JPWO2020096794A5 - - Google Patents
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- JPWO2020096794A5 JPWO2020096794A5 JP2021524017A JP2021524017A JPWO2020096794A5 JP WO2020096794 A5 JPWO2020096794 A5 JP WO2020096794A5 JP 2021524017 A JP2021524017 A JP 2021524017A JP 2021524017 A JP2021524017 A JP 2021524017A JP WO2020096794 A5 JPWO2020096794 A5 JP WO2020096794A5
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- metrology system
- light source
- sample holder
- sample
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- 230000005540 biological transmission Effects 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 3
- 210000004279 Orbit Anatomy 0.000 claims 1
- 230000001808 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 230000003287 optical Effects 0.000 claims 1
- 230000001360 synchronised Effects 0.000 claims 1
Claims (20)
第１のステージに結合された光源であって、第２のステージ上に配置されたサンプル保持器に光を向けるように構成された光源、
第３のステージ上に配置された１以上の走査検出器であって、前記サンプル保持器に隣接して且つ前記光源と対向するように軌道上に配置され、前記光源から送信された光を収集するように構成された１以上の走査検出器、及び
前記１以上の走査検出器と通信する分光光度計を備える、計測システム。 A waveguide measurement system,
a light source coupled to the first stage, the light source configured to direct light onto a sample holder located on the second stage;
one or more scanning detectors positioned on a third stage and positioned in orbit adjacent to the sample holder and opposite the light source to collect light transmitted from the light source; and a spectrophotometer in communication with the one or more scanning detectors.
第１のステージに結合された光源であって、第２のステージ上に配置されたサンプル保持器に向けて光を送信するように構成された光源、
第３のステージに結合された１以上の散乱計であって、前記サンプル保持器に隣接して且つ前記光源と対向するように配置され、前記光源によって送信された光を収集するように構成された１以上の散乱計、
第４のステージに結合された１以上の反射検出器であって、前記サンプル保持器の方向から前記第４のステージに向けて反射された光を収集するように構成された反射検出器、並びに
前記１以上の散乱計及び前記１以上の反射検出器と通信する分光光度計を備える、計測システム。 A waveguide measurement system,
a light source coupled to the first stage, the light source configured to transmit light towards a sample holder located on the second stage;
one or more scatterometers coupled to a third stage positioned adjacent to the sample holder and facing the light source and configured to collect light transmitted by the light source one or more scatterometers,
one or more reflection detectors coupled to a fourth stage, the reflection detectors configured to collect light reflected toward the fourth stage from the direction of the sample holder; A metrology system comprising a spectrophotometer in communication with the one or more scatterometers and the one or more reflection detectors.
第１のステージに結合された平行光源、
第２のステージ上に配置されたサンプル保持器、
第３のステージに結合され、前記サンプル保持器の方向から反射された光を収集するように構成された反射検出器、
第４のステージに結合され、前記平行光源から送信された光を収集するように構成された透過検出器、並びに
前記反射検出器及び前記透過検出器と通信する分光光度計を備える、計測システム。 A waveguide measurement system,
a directional light source coupled to the first stage;
a sample holder positioned on the second stage;
a reflection detector coupled to a third stage and configured to collect light reflected from the direction of the sample holder;
A metrology system comprising: a transmission detector coupled to a fourth stage and configured to collect light transmitted from said collimated light source; and a spectrophotometer in communication with said reflection detector and said transmission detector.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862756964P | 2018-11-07 | 2018-11-07 | |
| US62/756,964 | 2018-11-07 | ||
| US201862772887P | 2018-11-29 | 2018-11-29 | |
| US62/772,887 | 2018-11-29 | ||
| PCT/US2019/058313 WO2020096794A1 (en) | 2018-11-07 | 2019-10-28 | Methods and apparatus for waveguide metrology |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022514180A JP2022514180A (en) | 2022-02-10 |
| JPWO2020096794A5 true JPWO2020096794A5 (en) | 2022-11-08 |
Family
ID=70459610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021524017A Pending JP2022514180A (en) | 2018-11-07 | 2019-10-28 | Methods and equipment for waveguide measurement |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11029206B2 (en) |
| EP (1) | EP3877739A4 (en) |
| JP (1) | JP2022514180A (en) |
| KR (1) | KR20210072123A (en) |
| CN (1) | CN112997058A (en) |
| WO (1) | WO2020096794A1 (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10676325B1 (en) | 2018-02-27 | 2020-06-09 | Willie Dell | Hoist track adaptor |
| WO2021119153A1 (en) * | 2019-12-09 | 2021-06-17 | Egalon Claudio Oliveira | Systems and methods of side illumination of waveguides |
| WO2022081366A1 (en) | 2020-10-15 | 2022-04-21 | Applied Materials, Inc. | See-through metrology systems, apparatus, and methods for optical devices |
| DE102021200231A1 (en) * | 2021-01-13 | 2022-07-14 | Robert Bosch Gesellschaft mit beschränkter Haftung | Method for determining a diffraction characteristic of a hologram element for data glasses |
| CN113218627B (en) * | 2021-03-26 | 2022-10-14 | 歌尔股份有限公司 | Grating diffraction efficiency testing device and method |
| US20240201456A1 (en) * | 2021-04-30 | 2024-06-20 | Magic Leap, Inc. | Thin illumination layer waveguide and methods of fabrication |
| CN113884180B (en) * | 2021-09-29 | 2024-03-12 | 歌尔光学科技有限公司 | Testing system, method and device for diffraction optical waveguide |
| WO2023197106A1 (en) * | 2022-04-11 | 2023-10-19 | Goertek Optical Technology Co., Ltd | Waveguide measurement device |
| US20230375410A1 (en) * | 2022-05-20 | 2023-11-23 | Facebook Technologies, Llc | Apparatuses and systems for optical element measurements |
| WO2024059310A1 (en) * | 2022-09-15 | 2024-03-21 | Applied Materials, Inc. | Methods to measure light loss and efficiency of diffraction gratings on optical substrates |
| CN115931303B (en) * | 2022-10-26 | 2023-11-17 | 江西凤凰光学科技有限公司 | Test method of polychromatic diffraction optical waveguide |
| DE102022132453A1 (en) | 2022-12-07 | 2024-06-13 | Trioptics Gmbh | Device and method for determining an image quality of at least one image for a test object |
| CN117367751B (en) * | 2023-10-19 | 2024-05-10 | 中聚科技股份有限公司 | Performance detection method and device for ultra-pulse thulium-doped laser |
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| US5233405A (en) * | 1991-11-06 | 1993-08-03 | Hewlett-Packard Company | Optical spectrum analyzer having double-pass monochromator |
| IL116583A (en) * | 1995-12-27 | 2001-06-14 | Ruschin Shlomo | Spectral analyzer and direction indicator |
| JP4882139B2 (en) * | 2000-07-19 | 2012-02-22 | 大日本印刷株式会社 | Hologram evaluation device |
| US6731380B2 (en) * | 2001-06-18 | 2004-05-04 | Applied Optics Center Of Delaware, Inc. | Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films |
| KR100502560B1 (en) * | 2002-07-25 | 2005-07-20 | 주식회사 솔루션닉스 | Apparatus and Method for Registering Multiple Three Dimensional Scan Data by using Optical Marker |
| JP2005257320A (en) * | 2004-03-09 | 2005-09-22 | Tokyo Univ Of Pharmacy & Life Science | Spectral electrochemical cell and optical waveguide spectral electrochemical measuring method using it |
| US7254290B1 (en) | 2004-05-10 | 2007-08-07 | Lockheed Martin Corporation | Enhanced waveguide metrology gauge collimator |
| US7791727B2 (en) * | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
| CN101449134B (en) * | 2006-05-01 | 2011-08-03 | 海因兹仪器公司 | Measurement of linear and circular diattenuation in optical elements |
| JP4976113B2 (en) | 2006-11-29 | 2012-07-18 | 三井化学株式会社 | Optical waveguide inspection method and inspection apparatus |
| JP2010139483A (en) | 2008-12-15 | 2010-06-24 | Synergy Optosystems Co Ltd | Inspection system and inspection method of optical waveguide |
| WO2010140998A1 (en) * | 2009-06-02 | 2010-12-09 | Vladimir Yankov | Optical integrated nanospectrometer and method of manufacturing thereof |
| JP5467875B2 (en) | 2010-01-18 | 2014-04-09 | シナジーオプトシステムズ株式会社 | Optical waveguide inspection equipment |
| KR20130091390A (en) | 2012-02-08 | 2013-08-19 | 주식회사 제씨콤 | Goniometer of planar lightguide circuit |
| WO2013188602A1 (en) * | 2012-06-13 | 2013-12-19 | Kla-Tencor Corporation | Optical surface scanning systems and methods |
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| JP6331196B2 (en) | 2015-01-05 | 2018-05-30 | シナジーオプトシステムズ株式会社 | Optical element, irradiation optical system, condensing optical system, and optical waveguide inspection device |
| US9372347B1 (en) * | 2015-02-09 | 2016-06-21 | Microsoft Technology Licensing, Llc | Display system |
| WO2017165403A1 (en) * | 2016-03-21 | 2017-09-28 | Nueon Inc. | Porous mesh spectrometry methods and apparatus |
| JP6730125B2 (en) * | 2016-08-01 | 2020-07-29 | 株式会社ディスコ | Measuring device |
| KR20230070077A (en) * | 2016-10-28 | 2023-05-19 | 매직 립, 인코포레이티드 | Method and system for large field of view display with scanning reflector |
| JP2018146437A (en) | 2017-03-07 | 2018-09-20 | 日東電工株式会社 | Inspection method of optical waveguide and preparation method of optical waveguide using the same |
| US11092427B2 (en) * | 2018-09-25 | 2021-08-17 | The Charles Stark Draper Laboratory, Inc. | Metrology and profilometry using light field generator |
| EP3956629A4 (en) * | 2019-04-15 | 2023-01-04 | Applied Materials, Inc. | Measurement system and a method of diffracting light |
-
2019
- 2019-10-28 JP JP2021524017A patent/JP2022514180A/en active Pending
- 2019-10-28 WO PCT/US2019/058313 patent/WO2020096794A1/en unknown
- 2019-10-28 EP EP19881654.8A patent/EP3877739A4/en active Pending
- 2019-10-28 KR KR1020217016944A patent/KR20210072123A/en unknown
- 2019-10-28 CN CN201980073431.1A patent/CN112997058A/en active Pending
- 2019-10-31 US US16/670,976 patent/US11029206B2/en active Active
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