valve controller 70 as it is, the pendulum valve 80 does not operate properly. Therefore, as shown in Figure 2, the interface board 100 according to the present invention is responsible for the function of interconnecting the main system controller 60 and the pendulum valve controller 70.
이상 본 발명의 바람직한 실시예를 상술하였지만, 본 발명은 상술한 특정의 바람직한 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형의 실시가 가능한 것은 물론이고, 그와 같은 변경은 청구범위 기재의 범위 내에 있게 된다.Although the preferred embodiments of the present invention have been described above, the present invention is not limited to the specific preferred embodiments described above, and the general knowledge in the technical field to which the present invention pertains without departing from the gist of the present invention claimed in the claims. Anyone with a variety of changes can be made, of course, such changes are within the scope of the claims.
이상 설명한 바와 같이 본 발명에 의하면, 반도체 제조에 관한 에칭장비에 있어서, 기존의 장비에서 메인시스템 컨트롤러나 응용소프트웨어의 변환없이도 게이트밸브와 각도제어밸브 대신에 펜더럼밸브를 사용할 수 있게 되므로, 에칭장비의 배기부의 성능 및 효율을 적은 비용으로 현저히 개선할 수 있게 된다.As described above, according to the present invention, in the etching equipment for semiconductor manufacturing, since the pendulum valve can be used instead of the gate valve and the angle control valve in the existing equipment without changing the main system controller or application software, the etching equipment It is possible to remarkably improve the performance and efficiency of the exhaust portion of the fuel cell at a low cost.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08321446A (en) * | 1995-05-24 | 1996-12-03 | Kokusai Electric Co Ltd | Exhaust controlling system for processing chamber of multiple semiconductor manufacturing system |
| KR20010091858A (en) * | 2000-03-14 | 2001-10-23 | 고미야 히로요시 | Etching device |
| KR20020071765A (en) * | 2001-03-07 | 2002-09-13 | 어플라이드 머티어리얼스, 인코포레이티드 | Valve control system for atomic layer deposition chamber |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08321446A (en) * | 1995-05-24 | 1996-12-03 | Kokusai Electric Co Ltd | Exhaust controlling system for processing chamber of multiple semiconductor manufacturing system |
| KR20010091858A (en) * | 2000-03-14 | 2001-10-23 | 고미야 히로요시 | Etching device |
| KR20020071765A (en) * | 2001-03-07 | 2002-09-13 | 어플라이드 머티어리얼스, 인코포레이티드 | Valve control system for atomic layer deposition chamber |
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| Publication number | Publication date |
|---|---|
| KR20030086125A (en) | 2003-11-07 |
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