JPWO2017163506A1 - 太陽電池セル - Google Patents
太陽電池セル Download PDFInfo
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- JPWO2017163506A1 JPWO2017163506A1 JP2018506769A JP2018506769A JPWO2017163506A1 JP WO2017163506 A1 JPWO2017163506 A1 JP WO2017163506A1 JP 2018506769 A JP2018506769 A JP 2018506769A JP 2018506769 A JP2018506769 A JP 2018506769A JP WO2017163506 A1 JPWO2017163506 A1 JP WO2017163506A1
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- Prior art keywords
- layer
- silicon nitride
- nitride layer
- silicon
- amorphous silicon
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- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 151
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 151
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 127
- 229910021419 crystalline silicon Inorganic materials 0.000 claims abstract description 64
- 238000002161 passivation Methods 0.000 claims description 60
- 239000001257 hydrogen Substances 0.000 claims description 44
- 229910052739 hydrogen Inorganic materials 0.000 claims description 44
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 17
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- 239000002019 doping agent Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 301
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 8
- 125000004429 atom Chemical group 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910000077 silane Inorganic materials 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- 229910021529 ammonia Inorganic materials 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (7)
- 結晶性シリコンウェーハと、
窒化ケイ素を主成分として構成され、前記結晶性シリコンウェーハの受光面上に形成された第1窒化ケイ素層と、
前記結晶性シリコンウェーハの裏面の第1領域上に形成された第1導電型の第1非晶質シリコン層と、
窒化ケイ素を主成分として構成され、前記第1非晶質シリコン層上の一部に形成された第2窒化ケイ素層と、
前記結晶性シリコンウェーハの裏面の第2領域上、および前記第2窒化ケイ素層上に形成された第2導電型の第2非晶質シリコン層と、
を備え、
前記第2窒化ケイ素層は、前記第1窒化ケイ素層より屈折率が高い、太陽電池セル。 - 前記結晶性シリコンウェーハは、n型結晶性シリコンウェーハであり、
前記第1非晶質シリコン層は、n型非晶質シリコンを主成分として構成され、
前記第2非晶質シリコン層は、p型非晶質シリコンを主成分として構成される、請求項1に記載の太陽電池セル。 - 実質的に真正な非晶質シリコンか、または前記第1非晶質シリコン層を構成するn型非晶質シリコンよりn型ドーパントの濃度が低い非晶質シリコンを主成分として構成され、前記結晶性シリコンウェーハと前記第1非晶質シリコン層との間に形成されたパッシベーション層をさらに備える、請求項2に記載の太陽電池セル。
- 前記第2窒化ケイ素層は、波長633nmの光の屈折率が2.1以上である、請求項1〜3のいずれか1項に記載の太陽電池セル。
- 前記第2窒化ケイ素層は、波長633nmの光の屈折率が2.5以下である、請求項4に記載の太陽電池セル。
- 前記第2窒化ケイ素層は、前記第1窒化ケイ素層より水素濃度が高い、請求項1〜5のいずれか1項に記載の太陽電池セル。
- 前記第2窒化ケイ素層は、前記第1窒化ケイ素層より密度が低い、請求項1〜6のいずれか1項に記載の太陽電池セル。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016061965 | 2016-03-25 | ||
JP2016061965 | 2016-03-25 | ||
PCT/JP2016/087617 WO2017163506A1 (ja) | 2016-03-25 | 2016-12-16 | 太陽電池セル |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2017163506A1 true JPWO2017163506A1 (ja) | 2018-12-27 |
Family
ID=59899903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018506769A Pending JPWO2017163506A1 (ja) | 2016-03-25 | 2016-12-16 | 太陽電池セル |
Country Status (3)
Country | Link |
---|---|
US (1) | US20190027619A1 (ja) |
JP (1) | JPWO2017163506A1 (ja) |
WO (1) | WO2017163506A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7323107B2 (ja) * | 2018-03-26 | 2023-08-08 | シャープ株式会社 | 光電変換素子 |
CN116314356A (zh) | 2021-02-23 | 2023-06-23 | 浙江晶科能源有限公司 | 太阳能电池及其制作方法、太阳能组件 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000299482A (ja) * | 1999-04-12 | 2000-10-24 | Sanyo Electric Co Ltd | 太陽電池モジュール |
JP2005019549A (ja) * | 2003-06-24 | 2005-01-20 | Toyota Motor Corp | 光電変換素子 |
WO2008065918A1 (fr) * | 2006-12-01 | 2008-06-05 | Sharp Kabushiki Kaisha | Cellule solaire et son procédé de fabrication |
JP2010532086A (ja) * | 2007-04-12 | 2010-09-30 | アプライド マテリアルズ インコーポレイテッド | 太陽電池の窒化シリコンパッシベーション |
US20130125964A1 (en) * | 2011-11-18 | 2013-05-23 | Chan-Bin Mo | Solar cell and manufacturing method thereof |
JP2013125964A (ja) * | 2011-12-13 | 2013-06-24 | Samsung Sdi Co Ltd | 光起電力素子及びその製造方法 |
JP2013211392A (ja) * | 2012-03-30 | 2013-10-10 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP2016006841A (ja) * | 2014-05-30 | 2016-01-14 | パナソニックIpマネジメント株式会社 | 太陽電池 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10107306A (ja) * | 1996-10-03 | 1998-04-24 | Sanyo Electric Co Ltd | 太陽電池モジュール及びその製造方法 |
JP2003273382A (ja) * | 2002-03-12 | 2003-09-26 | Kyocera Corp | 太陽電池素子 |
JP4657630B2 (ja) * | 2004-05-25 | 2011-03-23 | 株式会社島津製作所 | 太陽電池、その製造方法および反射防止膜成膜装置 |
WO2012046306A1 (ja) * | 2010-10-05 | 2012-04-12 | 三菱電機株式会社 | 光起電力装置およびその製造方法 |
-
2016
- 2016-12-16 WO PCT/JP2016/087617 patent/WO2017163506A1/ja active Application Filing
- 2016-12-16 JP JP2018506769A patent/JPWO2017163506A1/ja active Pending
-
2018
- 2018-09-20 US US16/137,039 patent/US20190027619A1/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000299482A (ja) * | 1999-04-12 | 2000-10-24 | Sanyo Electric Co Ltd | 太陽電池モジュール |
JP2005019549A (ja) * | 2003-06-24 | 2005-01-20 | Toyota Motor Corp | 光電変換素子 |
WO2008065918A1 (fr) * | 2006-12-01 | 2008-06-05 | Sharp Kabushiki Kaisha | Cellule solaire et son procédé de fabrication |
JP2010532086A (ja) * | 2007-04-12 | 2010-09-30 | アプライド マテリアルズ インコーポレイテッド | 太陽電池の窒化シリコンパッシベーション |
US20130125964A1 (en) * | 2011-11-18 | 2013-05-23 | Chan-Bin Mo | Solar cell and manufacturing method thereof |
JP2013125964A (ja) * | 2011-12-13 | 2013-06-24 | Samsung Sdi Co Ltd | 光起電力素子及びその製造方法 |
JP2013211392A (ja) * | 2012-03-30 | 2013-10-10 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP2016006841A (ja) * | 2014-05-30 | 2016-01-14 | パナソニックIpマネジメント株式会社 | 太陽電池 |
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US20190027619A1 (en) | 2019-01-24 |
WO2017163506A1 (ja) | 2017-09-28 |
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