KR0133792Y1 - Exhaustion system of a vacuum tube - Google Patents
Exhaustion system of a vacuum tube Download PDFInfo
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- KR0133792Y1 KR0133792Y1 KR2019930019643U KR930019643U KR0133792Y1 KR 0133792 Y1 KR0133792 Y1 KR 0133792Y1 KR 2019930019643 U KR2019930019643 U KR 2019930019643U KR 930019643 U KR930019643 U KR 930019643U KR 0133792 Y1 KR0133792 Y1 KR 0133792Y1
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- vacuum
- boiler
- exhaust
- vacuum tube
- diffusion pump
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/385—Exhausting vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/38—Control of maintenance of pressure in the vessel
- H01J2209/383—Vacuum pumps
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
본 고안은 개선된 진공관 배기장치를 개시한다. 유확산펌프가 구비된 배기장치에 있어서는 배기중 진공이 파괴된 경우 장치를 정지시켜도 유확산 펌프의 보일러가 가열되어 있으므로 작동유가 계속 비등하여 외부로 방출되는 문제가 있었다.The present invention discloses an improved vacuum tube exhaust device. In the exhaust apparatus equipped with the diffusion pump, the boiler of the diffusion pump is heated even if the vacuum is broken during exhaust, so that the working oil is continuously boiled and discharged to the outside.
본 고안에서는 보일러를 급속냉각시킬수 있도록 구성하여 진공파괴시 작동유의 방출을 감소시키고 장치의 가동효율을 증대시켰다.In this design, the boiler can be rapidly cooled to reduce the discharge of hydraulic oil during vacuum breakdown and increase the operating efficiency of the device.
Description
제1도는 종래의 배기장치의 구성을 보이는 개략단면도.1 is a schematic cross-sectional view showing the configuration of a conventional exhaust device.
제2도는 본 고안 배기장치의 구성을 보이는 개략 단면도이다.2 is a schematic cross-sectional view showing the configuration of the present invention exhaust device.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
DP : 유확산 펌프(Oil diffusion pump) RP : 로타리 펌프(rotary pump)DP: Oil diffusion pump RP: Rotary pump
B : 보일러(boiler) O : 작동유(working oil)B: boiler O: working oil
KI : (작동유 응축 및 회수용)냉각관 K2 : (보일러 급속 냉각용)냉각관KI: Cooling pipe (for condensation and recovery of working oil) K2: Cooling pipe (for boiler rapid cooling)
V : 솔레노이드 밸브(solenoid valve)V: solenoid valve
본 고안은 음극선관 등의 진공관 제조에 관한 것으로, 특히 유확산펌프를 이용한 진공관 배기장치에 관한 것이다.The present invention relates to the manufacture of vacuum tubes, such as cathode ray tubes, and more particularly to a vacuum tube exhaust apparatus using a diffusion pump.
음극선관은 전자빔을 발생시켜 이를 집속(集束) 및 가속(加速)시킴으로써 형광면에 화상을 표시하는 장치이다. 전자빔의 안정적 발생과 원활한 가속을 위해서는 관내에 기체분자 등의 이물이 잔류하지 않도록 고진공으로 배기하지 않으면 안된다. 이러한 음극선관 등의 진공관의 배기에 가장 널리 사용되는 것은 제1도에 도시된 바와같이 유확산 펌프(oil diffusion pump:DP)와 로타리펌프(rotary pump:RP)의 2단 접속에 의한 배기장치이다.A cathode ray tube is an apparatus which displays an image on a fluorescent surface by generating an electron beam, focusing and accelerating it. For stable generation and smooth acceleration of the electron beam, high vacuum must be exhausted so that foreign substances such as gas molecules do not remain in the tube. The most widely used for evacuating vacuum tubes such as cathode ray tubes is an exhaust system by connecting two stages of an oil diffusion pump (DP) and a rotary pump (RP), as shown in FIG. .
제1도에서, 음극선관(T)의 배기관에 밀봉 접속된 유확산펌프(DP)는 히이터(heater:H)에 의해 보일러(boiler:B)에 수납된 작동유(working oil:O)을 비등시켜, 그 증기를 다단으로 형성시켜노즐(nozzle:N)을 통해 고속으로 분사함으로써 음극선관(T)내의 공기를 배출하도록 되어 있다. 이때 로타리 펌프(RP)는 유확산펌프(DP)의 작동을 유지시키는 배압(背壓)을 걸어주게 된다. 또한 비등된 증기를 다시 응축시켜 작동유(O)로 회수하기 위해 유확산펌프(DP)의 외주에는 소정의 냉각수가 순환하는 냉각관(K)이 구비된다.In FIG. 1, the diffusion pump DP sealedly connected to the exhaust pipe of the cathode ray tube T boils the working oil O stored in the boiler B by the heater H. The steam is formed in multiple stages, and the air in the cathode ray tube T is discharged by spraying at high speed through the nozzle N. At this time, the rotary pump RP applies a back pressure to maintain the operation of the diffusion pump DP. In addition, a cooling tube K through which a predetermined cooling water circulates is provided on the outer circumference of the oil diffusion pump DP in order to condense the boiled steam again and recover the working oil O.
그런데 음극선관(T)의 관체(envelope)는 절연성과 광학적 특성 등을 고려하여 유리재질로 구성되는 것이 일반적인바, 유리는 취성(脆性)재질이므로 결함이 있는 경우 배기증에 크랙(crack)이 폭축(implosion)이 발생하게 된다. 이러한 배기장치의 차단을 위해 배기관로의 중간에 압력 감지기(P)를 설치하여 차단스위치(SW)를 통해 히이터(H)의 발열과 로타리 펌프(RP)의 작동을 중단시켰다.However, the envelope of the cathode ray tube T is generally made of a glass material in consideration of insulation and optical characteristics. Since glass is a brittle material, cracks in the exhaust gas are deflated if there is a defect. (implosion) will occur. In order to shut off the exhaust system, a pressure sensor P was installed in the middle of the exhaust pipe to stop the heating of the heater H and the operation of the rotary pump RP through the shutoff switch SW.
그런데 히이터(H)에 전원 공급이 차단된다 하더라도 고온으로 가열되었던 보일러(B)가 쉽게 냉각되지 않으므로 작동유(O)는 계속 비등하게 되고, 그 증기는 진공이 파괴된 상태이므로 외부로 배출되어 버린다. 이에따라 보일러(B)에 수납된 작동유(O)의 수납량이 감소하게 된다. 그런데 일반적인 구조에 있어서는 유확산 펌프(DP)를 분해하기 전에는 작동유(O)의 잔량(殘量)을 확인할 수가 없어서, 종래에는 진공측정관에 의해 진공도를 측정함으로써 배기장치의 달성 진공도가 낮은 경우 작동유(O)의 수납량을 보충해왔다. 그러나 이러한 낮은 진공도는 오히려 배기관로의 밀봉 불량에 의한 리이크(leak)에 의해 더 잘 발생되므로, 결국 유확산펌프(RP)를 빈번히 분해 점검하는 수 밖에 없었다.However, even when the power supply to the heater (H) is cut off, since the boiler (B) heated to a high temperature is not easily cooled, the operating oil (O) continues to boil, and the steam is discharged to the outside because the vacuum is broken. Accordingly, the storage amount of the hydraulic oil (O) accommodated in the boiler (B) is reduced. However, in the general structure, it is not possible to check the residual amount of the hydraulic oil O before disassembling the diffusion pump DP, and conventionally, the operating oil when the achieved vacuum degree of the exhaust system is low by measuring the vacuum degree using a vacuum measuring tube. (O) has been replenished. However, such a low degree of vacuum is more likely to be caused by a leak due to poor sealing to the exhaust pipe, so that the diffusion pump RP has to be frequently overhauled.
이와같은 종래의 문제점을 감안하여 본 고안의 목적은 진공파괴시 작동유의 방출을 방지할수 있는 배기 장치를 제공하는 것을 목적으로 한다.In view of such a conventional problem, an object of the present invention is to provide an exhaust device capable of preventing the release of hydraulic oil during vacuum breakdown.
상술한 목적을 달성하기 위해 본 고안에 의한 진공관 배기장치는, 보일러에 수납된 작동유를 히이터로 비등시켜 발생된 증기를 분사시킴으로써 진공관의 관내를 배기하는 유확산 펌프가 구비된 배기장치에 있어서,In order to achieve the above object, the vacuum tube exhaust device according to the present invention, in the exhaust device equipped with a diffusion pump for exhausting the inside of the vacuum tube by injecting steam generated by boiling the operating oil contained in the boiler with a heater,
보일러의 외주에 설치되어 이를 급속냉각시키는 냉각관고,Cooling pipe installed on the outer circumference of the boiler to rapidly cool it,
진공관의 진공파괴시 배기장치의 작동을 중단시키는 차단스위치에 연동되어 냉각관에 냉각수를 공급하는 솔레노이드 밸브(solenoid valve)를 구비하는 것을 특징으로 한다.It is characterized in that it is provided with a solenoid valve (Solnoid valve) for supplying the cooling water to the cooling tube in conjunction with the shut-off switch to stop the operation of the exhaust device during the vacuum break of the vacuum tube.
이와같은 본 고안 배기장치의 구체적 특징과 다른 이점들은 첨부된 도면을 참조한 이하의 바람직한 실시예의 설명으로 더욱 명확해 질 것이다.Such specific features and other advantages of the inventive exhaust apparatus will become more apparent from the following description of the preferred embodiments with reference to the accompanying drawings.
제2도에서, 본 고안에 의한 배기 장치는 종래와 같이 유확산 펌프(DP)와 로타리 펌프(RP)의 2단 접속으로 구성되고, 유확산 펌프(DP)의 보일러(B)에 수납된 작동유(O)는 히이터(H)의 가열에 의해 비등되어 노즐(N)을 통해 분사되어 음극선관(T)을 배기하도록 구성된다. 유확산 펌프(DP)의 외주에는 비등된 증기의 응축 및 회수를 위한 냉각관(K1)이 구비되고, 배기관로의 중간에는 압력기(P)가 구비되어 급속한 압력변화에 대해 차단 스위치(SW)를 기동시켜 히이터(H)등 배기장치의 작동을 중단시키게 된다.In FIG. 2, the exhaust device according to the present invention is constituted by a two-stage connection of the diffusion pump DP and the rotary pump RP as in the prior art, and the hydraulic oil stored in the boiler B of the diffusion pump DP. (O) is configured to be boiled by heating of the heater (H), injected through the nozzle (N), and exhaust the cathode ray tube (T). The outer periphery of the oil diffusion pump DP is provided with a cooling tube K1 for condensation and recovery of the boiled steam, and a pressurizer P is provided in the middle of the exhaust pipe so that a rapid change in pressure is possible. By starting the exhaust system such as heater (H) to stop the operation.
유확산펌프(RP)의 보일러(B)의 외주에는 본 고안 특징에 따라 이를 급속냉각시키기 위한 냉각관(K2)이 설치되고 이에 냉각수를 공급하는 관로상에 설치된 솔레노이드 밸브(V)는 차단 스위치(SW)에 연동된다. 바람직하기로 솔레노이드 밸브(V)는 배기장치의 정상적인 동작시의 주 스위치(도시안됨)에도 연동되도록 한다. 냉각관(K2)은 자켓(jacket)형태로 구성될수도 있는바, 어떠한 구성이건 고온으로 가열된 보일러(B)를 냉각수의 공급에 의해 급속히 냉각시켜 보일러(B)내의 온도를 작동유(O)의 비점(沸點)이하로 강하시킬수 있는 것이면 족하다. 냉각관(K2)은 어러한 급속냉각의 기능외에도 정상적인 동작시 비열이 높은 물에 의해 보일러(B)를 감쌈으로써 단열역할을 하여 열효율의 향상과 열기의 외부발산을 방지할수도 있다.The outer periphery of the boiler (B) of the oil diffusion pump (RP) is provided with a cooling pipe (K2) for rapid cooling according to the features of the present invention and the solenoid valve (V) installed on the pipeline for supplying the cooling water is a cutoff switch ( SW). Preferably, the solenoid valve V is also interlocked with the main switch (not shown) in the normal operation of the exhaust device. The cooling pipe K2 may be configured in the form of a jacket, and in any configuration, the boiler B heated to a high temperature is rapidly cooled by the supply of cooling water, thereby cooling the temperature in the boiler B to the boiling point of the operating oil O. (沸點) It is enough to be able to descend below. Cooling pipe (K2) in addition to the function of rapid cooling, the boiler (B) is wrapped by the high specific heat in normal operation in addition to the role of adiabatic role to improve the thermal efficiency and to prevent the external emission of heat.
이와같이 구성된 본 고안 배기장치는 다음과 같이 작동된다.The inventive exhaust system configured as described above operates as follows.
먼저 정상적인 동작을 살펴보면, 음극선관(T) 등의 진공관의 배기가 완료되면 주스위치의 차단에 의해 먼저 유확산펌프(RP)의 히이터(H)가 차단되어 작동이 중단되고, 증기가 충분히 냉각응축되어 액체상태의 작동유(O)로 복귀될 정도의 시간이 경과한후 예를들어 수분후 로타리 펌프(RP)가 정지된다. 이때 솔레노이드 밸브(V)가 주스위치에 연동되도록 구성된 경우에는 냉각관(K2)에 냉각수가 공급되어 보일러(B)가 즉시 냉각되므로 로타리 펌프(RP)의 작동 정지시까지의 대기시간이 불필요하게 된다. 한편 배기중 음극선관(T)이 폭축 또는 크랙 등에 의해 또는 배기관로의 리이크에 의해 진공이 파괴된 경우에는 압력기(P)에 의해 차단 스위치(SW)가 작동하여 배기 장치를 정지시킨다. 이때 차단 스위치(SW)에 연동되는 솔레노이드 밸브(V)가 개방되어 냉각관(K2)에 냉각수가 공급되고, 이에따라 보일러(B)가 급속냉각됨으로써 작동유(O)의 비등이 신속히 정지되어 그 증기의 외부방출에 의한 수납량의 감소가 방지된다.First, in normal operation, when the exhaust of the vacuum tube such as cathode ray tube (T) is completed, the heater (H) of the diffusion pump (RP) is first blocked by the blocking of the main switch, the operation is stopped, and the steam is sufficiently cooled and condensed. After a period of time for returning to the hydraulic oil O in the liquid state, for example, after a few minutes, the rotary pump RP is stopped. In this case, when the solenoid valve (V) is configured to interlock with the main switch, the cooling water is supplied to the cooling pipe (K2) and the boiler (B) is immediately cooled, so that the waiting time until the operation of the rotary pump (RP) is stopped is unnecessary. . On the other hand, when the cathode ray tube T during exhaustion is broken by vacuum, cracks, or the like, or leaks to the exhaust pipe, the shutoff switch SW is operated by the pressure regulator P to stop the exhaust device. At this time, the solenoid valve V interlocked with the cutoff switch SW is opened to supply the cooling water to the cooling pipe K2. Accordingly, the boiler B is rapidly cooled, and the boiling of the operating oil O is quickly stopped. The reduction of the storage amount due to external discharge is prevented.
이와같이 본 고안에 의하면 진공파괴시에도 작동유의 잔량이 감소하지 않아 그 보충을 위한 유지점검이 불필요해지고 달성진공도의 지속적인 유지가 가능하게 된다.As such, according to the present invention, the residual amount of the working oil does not decrease even in the case of vacuum breaking, so that maintenance check for replenishment is unnecessary, and continuous maintenance of the achieved vacuum degree is possible.
또한 정상적인 작동시에도 두 펌프의 정지시간간에 대기시간이 불필요하게 되므로 배기장치의 가동효율을 높일수 있게된다.In addition, since the standby time is unnecessary between the stop times of the two pumps even during normal operation, it is possible to increase the operating efficiency of the exhaust system.
이에따라 본 고안의 진공관 제조의 생산성 향상과 원가절감에 큰 효과가 있다.Accordingly, there is a great effect on the productivity and cost reduction of the vacuum tube manufacturing of the present invention.
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KR2019930019643U KR0133792Y1 (en) | 1993-09-27 | 1993-09-27 | Exhaustion system of a vacuum tube |
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KR2019930019643U KR0133792Y1 (en) | 1993-09-27 | 1993-09-27 | Exhaustion system of a vacuum tube |
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KR0133792Y1 true KR0133792Y1 (en) | 1999-01-15 |
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