JPWO2021223886A5 - - Google Patents
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- Publication number
- JPWO2021223886A5 JPWO2021223886A5 JP2022567681A JP2022567681A JPWO2021223886A5 JP WO2021223886 A5 JPWO2021223886 A5 JP WO2021223886A5 JP 2022567681 A JP2022567681 A JP 2022567681A JP 2022567681 A JP2022567681 A JP 2022567681A JP WO2021223886 A5 JPWO2021223886 A5 JP WO2021223886A5
- Authority
- JP
- Japan
- Prior art keywords
- mems
- bar
- plane
- electrode
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2020/062901 WO2021223886A1 (de) | 2020-05-08 | 2020-05-08 | Mems zum hocheffizienten interagieren mit einem volumenstrom |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023525730A JP2023525730A (ja) | 2023-06-19 |
| JPWO2021223886A5 true JPWO2021223886A5 (ko) | 2023-07-12 |
Family
ID=70779683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022567681A Pending JP2023525730A (ja) | 2020-05-08 | 2020-05-08 | 体積流との高効率な相互作用のためのｍｅｍｓ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20230091340A1 (ko) |
| EP (1) | EP4147461A1 (ko) |
| JP (1) | JP2023525730A (ko) |
| KR (1) | KR20230020989A (ko) |
| CN (1) | CN115918106A (ko) |
| TW (1) | TWI821663B (ko) |
| WO (1) | WO2021223886A1 (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022208829A1 (de) * | 2022-08-25 | 2024-03-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | MEMS, MEMS-Lautsprecher und Verfahren zum Herstellen derselben |
| DE102022128242A1 (de) | 2022-10-25 | 2024-04-25 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikroelektromechanische Vorrichtung zur Erzeugung eines Schalldrucks |
| DE102022211284A1 (de) * | 2022-10-25 | 2024-04-25 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanische Struktur und mikromechanischer Lautsprecher |
| DE102022213678A1 (de) | 2022-12-15 | 2024-06-20 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanisches Bauteil und Verfahren zum Erzeugen und/oder Verstärken eines Schallsignals |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3515134B2 (ja) | 1992-03-04 | 2004-04-05 | 正喜 江刺 | 静電マイクロアクチュエーター |
| WO2012095185A1 (de) | 2011-01-14 | 2012-07-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches bauelement |
| US20160090300A1 (en) * | 2014-09-30 | 2016-03-31 | Invensense, Inc. | Piezoelectric microphone with integrated cmos |
| DE102015107560A1 (de) * | 2015-05-13 | 2016-11-17 | USound GmbH | Schallwandleranordnung mit MEMS-Schallwandler |
| DE102017206766A1 (de) * | 2017-04-21 | 2018-10-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mems-wandler zum interagieren mit einem volumenstrom eines fluids und verfahren zum herstellen desselben |
| US10349188B2 (en) * | 2017-10-18 | 2019-07-09 | Akustica, Inc. | MEMS microphone system and method |
-
2020
- 2020-05-08 CN CN202080102945.8A patent/CN115918106A/zh active Pending
- 2020-05-08 KR KR1020227042910A patent/KR20230020989A/ko active Search and Examination
- 2020-05-08 JP JP2022567681A patent/JP2023525730A/ja active Pending
- 2020-05-08 WO PCT/EP2020/062901 patent/WO2021223886A1/de unknown
- 2020-05-08 EP EP20727165.1A patent/EP4147461A1/de active Pending
-
2021
- 2021-05-07 TW TW110116489A patent/TWI821663B/zh active
-
2022
- 2022-11-03 US US18/052,289 patent/US20230091340A1/en active Pending
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