KR0173154B1 - 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 - Google Patents

수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 Download PDF

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Publication number
KR0173154B1
KR0173154B1 KR1019950070198A KR19950070198A KR0173154B1 KR 0173154 B1 KR0173154 B1 KR 0173154B1 KR 1019950070198 A KR1019950070198 A KR 1019950070198A KR 19950070198 A KR19950070198 A KR 19950070198A KR 0173154 B1 KR0173154 B1 KR 0173154B1
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KR
South Korea
Prior art keywords
tin oxide
thin film
hydrogen gas
sensor
oxide film
Prior art date
Application number
KR1019950070198A
Other languages
English (en)
Korean (ko)
Inventor
고석근
정형진
송석균
최원국
윤영수
조준식
최동수
전진석
Original Assignee
한갑수
한국가스공사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한갑수, 한국가스공사 filed Critical 한갑수
Priority to KR1019950070198A priority Critical patent/KR0173154B1/ko
Priority to JP8344102A priority patent/JP2996922B2/ja
Application granted granted Critical
Publication of KR0173154B1 publication Critical patent/KR0173154B1/ko

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
KR1019950070198A 1995-12-31 1995-12-31 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 KR0173154B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019950070198A KR0173154B1 (ko) 1995-12-31 1995-12-31 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법
JP8344102A JP2996922B2 (ja) 1995-12-31 1996-12-24 水素感知用酸化スズ薄膜センサおよびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950070198A KR0173154B1 (ko) 1995-12-31 1995-12-31 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법

Publications (1)

Publication Number Publication Date
KR0173154B1 true KR0173154B1 (ko) 1999-05-15

Family

ID=19448728

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950070198A KR0173154B1 (ko) 1995-12-31 1995-12-31 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법

Country Status (2)

Country Link
JP (1) JP2996922B2 (ja)
KR (1) KR0173154B1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101297809B1 (ko) * 2011-05-20 2013-08-19 경북대학교 산학협력단 수소이온농도 감지막 및 그 제조 방법
WO2022203370A1 (ko) * 2021-03-22 2022-09-29 한국화학연구원 수소 가스 센서

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477422B1 (ko) * 2002-01-11 2005-03-23 동양물산기업 주식회사 암모니아 가스 검지용 반도체식 박막 가스 센서의 제조방법 및 센서 소자
KR101489891B1 (ko) * 2013-10-16 2015-02-04 한국해양대학교 산학협력단 인듐 주석 산화물 박막 센서를 이용한 해상 유류 및 위험유해물질 유출 감지장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101297809B1 (ko) * 2011-05-20 2013-08-19 경북대학교 산학협력단 수소이온농도 감지막 및 그 제조 방법
WO2022203370A1 (ko) * 2021-03-22 2022-09-29 한국화학연구원 수소 가스 센서

Also Published As

Publication number Publication date
JPH09196879A (ja) 1997-07-31
JP2996922B2 (ja) 2000-01-11

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