KR100433320B1 - 침지시스템 - Google Patents
침지시스템 Download PDFInfo
- Publication number
- KR100433320B1 KR100433320B1 KR10-1998-0036412A KR19980036412A KR100433320B1 KR 100433320 B1 KR100433320 B1 KR 100433320B1 KR 19980036412 A KR19980036412 A KR 19980036412A KR 100433320 B1 KR100433320 B1 KR 100433320B1
- Authority
- KR
- South Korea
- Prior art keywords
- refractive index
- lens
- layer
- semiconductor
- immersion system
- Prior art date
Links
- 238000007654 immersion Methods 0.000 title claims abstract description 40
- 239000004065 semiconductor Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000002834 transmittance Methods 0.000 claims abstract description 3
- 239000010410 layer Substances 0.000 claims description 32
- 239000011241 protective layer Substances 0.000 claims description 11
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 230000006698 induction Effects 0.000 claims description 3
- 230000001939 inductive effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 3
- 238000003860 storage Methods 0.000 abstract description 31
- 239000011521 glass Substances 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 229920005372 Plexiglas® Polymers 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1365—Separate or integrated refractive elements, e.g. wave plates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/027—Mountings, adjusting means, or light-tight connections, for optical elements for lenses the lens being in the form of a sphere or ball
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10532—Heads
- G11B11/10541—Heads for reproducing
- G11B11/10543—Heads for reproducing using optical beam of radiation
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/1055—Disposition or mounting of transducers relative to record carriers
- G11B11/1058—Flying heads
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
- G11B33/12—Disposition of constructional parts in the apparatus, e.g. of power supply, of modules
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/17—Construction or disposition of windings
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Head (AREA)
- Lenses (AREA)
Abstract
Description
Claims (12)
- 평평한 표면과 휘어진 표면을 가진 구 세그먼트의 형태를 가지며, 저장 장치에 사용되는 파장(λ)의 전자기 광선(2)을 투과시키고 공기 보다 높은 제 1 굴절률(n1)을 가진 재료로 이루어진 렌즈(3)를 포함하는, 자기 광학 저장 장치용 침지 시스템(1)에 있어서, 전자기 광선(2)의 확장 방향으로 볼 때 렌즈(3) 다음에 전자기 광선에 대해 투과성을 가진 고굴절 층(4)이 배치되고, 렌즈(2)의 평평한 표면(5)과 상기 층(4)의 제 1 주표면(6)은 서로를 향하고 있으며, 상기 층(4)은 렌즈(3) 재료의 제 1 굴절률(n1) 보다 큰 제 2 굴절률(n2)을 가진 재료로 이루어지는 것을 특징으로 하는 침지 시스템.
- 제 1항에 있어서, 상기 고굴절 층(4)은 파장(λ)을 가진 광선(2)에 대해 투과성을 가진 반도체 재료로 이루어지는 것을 특징으로 하는 침지 시스템.
- 제 2항에 있어서, 파장(λ)에 따라 반도체 재료가 그룹 SiC, GaP, Si, Ge, GaAs로 이루어지는 것을 특징으로 하는 침지 시스템.
- 제 1항 내지 3항 중 어느 한 항에 있어서, 상기 고굴절 층(4)은 제 1 주표면(6)에 마주놓인 제 2 주표면(7)에 파장(λ)의 광선(2)에 대해 투과성을 가진보호층(8)을 가지며, 상기 보호층(8)은 층(4)의 반도체 재료 보다 높은 경도를 갖고 광학적으로 작용하지 않는 것을 특징으로 하는 침지 시스템.
- 제 1항 내지 3항 중 어느 한 항에 있어서, 상기 고굴절 층(4)은 반도체 플레이트(10)로 형성되고, 상기 반도체 플레이트(10)의 제 1 주표면(6)상에는 렌즈(3)의 평평한 표면(5)이 배치되며, 상기 반도체 플레이트의 두께(dHL)는 (r-hl)*n2이고, 상기 식에서 r 은 렌즈(3)의 휘어진 표면(15)의 곡률 반경이며 hL은 상기 휘어진 표면(15)의 높이인 것을 특징으로 하는 침지 시스템.
- 제 4 항에 있어서, 상기 고굴절 층(4)은 반도체 플레이트(10)로 형성되고, 상기 반도체 플레이트(10)의 제 1 주표면(6)상에는 렌즈(3)의 평평한 표면(5)이 배치되며, 상기 반도체 플레이트의 두께(dHL)는 (r-hl)*n2이고, 상기 식에서 r 은 렌즈(3)의 휘어진 표면(15)의 곡률 반경이며 hL은 상기 휘어진 표면(15)의 높이인 것을 특징으로 하는 침지 시스템.
- 제 1항 내지 3항 중 어느 한 항에 있어서, 렌즈(3)의 평평한 표면(5)은 광선(2)에 대해 투과성을 가진, 제 3 굴절률(n3)의 지지체 플레이트(11)의 제 1 주표면(12)상에 배치되고, 지지체 플레이트(11)의 제 1 주표면(12)에 마주놓인 지지체 플레이트(11)의 제 2 주표면(13)상에는 고굴절 층(4)이 제공되며, 굴절률은 n1≤ n3< n2인 것을 특징으로 하는 침지 시스템.
- 제 4 항에 있어서, 렌즈(3)의 평평한 표면(5)은 광선(2)에 대해 투과성을 가진, 제 3 굴절률(n3)의 지지체 플레이트(11)의 제 1 주표면(12)상에 배치되고, 지지체 플레이트(11)의 제 1 주표면(12)에 마주놓인 지지체 플레이트(11)의 제 2 주표면(13)상에는 고굴절 층(4)이 제공되며, 굴절률은 n1≤ n3< n2인 것을 특징으로 하는 침지 시스템.
- 제 1항 내지 3항 중 어느 한 항에 있어서, 유도 장치(14), 특히 코일이 고굴절 층(4)에 제공되는 것을 특징으로 하는 침지 시스템.
- 제 7 항에 있어서, 유도 장치(14), 특히 코일이 고굴절 층(4)에 제공되는 것을 특징으로 하는 침지 시스템.
- 제 9항에 있어서, 적어도 하나의 포토 다이오드가 유도 장치(14)에 전류를 공급하기 위해 제공되는 것을 특징으로 하는 침지 시스템.
- 제 10항에 있어서, 적어도 하나의 포토 다이오드가 유도 장치(14)에 전류를공급하기 위해 제공되는 것을 특징으로 하는 침지 시스템.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19738985.6 | 1997-09-05 | ||
DE19738985 | 1997-09-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR19990029524A KR19990029524A (ko) | 1999-04-26 |
KR100433320B1 true KR100433320B1 (ko) | 2004-07-16 |
Family
ID=7841384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1998-0036412A KR100433320B1 (ko) | 1997-09-05 | 1998-09-04 | 침지시스템 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6091694A (ko) |
EP (1) | EP0911653B1 (ko) |
JP (1) | JP4109355B2 (ko) |
KR (1) | KR100433320B1 (ko) |
DE (1) | DE59813644D1 (ko) |
TW (1) | TW408324B (ko) |
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US6307818B1 (en) * | 1998-06-09 | 2001-10-23 | Seagate Technology Llc | Magneto-optical head with integral mounting of lens holder and coil |
JP2000113484A (ja) * | 1998-10-07 | 2000-04-21 | Sony Corp | 光学ヘッド用スライダ |
KR100571984B1 (ko) * | 1999-05-17 | 2006-04-17 | 삼성전자주식회사 | 기록밀도가 향상되는 광기록매체 및 이를 이용하는 광기록/재생장치 |
US6494753B1 (en) | 1999-08-02 | 2002-12-17 | Swenco Products, Inc. | No-crimp electrical connector side-by-side type and method |
AU7686300A (en) | 1999-10-15 | 2001-04-23 | Hitachi Maxell, Ltd. | Magnetooptic recording medium and magnetooptic recorder |
US7064355B2 (en) * | 2000-09-12 | 2006-06-20 | Lumileds Lighting U.S., Llc | Light emitting diodes with improved light extraction efficiency |
US7053419B1 (en) | 2000-09-12 | 2006-05-30 | Lumileds Lighting U.S., Llc | Light emitting diodes with improved light extraction efficiency |
JP2002141556A (ja) | 2000-09-12 | 2002-05-17 | Lumileds Lighting Us Llc | 改良された光抽出効果を有する発光ダイオード |
JP4569800B2 (ja) * | 2000-11-22 | 2010-10-27 | ソニー株式会社 | 光学ピックアップ装置及びディスクドライブ装置 |
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US6987613B2 (en) | 2001-03-30 | 2006-01-17 | Lumileds Lighting U.S., Llc | Forming an optical element on the surface of a light emitting device for improved light extraction |
US7412143B2 (en) * | 2002-06-28 | 2008-08-12 | Seagate Technology Llc | Heat assisted magnetic recording with heat profile shaping |
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US6795630B2 (en) * | 2002-06-28 | 2004-09-21 | Seagate Technology Llc | Apparatus and method for producing a small spot of optical energy |
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US7272079B2 (en) * | 2004-06-23 | 2007-09-18 | Seagate Technology Llc | Transducer for heat assisted magnetic recording |
JP2006114196A (ja) * | 2004-09-14 | 2006-04-27 | Sony Corp | ソリッドイマージョンレンズとこれを用いた集光レンズ、光学ピックアップ装置、光記録再生装置及びソリッドイマージョンレンズの形成方法 |
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US7419839B2 (en) * | 2004-11-12 | 2008-09-02 | Philips Lumileds Lighting Company, Llc | Bonding an optical element to a light emitting device |
US7462502B2 (en) | 2004-11-12 | 2008-12-09 | Philips Lumileds Lighting Company, Llc | Color control by alteration of wavelength converting element |
US20060182393A1 (en) * | 2005-02-11 | 2006-08-17 | Seagate Technology Llc | System for confined optical power delivery and enhanced optical transmission efficiency |
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TW409248B (en) * | 1996-05-01 | 2000-10-21 | Terastor Corp | Flying head with solid immersion lens |
US5883872A (en) * | 1997-05-29 | 1999-03-16 | The Board Of Trustees Of The Leland Stanford Junior University | Near field magneto-optical recording system employing slit illumination |
-
1998
- 1998-08-21 DE DE59813644T patent/DE59813644D1/de not_active Expired - Lifetime
- 1998-08-21 EP EP98115824A patent/EP0911653B1/de not_active Expired - Lifetime
- 1998-08-27 TW TW087114169A patent/TW408324B/zh not_active IP Right Cessation
- 1998-09-03 JP JP24925498A patent/JP4109355B2/ja not_active Expired - Lifetime
- 1998-09-04 KR KR10-1998-0036412A patent/KR100433320B1/ko not_active IP Right Cessation
- 1998-09-08 US US09/149,814 patent/US6091694A/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5121256A (en) * | 1991-03-14 | 1992-06-09 | The Board Of Trustees Of The Leland Stanford Junior University | Lithography system employing a solid immersion lens |
US5497359A (en) * | 1994-08-30 | 1996-03-05 | National Business Machines Corporation | Optical disk data storage system with radiation-transparent air-bearing slider |
Also Published As
Publication number | Publication date |
---|---|
EP0911653B1 (de) | 2006-07-19 |
KR19990029524A (ko) | 1999-04-26 |
EP0911653A1 (de) | 1999-04-28 |
JP4109355B2 (ja) | 2008-07-02 |
JPH11144300A (ja) | 1999-05-28 |
DE59813644D1 (de) | 2006-08-31 |
US6091694A (en) | 2000-07-18 |
TW408324B (en) | 2000-10-11 |
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