JPWO2022210797A1 - - Google Patents

Info

Publication number
JPWO2022210797A1
JPWO2022210797A1 JP2023511433A JP2023511433A JPWO2022210797A1 JP WO2022210797 A1 JPWO2022210797 A1 JP WO2022210797A1 JP 2023511433 A JP2023511433 A JP 2023511433A JP 2023511433 A JP2023511433 A JP 2023511433A JP WO2022210797 A1 JPWO2022210797 A1 JP WO2022210797A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023511433A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022210797A1 publication Critical patent/JPWO2022210797A1/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/14Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
JP2023511433A 2021-03-29 2022-03-29 Pending JPWO2022210797A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021054900 2021-03-29
PCT/JP2022/015714 WO2022210797A1 (en) 2021-03-29 2022-03-29 Negative photosensitive composition, optical semiconductor device, solid-state imaging device and electronic device

Publications (1)

Publication Number Publication Date
JPWO2022210797A1 true JPWO2022210797A1 (en) 2022-10-06

Family

ID=83459449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023511433A Pending JPWO2022210797A1 (en) 2021-03-29 2022-03-29

Country Status (2)

Country Link
JP (1) JPWO2022210797A1 (en)
WO (1) WO2022210797A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006350029A (en) * 2005-06-16 2006-12-28 Sekisui Chem Co Ltd Black resist composition
KR102411740B1 (en) * 2014-07-18 2022-06-21 에이지씨 가부시키가이샤 Negative-type photosensitive resin composition, and resin cured film, partition and optical element
JP2021012223A (en) * 2017-10-19 2021-02-04 Jsr株式会社 Manufacturing method of substrate for display panel, radiation-sensitive composition and infrared ray transmission film
JP7111031B2 (en) * 2018-03-23 2022-08-02 信越化学工業株式会社 Photosensitive resin composition, photosensitive resin laminate, and pattern forming method
JP2019182899A (en) * 2018-04-02 2019-10-24 Jsr株式会社 Curable composition, and cured film forming method

Also Published As

Publication number Publication date
WO2022210797A1 (en) 2022-10-06

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