KR100200719B1 - Processing machine using low pressure gas plasma - Google Patents

Processing machine using low pressure gas plasma Download PDF

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Publication number
KR100200719B1
KR100200719B1 KR1019960033482A KR19960033482A KR100200719B1 KR 100200719 B1 KR100200719 B1 KR 100200719B1 KR 1019960033482 A KR1019960033482 A KR 1019960033482A KR 19960033482 A KR19960033482 A KR 19960033482A KR 100200719 B1 KR100200719 B1 KR 100200719B1
Authority
KR
South Korea
Prior art keywords
low pressure
pressure gas
processing machine
gas plasma
plasma
Prior art date
Application number
KR1019960033482A
Other languages
Korean (ko)
Inventor
Jeong-Ho Park
Chan-Soo Park
Hyun-Bok Jang
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of KR100200719B1 publication Critical patent/KR100200719B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
KR1019960033482A 1995-08-30 1996-08-12 Processing machine using low pressure gas plasma KR100200719B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR19950027721 1995-08-30

Publications (1)

Publication Number Publication Date
KR100200719B1 true KR100200719B1 (en) 1999-06-15

Family

ID=19425267

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960033482A KR100200719B1 (en) 1995-08-30 1996-08-12 Processing machine using low pressure gas plasma

Country Status (1)

Country Link
KR (1) KR100200719B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101002621B1 (en) * 2008-08-25 2010-12-21 영남대학교 산학협력단 Atmospheric plasma generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101002621B1 (en) * 2008-08-25 2010-12-21 영남대학교 산학협력단 Atmospheric plasma generator

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