JPWO2022215417A1 - - Google Patents

Info

Publication number
JPWO2022215417A1
JPWO2022215417A1 JP2023512873A JP2023512873A JPWO2022215417A1 JP WO2022215417 A1 JPWO2022215417 A1 JP WO2022215417A1 JP 2023512873 A JP2023512873 A JP 2023512873A JP 2023512873 A JP2023512873 A JP 2023512873A JP WO2022215417 A1 JPWO2022215417 A1 JP WO2022215417A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023512873A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022215417A1 publication Critical patent/JPWO2022215417A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/806—Calibration by correcting for reflection of the emitter radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
JP2023512873A 2021-04-09 2022-03-08 Pending JPWO2022215417A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021066292 2021-04-09
PCT/JP2022/010056 WO2022215417A1 (ja) 2021-04-09 2022-03-08 放射温度測定装置及び放射温度測定方法

Publications (1)

Publication Number Publication Date
JPWO2022215417A1 true JPWO2022215417A1 (ja) 2022-10-13

Family

ID=83546052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023512873A Pending JPWO2022215417A1 (ja) 2021-04-09 2022-03-08

Country Status (4)

Country Link
US (1) US20240110834A1 (ja)
EP (1) EP4303547A1 (ja)
JP (1) JPWO2022215417A1 (ja)
WO (1) WO2022215417A1 (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956538A (en) * 1988-09-09 1990-09-11 Texas Instruments, Incorporated Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors
JP2001056253A (ja) * 1999-08-20 2001-02-27 Toshiba Corp 温度測定方法及び温度測定装置
JP2002122480A (ja) * 2000-10-12 2002-04-26 Toshiba Corp 温度測定方法および装置、並びにプラズマ処理装置
US8152365B2 (en) * 2005-07-05 2012-04-10 Mattson Technology, Inc. Method and system for determining optical properties of semiconductor wafers
JP2017090351A (ja) 2015-11-13 2017-05-25 株式会社堀場製作所 放射温度計

Also Published As

Publication number Publication date
EP4303547A1 (en) 2024-01-10
US20240110834A1 (en) 2024-04-04
WO2022215417A1 (ja) 2022-10-13

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