JPS6488202A - Interferometer and light source apparatus therefor - Google Patents
Interferometer and light source apparatus thereforInfo
- Publication number
- JPS6488202A JPS6488202A JP24597287A JP24597287A JPS6488202A JP S6488202 A JPS6488202 A JP S6488202A JP 24597287 A JP24597287 A JP 24597287A JP 24597287 A JP24597287 A JP 24597287A JP S6488202 A JPS6488202 A JP S6488202A
- Authority
- JP
- Japan
- Prior art keywords
- luminous flux
- reflected
- corner cube
- mirror
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
PURPOSE:To achieve miniaturization and the facilitation of adjustment, by dividing the luminous flux from a beam source into measuring luminous flux and reference luminous flux and reflecting the measuring luminous flux by the reflecting means of a position to be measured to allow the same to interfere with the reference luminous flux. CONSTITUTION:The luminous flux emitted from a light source apparatus 20 having a semiconductor laser 21 oscillating in a single axis mode is divided into the measuring luminous flux P1 passing through a half mirror 24 being a beam splitter and the reference luminous flux P2 reflected from said mirror 24. The luminous flux P1 is reflected by the moving corner cube 25 arranged at a position to be measured and this reflected luminous flux is allowed to interfere with the luminous flux P2 reflected by a reference corner cube 26 by the mirror 24 to obtain interference beam P3. This interference beam P3 is separated into a P-component and an S-component by a polarizing beam splitter 27 and both components are respectively guided to detectors 28, 29 and two interference signals positionally shifted by 90 deg. in the change of the interference beam based on the movement of the corner cube 25 are outputted. As a phase element for imparting this phase difference, an S/4 plate crystal 23 is provided to the apparatus 20.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62245972A JP2691899B2 (en) | 1987-09-30 | 1987-09-30 | Interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62245972A JP2691899B2 (en) | 1987-09-30 | 1987-09-30 | Interferometer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6488202A true JPS6488202A (en) | 1989-04-03 |
JP2691899B2 JP2691899B2 (en) | 1997-12-17 |
Family
ID=17141574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62245972A Expired - Lifetime JP2691899B2 (en) | 1987-09-30 | 1987-09-30 | Interferometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2691899B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6233370B1 (en) | 1997-10-31 | 2001-05-15 | Kabushiki Kaisha Topcon | Interference measurement apparatus and probe used for interference measurement apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61215903A (en) * | 1985-03-22 | 1986-09-25 | Yamazaki Mazak Corp | Laser length measuring machine |
JPS61283190A (en) * | 1985-06-10 | 1986-12-13 | Nec Corp | Semiconductor laser device |
JPS62177403A (en) * | 1986-01-31 | 1987-08-04 | Omron Tateisi Electronics Co | Optical displacement measuring instrument |
-
1987
- 1987-09-30 JP JP62245972A patent/JP2691899B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61215903A (en) * | 1985-03-22 | 1986-09-25 | Yamazaki Mazak Corp | Laser length measuring machine |
JPS61283190A (en) * | 1985-06-10 | 1986-12-13 | Nec Corp | Semiconductor laser device |
JPS62177403A (en) * | 1986-01-31 | 1987-08-04 | Omron Tateisi Electronics Co | Optical displacement measuring instrument |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6233370B1 (en) | 1997-10-31 | 2001-05-15 | Kabushiki Kaisha Topcon | Interference measurement apparatus and probe used for interference measurement apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP2691899B2 (en) | 1997-12-17 |
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