KR0173154B1 - 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 - Google Patents
수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 Download PDFInfo
- Publication number
- KR0173154B1 KR0173154B1 KR1019950070198A KR19950070198A KR0173154B1 KR 0173154 B1 KR0173154 B1 KR 0173154B1 KR 1019950070198 A KR1019950070198 A KR 1019950070198A KR 19950070198 A KR19950070198 A KR 19950070198A KR 0173154 B1 KR0173154 B1 KR 0173154B1
- Authority
- KR
- South Korea
- Prior art keywords
- tin oxide
- thin film
- hydrogen gas
- sensor
- oxide film
- Prior art date
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950070198A KR0173154B1 (ko) | 1995-12-31 | 1995-12-31 | 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 |
JP8344102A JP2996922B2 (ja) | 1995-12-31 | 1996-12-24 | 水素感知用酸化スズ薄膜センサおよびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950070198A KR0173154B1 (ko) | 1995-12-31 | 1995-12-31 | 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR0173154B1 true KR0173154B1 (ko) | 1999-05-15 |
Family
ID=19448728
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950070198A KR0173154B1 (ko) | 1995-12-31 | 1995-12-31 | 수소가스 감지용 주석 산화물 박막 센서 및 그 제조방법 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2996922B2 (ja) |
KR (1) | KR0173154B1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101297809B1 (ko) * | 2011-05-20 | 2013-08-19 | 경북대학교 산학협력단 | 수소이온농도 감지막 및 그 제조 방법 |
WO2022203370A1 (ko) * | 2021-03-22 | 2022-09-29 | 한국화학연구원 | 수소 가스 센서 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100477422B1 (ko) * | 2002-01-11 | 2005-03-23 | 동양물산기업 주식회사 | 암모니아 가스 검지용 반도체식 박막 가스 센서의 제조방법 및 센서 소자 |
KR101489891B1 (ko) * | 2013-10-16 | 2015-02-04 | 한국해양대학교 산학협력단 | 인듐 주석 산화물 박막 센서를 이용한 해상 유류 및 위험유해물질 유출 감지장치 |
-
1995
- 1995-12-31 KR KR1019950070198A patent/KR0173154B1/ko not_active IP Right Cessation
-
1996
- 1996-12-24 JP JP8344102A patent/JP2996922B2/ja not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101297809B1 (ko) * | 2011-05-20 | 2013-08-19 | 경북대학교 산학협력단 | 수소이온농도 감지막 및 그 제조 방법 |
WO2022203370A1 (ko) * | 2021-03-22 | 2022-09-29 | 한국화학연구원 | 수소 가스 센서 |
Also Published As
Publication number | Publication date |
---|---|
JPH09196879A (ja) | 1997-07-31 |
JP2996922B2 (ja) | 2000-01-11 |
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