KR0119748Y1 - Quartz tube for lpcvd - Google Patents
Quartz tube for lpcvdInfo
- Publication number
- KR0119748Y1 KR0119748Y1 KR2019940029352U KR19940029352U KR0119748Y1 KR 0119748 Y1 KR0119748 Y1 KR 0119748Y1 KR 2019940029352 U KR2019940029352 U KR 2019940029352U KR 19940029352 U KR19940029352 U KR 19940029352U KR 0119748 Y1 KR0119748 Y1 KR 0119748Y1
- Authority
- KR
- South Korea
- Prior art keywords
- quartz tube
- transfer arm
- gear
- handle
- handle gear
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
본 고안은 저압화학기상증착장치용 석영관의 이송장치에 관한 것으로, 종래 저압화학기상증착장치용 석영관의 이송장치는 석영관의 사이즈가 커짐으로 인해 석영관의 분리 및 셋 업(set-up)의 어려움이 있었고, 석영관의 파손으로 인한 안전사고의 위험이 있었는 바, 하면에 바퀴(1a)가 설치되어 이동가능하게 구성된 몸체(1)와, 석영관(2)을 잡아주는 고정벨트(3)가 구비된 석영관 받침대(4)와, 상기 석영관 받침대(4)와 몸체(1)에 연결설치되어 석영관 받침대(4)를 지지하는 석영관 받침대 이송암(5)과, 상기 석영관 받침대 이송암(5)을 상하측으로 이동시키는 이송암 상하구동수단으로 구성되는 본 고안을 제공하여 석영관의 사이즈에 관계없이 석영관의 분리 및 히팅 챔버 내로의 셋 업이 용이해지고, 석영관의 파손을 예방하여 안전사고의 위험을 해소하도록 한 것이다.The present invention relates to a low pressure chemical vapor deposition device of the quartz tube transfer device, the conventional low pressure chemical vapor deposition device of the quartz tube transfer device of the quartz tube due to the size of the quartz tube separation and set-up (set-up) ), And there was a risk of safety accident due to the breakage of the quartz tube, the body (1) configured to be movable by the wheel (1a) is installed on the lower surface and the fixing belt for holding the quartz tube (2) ( 3) a quartz tube pedestal 4, a quartz tube pedestal transfer arm 5 which is connected to the quartz tube pedestal 4 and the body 1 to support the quartz tube pedestal 4, and the quartz The present invention consists of a transfer arm up and down driving means for moving the tube support transfer arm 5 upward and downward to facilitate separation and installation of the quartz tube regardless of the size of the quartz tube and into the heating chamber. To prevent damage and eliminate the risk of safety accidents. It is.
Description
제1도는 본 고안에 의한 저압화학기상증착장치용 석영관의 이송장치의 일실시례를 보인 사시도.Figure 1 is a perspective view showing an embodiment of a transfer device of a quartz tube for low pressure chemical vapor deposition apparatus according to the present invention.
제2도는 본 고안 장치의 기어 구성도.2 is a gear configuration diagram of the device of the present invention.
제3도는 본 고안 장치의 핸들기어 잠금장치의 구성도.3 is a block diagram of a handle gear locking device of the present invention device.
제4도는 본 고안 장치의 다른 실시례를 보인 사시도.Figure 4 is a perspective view showing another embodiment of the present invention device.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 몸체 1a : 바퀴1: Body 1a: Wheel
2 : 석영관 3 : 고정벨트2: quartz tube 3: fixing belt
4 : 석영관 받침대 5 : 석영관받침대 이송암4: quartz tube support 5: quartz tube support transfer arm
5 : 조절핸들 7 : 핸들기어5: adjusting handle 7: handle gear
8 : 방향전환기어 9 : 회전축8: direction change gear 9: rotation axis
10 : 암이송기어 11 : 핸들기어 록크10: female feed gear 11: handle gear lock
12 : 탄성부재 13 : 록크 해제손잡이12: elastic member 13: lock release knob
본 고안은 저압화학기상증착장치(LPCVD)용 석영관(QUARTZ TUVE)에 관한 것으로, 특히 석영관의 이송을 용이하게 실시하기에 적합하도록 한 저압화학기상증착장치용 석영관의 이송장치에 관한 것이다.The present invention relates to a quartz tube for low pressure chemical vapor deposition (QUARTZ TUVE), and more particularly to a transfer device for a quartz tube for low pressure chemical vapor deposition to facilitate the transfer of the quartz tube. .
종래 저압화학기상증착장치용 석영관의 이송장치는 석영관의 사이즈가 커짐으로 인해 석영관의 분리 및 셋 업(set-up)의 어려움이 있었고, 석영관의 파손으로 인한 안전사고의 위험이 있었다.Conventional low pressure chemical vapor deposition apparatus for transporting quartz tube has a difficulty in separation and set-up of the quartz tube due to the size of the quartz tube, the risk of safety accident due to the breakage of the quartz tube .
상기한 바와 같은 문제점을 감안하여 안출한 본 고안의 목적은 석영관의 분리 및 셋업의 어려움을 해결함과 아울러 석영관을 이송위치로 안전하게 이송시키려는 데 있다.The object of the present invention devised in view of the above problems is to solve the difficulty of separation and set-up of the quartz tube and to safely transport the quartz tube to the transfer position.
이러한 본 고안의 목적을 달성하기 위하여, 하면에 바퀴가 설치되어 이동가능하게 구성된 몸체와, 석영관을 잡아주는 고정벨트가 구비된 석영관 받침대와, 상기 석영관 받침대와 몸체에 연결설치되어 석영관 받침대를 지지하는 석영관받침대 이송암과, 상기 석영관받침대 이송암을 상하측으로 이동시키는 이송암 상하구동수단으로 구성함을 특징으로 하는 저압화학기상증착장치용 석영관의 이송장치가 제공된다.In order to achieve the object of the present invention, a wheel is installed on the lower surface and the body is configured to be movable, a quartz tube support provided with a fixing belt for holding a quartz pipe, and the quartz pipe support is installed and connected to the quartz pipe support A quartz tube support transfer arm supporting a pedestal, and a transfer arm vertical movement means for moving the quartz tube support transfer arm up and down is provided, characterized in that the low pressure chemical vapor deposition apparatus for transporting the quartz tube is provided.
이하, 상기한 바와 같은 본 고안을 첨부도면에 도시한 일실시례에 의거하여 보다 상세하게 설명한다.Hereinafter, the present invention as described above will be described in more detail on the basis of one embodiment shown in the accompanying drawings.
첨부도면 제1도는 본 고안에 의한 저압화학기상증착장치용 석영관의 이송장치의 일실시례를 보인 사시도이고, 제2도는 본 고안 장치의 기어 구성도이며, 제3도는 본 고안 장치의 핸들기어 잠금장치의 구성도로서, 이에 도시한 바와 같이, 본 고안 장치는 하면에 바퀴(1a)가 설치되어 이동가능하게 구성된 몸체(1)와, 석영관(2)을 잡아주는 고정벨트(3)가 구비된 석영관 받침대(4)와, 상기 석영관 받침대(4)와 몸체(1)에 연결설치되어 석영관 받침대(4)를 지지하는 석영관받침대 이송암(5)과, 상기 석영관받침대 이송암(5)을 상하측으로 이동시키는 이송암 상하구동수단으로 구성되어 있다.1 is a perspective view showing an embodiment of a transfer device of a quartz tube for low pressure chemical vapor deposition apparatus according to the present invention, Figure 2 is a gear configuration diagram of the device of the present invention, Figure 3 is a handle gear of the device of the present invention As a configuration diagram of the locking device, as shown in the present invention, the device of the present invention has a body (1) configured to be movable by installing a wheel (1a) on the lower surface, and a fixing belt (3) for holding the quartz tube (2) Quartz tube support 4 provided, the quartz tube support transfer arm (5) installed and connected to the quartz tube support (4) and the body (1) to support the quartz pipe support (4), and the quartz pipe support It is comprised by the conveyance arm up-and-down drive means which moves the arm 5 up and down.
상기 이송암 상하구동수단은 제2도에 도시한 바와 같이, 이송암(5)을 상하측으로 구동시키는 조절핸들(6)과, 상기 조절핸들(6)의 회전에 의해 회전되는 핸들기어(7)와, 상기 핸들기어(7)와 치합되어 핸들기어(7)의 회전력을 수평방향으로 전달하는 방향전환기어(8)와, 상기 방향전환기어(8)와 결합되어 회전되는 회전축(9)과, 상기 회전축(9)의 양단부에 결합되고 상기 이송암(5)과 치합되어 회전축(9)의 회전에 따라 이송암(5)을 상하로 이동시키는 암이송기어(10)로 구성되어 있다.As shown in FIG. 2, the transfer arm vertical drive means includes an adjustment handle 6 for driving the transfer arm 5 upward and downward, and a handle gear 7 rotated by the rotation of the adjustment handle 6. And a turning gear 8 engaged with the handle gear 7 to transmit the rotational force of the handle gear 7 in a horizontal direction, a rotating shaft 9 coupled with the turning gear 8 to rotate; It is coupled to both ends of the rotary shaft 9 and is engaged with the transfer arm 5 is composed of a female feed gear 10 for moving the transfer arm 5 up and down in accordance with the rotation of the rotary shaft (9).
또한, 상기 핸들기어(7)에는 핸들기어의 회전을 방지하는 핸들기어 잠금장치가 설치되어 있는 바, 그 구성은 제3도에서 보는 바와 같이, 핸들기어(7)를 잠그는 핸들기어 록크(11)와, 상기 핸들기어 록크(11)를 핸들기어(7)가 잠기는 방향으로 탄지하는 탄성부재(12)와, 상기 핸들기어 록크(11)를 해제하는 록크 해제손잡이(13)로 구성되어 있다.In addition, the handle gear 7 is provided with a handle gear locking device for preventing the rotation of the handle gear, the configuration of the handle gear lock 11 for locking the handle gear 7 as shown in FIG. And a resilient member 12 for holding the handle gear lock 11 in a direction in which the handle gear 7 is locked, and a lock release knob 13 for releasing the handle gear lock 11.
이와 같이 구성되어 있는 본 고안 장치의 동작을 설명한다.The operation of the device of the present invention configured as described above will be described.
먼저, 히팅 챔버(Heating Chamber)에서 석영관(2)을 분리할 때는 조절핸들(6)을 회전시켜 핸들기어(7)를 회전시킴으로써 석영관받침대 이송암(5)의 위치를 상하로 이동시켜 석영관 받침대(4)가 분리해내고자 하는 석영관(2)과 수평한 상태로 위치하도록 조정한다. 석영관 받침대(4)가 석영관(2)과 수평한 상태에서 히팅 쳄버 내에 있는 석영관(2)을 밀어 내어 석영관 받침대(4)에 안착시키고, 고정밸트(3)로 석영관(2)을 받침대(4)에 고정시킨 다음, 석영관받침대 이송암(5)을 가장 낮은 위치까지 이동시킨 상태에서 석영관 세척실로 이송시킨다.First, when separating the quartz tube 2 from the heating chamber (Heating Chamber) by rotating the control handle (6) by rotating the handle gear (7) by moving the position of the quartz tube support transfer arm (5) up and down the quartz Adjust so that the tube stand 4 is in a horizontal state with the quartz tube 2 to be separated. The quartz tube pedestal 4 is flush with the quartz tube pedestal 2 in the heating chamber in a state in which the quartz tube pedestal 4 is horizontal to the quartz tube pedestal 4, and the quartz tube 2 is fixed by the fixing belt 3. Is fixed to the pedestal (4), and then transferred to the quartz tube washing chamber with the quartz tube support transfer arm (5) moved to the lowest position.
또한, 석영관을 히팅 챔버에 셋 업시킬 때는 조절핸들(6)을 회전구동하여 석영관받침대 이송암(5)을 상하로 이동시켜 석영관(2)이 안착되어 있는 석영관 받침대(4)를 셋 업하고자 하는 히팅 챔버와 수평이 되게 한 다음, 고정벨트(3)를 풀고 석영관(2)을 히팅 챔버 내로 밀어 넣어주게 된다.In addition, when the quartz tube is set up in the heating chamber, the adjustment handle 6 is rotated to move the quartz tube support transfer arm 5 up and down to mount the quartz tube pedestal 4 on which the quartz tube 2 is seated. After leveling with the heating chamber to be set up, loosen the fixing belt (3) and push the quartz tube (2) into the heating chamber.
상기 석영관 받침대(4)에 석영관(2)을 안착시키거나, 히팅 챔버로 밀어 넣을 때, 석영관받침대 이송암(5)이 움직이지 않도륵 하기 위해 핸들기어 잠금장치가 설치되어 있는 바, 조절핸들(6) 사용시에는 록크 해제손잡이(13)를 눌러 잠금장치를 해제시켜준다.When the quartz tube 2 is seated on the quartz tube support 4 or pushed into the heating chamber, a handle gear lock is installed to prevent the quartz tube support transfer arm 5 from moving. When using the adjustment handle (6) to release the lock by pressing the lock release knob (13).
한편, 상기 석영관받침대 이송암(5')을 절곡형성한 본 고안의 다른 실시례가 실시가능한 바, 제4도에 이를 도시하였다.Meanwhile, another embodiment of the present invention in which the quartz tube support transfer arm 5 'is bent is illustrated, which is illustrated in FIG.
이상에서 설명한 바와 같이, 본 고안에 의한 저압화학기상증착장치용 석영관의 이송장치는 석영관의 사이즈에 관계없이 석영관의 분리 및 히팅 챔버 내로의 셋 업이 용이해지고, 석영관의 파손을 예방하여 안전사고의 위험을 해소하게 되는 효과가 있다.As described above, the feeding device of the quartz tube for low pressure chemical vapor deposition according to the present invention is easy to separate and set up the quartz tube regardless of the size of the quartz tube, and to set up into the heating chamber, and to prevent damage to the quartz tube. It has the effect of eliminating the risk of safety accidents.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940029352U KR0119748Y1 (en) | 1994-11-05 | 1994-11-05 | Quartz tube for lpcvd |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940029352U KR0119748Y1 (en) | 1994-11-05 | 1994-11-05 | Quartz tube for lpcvd |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR960019073U KR960019073U (en) | 1996-06-19 |
| KR0119748Y1 true KR0119748Y1 (en) | 1998-08-17 |
Family
ID=19397492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019940029352U KR0119748Y1 (en) | 1994-11-05 | 1994-11-05 | Quartz tube for lpcvd |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0119748Y1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101029026B1 (en) * | 2009-10-20 | 2011-04-15 | 한국표준과학연구원 | Apparatus for transferring busbar |
-
1994
- 1994-11-05 KR KR2019940029352U patent/KR0119748Y1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101029026B1 (en) * | 2009-10-20 | 2011-04-15 | 한국표준과학연구원 | Apparatus for transferring busbar |
Also Published As
| Publication number | Publication date |
|---|---|
| KR960019073U (en) | 1996-06-19 |
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