KR100247823B1 - Microwave plasma processing method and apparatus - Google Patents

Microwave plasma processing method and apparatus Download PDF

Info

Publication number
KR100247823B1
KR100247823B1 KR1019990030297A KR19990030297A KR100247823B1 KR 100247823 B1 KR100247823 B1 KR 100247823B1 KR 1019990030297 A KR1019990030297 A KR 1019990030297A KR 19990030297 A KR19990030297 A KR 19990030297A KR 100247823 B1 KR100247823 B1 KR 100247823B1
Authority
KR
South Korea
Prior art keywords
processing method
plasma processing
microwave plasma
microwave
processing
Prior art date
Application number
KR1019990030297A
Other languages
Korean (ko)
Inventor
Saburo Kanai
Yoshinao Kawasaki
Kazuaki Ichihashi
Seiichi Watanabe
Makoto Nawata
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2254162A external-priority patent/JP2613313B2/en
Priority claimed from JP2292049A external-priority patent/JPH04168279A/en
Priority claimed from JP2403054A external-priority patent/JP2646853B2/en
Priority claimed from KR1019910016783A external-priority patent/KR100237587B1/en
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of KR100247823B1 publication Critical patent/KR100247823B1/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B19/00—Slide fasteners
    • A44B19/24—Details
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B19/00—Slide fasteners
    • A44B19/24—Details
    • A44B19/26—Sliders
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B19/00—Slide fasteners
    • A44B19/24—Details
    • A44B19/34—Stringer tapes; Flaps secured to stringers for covering the interlocking members
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B19/00—Slide fasteners
    • A44B19/24—Details
    • A44B19/36—Means for permanently uniting the stringers at the end; Means for stopping movement of slider at the end
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B19/00—Slide fasteners
    • A44B19/24—Details
    • A44B19/38—Means at the end of stringer by which the slider can be freed from one stringer, e.g. stringers can be completely separated from each other
    • A44B19/384—Separable slide fasteners with quick opening devices
    • A44B19/386—Top end stop means for quick opening slide fasteners
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44B—BUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B19/00—Slide fasteners
    • A44B19/24—Details
    • A44B19/38—Means at the end of stringer by which the slider can be freed from one stringer, e.g. stringers can be completely separated from each other
    • A44B19/384—Separable slide fasteners with quick opening devices
    • A44B19/388—Bottom end stop means for quick opening slide fasteners
KR1019990030297A 1990-09-26 1999-07-26 Microwave plasma processing method and apparatus KR100247823B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2254162A JP2613313B2 (en) 1990-09-26 1990-09-26 Microwave plasma processing equipment
JP2292049A JPH04168279A (en) 1990-10-31 1990-10-31 Microwave plasma treating device
JP2403054A JP2646853B2 (en) 1990-12-18 1990-12-18 Microwave plasma processing equipment
KR1019910016783A KR100237587B1 (en) 1990-09-26 1991-09-26 Microwave plasma processing method and apparatus

Publications (1)

Publication Number Publication Date
KR100247823B1 true KR100247823B1 (en) 2000-03-15

Family

ID=27478317

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019990030297A KR100247823B1 (en) 1990-09-26 1999-07-26 Microwave plasma processing method and apparatus

Country Status (1)

Country Link
KR (1) KR100247823B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100454818B1 (en) * 2001-07-31 2004-11-08 주식회사제4기한국 Device and method for disinfection and sterilization by using high density plasma
KR100481785B1 (en) * 1998-10-23 2005-04-11 닛신덴키 가부시키 가이샤 Method and apparatus for forming polycrystal silicon thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100481785B1 (en) * 1998-10-23 2005-04-11 닛신덴키 가부시키 가이샤 Method and apparatus for forming polycrystal silicon thin film
KR100454818B1 (en) * 2001-07-31 2004-11-08 주식회사제4기한국 Device and method for disinfection and sterilization by using high density plasma

Similar Documents

Publication Publication Date Title
EP0478283A3 (en) Microwave plasma processing method and apparatus
GB2251977B (en) Method and apparatus for plasma processing
EP0451943A3 (en) Plasma processing method and apparatus
EP0663683A3 (en) Magnetron plasma processing apparatus and processing method.
EP0445981A3 (en) Plasma etching apparatus and method
GB2265634B (en) Substrate processing apparatus and substrate processing method
EP0584783A3 (en) Method and apparatus for improved processing
DE69416489T2 (en) Microwave plasma processing apparatus and method
SG52614A1 (en) Plasma processing apparatus and plasma processing method
EP0452773A3 (en) Method and apparatus for processing substrate
EP0407911A3 (en) Parallel processing apparatus and parallel processing method
GB9305554D0 (en) Method and apparatus for processing decuments
EP0522296A3 (en) Plasma processing system and method
SG68611A1 (en) Plasma processing apparatus and plasma processing method
EP0140294A3 (en) Plasma processing method and apparatus for carrying out the same
SG47090A1 (en) Plasma processing method and apparatus
ZA941840B (en) Pear processing method and apparatus
GB2244371B (en) Plasma processing apparatus
EP0764969A3 (en) Microwave plasma processing apparatus and microwave plasma processing method
EP0600709A3 (en) Range-image processing apparatus and method.
SG52861A1 (en) Plasma processing method and apparatus
EP0183561A3 (en) Microwave plasma processing process and apparatus
GB9316308D0 (en) Method and device for plasma processing of material
AU649283B2 (en) Process and apparatus for processing meat
GB2243944B (en) Plasma processing apparatus and operation method thereof

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20051201

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee