JPWO2008029736A1 - ダイヤモンドの表面層又は成長層の分離方法 - Google Patents
ダイヤモンドの表面層又は成長層の分離方法 Download PDFInfo
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 236
- 239000010410 layer Substances 0.000 title claims abstract description 92
- 238000000034 method Methods 0.000 title claims abstract description 62
- 239000002344 surface layer Substances 0.000 title claims abstract description 11
- 239000013078 crystal Substances 0.000 claims abstract description 77
- 238000005468 ion implantation Methods 0.000 claims abstract description 36
- 239000012808 vapor phase Substances 0.000 claims abstract description 25
- 239000008151 electrolyte solution Substances 0.000 claims abstract description 19
- 238000001308 synthesis method Methods 0.000 claims abstract description 16
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- 230000005684 electric field Effects 0.000 claims description 8
- 239000003792 electrolyte Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 description 80
- 150000002500 ions Chemical class 0.000 description 20
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 18
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- 238000005268 plasma chemical vapour deposition Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000007423 decrease Effects 0.000 description 8
- 238000003698 laser cutting Methods 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
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- 238000005498 polishing Methods 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
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- 239000001257 hydrogen Substances 0.000 description 4
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
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- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
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- 239000010439 graphite Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/20—Doping by irradiation with electromagnetic waves or by particle radiation
- C30B31/22—Doping by irradiation with electromagnetic waves or by particle radiation by ion-implantation
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/06—Joining of crystals
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- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
これらいずれの用途においても、大型のダイヤモンド基板の実現が求められており、多結晶ダイヤモンド基板に関しては、すでに2インチを越える大型の基板が製造されている。これに対して、単結晶ダイヤモンド基板は、天然あるいは人工の単結晶ダイヤモンドを劈開、ソーイング、レーザー切断等の方法により切り出し、必要に応じて研磨することにより得られているが、大型の単結晶ダイヤモンドは天然の場合には非常に高価となる。また、高温高圧合成法によって製造する場合にも、合成に極めて長時間を要し、結晶サイズが大きくなるに従って歩留まりも低下することから、1cm角程度が限界であり、実用的には5mm角程度までの結晶が多く用いられている。
1. ダイヤモンドにイオン注入を行って表面近傍に非ダイヤモンド層を形成した後、電解液中において電極間に交流電圧を印加して、該ダイヤモンドの非ダイヤモンド層をエッチングすることを特徴とする、ダイヤモンドの表面層の分離方法。
2. 電極間に印加する交流電圧の電界強度が、50〜10000V/cmである上記項1に記載のダイヤモンドの表面層の分離方法。
3. ダイヤモンドが、単結晶又は多結晶のダイヤモンドである上記項1に記載の方法。
4. ダイヤモンドにイオン注入を行って表面近傍に非ダイヤモンド層を形成した後、ダイヤモンド表面に気相合成法によってダイヤモンドを成長させ、その後、電解液中において電極間に交流電圧を印加して、該ダイヤモンドの非ダイヤモンド層をエッチングすることを特徴とする、ダイヤモンドの成長層の分離方法。
5. 電極間に印加する交流電圧の電界強度が、50〜10000V/cmである上記項4に記載のダイヤモンドの成長層の分離方法。
6. ダイヤモンドが、単結晶又は多結晶のダイヤモンドである上記項4に記載の方法。
基板として用いるダイヤモンドは、絶縁性であればよく、天然、人工など任意のダイヤモンドを用いることができる。ダイヤモンドは、単結晶及び多結晶のいずれであってもよい。
ダイヤモンド中への非ダイヤモンド層の形成は、イオン注入によって行うことができる。この工程では、ダイヤモンドの一方の表面からイオン注入することによって、ダイヤモンドの表面近傍に結晶構造が変質した非ダイヤモンド層が形成される。
上記した方法でイオン注入によってダイヤモンド中に非ダイヤモンド層を形成した後、電解液中において、交流電圧を印加してエッチングを行うことによって、グラファイト化が進行して導電性が増加している非ダイヤモンド層の部分でエッチングが進行して、非ダイヤモンド層の部分から表面層が分離される。この際、非ダイヤモンド層が電気化学的にエッチングされているのか、マイクロプラズマによってエッチングされているのかは必ずしも明確ではないので、電解液とは、エッチング処理に使用している液体を意味するものである。
気相合成法としては、特に限定はなく、例えば、マイクロ波プラズマCVD法、熱フィラメント法、直流放電法などの公知の方法を適用できる。
上記したエッチングによって分離されたダイヤモンドは、各種の用途に有効に利用できる。例えば、単結晶ダイヤモンドについては、工具、砥石、電子デバイス用基板等として有効に利用できる。
Claims (6)
- ダイヤモンドにイオン注入を行って表面近傍に非ダイヤモンド層を形成した後、電解液中において電極間に交流電圧を印加して、該ダイヤモンドの非ダイヤモンド層をエッチングすることを特徴とする、ダイヤモンドの表面層の分離方法。
- 電極間に印加する交流電圧の電界強度が、50〜10000V/cmである請求項1に記載のダイヤモンドの表面層の分離方法。
- ダイヤモンドが、単結晶又は多結晶のダイヤモンドである請求項1に記載の方法。
- ダイヤモンドにイオン注入を行って表面近傍に非ダイヤモンド層を形成した後、ダイヤモンド表面に気相合成法によってダイヤモンドを成長させ、その後、電解液中において電極間に交流電圧を印加して、該ダイヤモンドの非ダイヤモンド層をエッチングすることを特徴とする、ダイヤモンドの成長層の分離方法。
- 電極間に印加する交流電圧の電界強度が、50〜10000V/cmである請求項4に記載のダイヤモンドの成長層の分離方法。
- ダイヤモンドが、単結晶又は多結晶のダイヤモンドである請求項4に記載の方法。
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JP2008533138A JP4919300B2 (ja) | 2006-09-04 | 2007-08-31 | ダイヤモンドの表面層又は成長層の分離方法 |
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JP2006238402 | 2006-09-04 | ||
JP2006238402 | 2006-09-04 | ||
JP2008533138A JP4919300B2 (ja) | 2006-09-04 | 2007-08-31 | ダイヤモンドの表面層又は成長層の分離方法 |
PCT/JP2007/067023 WO2008029736A1 (fr) | 2006-09-04 | 2007-08-31 | Procéde de séparation d'une couche de surface ou d'une couche de croissance de diamant |
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JPWO2008029736A1 true JPWO2008029736A1 (ja) | 2010-01-21 |
JP4919300B2 JP4919300B2 (ja) | 2012-04-18 |
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US (1) | US9410241B2 (ja) |
EP (1) | EP2058419B1 (ja) |
JP (1) | JP4919300B2 (ja) |
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Families Citing this family (8)
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JP5142282B2 (ja) * | 2008-09-09 | 2013-02-13 | 独立行政法人産業技術総合研究所 | ダイヤモンドの表層加工方法 |
JP5245159B2 (ja) * | 2008-10-16 | 2013-07-24 | 独立行政法人産業技術総合研究所 | ダイヤモンド基材中への流路形成方法 |
GB2488498B (en) * | 2009-12-16 | 2017-11-22 | Nat Inst Advanced Ind Science & Tech | Method for producing mosaic diamond |
JP5621291B2 (ja) * | 2010-03-23 | 2014-11-12 | 住友電気工業株式会社 | ダイヤモンドの剥離方法及び剥離装置 |
JP5621292B2 (ja) * | 2010-03-23 | 2014-11-12 | 住友電気工業株式会社 | ダイヤモンドの剥離方法及び剥離装置 |
WO2016021710A1 (ja) * | 2014-08-08 | 2016-02-11 | 住友電気工業株式会社 | ダイヤモンドの製造方法、ダイヤモンド、ダイヤモンド複合基板、ダイヤモンド接合基板および工具 |
CN111996581B (zh) * | 2020-07-08 | 2021-10-26 | 西安电子科技大学 | 一种单晶金刚石与衬底无损耗快速分离方法 |
CN112899774B (zh) * | 2021-01-18 | 2023-10-17 | 武汉普迪真空科技有限公司 | 一种天然金刚石同质外延生长单晶金刚石的方法 |
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US5587210A (en) * | 1994-06-28 | 1996-12-24 | The United States Of America As Represented By The Secretary Of The Navy | Growing and releasing diamonds |
JPH1050644A (ja) * | 1996-08-05 | 1998-02-20 | Sumitomo Electric Ind Ltd | 半導体基体の加工方法 |
JP2001509839A (ja) * | 1994-06-28 | 2001-07-24 | アメリカ合衆国 | ダイヤモンド表面の研磨 |
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US3870033A (en) * | 1973-11-30 | 1975-03-11 | Aqua Media | Ultra pure water process and apparatus |
US5269890A (en) * | 1992-12-31 | 1993-12-14 | The United States Of America As Represented By The Secretary Of The Navy | Electrochemical process and product therefrom |
JP4588453B2 (ja) * | 2002-09-27 | 2010-12-01 | コムコン・アーゲー | 被覆方法 |
JP4340881B2 (ja) | 2004-03-24 | 2009-10-07 | 住友電気工業株式会社 | ダイヤモンドの製造方法 |
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- 2007-08-31 EP EP07806496.1A patent/EP2058419B1/en active Active
- 2007-08-31 JP JP2008533138A patent/JP4919300B2/ja active Active
- 2007-08-31 US US12/439,887 patent/US9410241B2/en active Active
- 2007-08-31 WO PCT/JP2007/067023 patent/WO2008029736A1/ja active Application Filing
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5587210A (en) * | 1994-06-28 | 1996-12-24 | The United States Of America As Represented By The Secretary Of The Navy | Growing and releasing diamonds |
JP2001509839A (ja) * | 1994-06-28 | 2001-07-24 | アメリカ合衆国 | ダイヤモンド表面の研磨 |
JPH1050644A (ja) * | 1996-08-05 | 1998-02-20 | Sumitomo Electric Ind Ltd | 半導体基体の加工方法 |
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EP2058419A4 (en) | 2012-02-29 |
WO2008029736A1 (fr) | 2008-03-13 |
JP4919300B2 (ja) | 2012-04-18 |
EP2058419B1 (en) | 2016-04-20 |
US20100206217A1 (en) | 2010-08-19 |
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