JPWO2020095619A1 - Thermal humidity measuring device - Google Patents

Thermal humidity measuring device Download PDF

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JPWO2020095619A1
JPWO2020095619A1 JP2020556709A JP2020556709A JPWO2020095619A1 JP WO2020095619 A1 JPWO2020095619 A1 JP WO2020095619A1 JP 2020556709 A JP2020556709 A JP 2020556709A JP 2020556709 A JP2020556709 A JP 2020556709A JP WO2020095619 A1 JPWO2020095619 A1 JP WO2020095619A1
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mixing ratio
measuring device
water mixing
humidity
thermal
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安藤　亮
亮 安藤
丈夫 細川
丈夫 細川
文夫 結城
文夫 結城
貴成 秋元
貴成 秋元
洋 小貫
洋 小貫
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Hitachi Astemo Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/56—Investigating or analyzing materials by the use of thermal means by investigating moisture content
    • G01N25/62—Investigating or analyzing materials by the use of thermal means by investigating moisture content by psychrometric means, e.g. wet-and-dry bulb thermometers
    • G01N25/64—Investigating or analyzing materials by the use of thermal means by investigating moisture content by psychrometric means, e.g. wet-and-dry bulb thermometers using electric temperature-responsive elements

Abstract

出力誤差のばらつきが小さい熱式湿度測定装置を得ること。本発明の熱式湿度測定装置１１は、発熱抵抗体を有する湿度検出部と、該湿度検出部からの信号を処理する信号処理部と、を備える熱式湿度測定装置であって、前記信号処理部は、室温での相対湿度１００％における水分混合比よりも大きい水分混合比の気体を用いて出力特性の調整が行われたものであることを特徴とする。To obtain a thermal humidity measuring device with small variation in output error. The thermal humidity measuring device 11 of the present invention is a thermal humidity measuring device including a humidity detecting unit having a heat generating resistor and a signal processing unit for processing a signal from the humidity detecting unit, and the signal processing. The unit is characterized in that the output characteristics are adjusted by using a gas having a water mixing ratio larger than the water mixing ratio at 100% relative humidity at room temperature.

Description

本発明は、湿度を測定する熱式湿度測定装置に関する。 The present invention relates to a thermal humidity measuring device for measuring humidity.

熱式湿度測定装置は、種々の技術分野で使用されており、自動車用内燃機関においては、低燃費化を図るために吸入空気の湿度を高精度に計測することが求められている。熱式湿度測定装置は、空気の熱伝導の変化を用いて湿度計測を行う。空気の熱伝導の変化は、空気中に晒された発熱体の放熱量により測定される。特許文献１には、薄膜の放熱量変化を、薄膜の温度変化情報から得るようにして、気体の物理的又は化学的変化を計測する熱伝導型の気体センサ装置の構造が示されている。 Thermal humidity measuring devices are used in various technical fields, and in internal combustion engines for automobiles, it is required to measure the humidity of intake air with high accuracy in order to improve fuel efficiency. The thermal humidity measuring device measures humidity by using changes in the heat conduction of air. The change in heat conduction of air is measured by the amount of heat released from the heating element exposed to the air. Patent Document 1 discloses a structure of a heat conduction type gas sensor device that measures a physical or chemical change of a gas by obtaining a change in the amount of heat radiation of the thin film from the temperature change information of the thin film.

特開２００５−３０８６７６号公報Japanese Unexamined Patent Publication No. 2005-308676

熱式湿度測定装置は、空気中に含まれる水分と乾燥空気の水分混合比（ｇ／ｋｇ）を出力する。熱式湿度測定装置は、製造時に出力特性の調整が行われ、出力誤差が一定の範囲に収まるように調整された後に出荷される。出力特性の調整では、水分混合比の調整点の間隔（調整点範囲）が狭い範囲で調整するよりも広い範囲で調整する方が高い精度を得られる。 The thermal humidity measuring device outputs the moisture mixture ratio (g / kg) of the moisture contained in the air and the dry air. The thermal humidity measuring device is shipped after the output characteristics are adjusted at the time of manufacture and the output error is adjusted to be within a certain range. In adjusting the output characteristics, it is possible to obtain higher accuracy by adjusting the water mixing ratio in a wide range than in adjusting the interval (adjustment point range) of the adjustment points in a narrow range.

しかしながら、水分混合比の場合、室温では相対湿度を１００％に調整しても、高混合比を達成することができず、水分混合比の調整点範囲を広くすることができない。したがって、出力特性の調整時に高混合比での調整ができず、出力誤差のばらつきを小さくすることが難しいという問題を有している。
本発明は、上記の点に鑑みてなされたものであり、その目的とするところは、出力誤差のばらつきが小さい熱式湿度測定装置を提供することである。However, in the case of the water mixing ratio, even if the relative humidity is adjusted to 100% at room temperature, a high mixing ratio cannot be achieved, and the adjustment point range of the water mixing ratio cannot be widened. Therefore, when adjusting the output characteristics, it is not possible to adjust with a high mixing ratio, and there is a problem that it is difficult to reduce the variation in the output error.
The present invention has been made in view of the above points, and an object of the present invention is to provide a thermal humidity measuring device having a small variation in output error.

上記課題を解決する本発明の熱式湿度測定装置は、発熱抵抗体を有する湿度検出部と、該湿度検出部からの信号を処理する信号処理部と、を備える熱式湿度測定装置であって、前記信号処理部は、室温での相対湿度１００％における水分混合比よりも大きい水分混合比の気体を用いて出力特性の調整が行われたものであることを特徴とする。 The thermal humidity measuring device of the present invention that solves the above problems is a thermal humidity measuring device including a humidity detecting unit having a heat generating resistor and a signal processing unit that processes a signal from the humidity detecting unit. The signal processing unit is characterized in that the output characteristics are adjusted by using a gas having a water mixing ratio larger than the water mixing ratio at 100% relative humidity at room temperature.

本発明によれば、出力誤差のばらつきが小さい熱式湿度測定装置を提供することができる。本発明に関連する更なる特徴は、本明細書の記述、添付図面から明らかになるものである。また、上記した以外の、課題、構成及び効果は、以下の実施形態の説明により明らかにされる。 According to the present invention, it is possible to provide a thermal humidity measuring device having a small variation in output error. Further features relating to the present invention will become apparent from the description herein and the accompanying drawings. In addition, problems, configurations, and effects other than those described above will be clarified by the following description of the embodiments.

本実施形態の熱式湿度測定装置を自動車用内燃機関に適用した例を示す図。The figure which shows the example which applied the thermal type humidity measuring apparatus of this embodiment to an internal combustion engine for automobiles. 本実施形態の熱式湿度測定装置を自動車用内燃機関の吸気通路に取り付けた状態を示す概念図。FIG. 6 is a conceptual diagram showing a state in which the thermal humidity measuring device of the present embodiment is attached to an intake passage of an internal combustion engine for an automobile. 調整点の範囲を示すグラフ。A graph showing the range of adjustment points. 水分混合比の測定範囲と調整点範囲と調整目標値を示すグラフ。A graph showing the measurement range of the water mixing ratio, the adjustment point range, and the adjustment target value. 環境温度と水分混合比の関係を示すグラフ。A graph showing the relationship between the ambient temperature and the water mixing ratio. 水分混合比の測定範囲を示すグラフ。The graph which shows the measurement range of a water mixture ratio. 湿度出力調整点の設定範囲を示すグラフ。A graph showing the setting range of the humidity output adjustment point. 水分混合比と出力電圧との関係を示すグラフ。The graph which shows the relationship between a water mixture ratio and an output voltage. 電圧と特性ばらつきとの関係を示すグラフ。A graph showing the relationship between voltage and characteristic variation. 各温度における水分混合比の範囲を示すグラフ。The graph which shows the range of the water mixture ratio at each temperature.

次に、本発明の一実施形態について図面を用いて説明する。
図１は、本実施形態の熱式湿度測定装置を自動車用内燃機関に用いた例を示す図である。Next, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a diagram showing an example in which the thermal humidity measuring device of the present embodiment is used for an internal combustion engine for an automobile.

本実施形態の熱式湿度測定装置１１は、自動車用の内燃機関システム１に用いられる。
内燃機関システム１は、過給器１５付きのエンジン２を有しており、その吸気通路３には、上流側から順番に、エアクリーナ４、エアフローセンサ５、インタークーラ６、スロットルバルブ７、吸気管８が設けられ、排気通路９には排気触媒１０が設けられている。そして、吸気管８には、熱式湿度測定装置１１と、圧力センサ１２と、温度センサ１３が取り付けられており、エンジン２に吸入される吸入空気の湿度、圧力、温度を測定する。The thermal humidity measuring device 11 of the present embodiment is used in the internal combustion engine system 1 for automobiles.
The internal combustion engine system 1 has an engine 2 with a supercharger 15, and in its intake passage 3, in order from the upstream side, an air cleaner 4, an air flow sensor 5, an intercooler 6, a throttle valve 7, and an intake pipe. 8 is provided, and an exhaust catalyst 10 is provided in the exhaust passage 9. A thermal humidity measuring device 11, a pressure sensor 12, and a temperature sensor 13 are attached to the intake pipe 8 to measure the humidity, pressure, and temperature of the intake air sucked into the engine 2.

過給器１５を通過した吸入空気は、インタークーラ６によって冷却はされるが、エンジン２に吸入されるときの温度は室温よりも高温となる。熱式湿度測定装置１１は、このような高温の吸入空気の湿度を検出するのに好適である。
図２は、本実施形態の熱式湿度測定装置を自動車用内燃機関の吸気通路に取り付けた状態を示す概念図である。The intake air that has passed through the supercharger 15 is cooled by the intercooler 6, but the temperature when it is sucked into the engine 2 becomes higher than room temperature. The thermal humidity measuring device 11 is suitable for detecting the humidity of such a high temperature intake air.
FIG. 2 is a conceptual diagram showing a state in which the thermal humidity measuring device of the present embodiment is attached to an intake passage of an internal combustion engine for an automobile.

熱式湿度測定装置１１は、吸気管８の取付部に装着される筐体２１と、筐体２１に収容されるセラミック基板２２及び回路基板２３を有している。そして、セラミック基板２２には、湿度センサ２４が実装されており、回路基板２３にはプリモールガイド２５を介してサーミスタ２６が接続されている。また、セラミック基板２２及び回路基板２３には、やＬＳＩやメモリ等の回路部品（図示せず）が搭載されている。 The thermal humidity measuring device 11 has a housing 21 mounted on the mounting portion of the intake pipe 8, a ceramic substrate 22 and a circuit board 23 housed in the housing 21. The humidity sensor 24 is mounted on the ceramic substrate 22, and the thermistor 26 is connected to the circuit board 23 via the pre-mole guide 25. Further, circuit components (not shown) such as LSI and memory are mounted on the ceramic substrate 22 and the circuit board 23.

筐体２１は、吸気管８の取付部に開口して形成された取付孔から挿入されて吸気管８内の通路８ａに配置される挿入部２１１と、挿入部２１１の基端に連続して吸気管８の外側に配置される本体部２１２を有している。本体部２１２には、セラミック基板２２及び回路基板２３を収容する収容室２１３が設けられている。挿入部２１１には、吸気管８内の通路８ａと収容室２１３との間を連通する連通路２１４が設けられており、吸気管８内の通路８ａを通過する吸入空気を収容室２１３に取り込むことができるようになっている。 The housing 21 is continuous with the insertion portion 211 inserted through the mounting hole formed by opening in the mounting portion of the intake pipe 8 and arranged in the passage 8a in the intake pipe 8 and the base end of the insertion portion 211. It has a main body portion 212 arranged outside the intake pipe 8. The main body 212 is provided with a storage chamber 213 for accommodating the ceramic substrate 22 and the circuit board 23. The insertion portion 211 is provided with a communication passage 214 that communicates between the passage 8a in the intake pipe 8 and the accommodation chamber 213, and takes in the intake air passing through the passage 8a in the intake pipe 8 into the accommodation chamber 213. You can do it.

熱式湿度測定装置１１は、発熱抵抗体を有する湿度検出部と、湿度検出部からの信号を処理する信号処理部を備えている。信号処理部は、湿度検出部からの信号を処理することによって、空気中に含まれる水分と乾燥空気の水分混合比（ｇ／ｋｇ）を出力する。熱式湿度測定装置１１は、水分混合比に応じた電圧（Ｖ）をセンサ出力として出力する。湿度検出部は、湿度センサ２４によって構成される。信号処理部は、セラミック基板２２及び回路基板２３に搭載されているＬＳＩやメモリによって構成される。 The thermal humidity measuring device 11 includes a humidity detecting unit having a heat generating resistor and a signal processing unit that processes a signal from the humidity detecting unit. The signal processing unit processes the signal from the humidity detection unit to output the water mixing ratio (g / kg) of the water contained in the air and the dry air. The thermal humidity measuring device 11 outputs a voltage (V) corresponding to the water mixing ratio as a sensor output. The humidity detection unit is composed of a humidity sensor 24. The signal processing unit is composed of an LSI and a memory mounted on the ceramic substrate 22 and the circuit board 23.

次に、熱式湿度測定装置１１の出力特性の調整方法について説明する。
熱式湿度測定装置１１は、個体差をなくして均一な検出精度を確保するために、出荷前に出力特性の調整が行われる。出力特性の調整作業では、水分混合比の異なる２点を調整点として設定し、それぞれの調整点を実現する気体の環境下に熱式湿度測定装置１１を配置し、かかる環境下で湿度センサ２４のセンサ出力（Ｖ）が調整公差の範囲に入るように信号処理部を調整し、その調整値をメモリに記憶させる作業が行われる。Next, a method of adjusting the output characteristics of the thermal humidity measuring device 11 will be described.
The output characteristics of the thermal humidity measuring device 11 are adjusted before shipment in order to eliminate individual differences and ensure uniform detection accuracy. In the output characteristic adjustment work, two points with different water mixing ratios are set as adjustment points, the thermal humidity measuring device 11 is placed in a gas environment that realizes each adjustment point, and the humidity sensor 24 is placed in such an environment. The signal processing unit is adjusted so that the sensor output (V) of the above is within the range of the adjustment tolerance, and the adjustment value is stored in the memory.

図３は、調整点範囲に応じた出力誤差のばらつき範囲を示すグラフであり、図３（ａ）は、本実施形態の調整方法により出力を調整した場合の出力誤差のばらつき範囲を示し、図３（ｂ）は、従来の調整方法により出力を調整した場合の出力誤差のばらつき範囲を示す図である。 FIG. 3 is a graph showing the variation range of the output error according to the adjustment point range, and FIG. 3A shows the variation range of the output error when the output is adjusted by the adjustment method of the present embodiment. FIG. 3 (b) is a diagram showing a variation range of output error when the output is adjusted by a conventional adjustment method.

従来は、図３（ｂ）に示すように、室温で達成可能な水分混合比の範囲Ｗ０内の気体のみを用いて出力の調整を行っていた。例えば、水分混合比が調整点Ａ２１の気体を有する環境下に熱式湿度測定装置１１を配置して出力３１を調整し、調整後に水分混合比が調整点Ａ２２の気体を有する環境下に配置して出力３２を調整する。調整点Ａ２１とＡ２２は、いずれも室温で達成可能な水分混合比範囲Ｗ０内の値である。 Conventionally, as shown in FIG. 3B, the output is adjusted by using only the gas within the range W0 of the water mixing ratio that can be achieved at room temperature. For example, the thermal humidity measuring device 11 is arranged in an environment where the water mixing ratio has a gas at the adjustment point A21 to adjust the output 31, and after the adjustment, it is arranged in an environment where the water mixing ratio has a gas at the adjusting point A22. And adjust the output 32. The adjustment points A21 and A22 are both values within the water mixing ratio range W0 that can be achieved at room temperature.

調整点範囲Ｗ１以外の出力は、外挿と補間により決定される。調整点Ａ２１とＡ２２においてそれぞれ調整誤差があるので、調整点Ａ２１とＡ２２からの外挿が多いほど、出力誤差の上限値ＵＬと下限値ＤＬとの間隔は広くなり、出力誤差のばらつきが大きくなる。 Outputs other than the adjustment point range W1 are determined by extrapolation and interpolation. Since there are adjustment errors at the adjustment points A21 and A22, the greater the extrapolation from the adjustment points A21 and A22, the wider the interval between the upper limit UL and the lower limit DL of the output error, and the greater the variation in the output error. ..

これに対して、本実施形態では、図３（ａ）に示すように、室温で達成できない水分混合比Ａ１２の環境下で出力の調整を行う。例えば、水分混合比が調整点Ａ１１の気体を有する環境下に熱式湿度測定装置１１を配置して出力３１を調整する。次いで、水分混合比が調整点Ａ１２の気体を有する環境下に熱式湿度測定装置１１を配置して出力３２を調整する。調整点Ａ１２は、室温で達成可能な水分混合比Ａ０よりも高い水分混合比である。
室温で達成可能な水分混合比Ａ０よりも高い水分混合比の気体を有する環境は、環境温度を室温よりも高い温度で実現できる。本実施形態では、高水分混合比を安定して達成できるまで環境温度を高温化し、かかる環境下で出力の調整を行っている。On the other hand, in the present embodiment, as shown in FIG. 3A, the output is adjusted in an environment of a water mixing ratio A12 which cannot be achieved at room temperature. For example, the output 31 is adjusted by arranging the thermal humidity measuring device 11 in an environment having a gas having a water mixing ratio of the adjustment point A11. Next, the thermal humidity measuring device 11 is arranged in an environment having a gas having a water mixing ratio of the adjusting point A12 to adjust the output 32. The adjustment point A12 is a water mixing ratio higher than the water mixing ratio A0 that can be achieved at room temperature.
An environment having a gas having a water mixing ratio higher than the water mixing ratio A0 that can be achieved at room temperature can realize an environmental temperature at a temperature higher than room temperature. In the present embodiment, the environmental temperature is raised until a high water mixing ratio can be stably achieved, and the output is adjusted in such an environment.

本実施形態によれば、室温では達成できない水分混合比の環境下で出力の調整を行っており、調整点Ａ１１とＡ１２の間の調整点範囲Ｗ１は、従来の調整点Ａ２１とＡ２２の間よりも広く、この広い調整点範囲Ｗ１内で出力調整を行っている。したがって、調整点Ａ１１とＡ１２からの外挿を少なくすることができ、外挿範囲での出力誤差のばらつきを小さくすることができる。 According to the present embodiment, the output is adjusted in an environment of a water mixing ratio that cannot be achieved at room temperature, and the adjustment point range W1 between the adjustment points A11 and A12 is larger than that between the conventional adjustment points A21 and A22. Is also wide, and the output is adjusted within this wide adjustment point range W1. Therefore, the extrapolation from the adjustment points A11 and A12 can be reduced, and the variation in the output error in the extrapolation range can be reduced.

図４は、センサ出力が曲がりを有する場合の調整方法を示すグラフであり、図４（ａ）は、本実施形態の調整方法により調整されたセンサ出力の例を示し、図４（ｂ）は、従来の調整方法により調整されたセンサ出力の例を示す図である。 FIG. 4 is a graph showing an adjustment method when the sensor output has a bend, FIG. 4A shows an example of the sensor output adjusted by the adjustment method of the present embodiment, and FIG. 4B shows an example. , Is a diagram showing an example of a sensor output adjusted by a conventional adjustment method.

センサ出力の特性ばらつきには、傾きと切片による誤差の他に、図６に示すような曲がりも含まれる。水分混合比と出力との関係が線形（直線状）に変化せず、非線形（カーブ状）に変化する場合、図４（ｂ）に示すように、水分混合比の調整点範囲が狭いと、室温で達成可能な水分混合比Ａ０よりも高い水分混合比において出力誤差が大きくなるおそれがある。 The variation in the characteristics of the sensor output includes the bending as shown in FIG. 6 in addition to the error due to the inclination and the intercept. When the relationship between the water mixing ratio and the output does not change linearly (linearly) but changes non-linearly (curved), as shown in FIG. 4B, if the adjustment point range of the water mixing ratio is narrow, The output error may increase at a water mixing ratio higher than the water mixing ratio A0 that can be achieved at room temperature.

例えば、図４（ｂ）に示す例では、室温で達成可能な水分混合比範囲Ｗ０内の調整点範囲Ｗ１内で出力調整を行ったことにより、センサ出力Ｖｏの傾きが大きくなっており、室温で達成可能な水分混合比Ａ０よりも高い範囲でセンサ出力Ｖｏの出力誤差が増大している。このように出力に曲がり誤差が生じている熱式湿度測定装置１１を、図４（ｂ）に示すような室温で達成可能な水分混合比範囲Ｗ０内の狭い調整点範囲Ｗ１で調整すると、曲がりによって傾きの調整目標値が誤差を持つことに起因して、調整された出力特性の誤差が悪化する。 For example, in the example shown in FIG. 4B, the slope of the sensor output Vo becomes large due to the output adjustment within the adjustment point range W1 within the water mixing ratio range W0 that can be achieved at room temperature, and the room temperature. The output error of the sensor output Vo increases in a range higher than the water mixing ratio A0 that can be achieved in. When the thermal humidity measuring device 11 having a bending error in the output is adjusted in a narrow adjustment point range W1 within the water mixing ratio range W0 achievable at room temperature as shown in FIG. 4B, bending is performed. Due to the fact that the adjustment target value of the inclination has an error, the error of the adjusted output characteristic is exacerbated.

一方、本実施形態によれば、室温で達成できない水分混合比で出力の調整を行っている。例えば、室温で達成可能な水分混合比範囲Ｗ０内の調整点Ａ１１の気体を有する環境下に熱式湿度測定装置１１を配置して出力３１を調整する。次いで、室温で達成可能な水分混合比範囲Ｗ０よりも高い調整点Ａ１２の気体を有する環境下に熱式湿度測定装置１１を配置して出力３２を調整する。したがって、図４（ａ）に示すように、センサ出力Ｖｏの傾きが小さくなっており、測定範囲Ｗ２である水分混合比の下限値Ａ１３から上限値Ａ１４までの間において曲がり以上の誤差は生じない。したがって、外挿範囲での出力誤差のばらつきを小さくすることができる。 On the other hand, according to the present embodiment, the output is adjusted at a water mixing ratio that cannot be achieved at room temperature. For example, the output 31 is adjusted by arranging the thermal humidity measuring device 11 in an environment having a gas at the adjustment point A11 within the water mixing ratio range W0 achievable at room temperature. Next, the thermal humidity measuring device 11 is arranged in an environment having a gas at the adjustment point A12 higher than the water mixing ratio range W0 achievable at room temperature to adjust the output 32. Therefore, as shown in FIG. 4A, the inclination of the sensor output Vo is small, and no error more than bending occurs between the lower limit value A13 and the upper limit value A14 of the water mixing ratio in the measurement range W2. .. Therefore, it is possible to reduce the variation in the output error in the extrapolation range.

図５は、環境温度と水分混合比の関係を示すグラフである。
水分混合比は、図５に示すように、相対湿度を１００％とした場合（１００％ＲＨ）でも、室内温度（２５℃）では２０ｇ／ｋｇが上限である。したがって、従来の室温で達成可能な水分混合比範囲Ｗ０内における出力の調整では、調整点の間隔が０ｇ／ｋｇから２０ｇ／ｋｇまでの間であり、極めて狭く、温度が高くなるに応じて出力誤差のばらつきが大きくなる。FIG. 5 is a graph showing the relationship between the environmental temperature and the water mixing ratio.
As shown in FIG. 5, the upper limit of the water mixing ratio is 20 g / kg at the room temperature (25 ° C.) even when the relative humidity is 100% (100% RH). Therefore, in the conventional adjustment of the output within the water mixing ratio range W0 that can be achieved at room temperature, the interval between the adjustment points is between 0 g / kg and 20 g / kg, which is extremely narrow and outputs as the temperature increases. The variation of the error becomes large.

一方、本実施形態によれば、高水分混合比を安定して発生できる温度で高水分混合比の環境と低水分混合比の環境をそれぞれ実現し、センサ出力の調整が行われる。例えば環境温度を８０℃とした場合、水分混合比を最大で５５７ｇ／ｋｇとすることができる。したがって、調整点の間隔を従来よりも広くすることができ、出力誤差のばらつきを小さくすることができる。したがって、自動車用の内燃機関システムに熱式湿度測定装置１１を用いた場合に、室温よりも高い温度の吸入空気の湿度を高精度に測定することができ、低燃費化を図ることができる。 On the other hand, according to the present embodiment, the environment of the high water content mixing ratio and the environment of the low water content mixing ratio are realized at a temperature at which a high water content mixing ratio can be stably generated, and the sensor output is adjusted. For example, when the environmental temperature is 80 ° C., the maximum water mixing ratio can be 557 g / kg. Therefore, the interval between the adjustment points can be made wider than before, and the variation in output error can be reduced. Therefore, when the thermal humidity measuring device 11 is used in the internal combustion engine system for automobiles, the humidity of the intake air having a temperature higher than room temperature can be measured with high accuracy, and fuel efficiency can be improved.

図７は、湿度出力調整点の設定範囲を示すグラフ、図８は、水分混合比と出力電圧との関係を示すグラフ、図９は、目標出力電圧と出力電圧との関係を示すグラフである。 FIG. 7 is a graph showing the setting range of the humidity output adjustment point, FIG. 8 is a graph showing the relationship between the water mixing ratio and the output voltage, and FIG. 9 is a graph showing the relationship between the target output voltage and the output voltage. ..

熱式湿度測定装置１１では、測定範囲の最大水分混合比の２５％以上の水分混合比の気体を用いて出力特性の調整が行われている。本実施形態では、出力の調整は、電圧信号で行う。図８に示すように、水分混合比と出力電圧との関係は非線形であるため、電圧信号の５０％以上を調整点とする場合、水分混合比では２５％以上に相当する。 In the thermal humidity measuring device 11, the output characteristics are adjusted by using a gas having a water mixing ratio of 25% or more of the maximum water mixing ratio in the measurement range. In this embodiment, the output is adjusted by a voltage signal. As shown in FIG. 8, since the relationship between the water mixing ratio and the output voltage is non-linear, when 50% or more of the voltage signal is set as the adjustment point, the water mixing ratio corresponds to 25% or more.

電圧５０％の範囲で調整すると、調整による最大特性ばらつきは調整点ばらつきの３倍になる。調整範囲を広げると最大特性ばらつきは小さくなり、調整範囲と出力範囲を同じにすると最大特性ばらつきは調整点ばらつきと同じになる。電圧信号の５０％以上で調整することによって、出力特性のばらつきを調整ばらつきの３倍以内とすることができる。
したがって、生産された熱式湿度測定装置１１の高水分混合比における出力特性の精度を向上できる。When the voltage is adjusted in the range of 50%, the maximum characteristic variation due to the adjustment becomes three times the adjustment point variation. When the adjustment range is widened, the maximum characteristic variation becomes small, and when the adjustment range and the output range are the same, the maximum characteristic variation becomes the same as the adjustment point variation. By adjusting at 50% or more of the voltage signal, the variation in output characteristics can be made within 3 times the adjustment variation.
Therefore, the accuracy of the output characteristics of the produced thermal humidity measuring device 11 at a high water mixing ratio can be improved.

熱式湿度測定装置１１は、湿度測定範囲Ｗ２の８割以上の調整幅で出力調整が行われている。つまり、調整点範囲Ｗ１は、湿度測定範囲Ｗ２の８割以上の大きさとなっている（図４参照）。熱式湿度測定装置１１は、水分混合比の調整点を広い範囲で調整する方が出力誤差のばらつきが生じにくくなっており、また、水分混合比が高い点（高湿度）の方が低い点（低湿度）よりも公差が狭く厳しいので、水分混合比が高い点で調整する方が調整しやすい。 The output of the thermal humidity measuring device 11 is adjusted with an adjustment range of 80% or more of the humidity measuring range W2. That is, the adjustment point range W1 is 80% or more of the humidity measurement range W2 (see FIG. 4). In the thermal humidity measuring device 11, it is less likely that the output error will vary when the adjustment point of the water mixing ratio is adjusted in a wide range, and the point where the water mixing ratio is high (high humidity) is the point where it is low. Since the tolerance is narrower and stricter than (low humidity), it is easier to adjust at the point where the water mixture ratio is high.

また、本実施形態では、室温での相対湿度１００％における水分混合比よりも大きい水分混合比の気体と、室温での相対湿度１００％における水分混合比よりも小さい水分混合比の気体とを用いて、出力特性の調整を行っている。これにより、室温と室温よりも高い温度の両方に存在する水分混合比で調整し、同じ水分混合比で温度特性を確認することができる。 Further, in the present embodiment, a gas having a water mixing ratio larger than the water mixing ratio at 100% relative humidity at room temperature and a gas having a water mixing ratio smaller than the water mixing ratio at 100% relative humidity at room temperature are used. The output characteristics are adjusted. As a result, it is possible to adjust the water mixing ratio existing at both room temperature and a temperature higher than room temperature, and to confirm the temperature characteristics at the same water mixing ratio.

図１０は、環境温度と水分混合比との関係を示すグラフであり、本実施形態における水分混合比の調整点の設定方法を説明するものである。 FIG. 10 is a graph showing the relationship between the environmental temperature and the water mixing ratio, and illustrates the method of setting the adjustment point of the water mixing ratio in the present embodiment.

熱式湿度測定装置１１は、室温よりも高温でかつ水分混合比を９０％以下で発生できる温度の気体を用いて出力特性の調整が行われている。例えば、調湿気体が露点温度（相対湿度１００％となる温度）を下回ると結露が発生し、水分混合比が低下してしまう。例えば、１００ｋＰａの圧力環境下で、３００ｇ／ｋｇの水分混合比を達成する場合、露天温度は７１℃なので、７１℃以下になると結露が発生し、水分混合比が低下してしまう。したがって、熱式湿度測定装置１１の出力特性を調整する調整装置において、調整を行う環境の相対湿度を１００％に保つことは困難である。 The output characteristics of the thermal humidity measuring device 11 are adjusted by using a gas having a temperature higher than room temperature and having a water mixing ratio of 90% or less. For example, if the humidity control body is below the dew point temperature (the temperature at which the relative humidity is 100%), dew condensation occurs and the water mixing ratio is lowered. For example, when a water mixing ratio of 300 g / kg is achieved in a pressure environment of 100 kPa, the open-air temperature is 71 ° C., so if the temperature is 71 ° C. or lower, dew condensation occurs and the water mixing ratio decreases. Therefore, in the adjusting device for adjusting the output characteristics of the thermal humidity measuring device 11, it is difficult to keep the relative humidity of the adjusting environment at 100%.

熱式湿度測定装置１１の出力特性を調整する調整装置は、調整環境の温度が外部環境の影響を受けるため、定温度制御をしても公差が生じる。例えば温度公差が±２％とすると、環境温度を７３．４℃とすれば相対湿度９０％で３００ｇ／ｋｇを達成できる。調整装置の温度を７３．４℃±２％に制御すれば、調整環境における結露を防ぎ、混合比を一定に保つことができる。 In the adjusting device that adjusts the output characteristics of the thermal humidity measuring device 11, the temperature of the adjusting environment is affected by the external environment, so that a tolerance is generated even if constant temperature control is performed. For example, if the temperature tolerance is ± 2% and the environmental temperature is 73.4 ° C., 300 g / kg can be achieved at a relative humidity of 90%. If the temperature of the adjusting device is controlled to 73.4 ° C. ± 2%, dew condensation can be prevented in the adjusting environment and the mixing ratio can be kept constant.

熱式湿度測定装置１１の出力特性の調整は、調整装置により行われる。調整装置は、熱式湿度測定装置１１を収容する収容室と、収容室内の温度及び湿度の環境を調整する温湿度調整部とを有している。調整装置は、調整する際の環境調湿空気の温度に比べて、収容室の温度や、収容室の内壁の温度が低い場合に、調整装置内で結露が発生し、収容室内の水分混合比が変化する可能性がある。そこで、調整装置では、環境調湿空気を流体として収容室内を流し、収容室内を環境調湿空気と同じ温度に調整している。収容室内において環境調湿空気を流体とすることにより、温湿調整部では、環境調湿空気の温度管理のみを精密に行えばよいので、管理が容易である。 The output characteristics of the thermal humidity measuring device 11 are adjusted by the adjusting device. The adjusting device includes a storage room for accommodating the thermal humidity measuring device 11, and a temperature / humidity adjusting unit for adjusting the temperature and humidity environment in the storage room. When the temperature of the containment chamber or the temperature of the inner wall of the containment chamber is lower than the temperature of the environmental humidity control air at the time of adjustment, dew condensation occurs in the adjuster and the moisture mixing ratio in the containment chamber. May change. Therefore, in the adjusting device, the environmental humidity control air is used as a fluid to flow through the accommodation chamber, and the temperature of the accommodation chamber is adjusted to the same temperature as the environmental humidity control air. By using the environmental humidity control air as a fluid in the accommodation chamber, the temperature / humidity adjustment unit only needs to precisely control the temperature of the environmental humidity control air, so that the control is easy.

また、熱式湿度測定装置１１の収容室内への搬入搬出時や、収容室内と収容室外との間のリーク部分から収容室内に外気が侵入し、収容室内の水分混合比が変化する可能性がある。この場合も、収容室内に調湿空気を流すようにすれば、外気との僅かな気体交換により変化した水分混合比も所定の値に戻すことができる。相対湿度が１００％付近の空気を流しても結露は乾きにくいが、相対湿度が１００％よりも低い環境調湿空気を用いることで、調整装置内の結露を乾かしやすくなる。 In addition, when the thermal humidity measuring device 11 is carried in and out of the accommodation room, outside air may enter the accommodation room from a leak portion between the accommodation room and the outside of the accommodation room, and the moisture mixing ratio in the accommodation room may change. be. In this case as well, if the humidity-controlled air is allowed to flow in the accommodation chamber, the moisture mixing ratio changed by a slight gas exchange with the outside air can be returned to a predetermined value. Condensation is difficult to dry even if air with a relative humidity of around 100% is flowed, but by using environmental humidity control air with a relative humidity lower than 100%, it becomes easier to dry the dew condensation in the adjusting device.

湿度出力を調整する際の環境調湿空気の温度に比べて、調整される熱式湿度測定装置１１の温度が露点温度未満の場合、調整される熱式湿度測定装置１１の表面に結露が発生し、水分混合比が変化する可能性がある。したがって、本実施形態では、熱式湿度測定装置１１の温度を、調整装置の環境調湿空気の露点温度より高い温度まで加熱し、その温度を保ったまま熱式湿度測定装置１１を調整装置の収容室内に搬入して湿度の出力特性の調整を行っている。これにより、結露の発生を防ぎ、水分混合比が変化するのを防ぐことができる。 If the temperature of the adjusted thermal humidity measuring device 11 is lower than the dew point temperature compared to the temperature of the environmental humidity control air when adjusting the humidity output, dew condensation occurs on the surface of the adjusted thermal humidity measuring device 11. However, the water mixing ratio may change. Therefore, in the present embodiment, the temperature of the thermal humidity measuring device 11 is heated to a temperature higher than the dew point temperature of the environmental humidity control air of the adjusting device, and the thermal humidity measuring device 11 is adjusted while maintaining the temperature. It is carried into the containment chamber and the humidity output characteristics are adjusted. This makes it possible to prevent the occurrence of dew condensation and prevent the water mixing ratio from changing.

以上、本発明の実施形態について詳述したが、本発明は、前記の実施形態に限定されるものではなく、特許請求の範囲に記載された本発明の精神を逸脱しない範囲で、種々の設計変更を行うことができるものである。例えば、前記した実施の形態は本発明を分かりやすく説明するために詳細に説明したものであり、必ずしも説明した全ての構成を備えるものに限定されるものではない。また、ある実施形態の構成の一部を他の実施形態の構成に置き換えることが可能であり、また、ある実施形態の構成に他の実施形態の構成を加えることも可能である。さらに、各実施形態の構成の一部について、他の構成の追加・削除・置換をすることが可能である。 Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various designs are designed without departing from the spirit of the present invention described in the claims. You can make changes. For example, the above-described embodiment has been described in detail in order to explain the present invention in an easy-to-understand manner, and is not necessarily limited to the one including all the described configurations. Further, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Further, it is possible to add / delete / replace other configurations with respect to a part of the configurations of each embodiment.

１１ 熱式湿度測定装置 11 Thermal humidity measuring device

Claims (7)

発熱抵抗体を有する湿度検出部と、該湿度検出部からの信号を処理する信号処理部と、を備える熱式湿度測定装置であって、
前記信号処理部は、室温での相対湿度１００％における水分混合比よりも大きい水分混合比の気体を用いて出力特性の調整が行われたものであることを特徴とする熱式湿度測定装置。A thermal humidity measuring device including a humidity detection unit having a heat generation resistor and a signal processing unit for processing a signal from the humidity detection unit.
The signal processing unit is a thermal humidity measuring device in which the output characteristics are adjusted by using a gas having a water mixing ratio larger than the water mixing ratio at 100% relative humidity at room temperature. 前記信号処理部は、測定範囲の最大水分混合比の２５％以上の水分混合比の気体を用いて出力特性の調整が行われたものであることを特徴とする請求項１に記載の熱式湿度測定装置。 The thermal formula according to claim 1, wherein the signal processing unit is one in which the output characteristics are adjusted by using a gas having a water mixing ratio of 25% or more of the maximum water mixing ratio in the measurement range. Humidity measuring device. 前記信号処理部は、測定範囲の８割以上の調整幅で出力特性の調整が行われたものであることを特徴とする請求項１に記載の熱式湿度測定装置。 The thermal humidity measuring device according to claim 1, wherein the signal processing unit is one in which the output characteristics are adjusted with an adjustment range of 80% or more of the measurement range. 前記信号処理部は、室温での相対湿度１００％における水分混合比よりも小さい水分混合比の気体を用いて出力特性の調整が行われたものであることを特徴とする請求項１に記載の熱式湿度測定装置。 The first aspect of claim 1, wherein the signal processing unit is one in which the output characteristics are adjusted by using a gas having a water mixing ratio smaller than the water mixing ratio at 100% relative humidity at room temperature. Thermal humidity measuring device. 前記信号処理部は、出力特性の調整を行う水分混合比を相対湿度９０％以下で発生できる温度の気体を用いて出力特性の調整が行われたものであることを特徴とする請求項２に記載の熱式湿度測定装置。 2. The signal processing unit is characterized in that the output characteristics are adjusted by using a gas having a temperature at which the water mixing ratio for adjusting the output characteristics can be generated at a relative humidity of 90% or less. The thermal humidity measuring device described. 前記信号処理部は、出力特性の調整を行う水分混合比に調整された流体を用いて出力特性の調整が行われたものであることを特徴とする請求項２に記載の熱式湿度測定装置。 The thermal humidity measuring device according to claim 2, wherein the signal processing unit is one in which the output characteristics are adjusted by using a fluid adjusted to a water mixing ratio for adjusting the output characteristics. .. 調整装置内の環境調湿空気の露点温度よりも高い温度まで熱式湿度測定装置を加熱する工程と、
調整装置内に前記熱式湿度測定装置を装着して湿度の出力特性の調整を行う工程と、
を含む熱式湿度計測装置の調整方法。The process of heating the thermal humidity measuring device to a temperature higher than the dew point temperature of the environmental humidity control air in the adjusting device, and
The process of installing the thermal humidity measuring device in the adjusting device and adjusting the output characteristics of humidity, and
How to adjust the thermal humidity measuring device including.
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