JPS6488202A - Interferometer and light source apparatus therefor - Google Patents

Interferometer and light source apparatus therefor

Info

Publication number
JPS6488202A
JPS6488202A JP24597287A JP24597287A JPS6488202A JP S6488202 A JPS6488202 A JP S6488202A JP 24597287 A JP24597287 A JP 24597287A JP 24597287 A JP24597287 A JP 24597287A JP S6488202 A JPS6488202 A JP S6488202A
Authority
JP
Japan
Prior art keywords
luminous flux
reflected
corner cube
mirror
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24597287A
Other languages
Japanese (ja)
Other versions
JP2691899B2 (en
Inventor
Nobuo Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Priority to JP62245972A priority Critical patent/JP2691899B2/en
Publication of JPS6488202A publication Critical patent/JPS6488202A/en
Application granted granted Critical
Publication of JP2691899B2 publication Critical patent/JP2691899B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

PURPOSE:To achieve miniaturization and the facilitation of adjustment, by dividing the luminous flux from a beam source into measuring luminous flux and reference luminous flux and reflecting the measuring luminous flux by the reflecting means of a position to be measured to allow the same to interfere with the reference luminous flux. CONSTITUTION:The luminous flux emitted from a light source apparatus 20 having a semiconductor laser 21 oscillating in a single axis mode is divided into the measuring luminous flux P1 passing through a half mirror 24 being a beam splitter and the reference luminous flux P2 reflected from said mirror 24. The luminous flux P1 is reflected by the moving corner cube 25 arranged at a position to be measured and this reflected luminous flux is allowed to interfere with the luminous flux P2 reflected by a reference corner cube 26 by the mirror 24 to obtain interference beam P3. This interference beam P3 is separated into a P-component and an S-component by a polarizing beam splitter 27 and both components are respectively guided to detectors 28, 29 and two interference signals positionally shifted by 90 deg. in the change of the interference beam based on the movement of the corner cube 25 are outputted. As a phase element for imparting this phase difference, an S/4 plate crystal 23 is provided to the apparatus 20.
JP62245972A 1987-09-30 1987-09-30 Interferometer Expired - Lifetime JP2691899B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62245972A JP2691899B2 (en) 1987-09-30 1987-09-30 Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62245972A JP2691899B2 (en) 1987-09-30 1987-09-30 Interferometer

Publications (2)

Publication Number Publication Date
JPS6488202A true JPS6488202A (en) 1989-04-03
JP2691899B2 JP2691899B2 (en) 1997-12-17

Family

ID=17141574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62245972A Expired - Lifetime JP2691899B2 (en) 1987-09-30 1987-09-30 Interferometer

Country Status (1)

Country Link
JP (1) JP2691899B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6233370B1 (en) 1997-10-31 2001-05-15 Kabushiki Kaisha Topcon Interference measurement apparatus and probe used for interference measurement apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61215903A (en) * 1985-03-22 1986-09-25 Yamazaki Mazak Corp Laser length measuring machine
JPS61283190A (en) * 1985-06-10 1986-12-13 Nec Corp Semiconductor laser device
JPS62177403A (en) * 1986-01-31 1987-08-04 Omron Tateisi Electronics Co Optical displacement measuring instrument

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61215903A (en) * 1985-03-22 1986-09-25 Yamazaki Mazak Corp Laser length measuring machine
JPS61283190A (en) * 1985-06-10 1986-12-13 Nec Corp Semiconductor laser device
JPS62177403A (en) * 1986-01-31 1987-08-04 Omron Tateisi Electronics Co Optical displacement measuring instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6233370B1 (en) 1997-10-31 2001-05-15 Kabushiki Kaisha Topcon Interference measurement apparatus and probe used for interference measurement apparatus

Also Published As

Publication number Publication date
JP2691899B2 (en) 1997-12-17

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