KR100418649B1 - 연마패드용 우레탄 성형물 및 그 제조방법 - Google Patents
연마패드용 우레탄 성형물 및 그 제조방법 Download PDFInfo
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- KR100418649B1 KR100418649B1 KR10-1999-0035130A KR19990035130A KR100418649B1 KR 100418649 B1 KR100418649 B1 KR 100418649B1 KR 19990035130 A KR19990035130 A KR 19990035130A KR 100418649 B1 KR100418649 B1 KR 100418649B1
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- Prior art keywords
- polishing
- active hydrogen
- weight
- containing compound
- urethane
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
- C08J9/32—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof from compositions containing microballoons, e.g. syntactic foams
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/08—Processes
- C08G18/10—Prepolymer processes involving reaction of isocyanates or isothiocyanates with compounds having active hydrogen in a first reaction step
- C08G18/12—Prepolymer processes involving reaction of isocyanates or isothiocyanates with compounds having active hydrogen in a first reaction step using two or more compounds having active hydrogen in the first polymerisation step
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/48—Polyethers
- C08G18/4854—Polyethers containing oxyalkylene groups having four carbon atoms in the alkylene group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/65—Low-molecular-weight compounds having active hydrogen with high-molecular-weight compounds having active hydrogen
- C08G18/66—Compounds of groups C08G18/42, C08G18/48, or C08G18/52
- C08G18/6666—Compounds of group C08G18/48 or C08G18/52
- C08G18/667—Compounds of group C08G18/48 or C08G18/52 with compounds of group C08G18/32 or polyamines of C08G18/38
- C08G18/6674—Compounds of group C08G18/48 or C08G18/52 with compounds of group C08G18/32 or polyamines of C08G18/38 with compounds of group C08G18/3203
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2203/00—Foams characterized by the expanding agent
- C08J2203/22—Expandable microspheres, e.g. Expancel®
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2375/00—Characterised by the use of polyureas or polyurethanes; Derivatives of such polymers
- C08J2375/04—Polyurethanes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249971—Preformed hollow element-containing
- Y10T428/249972—Resin or rubber element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249986—Void-containing component contains also a solid fiber or solid particle
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
- Polyurethanes Or Polyureas (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
시료 번호 |
반응혼합물 중의 물의 첨가량 (중량%) |
연마속도 (Å/분) |
평탄성 (%) |
1 (비교예) | 0 | 1830±30 | 7±1 |
2 | 0.003 | 1910±20 | 6±1 |
3 | 0.005 | 1930±20 | 6±1 |
4 | 0.02 | 1950±20 | 6±1 |
5 | 0.03 | 1950±20 | 6±1 |
6 | 0.05 | 1970±20 | 6±1 |
7 | 0.5 | 1970±20 | 6±1 |
8 | 0.8 | 1970±40 | 9±2 |
시료 번호 |
팽창된 미소중공구체의 첨가량 (활성수소함유 화합물 432부에 대한 중량부) |
우레탄프리폴리머와 활성수소함유 화합물의 합계 100중량부에 대한 팽창된 미소중공구체의 첨가량 (중량부) |
물의 첨가량 (중량%) |
연마속도 (Å/분) |
평탄성 (%) |
12 | 0.7 | 0.05 | 0.02 | 1820±20 | 8±1 |
13 | 2 | 1.14 | 0.02 | 1890±20 | 6±1 |
14 | 29 | 2.03 | 0.02 | 1930±20 | 6±1 |
15 | 77 | 5.38 | 0.02 | 1940±20 | 6±1 |
16 | 143 | 9.99 | 0.02 | 1950±20 | 6±1 |
17 | 286 | 19.97 | 0.02 | 1960±30 | 9±2 |
시료 번호 |
물의 첨가량 (중량%) |
연마속도 (Å/분) |
평탄성 (%) |
18 (비교예) | 0 | 1820±30 | 5±1 |
19 | 0.003 | 1900±20 | 5±1 |
20 | 0.005 | 1940±20 | 5±1 |
21 | 0.02 | 1950±20 | 5±1 |
22 | 0.03 | 1960±20 | 5±1 |
23 | 0.05 | 1960±20 | 5±1 |
24 | 0.5 | 1970±20 | 5±1 |
25 | 0.8 | 1980±40 | 8±2 |
시료 번호 |
미발포 가열팽창성 미소구상체의 첨가량 (활성수소함유 화합물 432부에 대한 중량부) |
우레탄프리폴리머와 활성수소함유 화합물의 합계 100중량부에 대한 첨가량 (중량부) |
물의 첨가량 (중량%) |
연마속도 (Å/분) |
평탄성 (%) |
30 | 1 | 0.06 | 0.02 | 1830±20 | 6±1 |
31 | 2 | 0.13 | 0.02 | 1900±20 | 5±1 |
32 | 29 | 2.03 | 0.02 | 1940±20 | 5±1 |
33 | 77 | 5.38 | 0.02 | 1950±20 | 5±1 |
34 | 143 | 9.99 | 0.02 | 1960±20 | 5±1 |
35 | 286 | 19.97 | 0.02 | 1960±30 | 8±2 |
Claims (13)
- 이소시아네이트기 말단(末端) 우레탄프리폴리머(urethane prepolymer)(B)와 활성수소함유 화합물(C)의 합계 100 중량부에 대해, 미소중공구체(微小中空球體)(A)를 0.1∼10 중량부, (A), (B) 및 (C)의 혼합물에 대해 물(D)을 0.005∼0.5 중량% 혼합하고 성형하여 만들어지는 연마패드(polishing pad)용 우레탄 성형물.
- 제 1항에 있어서,상기 우레탄 성형물 내에 미리 팽창시킨 미소중공구체(A-1)와 물(D)에 의한 기포가 함유되어 있는 것을 특징으로 하는 연마패드용 우레탄 성형물.
- 삭제
- 이소시아네이트기 말단 우레탄프리폴리머(B)와 활성수소함유 화합물(C)의 합계 100 중량부에 대해, 팽창된 미소중공구체(A-1)를 0.1∼10 중량부, (A-1), (B) 및 (C)의 혼합물에 대해 물(D)을 0.005∼0.5 중량% 혼합하고, 성형물 내에 물(D)에 의한 기포를 형성시키는 것을 특징으로 하는 연마패드용 우레탄 성형물의 제조방법.
- 제 4항에 있어서,상기 팽창된 미소중공구체(A-1)를 상기 이소시아네이트기 말단 우레탄프리폴리머(B) 및/또는 상기 활성수소함유 화합물(C)에 미리 혼합하는 것을 특징으로 하는 연마패드용 우레탄 성형물의 제조방법.
- 삭제
- 이소시아네이트기 말단 우레탄프리폴리머(B)와 활성수소함유 화합물(C)의 합계 100 중량부에 대해, 미발포(未發泡) 가열팽창성 미소구상체(微小球狀體)(A-2)를 0.1∼10 중량부, (A-2), (B) 및 (C)의 혼합물에 대해 물(D)을 0.005∼0.5 중량% 혼합하고 성형하여 만들어지며, 팽창시킨 미소중공구체(A)에 의한 기포 및 가스화된 물(D)에 의한 기포를 가지는 연마패드용 우레탄 성형물.
- 삭제
- 이소시아네이트기 말단 우레탄프리폴리머(B)와 활성수소함유 화합물(C)의 합계 100 중량부에 대해, 미발포 가열팽창성 미소구상체(A-2)를 0.1∼10 중량부, (A-2), (B) 및 (C)의 혼합물에 대해 물(D)을 0.005∼0.5 중량% 혼합하고, 반응열 및 외부로부터의 가열에 의해 미발포 가열팽창성 미소구상체(A-2)를 발포시키는 동시에, 물(D)에 의한 기포를 형성시키는 것을 특징으로 하는 연마패드용 우레탄 성형물의 제조방법.
- 제 9항에 있어서,상기 미발포 가열팽창성 미소구상체(A-2)를 상기 이소시아네이트기 말단 우레탄프리폴리머(B) 및/또는 상기 활성수소함유 화합물(C)에 미리 혼합하는 것을 특징으로 하는 연마패드용 우레탄 성형물의 제조방법.
- 삭제
- 제 1항에 있어서,상기 활성수소함유 화합물(C)이 디아민계 화합물(C-1) 단독으로, 또는 디아민계 화합물(C-1) 및 분자량이 500∼1000인 저분자 디올(C-2)의 혼합물로 이루어지는 것을 특징으로 하는 연마패드용 우레탄 성형물.
- 제 4항 또는 제 9항에 있어서,상기 활성수소함유 화합물(C)이 디아민계 화합물(C-1) 단독으로, 또는 디아민계 화합물(C-1) 및 분자량이 500∼1000인 저분자 디올(C-2)의 혼합물로 이루어지는 것을 특징으로 하는 연마패드용 우레탄 성형물의 제조방법.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15742199A JP3316757B2 (ja) | 1999-06-04 | 1999-06-04 | 研磨パッド用ウレタン成形物の製造方法及び研磨パッド用ウレタン成形物 |
JP99-157420 | 1999-06-04 | ||
JP99-157421 | 1999-06-04 | ||
JP15742099A JP3316756B2 (ja) | 1999-06-04 | 1999-06-04 | 研磨パッド用ウレタン成形物の製造方法及び研磨パッド用ウレタン成形物 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010005435A KR20010005435A (ko) | 2001-01-15 |
KR100418649B1 true KR100418649B1 (ko) | 2004-02-11 |
Family
ID=26484888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1999-0035130A KR100418649B1 (ko) | 1999-06-04 | 1999-08-24 | 연마패드용 우레탄 성형물 및 그 제조방법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6627671B1 (ko) |
EP (1) | EP1057841B1 (ko) |
KR (1) | KR100418649B1 (ko) |
TW (1) | TWI228522B (ko) |
Cited By (2)
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KR101186531B1 (ko) | 2009-03-24 | 2012-10-08 | 차윤종 | 폴리우레탄 다공질체의 제조방법과 그 제조방법에 따른 폴리우레탄 다공질체 및 폴리우레탄 다공질체를 구비한 연마패드 |
KR20180049565A (ko) | 2016-11-03 | 2018-05-11 | 에스케이씨 주식회사 | 연마패드 제조용 자외선 경화형 수지 조성물, 연마패드 및 이의 제조방법 |
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KR20020095941A (ko) * | 2001-06-18 | 2002-12-28 | 조형래 | 반도체 소재 연마용 고분자 연마패드의 제조방법 및 그제조 패드 |
KR100845481B1 (ko) * | 2001-11-13 | 2008-07-10 | 도요 고무 고교 가부시키가이샤 | 연마 패드 및 그 제조 방법 |
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TW592894B (en) * | 2002-11-19 | 2004-06-21 | Iv Technologies Co Ltd | Method of fabricating a polishing pad |
TWI313693B (en) * | 2002-12-17 | 2009-08-21 | Dainippon Ink & Chemicals | Two-component curable polyol composition for foamed grindstone, two-component curable composition for foamed grindstone, foamed grindstone, and method for producing foamed grindstone |
US7129277B2 (en) | 2002-12-31 | 2006-10-31 | 3M Innovative Properties Company | Emulsions including surface-modified inorganic nanoparticles |
US7141612B2 (en) | 2002-12-31 | 2006-11-28 | 3M Innovative Properties Company | Stabilized foams including surface-modified organic molecules |
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SG111222A1 (en) * | 2003-10-09 | 2005-05-30 | Rohm & Haas Elect Mat | Polishing pad |
US20050171224A1 (en) * | 2004-02-03 | 2005-08-04 | Kulp Mary J. | Polyurethane polishing pad |
WO2006027805A1 (en) * | 2004-09-08 | 2006-03-16 | Elachem S.R.L. | Composition and process for the realization of low density expanded products |
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TWI410314B (zh) * | 2005-04-06 | 2013-10-01 | 羅門哈斯電子材料Cmp控股公司 | 藉由反應-射出成形製造多孔化學機械研磨墊之裝置 |
KR100684162B1 (ko) * | 2006-09-29 | 2007-02-22 | 강남화성 (주) | 우레탄 시트용 수지 조성물 및 이를 이용한 우레탄 시트의시공방법 |
US20090062414A1 (en) * | 2007-08-28 | 2009-03-05 | David Picheng Huang | System and method for producing damping polyurethane CMP pads |
US8052507B2 (en) * | 2007-11-20 | 2011-11-08 | Praxair Technology, Inc. | Damping polyurethane CMP pads with microfillers |
WO2010022895A1 (de) * | 2008-08-27 | 2010-03-04 | Bayer Materialscience Ag | Viskoelastische polyurethan- und polyisocyanurat-hartschaumstoffe |
US9056382B2 (en) * | 2009-05-27 | 2015-06-16 | Rogers Corporation | Polishing pad, composition for the manufacture thereof, and method of making and using |
US20150038066A1 (en) * | 2013-07-31 | 2015-02-05 | Nexplanar Corporation | Low density polishing pad |
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KR101186531B1 (ko) | 2009-03-24 | 2012-10-08 | 차윤종 | 폴리우레탄 다공질체의 제조방법과 그 제조방법에 따른 폴리우레탄 다공질체 및 폴리우레탄 다공질체를 구비한 연마패드 |
KR20180049565A (ko) | 2016-11-03 | 2018-05-11 | 에스케이씨 주식회사 | 연마패드 제조용 자외선 경화형 수지 조성물, 연마패드 및 이의 제조방법 |
Also Published As
Publication number | Publication date |
---|---|
EP1057841A2 (en) | 2000-12-06 |
TWI228522B (en) | 2005-03-01 |
EP1057841A3 (en) | 2002-01-09 |
US6627671B1 (en) | 2003-09-30 |
KR20010005435A (ko) | 2001-01-15 |
EP1057841B1 (en) | 2012-05-30 |
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